• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.8
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• pp.53-61
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• 1994

Intermetallic dielectric layer was formed by using SiO$_2$/SOG/SiO$_2$ for aluminum based dual-metal interconnection process and its electric characteristics were evaluated. The dielectric layer was in the cost and facility point of view more useful than the insulator that was formed by etch-back process. The planarity by using SOG process was about 40% higher than that of the insulator by the CVD process. When SiO$_2$ films were deposited by the PECVD process the Al hillock formation during the next process was restrained bucause the intermetalic insulator was made at low temperature. The leakage current was 1${\times}10^{7}~1{\times}10^{-8}A/cm^{2}$ at the electric field of 10$^{5}$V/cm and breakdown filed was 4.5${\times}10^{6}~7{\times}10^{6}A/cm$. So we had confirmed that siloxane SOG was very useful for intermetallic layer material.

• Proceedings of the Korean Society of Medical Physics Conference
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• 2003.09a
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• pp.44-44
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• 2003

As a basic measurement tool in the areas of animal models of human disease, gene expression and therapy, and drug discovery and development, small animal PET imaging is being used increasingly. An ideal small animal PET should have high sensitivity and high and uniform resolution across the field of view to achieve high image quality. However, the combination of long narrow pixellated crystal array and small ring diameter of small animal PET leads to the degradation of spatial resolution for the source located at off center. This degradation of resolution can be improved by determining the depth of interaction (DOI) in the crystal and by taking into account the information in sorting the coincident events. Among a number of 001 identification schemes, dual layer phsowich detector has been widely investigated by many research groups due to its practicability and effectiveness on extracting DOI information. However, the effects of each crystal length composing dual layer phoswich detector on DOI measurements and image qualities were not fully characterized. In order to minimize the DOI effect, the length of each layer of phoswich detector should be optimized. The aim of this study was to perform simulations using a simulation tool, GATE to design the optimum lengths of crystals composing a dual layer phoswich detector. The simulated small PET system employed LSO front layer LuYAP back layer phoswich detector modules and the module consisted of 8${\times}$8 arrays of dual layer crystals with 2 mm ${\times}$ 2 mm sensitive area coupled to a Hamamatsu R7600 00 M64 PSPMT. Sensitivities and variation of radial resolutions were simulated by varying the length of LSO front layer from 0 to 10 mm while the total length (LSO + LuYAP) was fixed to 20 mm for 10 cm diameter ring scanner. The radial resolution uniformity was markedly improved by using DOI information. There existed the optimal lengths of crystal layers to minimize the variation of radial resolutions. In 10 cm ring scanner configuration, the radial resolution was kept below 3.4 mm over 8 cm FOV while the sensitivity was higher than 7.4% for LSO 5 mm : LuYAP 15 mm phoswich detector. In this study, the optimal length of dual layer phoswich detector was derived to achieve high and uniform radial resolution.

• Journal of the Korean Geosynthetics Society
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• v.6 no.4
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• pp.39-48
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• 2007

This paper introduces a recently developed reinforced earth wall system with steel framed-facing. The new system incorporates a steel-framed facing that might be assembled on-site and steel strip or geogrid type reinforcements for backfill area. In order to enhance scenery view design of the wall construction, dual-structured facing is proposed in which room for planting space locates in the front of facing. A reinforced earth walls using the proposed system was constructed to verify constructability of the proposed system and facing movement and tensile characteristics of reinforcement were measured to understand the mechanical behavior.

• Atmosphere
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• v.17 no.1
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• pp.69-86
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• 2007

The characteristics of the dual-Doppler wind retrieval method based on a three dimensional variational (3DVAR) conception were investigated from the following four points of view; the sensitivity of the number of iteration, the effect of the weak constraint term, the effect of the smoothness term, and the sensitivity of the error mixing ratio of the radial velocities. In the experiment, the radial velocities relative to the Gosan and Jindo radar sites of the Korea Meteorological Administration (KMA) were calculated from the forecasting of the WRF (Weather Research and Forecast; Skamarock, 2004) model at 1330 UTC 30 June 2006, which is the one and half hour forecast from the initial time, 1200 UTC on that day. The results showed that the retrieval performance of the horizontal wind field was robust, but that of the vertical wind was sensitive to the external conditions, such as iteration number and the on/off of the weak constraint term. The sensitivity of error mixing ratio was so large that even the horizontal wind retrieval efficiency was reduced a lot. But the sensitivity of the smooth term was not so large. When we applied this method to the real mesoscale convective system (MCS) between the Gosan and Jindo radar pair at 1430 UTC 30 June 2006, the wind structure of the convective cells in the MCS was consistently retrieved relative to the reflectivity factor structure. By comparing the vertical wind structure of this case with that of 10 minutes after, 1440 UTC 30 June 2006, we got the physical consistency of our method.

• Journal of Institute of Control, Robotics and Systems
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• v.19 no.11
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• pp.979-983
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• 2013

The three-dimensional measurement method of confocal systems is a spot scanning method which has a high resolution and good illumination efficiency. However, conventional confocal systems had a weak point in that it has to perform XY axis scanning to achieve FOV (Field of View) vision through spot scanning. There are some methods to improve this problem involving the use of a galvano mirror [1], pin-hole array, etc. Therefore, in this paper we propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array in a dual microscope configuration. We made an area scan possible by using a combination MLA (Micro Lens Array) and pin-hole array, and used an objective lens to improve the light transmittance and signal-to-noise ratio. Additionally, we made it possible to change the objective lens so that it is possible to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did an experiment using 5X, 2.3X objective lens, and did a calibration of height using a VLSI calibration target.

• IEIE Transactions on Smart Processing and Computing
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• v.4 no.5
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• pp.305-310
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• 2015

We propose a new concept for a depth of interaction (DOI) positron emission tomography (PET) detector based on dual-ended-scintillator (DES) readout for small animal imaging. The detector consists of lutetium yttrium orthosilicate (LYSO) arrays coupled with orthogonal wavelength-shifting (WLS) fibre placed on the top and bottom of the arrays. On every other line, crystals that are 2 mm shorter are arranged to create grooves. WLS fibre is inserted into these grooves. This paper describes the design and performance evaluation of this PET detector using Monte Carlo simulations. To investigate sensitivity by crystal size, five types of PET detectors were simulated. Because the proposed detector is composed of crystals with three different lengths, degradation in sensitivity across the field of view was also explored by simulation. In addition, the effect of DOI resolution on image quality was demonstrated. The simulation results proved that the devised PET detector with excellent DOI resolution is helpful for reducing the channels of sensors/electronics and minimizing gamma ray attenuation and scattering while maintaining good detector performance.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.3
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• pp.37-43
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• 2002

Electronic speckle contouring(ESC) based on electronic speckle pattern interferometry is the optical method for measuring object shape by using fringe-projection techniques. This method has the advantages of being non-contact, non-destructive and a whole-field measurement of the surface under investigation. Fringes in ESC represent the difference in depth along the view direction between the master wavefront and the test component. The contour maps of three-dimensional diffuse objects can be obtained by small shifts of optical fiber carrying the dual-object-beams and 4-frame phase shifting. In this study we proposed the contouring method by shifting the collimated illumination beams through optical fiber in order to obtain the contour fringe patterns. And also, we performed the addition of incremental images through the geometrical analysis to obtain the contour fringe interval when we performed the incremental addition of images and experiments based on this method. We obtained both quantitative increment without decorrelation effect and qualitative improvement by reducing the noise of contour fringes.

• Korean Journal of Optics and Photonics
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• v.34 no.2
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• pp.53-60
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• 2023

We designed a catadioptric objective lens with a 0.6 numerical aperture (NA) for semiconductor inspection at 193 nm. The objective lens meets major requirements such as a spatial resolution of 200 nm and a field of view (FOV) of 0.15 mm or more. We selected a wavelength of 266 nm for autofocus based on the availability of the light source. First, we built the objective lenses of three lens groups: a focusing lens group, a field-lens group, and an NA conversion group. In particular, the NA conversion group is a group of catadioptric lenses that convert the numerical aperture of the beam focused by the prior groups to the required value, i.e., 0.6. The last design comprises 11 optical elements with root-mean-squared (RMS) wavefront aberrations less than λ/80 over the entire field of view. We also achieved the athermalization of the objective lens with focus-shift alone satisfying the performance of RMS wavefront aberration below λ/30 at a temperature range of 20 ± 1.2 ℃.

• Journal of Biomedical Engineering Research
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• v.19 no.5
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• pp.531-538
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• 1998

This paper represents the design of 3D endoscopic image processing system in order to Improve visualization and enhance the ability of the surgeon to perform delicate endoscopic surgery. The proposed 3D systems have four features of stereo endoscopic image processing The multiplexer give field seauential stereo for recording and for aligning cameras and viewing stereo with 3D monitor. Demultiplexing of the field sequential image which separates out the R and L images for dual TFT-LCD 3D monitor viewed with passive polarized glasses. separable processing of the left and right eye images, and design of TFT-LCD 3D monitor. The viewing angle, zone, and image quality of the Polarization-type Stereoscopic Display (SM500TFT-3D) system which we have developed using 15 Samsung TFT-1.CD with a screen resolution of 1024×768 pixels were measured and compared with those of Electric Shutter-type Stereoscopic Display system. The result of experiments shows that the Polarization-type Stereoscopic Display System using TFT-LCD has a wade viewing angle and zone which Is necessary fort multi-view and it has better image quality and stability of the optical performances than the Electric Shutter-type does.

• Nuclear Medicine and Molecular Imaging
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• v.42 no.2
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• pp.98-111
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• 2008

This review introduces advances in clinical and pre-clinical single photon emission computed tomography (SPECT) and positron emission tomography (PET) providing noninvasive functional images of biological processes. Development of new collimation techniques such as multi-pinhole and slit-slat collimators permits the improvement of system spatial resolution and sensitivity of SPECT. Application specific SPECT systems using smaller and compact solid-state detector have been customized for myocardial perfusion imaging with higher performance. Combined SPECT/CT providing improved diagnostic and functional capabilities has been introduced. Advances in PET and CT instrumentation have been incorporated in the PET/CT design that provide the metabolic information from PET superimposed on the anatomic information from CT. Improvements in the sensitivity of PET have achieved by the fully 3D acquisition with no septa and the extension of axial field-of-view. With the development of faster scintillation crystals and electronics, time-of-flight (TOF) PET is now commercially available allowing the increase in the signal-to-noise ratio by incorporation of TOF information into the PET reconstruction process. Hybrid PET/SPECT/CT systems has become commercially available for molecular imaging in small animal models. The pre-clinical systems have improved spatial resolution using depth-of-interaction measurement and new collimators. The recent works on solid state detector and dual modality nuclear medicine instrumentations incorporating MRI and optical imagers will also be discussed.