• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.45-50
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• 2020

We investigated the Si_1-xGe_x surface properties when dry cleaning the films using NF₃ / H₂O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H₂O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H₂O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.

• 방사성폐기물학회지
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• 제14권4호
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• pp.435-443
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• 2016

본 논문은 국내 원전의 습식저장조에 저장 중인 경수로형 사용후핵연료를 금속겸용용기를 이용해 건식으로 운영하기 위한 운영공정을 개발하는 것이다. 국내 경수로형 원전의 사용후핵연료는 1990년대 초부터 습식으로 소내에서 운반을 한 경험은 많으나 건식으로 운전한 경험은 전혀 없는 실정이다. 이에 따라 금속겸용용기를 운영할 수 있는 세부 운영공정을 개발하였으며 주요 운영공정에서 금속겸용용기의 주요 구성품 및 사용후핵연료의 안전성이 유지됨을 확인하였다. 단기운영공정은 총 21시간 내에 이루어지도록 절차를 수립하였고 단계별로 허용운전 시간(15시간 습식공정, 3시간 배수공정, 그리고 3시간 진공공정)도 제시하였다.

• Tribology and Lubricants
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• 제35권1호
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• pp.9-15
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• 2019

Graphene is a fascinating material for fabricating flexible and transparent devices owing to its thickness and mechanical properties. To utilize graphene as a core material for devices, the transfer process of graphene is an inevitable step. The transfer process can be classified into wet and dry methods depending on the surrounding environment. The adhesion between graphene and a target substrate determines the success or failure of the transfer process. As the surface energy of graphene is an important parameter that provides adhesion, it is useful to estimate the surface energy to understand the mechanisms of the transfer process. However, the exact surface energy of graphene is still disputed because the wetting transparency of graphene depends on the polarity of the liquid and target substrate. Previously reported results use graphene transferred by the wet method. However, there are few reports on the surface energy of graphene transferred by the dry method. In this study, the surface energy of graphene transferred by the wet and dry methods is estimated. Wetting transparency occurs for certain combinations of liquids and substrates. For graphene on a polar substrate, the surface energy decreases by 25 and 35% for the wet and dry transfer methods, respectively. However, the surface energy of graphene on dispersive substrates decreases by ~10% regardless of the transfer method. In conclusion, the surface energy of graphene is $36{\sim}38mJ/m^2$, and differs depending on the transfer method and polarity of the substrate.

• 한국재료학회지
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• 제14권8호
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• pp.573-578
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• 2004

Newly developed silicide materials for ULSI should have the appropriate electrical property of low resistant as well as process compatibility in conventional CMOS process. We prepared $NiCoSi_x$ silicides from 15 nm-Co/15 nm-Ni/Si structure and performed contact dry etch process to confirm the dry etch stability and compatibility of $NiCoSi_x$ layers. We dry etched the photoresist/SiO/silicide/silicon patterns with $CF_4\;and\;CHF_3$ gases with varying powers from 100 to 200 W, and pressures from 45 to 65 mTorr, respectively. Polysilicon and silicon active layers without silicide were etched $0\sim316{\AA}$ during over etch time of 3min, while silicon layers with proposed $NiCoSi_x$ silicide were not etched and showed stable surfaces. Our result implies that new $NiCoSi_x$ silicides may replace the conventional silicides due to contact etch process compatibility.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.922-925
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• 2007

In the usual dry etching process for the TFT-LCD fabrication, it is hard to monitor the basic plasma parameters such as density and temperature. However, the basic parameters are easily monitored during the dry etching process. We have simultaneously measured the electric characteristics and basic plasma parameters of the dry etching chamber during the process, analyzed them to interpret plasma parameters. For the Ar plasma discharge case, we could obtain the density and temperature from the electric characteristics using a simple simple sheath model.

• Journal of Welding and Joining
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• 제23권6호
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• pp.43-48
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• 2005

This work was carried out to obtain sound welds and to select a most suitable binary metal joint among three different dissimilar binary metal combinations such as Zr-4/Ta, Mo/Ta and Ti/Ta(seal tube/sensor sheath) joints fur the instrumented nuclear fuel irradiation test. To do this, Taguchi experimental method was employed to optimize the experimental data. In addition, metallography, micro-focus x-ray radiography and hardness test were conducted to examine the welds. From the weld bead appearance, penetration depth and bead width as well as weld defects standpoint, Zr-4/Ta joint is suggested for the circumferential joining between a seal tube and a sensor sheath. The optimized welding parameters based on Zr-4/Ta joint are suggested as well.

• Biotechnology and Bioprocess Engineering:BBE
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• 제11권1호
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• pp.19-25
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• 2006

With particular regards to the hepatitis A virus (HAV), a terminal dry-heat treatment ($100^{\circ}C$ for 30 min) process, following lyophilization, was developed to improve the virus safety of a solvent/detergent-treated antihemophilic factor IX concentrate. The loss of factor IX activity during dry-heat treatment was of about 3%, as estimated by a clotting assay. No substantial changes were observed in the physical and biochemical characteristics of the dry-heat-treated factor IX compared with those of the factor IX before dry-heat treatment. The dry-heat-treated factor IX was stable for up to 24 months at $4^{\circ}C$, The dry-heat treatment after lyophilization was an effective process for inactivating viruses. The HAV and murine encephalomyocarditis virus (EMCV) were completely inactivated to below detectable levels within 10 min of the dry-heat treatment. Porcine parvovirus (PPV) and bovine herpes virus (BHV) were potentially sensitive to the treatment. The log reduction factors achieved during lyophilization and dry-heat treatment were ${\ge}5.60$ for HAV, ${\ge}6.08$ for EMCV, 2.64 for PPV, and 3.59 for BHV. These results indicate that dry-heat treatment improves the virus safety of factor IX concentrates, without destroying the activity. Moreover, the treatment represents an effective measure for the inactivation of non-lipid enveloped viruses, in particular HAV, which is resistant to solvent/detergent treatment.

• 동력기계공학회지
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• 제15권4호
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• pp.5-10
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• 2011

In case of using rapid vacuum-freeze drying for high quality dry flower of flowering plant, the morphological and physiological characteristics of dry rose showed as the following. The dry ratio of about 82% presented after 1 day in case of using rapid vacuum-freeze drying and it was reached that the optimum storage water content of general dry products was 18%. The dry ratio of about 89% presented after 4 days. This result indicates very short dry time comparing with natural dry time of 12 days. Also, the morphological characteristics of flowering plant in case of vacuum-freeze drying showed similar shape with real flower. The contraction decreased about 9% comparing with real flower under dry time of 72 hours. But the contraction in case of natural dry decreased 36% and showed noticeable difference. The brightness which affects physiological characteristics of dry flowering plant showed lower values according to the dry process and chromaticity was thick. After 4 days, natural dry was thick with about 2 times comparing with vacuum-freeze drying. In case of vacuum-freeze drying, the quantity of anthocyanin and chlorophyl which affect discoloration and bleaching of dry flowering plant showed the clear difference comparing with natural dry method due to the sublimation by vacuum after rapid freeze with short initial time.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.394-397
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• 2004

This paper presents a simple analytic method using 2D simulation program for predications of cutting force and machining temperature in dry type milling process. And also, comparison of cutting force and machining temperature obtained from experiment and simulation work is accomplished to distinguish of suitability.

• 한국건축시공학회지
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• 제3권4호
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• pp.111-117
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• 2003

Recently SAMWOO EMC received order and built interior walls which was used the day process in several high-rise compound buildings. On the way to build, this process was brought about several matter according to the progress and qualify control. So, this study is the improving way of the dry process from experiences on those constructions