• 전력전자학회논문지
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• 제6권5호
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• pp.394-399
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• 2001

반도체 생산 공정에 있어, 저압 화학적 기상 증착(Low Pressure Chemical Vapor Deposition)과 프라즈마 강화 화학적 기상 증착(Plasma Enhanced Chemical Vapor Deposition) 공정 후 발생된 환경 유해 가스를 효과적으로 세정하기 위한 장비인 건식 세정기(dry scrubber)의 전원장치에 대한 연구이다. 주 전력회로는 1500W, 스위칭주파수 100kHz의 위상 변위 풀 브리지(Phase Shift Full-Bridge)방식의 인버터와 100kHz 저역 통과 필터 및 임피던스 변환기로 구성되었다 모드해석과 모의실험을 통하여 회로방식의 타당성을 확인하였고 50$\Omega$ dummy load 및 chamber 실험을 통하여 다양한 부하조건에서도 프라즈마를 안정되게 발생시킬 수 있음을 확인하였다.

• 한국대기환경학회지
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• 제6권1호
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• pp.85-96
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• 1990

Simultaneous removal efficiencies of hydrophilic and hydrophobic gaseous pollutants are experimentally determined, and the macroscopic removal mechanism of pollutants in a dry scrubber is analyzed using the extended model of three phase equilibrium distribution of pollutant at high temperatures that can describe the different morphological conditions of adsorbent and water at varying relative humidities. For the simplicity, the inside of spray dryer is divided into three regions of ; (1) absorption, (2) three-phase equilibrium, and (3) adsorption, and the removal efficiencies of each pollutants at three regions are observed at different experimental conditions to estimate the effects of important parameters of dry scrubber. The laboratory experiments simulate the three regions of spray dryer with the temperature control and thus evaporation rate of water from the slurry particle. $SO_2$ as a hydrophilic gaseous pollutant and vinyl chloride as a hydrophobic toxic gas are selected for the future field application to soid waste incineration, and the two types of slurry are made of the two sorbents ; 10 wt.% $Ca(OH)_2$, and 10 wt.% NaOH. Result of temperature effect shows the height of absorption plus three-phase region is decreased as the operation temperature is increased, which results in the lower removal efficiency of $SO_2$ but higher removal for vinyl chloride in the adsorption region of dry scrubber. The removal efficiency of $SO_2$ is higher by NaOH slurry than by $Ca(OH)_2$ slurry due to the hygroscopic nature of NaOH, while the removal of vinyl chloride is higher in $Ca(OH)_2$ case. From the analysis of redults using three-phase equilibrium distribution model, the effective two-phase partition coefficients can be obtained, and the possible extention in the application of the three-phase equilibrium model in a dry scrubber design has been demonstrated.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2001년도 Proceedings ICPE 01 2001 International Conference on Power Electronics
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• pp.113-116
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• 2001

In this paper, the development of the LF power supply for dry scrubber is discussed. 1500kW, 100kHz LF power supply is designed and tested. The main power stage is used for the FB PWM inverter with an LC filter in the secondary circuit. The operation characteristics of LF power supply are verified by simulation and experimental results.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 1999년도 춘계학술대회 논문집
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• pp.37-37
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• 1999

• 전력전자학회:학술대회논문집
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• 전력전자학회 2001년도 전력전자학술대회 논문집
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• pp.576-579
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• 2001

In this paper, the development of the LF power supply for dry scrubber is discussed. 1500kW, 100kHz LF power supply is designed and tested. The main power stage is used for the FB PWM inverter with an LC filter in the secondary circuit. The operation characteristics of LF power supply are verified by simulation and experimental results.

• Journal of Advanced Marine Engineering and Technology
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• 제30권1호
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• pp.81-87
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• 2006

In marine air pollution control, SCR (Selective Catalytic Reduction) is reconized as the most effect method to control NOx, but on the other hand. seawater scrubber applying the basic characteristic that is naturally alkaline (pH typically around 8.1) is viewed as an economical SOx removal system at present. Especially, seawater scrubber would not be necessary to follow any of the various land based flue gas desulfurization methods. i.e. wet, dry or alkali scrubbing. However, these methods are not readily adaptable to marine conditions due to the quantifies of consumables required i.e. lime or limestone, the means of operation and the commercial availability. This research is undertaken to develop a new method as the main target of eliminating all exhaust emissions, particularly vessel, because of easy access to seawater and apt to apply a wet scrubber system. First, using the acidic seawater by seawater electrolysis, nitric monoxide(NO) is adequately oxidized to nitric dioxide $(NO_2)$by ClOx-in the acidic seawater, the electrolyzed alkaline seawater by electrolysis which contains mainly NaOH together with alkali metal ions $(i.e\;Na^{+}\;K^{+},\;Mg_{2}\;^{+},\;Ca_{2}\;^{+})$, is used as the absorption medium of NOx, the SOx are absorbed by relatively high solubility compared to other components of exhaust pollutants. The results found that the NOx and SOx removals could be achieved nearly Perfect.

• 한국입자에어로졸학회지
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• 제9권4호
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• pp.239-246
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• 2013

The purpose of this study is to determine the feasibility of dry-type desulfurization process for actual application to coal-fired power plant. We used actual exhaust gas from Facility Y, Plant #2 to fabricate a demo-scale testing device to attempt to improve the efficiency of desulfurization. A spout-bed circulating dry scrubber convergence system connecting turbo reactor with bag filter was devised, then analyzed for performance characteristics of $SO_2$ removal for Ca/S mole ratio, superficial gas velocity, and ammonia injection, and for secondary reaction characteristics of the non-reactive sorbent at the bag filter. As a result, the installation of spout-bed circulating dry scrubber convergence system showed better economy and efficiency for removing sulfur than the existing wet/semidry-type desulfurization process. In addition, the best efficiency for desulfurization occurred when connected to the bag filter, with differential pressure maintained at 150 $mmH_2O$.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2003년도 춘계전력전자학술대회 논문집(1)
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• pp.260-263
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• 2003

When ICP(Inductive Coupled Plasma type etching and wafer manufacturing is being processed in semiconductor process, a noxious gas in PFC and CFC system is generated. Gas cleaning dry scrubber is to remove this noxious gas. This paper describes a power source device, 2MHz switching frequency class 2kW RF Generator, used as a main power source of the gas cleaning dry scrubber. The power stage of DC/DC converter is consist of full bridge type converter with 100kHz switching frequency Power amplifier is push pull type inverter with 2MHz switching frequency, and transmission line transformer. The adequacy of the circuit type and the reliability of generating plasma in various load conditions are verified through 50$\Omega$ dummy load and chamber experiments result.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2000년도 추계학술대회 논문집
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• pp.247-248
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• 2000

산업규모의 급속한 팽창과 더불어 에너지원의 확보에 석탄이 차지하는 비중이 커지고, 산업경제의 부산물인 쓰레기의 처리가 매립에서 소각방식으로 바뀌어가고 있는 시점에서 산업연료사용량과 난방부분의 에너지 사용량이 급속히 증가하고 있다. 이러한 인간의 생산활동으로 인해 대기 중으로 배출되는 가스는 크게 연소가스와 소각가스로 분리할 수 있는데 대표적인 연소가스로써는 SO$_2$가 있으며, 소각가스로는 HCl이 있다. (중략)

• 한국수소및신에너지학회논문집
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• 제20권4호
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• pp.352-359
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• 2009

KEPRI is developing a Korean type coal-gasification system and the scale is 20 ton/day. Prior to this pilot plant, a 1 ton/day class gasification system will be used for pre-testing of several coal types. This paper introduces the configuration and design conditions of this 1 ton/day class system, presenting the gas/coal ratio, oxygen/coal ratio, cold gas efficiency, CFD analysis of gasifier, and others. The existing combustion furnace for residual oil was retrofitted as a coal gasifier and a vertical and down-flow type burner was manufactured. Ash removal is carried out through a water quencher and a scrubber following the quencher, and the sulfur is removed by adsorption in the activated carbon tower. The gas produced from the gasifier is burned at the flare stack. In this paper, the results of design conditions and initial operation conditions of I ton/day gasification system are compared together.