• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1117-1120
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• 2001

Chemical mechanical planarization(CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There have been serious problems in CMP in terms of repeatability and defects in patterned wafers. Since IBM's official announcement on Copper Dual Damascene(Cu2D) technology, the semiconductor world has been engaged in a Cu2D race. Today, even after~3years of extensive R&D work, the End-of-Line(EOL) yields are still too low to allow the transition of technology to manufacturing. One of the reasons behind this is the myriad of defects associated with Cu technology. Especially, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasive and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using Ce$O_2$ is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method for developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.29 no.10
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• pp.805-810
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• 2018

A coated perfect electric conductor(PEC) interface to reduce scattered fields can be efficiently modeled by using the impedance boundary condition. The self-dual integral equation(SDIE) proposed by Yan et al. may be an efficient multi-level fast multipole method (MLFMM) formulation for the impedance object. This equation can be applied to an inhomogeneous impedance material, but its accuracy can be degenerated when the material contains a PEC or perfect magnetic conductor(PMC) region. In this paper, we modify the original SDIE formulation for an inhomogeneous object containing a PEC or PMC region and numerically verify its accuracy.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.127-132
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• 2003

A study of high-pressure n-heptane droplet vaporization is conducted with emphasis placed on equilibrium at vapor-liquid interface. General frame of previous rigorous model[1] is retained but tailored for flash equilibrium calculation of vapor-liquid interfacial thermodynamics. The model is based on complete time-dependent conservation equations with a full account of variable properties and vapor-liquid interfacial thermodynamics. The influences of high-pressure phenomena, including ambient gas solubility, thermodynamic non-ideality, and property variation on the droplet evaporation are investigated. The governing equations and associated moving interfacial boundary conditions are solved numerically using a implicit scheme with the preconditioning method and the dual time integration technique. And a parametric study of entire droplet vaporization history as a function of ambient pressure, temperature has been conducted. Some computational results are compared with Sato's experimental data for the validation of calculations. For low ambient temperatures, the droplet lifetime first increases with pressures, then decreases for high pressures. For higher ambient temperatures, the droplet lifetime increase with less amplitude than that of low ambient temperatures, which then decreases with more amplitude than that of low temperatures. The solubility of nitrogen can not be neglected in the high pressure and it becomes higher as the pressure goes up.

• The Transactions of the Korean Institute of Power Electronics
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• v.22 no.4
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• pp.336-344
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• 2017

This paper presents the three-port DC-DC converter modeling and controller design procedure, which is part of the solid-state transformer (SST) to interface medium voltage AC grid to bipolar DC distribution network. Due to the high primary side DC link voltage, the proposed converter employs the three-level neutral point clamped (NPC) topology at the primary side and 2-two level half bridge circuits for each DC distribution network. For the proposed converter particular structure, this paper conducts modeling the three winding transformer and the power transfer between each port. A decoupling method is adopted to simplify the power transfer model. The voltage controller design procedure is presented. In addition, the output current sharing controller is employed for current balancing between the parallel-connected secondary output ports. The proposed circuit and controller performance are verified by experimental results using a 30 kW prototype SST system.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.12 no.2
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• pp.38-44
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• 1998

This paper presents an integrated fault diagnosis expert system to assist SCADA operators in local control centers which controls unmanned distribution substations in a power system. The proposed system diagnoses various faults occurred in both substation devices and transmission devices. The system can be easily installed without disturbing main SCADA system. The system simply shares the dynamic information including alarms with main SCADA using dual data link interface. And the proposed expert system utilizes the fuzzy reasoning process in order to consider the uncertainty factor. The system is developed using a low cost personal computer owing to the special modular programming and the meta-inf!'lrence structure. Case studies showed a promising possibility.bility.

• IEMEK Journal of Embedded Systems and Applications
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• v.8 no.5
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• pp.249-254
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• 2013

In this paper we propose nonlinear control system for automatic unmanned vehicle using a RC (Radio Controlled) car which is usually controlled by a remote controller. In the proposed system, a RC car is dissembled and reassembled with several parts enabling it to be controlled by an android mobile platform with Bluetooth communication. In our system, an android mobile smartphone is mounted on the RC car and plays an important role as an eye of the car. The proposed system automatically controls the RC car to follow a lane that we draw on the floor of our laboratory. Also, the proposed RC car system can also be controlled manually using the accelerometer sensor of a smartphone through a Bluetooth module. Our proposed system that has both manual mode and automatic mode consists of several components; a microprocessor unit, a Bluetooth serial interface module, a smartphone, a dual motor controller and a RC toy car. We are now in the development of a group driving system in which one car follows the front car that tracks a lane automatically.

• The Transactions of the Korean Institute of Power Electronics
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• v.12 no.3
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• pp.248-257
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• 2007

This paper presents the control system for driving myoelectric hand prosthesis according to myoelectric signal generated in the human muscle. A surface myoelectric sensor for measuring myoelectric signal is designed a skin interface and a processing circuit according to myoelectric signal output property. The control system consists of two controller for driving dual motor, torque sensor for measuring out torque of motor, slip sensor for detecting slip of torque. The experimental results proved the proposed control system.

• Journal of Korean Society of Water and Wastewater
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• v.10 no.2
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• pp.55-69
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• 1996

Backwashing is one of the most important processes in water treatment. Several models have been utilized to predict minimum fluidization velocity and expansion of media. However, it is not unusual that the actual bahavior of media dose not agree well with the prediction. This study has investigated the applicability of models in predicting the minimum fluidization velocity of sand media. However even the better model has predicted minimum fluidization velocity 1.1 to 1.8 times higher than actual fluidization velocity. The expansion rate of sand media was inspected. It is found that the actual expansion rate was greater than the predicted. In this study condition, use of $d_{10}$ instead of $d_{60}$ was better to predict the expansion of media. On the contrary to the sand media, the actual expansion of anthracite media was less than that predicted. Sometimes it is reported that the dual media has been overflown during backwashing and mixed severely at the interface. It is because the grain size distribution of anthracite has not been selected properly. The numerical values for media expansion found in this study could be referred as the useful data in operating and/or designing filter media.

• Journal of Korea Multimedia Society
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• v.21 no.11
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• pp.1342-1352
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• 2018

Voice Command systems are important means of ensuring accessibility to digital devices for use in situations where both hands are not free or for people with disabilities. Interests in services using speech recognition technology have been increasing. In this study, we developed a mobile writing application using voice recognition and voice command technology which helps people create and edit documents easily. This application is characterized by the minimization of the touch on the screen and the writing of memo by voice. We have systematically designed a mode to distinguish voice writing and voice command so that the writing and execution system can be used simultaneously in one voice interface. It provides a shortcut function that can control the cursor by voice, which makes document editing as convenient as possible. This allows people to conveniently access writing applications by voice under both physical and environmental constraints.

• Journal of Ocean Engineering and Technology
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• v.37 no.6
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• pp.225-237
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• 2023

In this study, numerical simulations for a single fixed truncated circular cylinder in regular waves were conducted to investigate the nonlinear wave run-up under various dampers and wave period conditions. The present study used the volume of fluid (VOF) technique to capture the air-water interface. The unsteady Reynolds-averaged Navier-Stokes (URANS) equation with the k- 𝜖 turbulence model was solved using the commercial computational fluid dynamics (CFD) software STAR-CCM+. First, a systematic spatial convergence study was conducted to assess the performance and precision of the present numerical wave tank. The numerical scheme was validated by comparing the numerical results of wave run-up on a bare truncated cylinder with the experimental results, and a good agreement was achieved. Then, a series of parametric studies were carried out to examine the wave run-up time series around the truncated cylinder with single and dual dampers in terms of the first- and second-order harmonic and mean set-up components. Additionally, the local wave field and the flow velocity vectors adjacent to the cylinder were evaluated. It was confirmed that under short wave conditions, the high position of the damper led to a noticeable increase in the wave run-ups with significant changes in the first- and second-order harmonic components.