• Title/Summary/Keyword: Dual-nozzles

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Numerical Simulation: Effects of Gas Flow and Rf Current Direction on Plasma Uniformity in an ICP Dry Etcher

  • Joo, Junghoon
    • Applied Science and Convergence Technology
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    • v.26 no.6
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    • pp.189-194
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    • 2017
  • Effects of gas injection scheme and rf driving current configuration in a dual turn inductively coupled plasma (ICP) system were analyzed by 3D numerical simulation using CFD-ACE+. Injected gases from a tunable gas nozzle system (TGN) having 12 horizontal and 12 vertical nozzles showed different paths to the pumping surface. The maximum velocity from the nozzle reached Mach 2.2 with 2.2 Pa of Ar. More than half of the injected gases from the right side of the TGN were found to go to the pump without touching the wafer surface by massless particle tracing method. Gases from the vertical nozzle with 45 degree slanted angle soared up to the hottest region beneath the ceramic lid between the inner and the outer rf turn of the antenna. Under reversed driving current configuration, the highest rf power absorption region were separated into the two inner islands and the four peaked donut region.

An Investigation on the Flow Characteristics of Water Spray Nozzle (미세 물분무 노즐의 유동특성에 관한 연구)

  • Jun, You Woo;Han, Young Tak;Kim, Chang Seob;Kim, Chang;Ryou, Hong-Sun
    • Fire Science and Engineering
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    • v.29 no.5
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    • pp.29-33
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    • 2015
  • In this study, the relations of flow rate, discharging distance and droplet size are measured in accordance with the nozzle shape. The dual type nozzles of LPN142 and LPN148, which have identical core diameter (6.0 mm) and the different radial injection angles (${\theta}_2=142^{\circ}$ and $148^{\circ}$), are manufactured. The distribution diameters with discharging distance are quantified by UL2167 test standard. The relations between discharging angle and droplet sizes, which are measured by the method of Helium-Neon laser equipment, are obtained by the empirical correlation as working pressure increase. Moreover, the extinction coefficient, which is major parameter of the radiative transport equation (RTE) is analyzed with variable droplet sizes. Thus, it is possible to opt the nozzle's shape by analyzing the relations of working pressure, spray distance, droplet size and fire characteristics at minimum allowable flow rate.

Optimum Design of Dual Orifice Fuel Nozzle (이중 오리피스 연료 노즐 최적설계)

  • Lim, O-Kaung;Choi, Eun-Ho;Kim, Sung-Sub
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.20 no.4
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    • pp.407-416
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    • 2007
  • Fuel spray nozzle has a critical effect on combustion characteristics. Mass flow rate and SMD(sauter mean diameter) were selected as design variables by using the experiment data of various types of duplex fuel nozzles for the swirl atomizers. The sensitivity of each design variable on the mass flow rate and SMD was analyzed and the uniformity of mass flow rate was investigated through the shape optimization of duel-orifice-type swirl atomizers. The design variables that have a little effect on the optimum design were excluded using the DOE(design of experiments) method, which enabled the optimization of sensitive design variables on mass flow rate and limit tolerance. The SMD of the research spray nozzle that was used in this study was found to be most similar to that of the calculation results using the Jasuja's SMD relationship. This study showed the specific characteristics of duel orifice type swirl atomizers and the optimization of these kinds of nozzle. This study provided the optimization design of mass flow rate and its allowable tolerance.

CAVITATION FLOW ANALYSIS OF HYDROFOIL WITH CHANGE OF ANGLE OF ATTACK (받음각 변화에 대한 수중익형의 캐비테이션 해석)

  • Kang, T.J.;Park, W.G.;Jung, C.M.
    • Journal of computational fluids engineering
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    • v.19 no.2
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    • pp.17-23
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    • 2014
  • Cavitation causes a great deal of noise, damage to components, vibrations, and a loss of efficiency in devices, such as propellers, pump impellers, nozzles, injectors, torpedoes, etc. Thus, the cavitating flow simulation is of practical importance for many engineering systems. In the present work, a two-phase flow solver based on the homogeneous mixture model has been developed. The solver employs an implicit preconditioning, dual time stepping algorithm in curvilinear coordinates. The flow characteristics around Clark-Y hydrofoil were calculated and then validated by comparing with the experimental data. The lift and drag coefficients with changes of angle of attack and cavitation number were obtained. The results show that cavity length and lift, drag coefficient increase with increasing angle of attack.

The Characteristics of Film-Cooling Effectiveness on a Turbine-Blade-Shaped Surface (터빈 블레이드 형상 곡면에서의 막냉각 효율 특성)

  • Yun, Sun-Hyeon;Ryu, Won-Taek;Kim, Dong-Geon;Kim, Dae-Seong;Kim, Gwi-Sun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.3
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    • pp.384-393
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    • 2002
  • The effects of hole expansion angle and the arrangement of nozzles on a film cooling system for a turbine-blade-shaped surface were experimentally investigated. Liquid crystal with flue-temperature correlation and an image processing system were employed to evaluate surface temperature. Distributions of cooling effectiveness were then presented to figure out the change of heat transfer characteristics with different geometric conditions of cooling-holes. It was found thats the averaged cooling efficiency on the suction surface was maximum with 10 degree of the cooling hole expansion angle. It was also shown that the averaged cooling efficiency on the pressure surface and the averaged cooling efficiency for dual array case were not affected by the hole expansion angle.

Numerical Study on Co-axial Swirl Jets by Shear Excitation Control (전단 자극 제어에 의한 동축 스월제트 수치 연구)

  • Lee, Wonjoong
    • Aerospace Engineering and Technology
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    • v.12 no.1
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    • pp.207-212
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    • 2013
  • To investigate the possibility of using artificial means for the control of shear layers in swirl jets, a shear excitation device is introduced. The device consists of co-centric dual nozzles with internal lobes (i.e., convex surfaces) of small height to induce disturbance. The number of convexities can be varied to produce the various modes in azimuthal direction. The acquired velocity data of the swirling jets, with and without the lobes, are numerically simulated in 2-D contour plots and 3-D particle trace plots. The results are compared with the baseline (i.e., no excitation case) at various excitation modes. Conclusively it is observed that the artificial excitation method is effective in the control of the vortical structure in swirling jets.

A Study of the Combustion Flow Characteristics of a Exhaust Gas Recirculation Burner with Both Outlets Opening (양쪽 출구가 트인 배기가스 재순환 버너의 연소 유동 특성에 관한 연구)

  • Ha, Ji-Soo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.6
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    • pp.696-701
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    • 2018
  • The nitrogen oxides generated during combustion reactions have a great influence on the generation of acid rain and fine dust. As an NOx reduction method, exhaust gas recirculation combustion using Coanda nozzles capable of recirculating a large amount of exhaust gas with a small amount of air has recently been utilized. In this study, for the burner outlet with dual end opening, the use of a recirculation burner was investigated for the distribution of the pressure, streamline, temperature, combustion reaction rate and nitrogen oxides using computational fluid analysis. The gas mixed with the combustion air and the recirculated exhaust gas flow in the tangential direction of the circular cylinder burner, so that there is a region with low pressure in the vicinity of the fuel nozzle exit. As a result, a reverse flow is formed in the central portion of the burner near the center of the circular cylinder burner and the exhaust gas is discharged to the outside region of the circular cylinder burner. The combustion reaction occurs on the right side of the burner and the temperature and NOx distribution are relatively higher than those on the left side of the burner. It was found that the average NOx production decreased from an air flow ratio of 1.0 to 1.5. When the air flow ratio is 1.8, the NOx production increases abruptly. It is considered that the NOx production reaction increases exponentially with temperature when the air ratio is more than 1.5 and the NOx production reaction rate increases rapidly on the right-hand side of the burner.