• 제목/요약/키워드: Dry cleaning method

검색결과 90건 처리시간 0.019초

$UV/O_3$을 이용한 Si contact hole 건식세정에 관한 연구 (Dry Cleaning of Si Contact Hole using$UV/O_3$ Method)

  • 최진식;고용득;구경완;김성일;천희곤
    • E2M - 전기 전자와 첨단 소재
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    • 제10권1호
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    • pp.8-14
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    • 1997
  • The UV/O$_{3}$ dry cleaning has been well known in removing organic molecules. The UV/O$_{3}$ dry cleaning method was performed to clean the Si wafer surfaces and contact holes contaminated by organic molecules such as residual PR. During the cleaning process, the Si surfaces were analyzed with X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and ellipsometer. When the UV/O$_{3}$ dry cleaning at 200'C was performed for 3 minutes, the residual photoresist was almost removed on Si wafer surfaces, but Si surfaces were oxidized. For UV/O$_{3}$ application of contact hole cleaning, the contact string were formed using the equipment of ISRC (Inter-university Semiconductor Research Center). Before Al deposition, UV/O$_{3}$ (at 200.deg. C) dry cleaning was performed for 3 minutes. After metal annealing, the specific contact resistivity was measured. Because UV/O$_{3}$ dry cleaning removed organic contaminants in contact holes, the specific contact resistivity decreased. Each contact hole size was different, but the specific contact resistivities were all much the same. Thus, it is expected that the UV/O$_{3}$ dry cleaning method will be useful method of removal of the organic contaminants at smaller contact hole cleaning.

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의영 전의이씨 출토복식의 세척방법에 관한 연구 (A Study on the Cleaning Method of Excavated Textiles)

  • 박윤미;황은경;정복남
    • 복식문화연구
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    • 제11권6호
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    • pp.956-966
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    • 2003
  • The purpose of study is to find out a suitable cleaning method for excavated textiles of Jeon-ui Lee(1570∼1647). The textiles were excavated from her tomb in 1997, and her descendents put them in a box without any treatment and kept them in the warehouse since then. We used two kinds of silk as samples, non-dyed and dyed textile. The experiment was performed by 8 kinds of wet cleaning and dry cleaning methods, an ultrasonic cleaner was used in the wet cleaning, decane and perchloroethylene were used as solvents in the dry cleaning. The use of the ultrasonic cleaner in the wet cleaning method did not show any damage to the fibers of the textiles and it not only cleaned well but also was safe for the fugitive dyes. It resulted in more effective cleaning when the detergent was used together. Therefore, it is effective to use the ultrasonic cleaning on the delicate historical textiles and helpful to the operator's safety and environment.

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겨울 아우터웨어의 품질표시에 대한 소비자 태도와 관리 (Consumers' Attitude toward Care Label Instructions and Care of Winter Outerwear)

  • 한호정;정혜원
    • 한국의류학회지
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    • 제38권6호
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    • pp.942-952
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    • 2014
  • Winter outerwear includes various clothes such as classical jackets/coats, padded jackets/coats, wind breakers, leather and fur jackets/coats. This research surveyed care-label instructions attached to 100 jackets/coats dropped off at five drycleaners in the Gyungin area. University students' perception and attitudes towards care labels and management of winter outerwear were examined using a questionnaire. Data collected from 230 respondents were analyzed by frequency analyses, t-tests, ANOVAs and Duncan tests with PASW 20.0. Half of the padding jackets/coats were labelled to be dry cleaned and dry cleaning was more excessively labelled than necessary. University students confirmed more care symbols than fiber compositions such as more at time of cleaning than at purchasing. Clothing-related major students understood care label symbols better than non-clothing major students. Consumers laundered some winter outerwear at home, even though they thought dry cleaning was a proper cleaning method. The appropriate cleaning method for padded jackets/coats is laundering; however, consumers who answered dry cleaning as an appropriate method were three times as those who answered washing, and those performed dry cleaning were two times as those who performed washing. Winter outerwear manufacturers should provide adequate and more specified care-information to consumers in order to maintain initial appearance and performance over longer periods.

드라이클리닝 시 친수성 오구의 세탁성 향상을 위한 연구 (Detergency improvement of hydrophilic soils in dry cleaning process)

  • 곽수경;상정선;박명자
    • 한국의상디자인학회지
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    • 제21권4호
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    • pp.213-220
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    • 2019
  • The dry cleaning effect related to the type of soil and fiber was analyzed using silicone and alcohol-based solvents(ethyl alcohol, isopropyl alcohol, acetone) that are relatively safe for the human body and environment to improve the detergency of hydrophilic soils in dry cleaning system. Based on this analysis, an effective dry cleaning method to be carried out for improving the detergency according to the type of hydrophilic soils. After dry cleaning was performed using 20 types of artificial soiled fabrics consisting of 7 types of fibers and 4 types of hydrophilic soils, the detergency was measured and the results were compared and analyzed by solvents and fiber types. The results are presented as follows; first, the detergency of hydrophilic soils using silicone solvents showed a low rate of detergency. In particular, the tannin soil showed a lower level of detergency compared to the protein soil. Second, the detergency of hydrophilic soils using silicon solvents with dry soap differed in some detergency according to the soil and fiber types. Especially, the detergency of curry soil on cotton fabric showed significant improvement. Third, the protein soil was not removed from dry cleaning using alcohol-based solvents, but the effect of dry cleaning of curry soil on both cotton and polyester fabric was substantially improved. As a result, the elimination of blood soil is more effective in silicon solvents than in alcohol-based solvents. The removal of tannin soils may improve detergency by adding dry soap to silicon solvents or by using alcohol-based solvents as alternative solvents. The use of alternative solvents such as silicon and alcohol solvents can contribute to the environmental improvement of the dry cleaning industry, which uses petroleum-based solvents. It is also expected to provide consumers with the opportunity to choose eco-friendly and efficient dry cleaning methods.

오염 입자 상태에 따른 레이저 충격파 클리닝 특성 고찰 (Investingation of Laser Shock Wave Cleaning with Different Particle Condition)

  • 강영재;이종명;이상호;박진구;김태훈
    • 한국레이저가공학회지
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    • 제6권3호
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    • pp.29-35
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    • 2003
  • In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97% while the efficiencies of wet alumina particle in DI water and IPA are 35% and 55% respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

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드리아 클리닝 용제에 대한 염료의 용해성 (A Study on Dyes Solubility of Dry cleaning Solvents)

  • Cha, Ok-Sun;Shin, Jung-Sook
    • 한국염색가공학회지
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    • 제2권3호
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    • pp.43-50
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    • 1990
  • The purpose of this paper is to investigate the dyes solubility of dry cleaning solvents among the current domestic products. The dyes were experimented in following way; 1) The flow rate of dyes by paper chromatography method. 2) The color difference & the absorbance of solvents between the dyed fabrics before and after dry cleaning. From the experiment, following results were obtained. 1. In paper chromatography methods, the flow rate of dyes in the disperse dyes was bigger while flow was not shown in the direct dyes & acid dyes. 2. The more the number of times on dry cleaning in dyed fabrics was, the higher the absorbance of solvents was shown. The results were showed following order, PerchloroethyleneHydrocarbon> Fluorocabon. 3. The color difference between before & after dry cleaning on dyed fabrics showed bigger in disperse dyes.

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활선 현수애자련 자동 청소 및 점검용 로봇시스템의 개발과 적용 (Development of Robot System for Automatic Cleaning and Inspection of Live-line Suspension Insulator Strings and Its Application)

  • 박준영;조병학;변승현;이재경
    • 한국정밀공학회지
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    • 제24권11호
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    • pp.66-75
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    • 2007
  • To prevent an insulator failure, an automatic cleaning and inspection robot was developed for suspension insulator strings. The robot autonomously moves along the insulator string using the clamps installed on its two moving frames. Especially, unlike the existing cleaning robots using jets of water, the robot system adopts a dry cleaning method using rotating brushes and a circular motion guide. In addition, a mechanized brush bristles and a voltage-balancing contactor are devised to increase cleaning efficiency and to prevent arc generation under live-line conditions, respectively. We confirmed its effectiveness through experiments.

정충신 장군 갑옷과 위산 이휴정 소장 봉황문단 직영포에 실시한 보존처리연구 (A study for the Conservation about the Armor of General Jung, Choong Sin and the Chinese Phoenix-Patterned Military uniform in $IHYUJ\breve{O}NG$)

  • 배상경
    • 보존과학회지
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    • 제3권1호
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    • pp.23-30
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    • 1994
  • This thesis researched for the conservation of a suit of armor that General Jung, Choong Sin had been worn in the 17th century, and of military uniform that was in perfect condition even though it had been underground for over 300years since 1676. As the armor was made with silk and cotton, it was treated by the dry cleaning method and the mild charge system. In the dry cleaning method, the used solvents were n-hexane and n-decane. And the percentage of the dry soap was 2 in the mild charge system. As the military uniform was made with only silk, it was treated by the dry cleaning method through the solvent of n-hexane and n-decane. Armor was repaired by scoured hemp partially, but military uniform became too deteriorated seriously to repair.

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초임계 이산화탄소를 이용한 초순수 건식 세정기술 (Ultra Dry-Cleaning Technology Using Supercritical Carbon Dioxide)

  • 정승남;김선영;유기풍
    • 청정기술
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    • 제7권1호
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    • pp.13-25
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    • 2001
  • 정밀 기계산업과 반도체 산업의 진보와 더불어 대상물의 초순도 세정이 하이테크 산업발전에 가장 중요한 핵심기술로 부각되고 있다. 현재 초순수 세정은 크게 습식세정과 건식세정으로 분류하고 있다. 습식세정의 경우 오랜 경험과 높은 세정효율을 보이고 있지만, 다량의 탈이온수에 과산화수소, 황산, 불산 또는 수산화 암모늄 등의 독성첨가제를 반복적으로 사용하고 있어 독성 폐수발생등 심각한 환경오염을 유발하고 있다. 따라서, 최근에는 습식 세정에 따른 환경오염의 문제를 개선하기 위한 노력으로 몇 가지 건식 세정기술이 개발되고 있다. 최근 들어 건식세정 방법 중에 소위 초임계상태의 환경 용매를 사용하는 기술이 개발되고 있으며, 높은 세정효율과 더불어 환경친화성이 높은 유망한 기술로 받아들여지고 있어 국제적인 관심이 집중되고 있다. 이 논문에서는 초임계 이산화탄소 세정에 관심을 두어, 초임계 용매의 물리화학적 특성과 환경친화측면, 세정공정의 엔지니어링, 그리고 국내외 기술 현황을 종합적으로 분석 평가하였다.

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의류용 크롬유혁의 가공처리에 따른 항미생물효과 및 특성변화에 관한 연구 -드라이클리닝에 의한 변화를 중심으로- (A Study on the Antibacteria Effect and the Properties Change by Treatment of Chrome-Tanned Garment Leathers. -On the Changes by Dry Cleaning-)

  • Cho, Seung-Shick;Sim, Mi-Sook;Kim, Un-Bae
    • 한국염색가공학회지
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    • 제3권2호
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    • pp.10-15
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    • 1991
  • This study was to examine the anti-bacteria effect and the changes of chemical properties of chrome-tanned garment leathers on the preservative treatment. Various test methods, such as investigation of preservative treatment process, resistance test and chemical analysis by cleaning, antbbacterial test by shake flask method are carried out in this study. The results can be obtained as follows: 1. Bacterial reduction percentage of chrome-tanned garment leathers on the preservative treatment was 28.6%. 2. In the antbbacterial effect by dry cleaning, preservative treated leathers has no resistance. 3. Fats content has been removed by dry cleaning using perchloroethylene, so garment leathers properties were altered. 4. PH value was changed by dry cleaning. But once after fats removing, it was changed the little by dry cleaning numbers.

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