• 제목/요약/키워드: E-beam irradiation

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증착 후 전자빔 조사에 따른 IWO 박막의 전기적, 광학적 특성 개선 효과 (Enhanced Electrical and Optical Properties of IWO Thin Films by Post-deposition Electron Beam Irradiation)

  • 최재욱;허성보;이연학;김대일
    • 열처리공학회지
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    • 제36권5호
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    • pp.298-302
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    • 2023
  • Transparent and conducting tungsten (W) doped indium oxide (IWO) thin films were deposited on the glass substrate by using RF magnetron sputtering and then electron irradiation was conducted to investigate the effect of electron irradiation on the optical and electrical properties of the films. The electron irradiated films showed three x-ray diffraction peaks of the In2O3 (222), (431) and (046) planes and the full width at half maximum values are decreased as increased electron irradiation energy. In the atomic force microscope analysis, the surface roughness of as deposited films was 1.70 nm, while the films electron irradiated at 700 eV, show a lower roughness of 1.28 nm. In this study, the figure of merit (FOM) of as deposited films is 2.07 × 10-3-1, while the films electron irradiated at 700 eV show the higher FOM value of 5.53 × 10-3-1. Thus, it is concluded that the post-deposition electron beam irradiation is the one of effective methods to enhance optical and electrical performance of IWO thin films.

고에너지 전자선 진자조사에 의한 선량분포 (The Dose Distribution of Arc therapy for High Energy Electron)

  • 추성실;김귀언;서창옥;박창윤
    • Radiation Oncology Journal
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    • 제1권1호
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    • pp.29-36
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    • 1983
  • The treatment of tumors along curved surfaces with stationary electron beams using cone collimation may lead to non-uniform dose distributions due to a varying air gap between the cone surface and patient. For large tumors, more than one port may have to be used in irradiation of the chest wall, often leading to regions of high or low dose at the junction of the adjacent ports. Electron-beam arc therapy may elimination many of these fixed port problems. When treating breast tumors with electrons, the energy of the internal mammary port is usually higher than that of the chest wall port. Bolus is used to increase the skin dose or limit the range of the electrons. We invertiaged the effect of various arc beam parameters in the isodose distributions, and combined into a single arc port for adjacent fixed ports of different electron beam eneries. The higher fixed port energy would be used as the arc beam energy while the beam penetration in the lower energy region would be controlled by a proper thickness of bolus. We obtained the results of following: 1. It is more uniform dose distribution of electron to use rotation than stationary irradiation. 2. Increasing isocenter depth on arc irradiation, increased depth of maximum dose, reduction in surface dose and an increasing penetration of the linear portion of the curve. 3. The deeper penetration of the depth dose curve and higher X-ray background for the smaller field sized. 4. If the isocenter depth increase, the field effect is small. 5. The decreasing arc beam penetration with decreasing isocenter depth and the isocenter depth effect appears at a greater depth as the energy increases. 6. The addition of bolus produces a shift in the penetration that is the same for all depths leaving the shape of the curves unchanged. 7. Lead strips 5 mm thick were placed at both ends of the arc to produce a rapid dose drop-off.

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E-빔 조사된 폴리머의 전하 분포의 축퇴 과정 (Decay Process of Charge Distribution in E-Beam Irradiated Polymers)

  • 윤주호;최용성;이경섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.329-330
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    • 2007
  • Decay processes of accumulated charge in e-beam irradiated polymers during elevating temperature are observed using pulsed electro-acoustic measurement system. Since the polymeric materials have many superior properties such as light-weight, good mechanical strength, high flexibility and low cost, they are inevitable materials for spacecrafts. In space environment, however, the polymers sometimes have serious damage by irradiation of high energy charged particles. When the polymers of the spacecraft are irradiated by high energy charged particles, some of injected charges accumulate and remain for long time in the bulk of the polymers. Since the bulk charges sometimes cause the degradation or breakdown of the materials, the investigation of the charging and the decay processes in polymeric materials under change of temperature is important to decide an adequate material for the spacecrafts. By measuring the charge behavior in e-beam irradiated polymer, such as polyimide or polystyrene, it is found that the various accumulation and decay patterns are observed in each material. The results seem to be useful and be helpful to progress in the reliability of the polymers for the spacecraft.

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Effect of Proton Irradiation on the Magnetic Properties of Antiferromagnet/ferromagnet Structures

  • Kim, Dong-Jun;Park, Jin-Seok;Ryu, Ho Jin;Jeong, Jong-Ryul;Chung, Chang-Kyu;Park, Byong-Guk
    • Journal of Magnetics
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    • 제21권2호
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    • pp.159-163
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    • 2016
  • Antiferromagnet (AFM)/ferromagnet (FM) bilayer structures are widely used in the magnetic devices of sensor and memory applications, as AFM materials can induce unidirectional anisotropy of the FM material via exchange coupling. The strength of the exchange coupling is known to be sensitive to quality of the interface of the AFM/FM bilayers. In this study, we utilize proton irradiation to modify the interface structures and investigate its effect on the magnetic properties of AFM/FM structures, including the exchange bias and magnetic thermoelectric effect. The magnetic properties of IrMn/CoFeB structures with various IrMn thicknesses are characterized after they are exposed to a proton beam of 3 MeV and $1{\sim}5{\times}10^{14}ions/cm^2$. We observe that the magnetic moment is gradually reduced as the amount of the dose is increased. On the other hand, the exchange bias field and thermoelectric voltage are not significantly affected by proton irradiation. This indicates that proton irradiation has more of an influence on the bulk property of the FM CoFeB layer and less of an effect on the IrMn/CoFeB interface.

전자빔 조사 폴리머의 전자 분포의 축퇴 과정 (Decay Process of Charge Distribution in E-beam Irradiated Polymers)

  • 최용성;김형곤;황종선;이경섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 논문집 센서 박막재료연구회 및 광주 전남지부
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    • pp.69-72
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    • 2008
  • Decay processes of accumulated charge in e-beam irradiated polymers during elevating temperature are observed using pulsed electro-acoustic measurement system. Since the polymeric materials have many superior properties such as light-weight, good mechanical strength, high flexibility and low cost, they are inevitable materials for spacecrafts. In space environment, however, the polymers sometimes have serious damage by irradiation of high energy charged particles. When the polymers of the spacecraft are irradiated by high energy charged particles, some of injected charges accumulate and remain for long time in the bulk of the polymers. Since the bulk charges sometimes cause the degradation or breakdown of the materials, the investigation of the charging and the decay processes in polymeric materials under change of temperature is important to decide an adequate material for the spacecrafts. By measuring the charge behavior in e-beam irradiated polymer, such as polyimide or polystyrene, it is found that the various accumulation and decay patterns are observed in each material. The results seem to be useful and be helpful to progress in the reliability of the polymers for the spacecraft.

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Photocatalytic activities and surface properties of e-beam treated carbon paper deposited $TiO_2$ using Atomic Layer Deposition (ALD)

  • Kim, Myoung-Joo;Seo, Hyun-Ook;Luo, Yuan;Kim, Kwang-Dae;Kim, Young-Dok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.345-345
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    • 2010
  • Thin film of $TiO_2$ deposited on carbon paper was fabricated by atomic layer deposition (ALD) using titanium isopropoxide (TTIP) and $H_2O$ as precursors. In this work, the photocatalytic activities of $TiO_2$ films with and without e-beam treatment were compared. The samples were treated by e-beam using e-beam energy of 1MeV and exposure range between 5 and 15kGy. The photocatalytic activity was evaluated by the photocatalytic degradation of methyleneblue (MB) under UV irradiation (365nm) at room temperature using an UV-vis spectroscopy. The surface properties were characterized by scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS). The sample treated by the low radiation dose has more catalytic activity than other ones. SEM images show that the high radiation dose caused the $TiO_2$ to aggregation on carbon paper. Due to the aggregation of $TiO_2$, the partially exposed carbon paper was oxidized.

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InGaZnO 박막 트랜지스터의 전기 및 광학적 특성에 대한 전자빔 조사의 영향 (Influence of Electron Beam Irradiation on the Electrical and Optical Properties of InGaZnO Thin Film Transistor)

  • 조인환;박해웅;김찬중;전병혁
    • 한국재료학회지
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    • 제27권6호
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    • pp.345-349
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    • 2017
  • The effects of electron beam(EB) irradiation on the electrical and optical properties of InGaZnO(IGZO) thin films fabricated using a sol-gel process were investigated. As the EB dose increased, the electrical characteristic of the IGZO TFTs changed from semiconductor to conductor, and the threshold voltage values shifted to the negative direction. X-ray photoelectron spectroscopy analysis of the O 1s core level showed that the relative area of oxygen vacancies increased from 14.68 to 19.08 % as the EB dose increased from 0 to $1.5{\times}10^{16}electrons/cm^2$. In addition, spectroscopic ellipsometer analysis showed that the optical band gap varied from 3.39 to 3.46 eV with increasing EB dose. From the result of band alignment, it was confirmed that the Fermi level($E_F$) of the sample irradiated with $1.5{\times}10^{16}electrons/cm^2$ was located at the closest position to the conduction band minimum(CBM) due to the increase of electron carrier concentration.

Application of CRAMPS for a Phase Transition in H+-ion irradiated TlH2PO4

  • Kim, Se-Hun;Han, J.H.;Lee, Cheol-Eui;Lee, Kwang-Sei;Kim, Chang-Sam;Dalal, N.S.;Han, Doug-Young
    • 한국자기공명학회논문지
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    • 제14권2호
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    • pp.134-143
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    • 2010
  • We studied the hydrogen-bonded $TlH_2PO_4$ (TDP) ferroelectrics treated with the proton-beam bombardment. The TDP material was irradiated with 1-MeV proton beam at a dose of $10^{15}/cm^2$. In order to analyze the hydrogen environment in TDP, we carried out the $^1H$ high resolution nuclear magnetic resonance (NMR) - i.e., Combined Rotation And Multiple Pulse Spectroscopy (CRAMPS) measurement. The isotropic chemical shift of hydrogen indicates its displacive property is related to the $PO_4$ lattice deformation which occurs throughout the antiferroelectric-, the ferroelastic- and the paraelastic-phase transitions. The temperature dependence of $\sigma_{iso}$ reveals the electronic charge redistribution is induced by the proton-beam irradiation and the elastic property.

전자빔을 이용한 triclosan 제거에 있어서 실험계획법의 이용 (Decomposition of Triclosan onto E-beam Process using a Design of Experiment(DOE))

  • 장태범;이시진
    • 한국지반환경공학회 논문집
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    • 제13권6호
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    • pp.51-57
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    • 2012
  • 본 연구는 E-beam 공정을 통한 triclosan의 광분해에 대하여 조사하였다. 공정의 최적화는 실험계획법에 의한 회분식 실험을 통해 수행되었다. 실험계획법은 통계적 적용 방안의 하나로 각 인자간의 영향을 고려하기 위해 반응표면을 설계하는 방법이다. 반응은 triclosan의 제거율(%, $Y_1$)과 TOC 제거율(%, $Y_2$)로 적용되었고 두 개의 독립변수로서 triclosan의 농도를 "$x_1$", 조사강도를 "$x_2$"로 설계하였다. 코드화 된 인자에 대한 Triclosan 제거율과 TOC 제거율에 따른 회귀식은 각각 $Y_1=63-12.4335x_1+15.1835x_2+5.8125x{_1}^2-5.6875x{_2}^2-0.75x_1x_2(R^2=95.1%,\;R^2(Adj)=91.7%)$$Y_2=46-8.8462x_1+11.7175x_2-0.75x{_1}^2-6.25x{_2}^2(R^2=98.7%,\;R^2(Adj)=97.7%)$로 나타났다. $Y_1$$Y_2$에 대한 모델 예측식의 결정계수($R^2$)와 수정결정계수($R{^2}_{(Adj)}$)의 값이 90% 이상으로 나타나 실험적 관찰결과와 잘 부합하였다. 이러한 결과는 회귀모델이 E-beam 공정에서의 인자영향을 잘 설명하며 통계적 적용이 성공적으로 적용된 것으로 판단된다.

전자선 조사를 통한 EPDM/Polyamide12 탄성체의 제조에 관한 연구 (Preparation of EPDM/Polyamide12 Elastomers through Electron Beam Irradiation)

  • 정효신;박정일;강필현;최명찬;장영욱;홍성철
    • 폴리머
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    • 제37권5호
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    • pp.571-578
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    • 2013
  • 다양한 조성의 ethylene propylene diene rubber(EPDM)/polyamide12(PA12) 용융 혼합물에 전자선 조사를 함으로써 열가소성 탄성체(thermoplastic elastomer, TPE)의 특성을 보이는 소재를 제조하였다. EPDM과 PA12 상 사이의 상용화제로 말레산화 EPDM(mEPDM)을 첨가함으로써 EPDM/PA12 용융 혼합물의 기계적 물성을 향상시켰다. 또한 EPDM/PA12 용융 혼합물에 0~100 kGy의 전자선을 조사함으로써 EPDM 사슬간의 선택적인 가교 반응을 유도함과 동시에 PA12 상으로부터 용융 유동성을 확보할 수 있었다. 결과적으로 EPDM/PA12 용융 혼합물에 mEPDM을 첨가한 후 전자선을 25 kGy 조사함에 의하여 열가소성 용융 거동을 보이면서도 물성 및 탄성체 성질이 우수한 EPDM/PA12 용융 혼합물을 제조할 수 있었다.