• Title/Summary/Keyword: Dual chamber SEM

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The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

  • Ben Tordoff;Cheryl Hartfield;Andrew J. Holwell;Stephan Hiller;Marcus Kaestner;Stephen Kelly;Jaehan Lee;Sascha Muller;Fabian Perez-Willard;Tobias Volkenandt;Robin White;Thomas Rodgers
    • Applied Microscopy
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    • v.50
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    • pp.24.1-24.11
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    • 2020
  • The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

A STUDY ON THE VOND STRENGTH OF PORCELAIN LAMINATE AND COMPOSITE RESIN CEMENTS (라미네이트 도재와 복합레진 시멘트의 결합강도에 관한 연구)

  • Kim, Sung-Il;Lim, Ho-Nam;Park, Nam-Soo
    • The Journal of Korean Academy of Prosthodontics
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    • v.29 no.1
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    • pp.91-109
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    • 1991
  • The purpose of this study were to comfirm the effects of the thickness and kinds of porcelain, etchants, illumination time, elapsed time for the measurement, and chemical cure component to the bond strength of porcelain laminate and composite resin cement, and to compare the effects between the light cured resin and the dual cured resins. The etched porcelain surface, the sectioned surface crossing porcelain and resin after bonding, and the debonded surfaces were observed by the SEM. One product of laminate porcelain powder, one light cured resin and two dual cured resins were selected. Each resin cements are lightened through the thin porcelain disc which was cut from cylindrical porcelain specimen by the diamond saw, and by the light through the porcelain disc they were bonded. Changes of thickness and kinds of porcelain, etchants, illumination time, and the elapsed time for the measurement were considered as variables for the bond strength. And the bond strength of porcelain and dual cured resins under the conditions of autopolymerization or the removal of chemical cure component were measured and compared. Bond strength were measured by shear stress. The etched surface, the cross-sectioned surface, and the debonded surface of porcelain or resin were observed by SEM. On the summary of this study, the following conclusions can be stated; 1. Bond strength of light cured resin was decreased inversely by the thickened porcelain laminate and showed the lowest value to the masking dentin porcelain among 4 kinds of porcelain powder. 2. Bond strength of autopolymerization of dual cured resin without illumination in dark chamber were from 75% to 98% to the data of dual cured resin with illumination. 3. Bond strength of dual cured resin used without chemical cured components were same to them of light cured resin. 4. Cross-sectioned surface treated by silane did not show the gap between the porcelain and resin. 5. Illumination over 80 seconds did not make the significant increase of bond strength on all kinds of resin.

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Development of a multi-functional nano-fabrication system for fabrication and measurement (가공 및 측정이 가능한 복합나노가공시스템의 개발)

  • 장동영;박만진;김진현;한동철
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.04a
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    • pp.466-471
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    • 2004
  • In focused-ion-beam (FIB) application of micromachining and device transplantation, four kinds of FIB processes, namely FIB sputtering, FIB-induced etching, redeposition, and FIB-induced deposition, are well utilized. As with FIB systems, scanning electron microscopes(SEMs) were extensively used in the semiconductor industry. They are the tools of choice for defect review and providing the image resolution needed for process monitoring. The enhanced capabilities of a dual-column on one chamber system are quickly becoming realized by the nano industry for performing a wide range of application.

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Influence of Sodium Hypochlorite on Bond Strength of Dual-cured Core Build-up Resin Composite (이원중합형 코어 축조용 복합레진의 결합강도에 대한 NaOCI의 영향에 대한 연구)

  • Lee, Jun-Bong;Park, Jong-Duk;Kwon, Su-Mi;Yu, Mi-Kyung;Lee, Kwang-Won
    • Journal of Dental Rehabilitation and Applied Science
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    • v.23 no.4
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    • pp.283-292
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    • 2007
  • Two-step or one-step bonding systems generally inhibit curing process of dual-cured core build-up resin composite for their adhesive acidity. In addition this dual-cured core build-up resin composite can be applied to dentin of pulp chamber and root at the time that complete the endodontic treatment. The purpose of this investigation was to determine the influence of sodium hypochlorite on rnicrotensile bond strength of dual-cured core build-up resin composite. Extracted human molars were horizontally sectioned with 1mm thickness using low speed diamond saw. After the sectioned specimens were divided into 8 groups, adhesive systems (Clearfil SE-Bond, Prime&Bond NT[2-step, 1-step], Adper Prompt L-Pop) were then applied with or without sodium hypochlorite pretreatment. The treated specimen was filled with dual-cured core build-up resin composite (Luxacore, DMG corp., German). Then light cured for 40 seconds and soaked in $37^{\circ}C$ water bath for 24 hours. After the treated specimen was grinded with 1mm width and measured rnicrotensile bond strength by testing machine. Additionally 8 teeth were prepared for SEM evaluation. The results were as follows. : NaOCl treated groups generally had lower rnicrotensile bond strength but did not show any difference statistically except Adper Prompt L-Pop. When the teeth were treated by NaOCl, though the difference of applied adhesive system, it had no statistically significant difference within the NaOCl treated groups except the relation of between ClearFil SE-Bond adhesive system and Adper Prompt L-Pop adhesive system. In the SEM evaluation, NaOCl treated groups presented relatively long resin tags and incomplete hybrid layer formation generally.

Effects of Sm:Ba:Cu Composition Ratio on the Superconducting Properties of SmBCO Coated Conductor Prepared by using a Composition Gradient Method (SmBCO 초전도 선재 특성에 대한 Sm:Ba:Cu 조성비의 영향)

  • Kim, H.S.;Oh, S.S.;Jang, S.H.;Min, C.H.;Ha, H.S.;Ha, D.W.;Ko, R.K.;Youm, D.J.;Moon, S.H.;Chung, K.C.
    • Progress in Superconductivity
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    • v.13 no.1
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    • pp.7-11
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    • 2011
  • The effects of Sm:Ba:Cu composition ratio in SmBCO coated conductor on their superconducting properties were investigated. The SmBCO coated conductors were fabricated by reactive co-evaporation method using EDDC(Evaporation using Drum in Dual Chamber) system. In this system, we could obtain various samples with different composition ratios in a batch by the technique providing composition gradient at deposition zone. From the specimens prepared by EDDC system, we found that composition ratio is uniform parallel to the drum axis, but gradient along the circumferential direction of the drum. We installed a shield having parallelogram open area between the deposition chamber and the evaporation chamber in EDDC system, and attached a 30 cm long template, which is parallel to drum axis, onto the drum surface. In this configuration, we could obtain SmBCO coated conductors having a gradient composition along the length of template. We measured the composition ratios and surface morphologies with periodic interval by SEM and EDAX, and confirmed the profile of composition ratio. We also measured critical current using non-contact Hall probe critical current measurement system and thereby could plot composition ratio vs. critical current. The maximum critical current was obtained, and the surface morphology with the shape of roof tile was observed at the corresponding composition ratio of Sm:Ba:Cu = 1.01:1.99:4.87. It was also found that composition ratio had an effect on not only critical current but also surface morphology.

Fabrication of SmBCO Coated Conductors using IBAD-MgO Template (IBAD-MgO 템플릿을 이용한 SmBCO 박막선재의 제조)

  • Ha, Hong-Soo;Kim, Ho-Sup;Yang, Ju-Saeng;Jung, Yae-Hyun;Kim, Ho-Kyum;Yoo, Kwon-Kuk;Ko, Rock-Kil;Song, Kyu-Jeong;Ha, Dong-Woo;Oh, Sang-Soo;Yeom, Do-Jun;Park, Chan;Yoo, Sang-Im;Moon, Seong-Hyun;Joo, Jin-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.30-31
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    • 2006
  • We have fabricated SmBCO coated conductor on IBAD-MgO substrates using unique co-evaporation method. The batch type co-deposition system was specially designed and named as EDDC(evaporation using drum m dual chamber) that is possible to deposit superconducting layer with different composition ratio at low temperature of $700^{\circ}C$. In this study, we have investigated the influence of SmBCO phase composition and texture of IBAD-MgO template on the critical current density. We have changed the deposition rates of Sm, Ba and Cu during co-evaporation to examine the optimal composition ratio shown better critical current density. The composition ratio and surface morphology of SmBCO coated conductors were analyzed by the EDX and SEM, respectively. A higher critical current density was measured at superconducting phase composition ratio of Ba deficiency, Sm or Cu rich compared to the Sm1Ba2Cu3Ox stoichiometry.

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Fabrication of GdBCO Coated conductor using IBAD-MgO substrate (IBAD-MgO 기판을 이용한 GdBCO 초전도 박막선재의 제조)

  • Ha, H.S.;Lee, J.H.;Oh, J.G.;Ko, R.K.;Kim, H.S.;Ha, D.W.;Oh, S.S.;Kim, H.K.;Yang, J.S.;Jung, S.W.;Moon, S.H.;Park, C.;Yoo, S.I.;Youm, D.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.44-44
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    • 2008
  • GdBCO coated conductor have been fabricated using reactive co-evaporation. The batch type co-deposition system was specially designed and was named EDDC (evaporation using drum in dual chamber) that is possible to deposit superconducting layer with optimum composition ratio of materials at temperature over $700^{\circ}C$ and several mTorr of oxygen. The IBAD-MgO substrate with the architecture of LaMnO3(LMO)/IBAD-MgO/Hastelloy was used for coated conductor. In this study, GdBCO superconducting layer was deposited on IBAD-MgO substrate at optimal oxygen partial pressure (pO2) and deposition temperature. After fabrication of GdBCO coated conductor, critical current density was measured by 4-probe method. Surface morphology and texture of GdBCO coated conductors were analyzed by the SEM and XRD, respectively.

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Fabrication of Thick SmBCO/IBAD-MgO coated conductor (후막 SmBCO/IBAD-MgO 초전도 박막선재의 제조)

  • Lee, J.H.;Kang, D.K.;Ha, H.S.;Ko, R.K.;Oh, S.S.;Kim, H.K.;Yang, J.S.;Jung, S.W.;Moon, S.H.;Youm, D.;Kim, C.J.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.05a
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    • pp.9-9
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    • 2009
  • Coated conductor is required to have good critical current property for high efficiency of electric power applications. Until now, long coated conductor does not show high Jc over 3 MA/$cm^2$ in thick superconducting layer because of texture degradation by thick superconducting layer. In this study, in order to overcome this issue, thicker superconducting layer was deposited with optimized conditions to reduce the degradation of critical current density. SmBCO superconducting coated conductor was deposited with 1~3 um of thickness at $750\sim850^{\circ}C$ under 15~20 mTorr of oxygen partial pressure using batch type EDDC( evaporation using drum in dual chamber). The buffered substrate for superconducting layer deposition was used IBAD-MgO template with the architecture of $LaMnO_3/MgO/Y_2O_3/Al_2O_3$/Hastelloy. After fabrication of coated conductor, critical current was measured by 4-prove method under self-magnetic field and 77K. In addition, surface morphology and texture were analyzed by SEM and XRD, respectively. 3 um thick SmBCO coated conductor shows highest $I_C$ values of 638A/cm-w in 1 m long in the world.

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