• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.247-251
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• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• Journal of the Korean Society of Clothing and Textiles
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• v.32 no.6
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• pp.882-889
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• 2008

Three fabrics, 100% silk, nylon and cotton each, were dyed with a lichen dye solution prepared by a fermentation method under conditions of varying dyebath pH and temperature. To verify the effect of chitosan on fabric dyeing, the 100% cotton fabric was treated with a chitosan solution before dyeing. The K/S, CIE $L^*$, $a^*$, $b^*$, ${\Delta}E$ and Munsell values of the dyed samples were measured. Colorfastness of each sample was also investigated. The maximum K/S value was measured at 520nm wavelength for the dyed silk fabric and at 480nm for the dyed cotton and nylon. The K/S values for the dyed silk fabric were much greater than those of the other fabrics. The dyed silk fabric showed a red tone on the Munsell color system, and the dyed nylon and cotton fabrics a yellowish red tone. Dye affinity to fabrics was better in a neutral or acidic dyebath. As dyeing temperature increased, K/S values increased for the dyed nylon and cotton fabrics but not for the silk. Dyeability of cotton fabrics could improve by Chitosan treatment. As for most natural dyes, colorfastness of all dyed samples was poor. The silk fabric showed an excellent dry cleaning fastness of Grade 5.

• Korean Journal of Heritage: History & Science
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• v.53 no.2
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• pp.222-241
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• 2020

The Taereung Royal Tomb from the Joseon Dynasty is the tomb of Empress Munjeong, the second queen of King Jungjong, and it contains various types of stone artifacts. All of these stone artifacts were constructed using coarse- to medium-grained biotite granite. The major types of deterioration of the stone artifacts are identified as surface weathering and biological contaminants. Exfoliation (145 sculptures), granular decomposition (138 sculptures), and repair materials (156 sculptures), along with biological contaminant algae (154 sculptures), lichen (165 sculptures) and moss (97 sculptures), have a high occurrence frequency. In particular, it is deemed that immediate conservation treatment is required, as biological deterioration (algae) represents the most serious condition (grade 3 or higher in 94% of all stones), and it is thought that exfoliation and granulation decomposition are required for long-term conservation management. As a result of equo -tip hardness and ultrasonic measurement, more than 70% of stones were found to have very weak physical properties. Through hyperspectral analysis, organisms were shown to inhabit more than 80% of the surface of burial mound stone artifacts, and P (phosphorus), S (sulfur), Cl (chlorine), and Ca (calcium) were detected in this area. This is because Taereung Royal Tomb has been exposed to the outdoors for hundreds of years and has been weathered by physical, chemical, and biological factors. Therefore, among the stone artifacts in the Taereung Royal Tomb, those with high physical weathering grades are considered to require consolidation to reinforce them physically. Since organisms are highly likely to cause stone damage, they must be removed via dry and wet cleaning. In addition, in order to delay the reoccurrence of organisms following conservation treatment, it is necessary to regularly clean up the soil that has flowed into the burial mound, and to monitor conservation conditions over the long term.

• Korean Journal of Soil Science and Fertilizer
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• v.36 no.5
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• pp.323-332
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• 2003

This study was carried out to provide information for the present status of soil pollution near abandoned old-zinc mining area through analysis of bound form and 0.1 N-HCl extractable concentrations of heavy metals in soils and plants. Feasibility of endemic plants for phytoremediation was evaluated by the investigation of vegetation in soils. Cd contents of the selected samples near old-zinc mining soils ranged from 0.2 to $42mg\;kg^{-1}$. Nonagricultural soils near the mining area contained great amounts of Zn, Pb, Cd, and Cu than the paddy and upland soils. Some Korean wild plants, Artemisia princeps, Artemisia montana, Erigeron canadensis, and Pueraria thunbergiana, were found to grow vigorously in the studied area. Among them, Artemisia princeps was selected as a possible phytoremediator for cleaning heavy metal contaminated soils. Artemisia princeps contained about 43 and $52mg\;kg^{-1}$ of Cd in their root and shoot as dry weight, respectively. Average contents of Cd in the rhizosphere soil, $15.68mg\;kg^{-1}$, was slightly higher than the soil-root interface soils, $14.1mg\;kg^{-1}$. Sequential extraction of Cd contaminated soils showed that average $2.4mg\;kg^{-1}$ (about 7%) of cadmium existed as exchangeable form and the average amounts increased as follows : adsorbed < organically bound < exchangeable << oxide carbonate << sulfide residual fractions. Amendment of organic by-product fertilizer in metal-contaminated soils promoted the growth of roots significantly as compared with the other treatments containing chemical fertilizer.