• Journal of the Semiconductor & Display Technology
• /
• v.19 no.2
• /
• pp.45-50
• /
• 2020

We investigated the Si_1-xGe_x surface properties when dry cleaning the films using NF₃ / H₂O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H₂O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H₂O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.128-128
• /
• 2010

In this study, we investigated the evolution and reduction of the surface roughness during the high-speed chemical dry thinning process of Si wafers. The direct injection of NO gas into the reactor during the supply of F radicals from NF3 remote plasmas was very effective in increasing the Si thinning rate, due to the NO-induced enhancement of the surface reaction, but resulted in the significant roughening of the thinned Si surface. However, the direct addition of Ar and N2 gas, together with NO gas, decreased the root mean square (RMS) surface roughness of the thinned Si wafer significantly. The process regime for the increasing of the thinning rate and concomitant reduction of the surface roughness was extended at higher Ar gas flow rates. In this way, Si wafer thinning rate as high as $20\;{\mu}m/min$ and very smooth surface roughness was obtained and the mechanical damage of silicon wafer was effectively removed. We also measured die fracture strength of thinned Si wafer in order to understand the effect of chemical dry thinning on removal of mechanical damage generated during mechanical grinding. The die fracture strength of the thinned Si wafers was measured using 3-point bending test and compared. The results indicated that chemical dry thinning with reduced surface roughness and removal of mechanical damage increased the die fracture strength of the thinned Si wafer.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.30 no.2
• /
• pp.93-101
• /
• 2016

This paper presents the surface discharge characteristics in Dry-Air on laminated epoxy solid dielectrics and conductive particles in order to provide the valuable information for the insulation design of eco- friendly gas insulated switchgear. To improve insulation performance, the three types of the laminated epoxy solid dielectrics were proposed, and it was revealed that their surface discharge characteristics were similar to the bakelite dielectrics of same-laminated types. From the surface discharge characteristics of dry air, it was demonstrated that the effect of conductive particles on surface discharge voltage was dominant when there are this particles at the shortest electrode gap and that the degradation of insulation performance on the conductive particles was evident in epoxy than teflon. These phenomena were interpreted in terms of particle-triggered discharge mechanism and electric field of triple junction, respectively.

• Corrosion Science and Technology
• /
• v.21 no.2
• /
• pp.121-129
• /
• 2022

A study on water-based epoxy coated on mild steel using the electroplating method was conducted to optimize the process parameters for dry film thickness to achieve superior paint quality at optimal cost in an automotive plant. The regression model was used to adjust various parameters such as electrode voltage, bath temperature, processing time, non-volatile matter, and surface area to optimize the dry film thickness. The average dry film thickness computed using the model was in the range of 15 - 35 ㎛. The error in the computed dry film thickness with reference to the experimentally measured dry film thickness value was - 0.5809%, which was well within the acceptable limits of all paint shop standards. Our study showed that the dry film thickness on mild steel was more sensitive to electrode voltage and bath temperature than processing time. Further, the presence of non-volatile matter was found to have the maximum impact on dry film thickness.

• Herbal Formula Science
• /
• v.27 no.4
• /
• pp.285-297
• /
• 2019

Objectives : The purpose of this study is to analyze effectiveness of herbal medicine treatment on Dry Eye Syndrome. Methods : We analyze medical records of 114 patients who visited Indara oriental medical clinic for dry eye syndrome. Patients were treated with acupuncture and Inmok-tang, and the ocular surface disease index was evaluated before and after treatment. Results : Analysis of 114 medical records showed a significant decrease in the pre-treatment and post-treatment ocular surface disease index, and a statistically significant positive correlation between the duration of Inmok-tang administration and the change in the ocular surface disease index. Conclusions : Herbal medicine treatment with Inmok-tang reduces the Ocular Surface Disease Index, an indicator of subjective symptoms of dry eye syndrome.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 1998.05a
• /
• pp.3-3
• /
• 1998

The atmospheric corrosIOn properties of Zinc (Zn) under wet/dry transition of $H_20$ film were investigated in this study. The atmospheric corrosion of metal is usually occurred as a result of repetitious thickness transition (so called wet/dry transition) of liquid phase which is covering the metal surface. Corrosion potential and the polarization behaviour of Zn during liquid film thickness transition were measured by Kelvin probe method which IS using vibrating reference electrode without touching the liquid film. The oxidized states of Zn as a result of successive wet/dry transition were also investigated by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The results show that the corrosion potential and the corrosIOn rate of Zn both are increasing during drying. However, the corrOSIon rate is decreasing again when the Zn surface is completely dried while the corrosion potential still remains high. This behaviour can be explained by the polarization behaviour change of Zn according to the $H_20$ film thickness change. The completely dried surface is consisted mostly with Zn and ZnO phases. After a number of cycles of wet/dry transition, however, the oxidized Zn phase of ${\varepsilon}-Zn(OH)_2$, which has rather voluminous and defected structure, were found.

• Journal of Environmental Science International
• /
• v.12 no.4
• /
• pp.393-397
• /
• 2003

It has been researched the relationship between deposition velocity and factors which could affect the deposition phenomena and deposition velocity also has been estimated fer several land-use types. The typical deposition velocities are complex functions of surface types, atmospheric stabilities, friction velocities, air pollutants and so on. The canopy resistance is major contribution to the model's total resistance for O₃. Canopy wetness is also an important factor to calculate deposition velocity. We considered the canopy wetness as canopy water content(CWC) in our Model. But, it is not easy to observe CWC over each land-use types. In this study, we use CWC observed by EMEFS(CANADA Environment Service, 1988) to examine the influence of CWC in estimation of 03 dry deposition velocity(V/sub d/) in summertime. The value of O₃ V/sub d/ range 0.2 ∼ 0.7 cm s/sup -1/ on dry surface and 0.01 ∼ 0.35 cm s/sup -1/ on wet surface in daytime.

• Proceedings of the Korea Concrete Institute Conference
• /
• 2005.05b
• /
• pp.153-156
• /
• 2005

Surface dry condition examination method on the KS F 2504(Testing method for specific gravity and absorption of fine aggregate) has dim detail prescriptions which can cause different ways of understanding based on one's convinence, not on correct means of rule. So we investigate the problems about the inconsistency on decisioing surface dry condition at management examination in the lab and scene. In conclusion, free-falling method is easier and faster than self-weight method. And we also found that the most important face on decisioning surface dry is compacting factor of tamping rod.

• Journal of Sensor Science and Technology
• /
• v.15 no.4
• /
• pp.245-250
• /
• 2006

In this paper, glass cap wafer for MEMS device package is fabricated by using sand blaster dry etcher and Its surface is studied. The surface of dry etched glass is analyzed by using SEM, and many glass particles and micro cracks are observed. If these kind of particles were dropped from glass to the surface of device, It would make critical failure to the operation of device. So, several cleaning and etching methods are induced to remove these kinds of dormant failure mode and optimized condition is found out.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.449-449
• /
• 2011

We reported the direct effect of intrinsic surface energy of dry adhesive material to the Van der Waals and capillary forces contributions of the total adhesion force in an artificial gecko-inspired adhesion system. To mimic the gecko foot we fabricated tilted nanohairy structures using both lithography and ion beam treatment. The nanohairy structures were replicated from Si wafer mold using UV curable polymeric materials. The control of nanohairs slanting angles was based on the uniform linear argon ion irradiation to the nanohairy polymeric surface. The surface energy was studied utilizing subsequent conventional oxygen ion treatment on the nanohairy structures which resulted in gradient surface energy. Our shear adhesion test results were found in good agreement with the accepted Van der Waals and capillary forces theory in the gecko adhesion system. Surface energy would give a direct impact to the effective Hamaker constant in Van der Waals force and the filling angle (${\varphi}$) of water meniscus in capillary force contributions of gecko inspired adhesion system. With the increasing surface energy, the effective Hamaker constant also increased but the filling angle decreased, resulting in a competition between the two forces. Using a simple mathematical model, we compared our experimental results to show the quantitative contributions of Van der Waals and capillary forces in a single adhesion system on both hydrophobic and hydrophilic surfaces. We found that the Van der Waals force contributes about 82.75% and 89.97% to the total adhesion force on hydrophilic and hydrophobic test surfaces, respectively, while the remaining contribution was occupied by capillary force. We also showed that it is possible to design ultrahigh dry adhesive with adhesion strength of more than 10 times higher than apparent gecko adhesion force by controlling the surface energy and the slanting angle induced-contact line of dry adhesive the materials.