• 제목/요약/키워드: Dual chamber SEM

검색결과 8건 처리시간 0.025초

The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

  • Ben Tordoff;Cheryl Hartfield;Andrew J. Holwell;Stephan Hiller;Marcus Kaestner;Stephen Kelly;Jaehan Lee;Sascha Muller;Fabian Perez-Willard;Tobias Volkenandt;Robin White;Thomas Rodgers
    • Applied Microscopy
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    • 제50권
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    • pp.24.1-24.11
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    • 2020
  • The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

라미네이트 도재와 복합레진 시멘트의 결합강도에 관한 연구 (A STUDY ON THE VOND STRENGTH OF PORCELAIN LAMINATE AND COMPOSITE RESIN CEMENTS)

  • 김성일;임호남;박남수
    • 대한치과보철학회지
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    • 제29권1호
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    • pp.91-109
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    • 1991
  • The purpose of this study were to comfirm the effects of the thickness and kinds of porcelain, etchants, illumination time, elapsed time for the measurement, and chemical cure component to the bond strength of porcelain laminate and composite resin cement, and to compare the effects between the light cured resin and the dual cured resins. The etched porcelain surface, the sectioned surface crossing porcelain and resin after bonding, and the debonded surfaces were observed by the SEM. One product of laminate porcelain powder, one light cured resin and two dual cured resins were selected. Each resin cements are lightened through the thin porcelain disc which was cut from cylindrical porcelain specimen by the diamond saw, and by the light through the porcelain disc they were bonded. Changes of thickness and kinds of porcelain, etchants, illumination time, and the elapsed time for the measurement were considered as variables for the bond strength. And the bond strength of porcelain and dual cured resins under the conditions of autopolymerization or the removal of chemical cure component were measured and compared. Bond strength were measured by shear stress. The etched surface, the cross-sectioned surface, and the debonded surface of porcelain or resin were observed by SEM. On the summary of this study, the following conclusions can be stated; 1. Bond strength of light cured resin was decreased inversely by the thickened porcelain laminate and showed the lowest value to the masking dentin porcelain among 4 kinds of porcelain powder. 2. Bond strength of autopolymerization of dual cured resin without illumination in dark chamber were from 75% to 98% to the data of dual cured resin with illumination. 3. Bond strength of dual cured resin used without chemical cured components were same to them of light cured resin. 4. Cross-sectioned surface treated by silane did not show the gap between the porcelain and resin. 5. Illumination over 80 seconds did not make the significant increase of bond strength on all kinds of resin.

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가공 및 측정이 가능한 복합나노가공시스템의 개발 (Development of a multi-functional nano-fabrication system for fabrication and measurement)

  • 장동영;박만진;김진현;한동철
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.466-471
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    • 2004
  • In focused-ion-beam (FIB) application of micromachining and device transplantation, four kinds of FIB processes, namely FIB sputtering, FIB-induced etching, redeposition, and FIB-induced deposition, are well utilized. As with FIB systems, scanning electron microscopes(SEMs) were extensively used in the semiconductor industry. They are the tools of choice for defect review and providing the image resolution needed for process monitoring. The enhanced capabilities of a dual-column on one chamber system are quickly becoming realized by the nano industry for performing a wide range of application.

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이원중합형 코어 축조용 복합레진의 결합강도에 대한 NaOCI의 영향에 대한 연구 (Influence of Sodium Hypochlorite on Bond Strength of Dual-cured Core Build-up Resin Composite)

  • 이준봉;박종덕;권수미;유미경;이광원
    • 구강회복응용과학지
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    • 제23권4호
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    • pp.283-292
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    • 2007
  • Two-step or one-step bonding systems generally inhibit curing process of dual-cured core build-up resin composite for their adhesive acidity. In addition this dual-cured core build-up resin composite can be applied to dentin of pulp chamber and root at the time that complete the endodontic treatment. The purpose of this investigation was to determine the influence of sodium hypochlorite on rnicrotensile bond strength of dual-cured core build-up resin composite. Extracted human molars were horizontally sectioned with 1mm thickness using low speed diamond saw. After the sectioned specimens were divided into 8 groups, adhesive systems (Clearfil SE-Bond, Prime&Bond NT[2-step, 1-step], Adper Prompt L-Pop) were then applied with or without sodium hypochlorite pretreatment. The treated specimen was filled with dual-cured core build-up resin composite (Luxacore, DMG corp., German). Then light cured for 40 seconds and soaked in $37^{\circ}C$ water bath for 24 hours. After the treated specimen was grinded with 1mm width and measured rnicrotensile bond strength by testing machine. Additionally 8 teeth were prepared for SEM evaluation. The results were as follows. : NaOCl treated groups generally had lower rnicrotensile bond strength but did not show any difference statistically except Adper Prompt L-Pop. When the teeth were treated by NaOCl, though the difference of applied adhesive system, it had no statistically significant difference within the NaOCl treated groups except the relation of between ClearFil SE-Bond adhesive system and Adper Prompt L-Pop adhesive system. In the SEM evaluation, NaOCl treated groups presented relatively long resin tags and incomplete hybrid layer formation generally.

SmBCO 초전도 선재 특성에 대한 Sm:Ba:Cu 조성비의 영향 (Effects of Sm:Ba:Cu Composition Ratio on the Superconducting Properties of SmBCO Coated Conductor Prepared by using a Composition Gradient Method)

  • 김호섭;오상수;장세훈;민창훈;하홍수;하동우;고락길;염도준;문승현;정국채
    • Progress in Superconductivity
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    • 제13권1호
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    • pp.7-11
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    • 2011
  • 조성경사법을 이용하여 LMO/IBAD-MgO template 상에 EDDC 증착법을 이용하여 $Sm_{1+x}Ba_{2-x}Cu_{3+y}O_{7-d}$ 초전도 박막을 증착하였다. 테이프 형상의 기판상에 길이방향으로 $Sm_{1+x}Ba_{2-x}Cu_{3+y}O_{7-d}$ 박막의 조성비가 연속적으로 변하는 샘플을 얻을 수 있었고, 비접촉 Hallprobe를 이용하여 임계전류를 측정한 결과 조성비에 대응하는 연속적인 임계전류분포를 측정할 수 있었다. 본 조성비 영역 중 Sm:Ba:Cu = 1.01:1.99 :4.87의 조성비에서 최대의 임계전류를 보였다. 이 조성비에서 SmBCO 박막표면에 전체적으로 roof tile 형상의 결정립들이 관찰되었으며 국소적으로 2차상들이 관찰되었다. 조성 경사법을 이용하면 광범위한 조성비영역에서 신뢰도 높은 초전도특성, 결정배향성, 박막표면 형상 등을 조사할 수 있을 것으로 예상된다.

IBAD-MgO 템플릿을 이용한 SmBCO 박막선재의 제조 (Fabrication of SmBCO Coated Conductors using IBAD-MgO Template)

  • 하홍수;김호섭;양주생;정예현;김호겸;유권국;고락길;송규정;하동우;오상수;염도준;박찬;유상임;문승현;주진호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.30-31
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    • 2006
  • We have fabricated SmBCO coated conductor on IBAD-MgO substrates using unique co-evaporation method. The batch type co-deposition system was specially designed and named as EDDC(evaporation using drum m dual chamber) that is possible to deposit superconducting layer with different composition ratio at low temperature of $700^{\circ}C$. In this study, we have investigated the influence of SmBCO phase composition and texture of IBAD-MgO template on the critical current density. We have changed the deposition rates of Sm, Ba and Cu during co-evaporation to examine the optimal composition ratio shown better critical current density. The composition ratio and surface morphology of SmBCO coated conductors were analyzed by the EDX and SEM, respectively. A higher critical current density was measured at superconducting phase composition ratio of Ba deficiency, Sm or Cu rich compared to the Sm1Ba2Cu3Ox stoichiometry.

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IBAD-MgO 기판을 이용한 GdBCO 초전도 박막선재의 제조 (Fabrication of GdBCO Coated conductor using IBAD-MgO substrate)

  • 하홍수;이정훈;오재근;고락길;김호섭;하동우;오상수;김호겸;양주생;정승욱;문승현;박찬;유상임;염도준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.44-44
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    • 2008
  • GdBCO coated conductor have been fabricated using reactive co-evaporation. The batch type co-deposition system was specially designed and was named EDDC (evaporation using drum in dual chamber) that is possible to deposit superconducting layer with optimum composition ratio of materials at temperature over $700^{\circ}C$ and several mTorr of oxygen. The IBAD-MgO substrate with the architecture of LaMnO3(LMO)/IBAD-MgO/Hastelloy was used for coated conductor. In this study, GdBCO superconducting layer was deposited on IBAD-MgO substrate at optimal oxygen partial pressure (pO2) and deposition temperature. After fabrication of GdBCO coated conductor, critical current density was measured by 4-probe method. Surface morphology and texture of GdBCO coated conductors were analyzed by the SEM and XRD, respectively.

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후막 SmBCO/IBAD-MgO 초전도 박막선재의 제조 (Fabrication of Thick SmBCO/IBAD-MgO coated conductor)

  • 이정훈;강득균;하홍수;고락길;오상수;김호경;양주생;정승욱;문승현;염도준;김철진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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    • pp.9-9
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    • 2009
  • Coated conductor is required to have good critical current property for high efficiency of electric power applications. Until now, long coated conductor does not show high Jc over 3 MA/$cm^2$ in thick superconducting layer because of texture degradation by thick superconducting layer. In this study, in order to overcome this issue, thicker superconducting layer was deposited with optimized conditions to reduce the degradation of critical current density. SmBCO superconducting coated conductor was deposited with 1~3 um of thickness at $750\sim850^{\circ}C$ under 15~20 mTorr of oxygen partial pressure using batch type EDDC( evaporation using drum in dual chamber). The buffered substrate for superconducting layer deposition was used IBAD-MgO template with the architecture of $LaMnO_3/MgO/Y_2O_3/Al_2O_3$/Hastelloy. After fabrication of coated conductor, critical current was measured by 4-prove method under self-magnetic field and 77K. In addition, surface morphology and texture were analyzed by SEM and XRD, respectively. 3 um thick SmBCO coated conductor shows highest $I_C$ values of 638A/cm-w in 1 m long in the world.

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