• Corrosion Science and Technology
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• v.9 no.6
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• pp.276-280
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• 2010

Copper(Cu) as an interconnecting metal layer can replace aluminum (Al) in IC fabrication since Cu has low electrical resistivity, showing high immunity to electromigration compared to Al. However, it is very difficult for copper to be patterned by the dry etching processes. The chemical mechanical polishing (CMP) process has been introduced and widely used as the mainstream patterning technique for Cu in the fabrication of deep submicron integrated circuits in light of its capability to reduce surface roughness. But this process leaves a large amount of residues on the wafer surface, which must be removed by the post-CMP cleaning processes. Copper corrosion is one of the critical issues for the copper metallization process. Thus, in order to understand the copper corrosion problems in post-CMP cleaning solutions and study the effects of DC biases and post-CMP cleaning solution concentrations on the Cu film, a constant voltage was supplied at various concentrations, and then the output currents were measured and recorded with time. Most of the cases, the current was steadily decreased (i.e. resistance was increased by the oxidation). In the lowest concentration case only, the current was steadily increased with the scarce fluctuations. The higher the constant supplied DC voltage values, the higher the initial output current and the saturated current values. However the time to be taken for it to be saturated was almost the same for all the DC supplied voltage values. It was indicated that the oxide formation was not dependent on the supplied voltage values and 1 V was more than enough to form the oxide. With applied voltages lower than 3 V combined with any concentration, the perforation through the oxide film rarely took place due to the insufficient driving force (voltage) and the copper oxidation ceased. However, with the voltage higher than 3 V, the copper ions were started to diffuse out through the oxide film and thus made pores to be formed on the oxide surface, causing the current to increase and a part of the exposed copper film inside the pores gets back to be oxidized and the rest of it was remained without any further oxidation, causing the current back to decrease a little bit. With increasing the applied DC bias value, the shorter time to be taken for copper ions to be diffused out through the copper oxide film. From the discussions above, it could be concluded that the oxide film was formed and grown by the copper ion diffusion first and then the reaction with any oxidant in the post-CMP cleaning solution.

• Clean Technology
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• v.28 no.3
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• pp.203-209
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• 2022

An environmental evaluation was conducted by employing LCA methodology for a mechanical seal manufacturing process that uses recycled silicon recovered from end-of-cycle PV modules. The recycled silicon was purified and reacted with carbon to synthesize β-SiC particles. Then the particles underwent compression molding, calcination and heat treatment to produce a product. Field data were collected and the potential environmental impacts of each stage were calculated using the LCI DB of the Ministry of Environment. The assessment was based on 6 categories, which were abiotic resource depletion, acidification, eutrophication, global warming, ozone depletion and photochemical oxidant creation. The environmental impacts by category were 45 kg CO₂ for global warming and 2.23 kg C₂H₄ for photochemical oxide creation, and the overall environmental impact by photochemical oxide creation, resource depletion and global warming had a high contribution of 98.7% based on weighted analysis. The wet process of fine grinding and mixing the raw silicon and carbon, and SiC granulation were major factors that caused the environmental impacts. These impacts need to be reduced by converting to a dry process and using a system to recover and reuse the solvent emitted to the atmosphere. It was analyzed that the environmental impacts of resource depletion and global warming decreased by 53.9% and 60.7%, respectively, by recycling silicon from end-of-cycle PV modules. Weighted analysis showed that the overall environmental impact decreased by 27%, and the LCA analysis confirmed that recycling waste modules could be a major means of resource saving and realizing carbon neutrality.

• Tuberculosis and Respiratory Diseases
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• v.40 no.2
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• pp.104-111
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• 1993

Background: Gram-negative bacterial endotoxin induced septicemia is known to be a leading cause in the development of adult respiratory distress syndrome(ARDS). The mechanism of endotoxin induced lung injury is mainly due to the activated neutrophils which injure the capillary endothelial cells by releasing oxidant radical and resulted in pulmonary edema. We studied the change of antioxidant enzyme in the case of large or small, intermittant dose of endotoxin infused rat lungs. Methods: Endotoxin was given to the rat through the peritoneal cavity in the dose of 7 mg/kg body weight in the large dose group and 1 mg/kg for 10 days in the small dose group. Bronchoalveolar lavage (BAL) was done and rats were killed at 6, 12, 24 hours after single endotoxin injection in the large dose group and 3, 7, 10 days after daily endotoxin injection for 10 days in the small dose group. The lungs were perfused with normal saline through the pulmonary artery to remove the blood and were homogenized in 5 volume of 50 mM potassium phosphate buffer containing 0.1 mM EDTA. After centrifuging at 100,000 g for 60 minute, the supernatent was removed and stored at $-70^{\circ}C$ until measuring for superoxide dismutase (SOD), catalase, glutathione peroxidase (GSH-Px) and protein. Results: We observed the following results. 1) The lung wet/dry weight ratio and albumin concentration in the BAL fluids were increased to peak at 12 hours and neutrophil number in the BAL fluids were peak at 6 hours after endotoxin injection in the large dose group. 2) Cu, Zn SOD (IU/mg protein) was significantly decreased after 6, 12 hours after endotoxin injection in the large dose group. 3) There were no singnificant change in the level of Mn SOD, catalase, GSH-Px after endotoxin injection in both groups. Conclusion: Endotoxin in the large dose group produced the acute pulmonary edema and decreased the Cu, Zn SOD in the lung tissue after injecting endotoxin at 6 and 12 hours. These phenomenon may be due to the cell membrane damage by endotoxin. Further research would be necessary whther giving SOD by intratracheal route or method to increase the synthesis of SOD may lessen the acute lung injury by endotoxin.

• Applied Chemistry for Engineering
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• v.22 no.5
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• pp.532-539
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• 2011

The physical and chemical properties of the dried low rank coals (LRCs) before and after the surface treatment using ozone and ammonia were characterized in this study. The contents of moisture, volatiles, fixed carbon and ash consisting of dried LRCs before the surface treatment were about 2.0, 44.8, 44.9 and 8.9%, respectively. Also, it was composed of carbon of 62.66%, hydrogen of 4.33%, nitrogen of 0.94%, oxygen of 27.01% and sulfur of 0.09%. The dried LRCs was surface-treated with the various dry methods using gases such as ozone at room temperature, ammonia at $200^{\circ}C$ and then the dried LRCs before and after the surface treatment were characterized by the various analysis methods such as FT-IR, TGA, proximate and elemental analysis, caloric value, ignition test, adsorption of $H_2O$ and $NH_3-TPD$. As a result, the oxygen content increased and the calorific value, ignition temperature and the contents of carbon and hydrogen relatively decreased because the oxygen-contained functional groups were additionally generated by the surface oxidation with ozone which plays a role as an oxidant. Also, its $H_2O$ adsorption ability got higher because the hydrophilic oxygen-contained functional groups were additionally generated by the surface oxidation with ozone. On the other hand, it was confirmed that the dried LRCs after the surface treatment with $NH_3$ at $200^{\circ}C$ have the decreased oxygen content, but the increased calorific value, ignition temperature and contents of carbon and hydrogen because of the decomposition of oxygen-contained functional groups the on the surface. In addition, the $H_2O$ adsorption ability was lowered bucause the surface of the dried LRCs might be hydrophobicized by the loss of the hydrophilic oxygen-contained functional groups. It was concluded that the various physico-chemical properties of the dried LRCs can be changed by the surface treatment.

• Korean Journal of Medicinal Crop Science
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• v.13 no.3
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• pp.93-100
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• 2005

This research was performed to investigate the possibilities of industrial usage of camellia (Camellia japonica L.) by examining the antioxidant and antimicrobial effects of methanol extract with different sections. Content of total phenolics, DPPH radical scavenging activities and antibacterial activity of young leaf, mature leaf, flower bud, flower, bark, and seed of camellia were compared in vitro experimental models. Total phenolics was contained the higher in young leaf (74.62 mg), flower bud (65.02 mg) and flower (62.42 mg) but less than 20.95 mg per 100 g of dry weight in other parts of Camellia japonica L. And effects of antioxidant measured by DPPH radical scavenger activity ($RC_{50}$, reduce concentration 50%), was shown higher $7.16{\sim}18.14\;{\mu}g/m{\ell}$ in methanol extract of young leaf, flower bud and flower than $61.23\;{\mu}g/m{\ell}$ of BHT as a chemical oxidant. Also, the antimicrobial activity of Camellia japonica L. extracts determined using a paper disc method against food-borne pathogen and food spoilage bacteria, the young leaves extracts showed the most active antimicrobial activity against 7 kinds of harmful microorganisms. Flower bud extracts showed the highest antibacterial activity against P. aeruginosa and Enterobacter spp. C1036. In addition, the minimum inhibitory concentration (MIC) of young leaf extract against B. subtillis,S. fradiae,S. aureus,E. coli,P. aeruginosa, Enterobacter spp. C1036, and S. typhimurium were revealed 1 to 15 ${\mu}g/m{\ell}$. As a result, antimicrobial activity of camellia extracts was shown higher gram positive bacteria than gram negative bacteria.

• Food Science and Preservation
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• v.24 no.2
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• pp.206-214
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• 2017

The objective of this study is to investigate the quality characteristics of Yanggaeng by using the functional properties of Glechoma hederacea (GH). Sample was dried at $50^{\circ}C$ dry oven. The results of the study were as follows : The Phenolic compounds of GH was $12.99{\pm}0.3mg/g$ in water extract (GHWE), $3.14{\pm}0.07mg/g$ in 70% ethanol extract (GHEE). The antioxidant activity of GH was determined in various phenolic concentrations at $50-200{\mu}g/mL$. DPPH activities of GHWE and GHEE were 77.16-78.24% and 73.04-77.00%, respectively. The ABTS were 84.35-99.75% and 83.74-99.55%. The anti-oxidant protection factor (PF) were 1.54-1.62 PF and 1.62-2.09 PF and TBARS were 42.93-94.09% and 91.05-95.19%, respectively. Tyrosinase inhibitory activity of GHEE increased concentration dependently. Hyaluronidase inhibition activity of GHEE and GHWE, showing that there were increasing pattern depending on the increases in the phenolics concentration of GH. In texture, Hardness and springiness were significantly different in the control and 2% groups, but cohesiveness and chewiness did not show any significant difference. In color, L value decreased in proportion to concentration, and a and b values did not change. Sensory characteristics showed that the 1% group had the highest score and the 2% group had the lowest score. Thus, when the GHP Yanggaeng was prepared, in consideration of its sensory characteristics, and at appropriate concentration on below 1%.

• Journal of Life Science
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• v.32 no.8
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• pp.633-640
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• 2022

Recently, kenaf (Hibiscus cannabinus L.) has been highlighted due to its rapid growth in dry, infertile land and its versatile applications in textiles, paper, feed, food, medicine, and phyto-remediation. In Korea, a new cultivar, 'Jangdae', which has the merit of feasible seed-gathering, was established in 2013. However, most of the kenaf seeds used are still imported, and a comparison study of useful bio-activities between Jangdae and imported seeds has not been conducted. In this study, anti-thrombosis, antioxidant and anti-diabetic activities of the ethanol extracts of the Jangdae seed (E-JS) and 8 imported cultivar seeds (E-ICS) were investigated. The E-JS has 14.4 mg/g of total polyphenol and 5.3 mg/g of total flavonoids, whereas the E-ICS has 5.9~8.7 mg/g and 0.7~1.5 mg/g, respectively. Among the 9 kenaf seed extracts, IT 181215 and IT 207877 seed extracts showed 1.92 and 1.88-folds extended thrombin time (TT), and IT 207886 seed extracts showed 3.04-folds extended activated partial thromboplastin time (aPTT). All extracts, except Hong-ma seed, showed 1.36~1.56-folds extended prothrombin time (PT). The E-JS showed strong anti-thrombosis activities with 1.46-folds (TT), 1.38-folds (PT) and 2.37-folds (aPTT) compared to those of solvent controls. The E-JS has the strongest antioxidant activities among the seed extracts, with 0.48 mg/ml of RC₅₀ for ABTS cation and 0.27 mg/ml of RC₅₀ for nitrite scavenging. Meanwhile, the E-JS and IT 181215 extracts showed strong inhibition against α-glucosidase with 10.3~10.6% inhibition at 0.5 mg/ml. Our results suggest the E-JS has potential as an anti-thrombosis, antioxidant and anti-diabetic agent.

• Korean Journal of Poultry Science
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• v.49 no.4
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• pp.287-298
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• 2022

This study evaluated the efficacy of chlorine dioxide (ClO₂) as an oxidant to reduce malodor emission from chicken feces. Two experiments were performed with the following four treatments in parallel: 1) fresh chicken feces with only distilled water added as a control, 2) a commercial germicide as a positive control, and 3) 2,000 or 4) 3,000 ppm of ClO₂ supplementation. Aluminum gas bags containing chicken feces sealed with a silicone plug were used in both experiments, and each treatment was tested in triplicate. In Experiment 1, 10 mL of each additive was added on the first day of incubation, and malodor emissions were then assessed after 10 days of incubation. In Experiment 2, 1 mL of each additive was added daily during a 14-day incubation period. At the end of the incubation, gas production, malodor-causing substances (H₂S and NH₃ gases), dry matter, pH, volatile fatty acids (VFAs), and microbial enumeration were analyzed. Supplementing ClO₂ at 2,000 and 3,000 ppm significantly reduced the pH and the ammonia-N, total VFA, H₂S, and ammonia gas concentrations in chicken feces compared with the control feces (P<0.05). Additionally, microbial analysis indicated that the number of coliform bacteria was decrease after ClO₂ treatment (P<0.05). In conclusion, ClO₂ at 2,000 and 3,000 ppm was effective at reducing malodor emission from chicken feces. However, further studies are warranted to examine the effects of ClO₂ at various concentrations and the effects on malodor emission from a poultry farm.