• 한국소음진동공학회논문집
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• 제18권1호
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• pp.110-122
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• 2008

Pneumatic vibration isolator typically consisting of dual-chamber pneumatic springs and a rigid table are widely employed for proper operation of precision instruments such as optical devices or nano-scale equipments owing to their low stiffness- and high damping-characteristics. As environmental vibration regulations for precision instruments become more stringent, it is required to improve further the isolation performance. In order to facilitate their design optimization or active control, a more accurate mathematical model or complex stiffness is needed. Experimental results we obtained rigorously for a dual-chamber pneumatic spring exhibit significantly amplitude dependent behavior, which cannot be described by linear models in earlier researches. In this paper, an improvement for the complex stiffness model is presented by taking two major considerations. One is to consider the amplitude dependent complex stiffness of diaphragm necessarily employed for prevention of air leakage. The other is to employ a nonlinear model for the air flow in capillary tube connecting the two pneumatic chambers. The proposed amplitude-dependent complex stiffness model which reflects dependency on both frequency and excitation amplitude is shown to be very valid by comparison with the experimental measurements. Such an accurate nonlinear model for the dual-chamber pneumatic springs would contribute to more effective design or control of vibration isolation systems.

• 한국소음진동공학회논문집
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• 제18권4호
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• pp.411-423
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• 2008

Pneumatic vibration isolator has a wide application for ground-vibration isolation of vibration-sensitive equipments. Recent advances In precision machine tools and instruments such as nano-technology or medical devices require a better isolation performance, which can be efficiently done by precise modeling- and design- of the isolation system. This paper will discuss an efficient transmissibility design method for pneumatic vibration isolator by employing the complex stiffness model of dual-chamber pneumatic spring developed in our previous research. Three design parameters of volume ratio between the two pneumatic chambers, the geometry of capillary tube connecting the two pneumatic chambers and finally the stiffness of diaphragm necessarily employed for prevention of air leakage were found to be important factors in transmissibility design. Based on design technique that maximizes damping of dual-chamber pneumatic spring, trade-off among the resonance frequency of transmissibility, peak transmissibility and transmissibility in high frequency range was found, which was not ever stated in previous researches. Furthermore this paper will discuss about negative role of diaphragm in transmissibility design. Then the design method proposed in this paper will be illustrated through experiment at measurements.