• Title/Summary/Keyword: Droplet diameter

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CFD simulation of cleaning nanometer-sized particulate contaminants using high-speed injection of micron droplets (초고속 미세 액적 충돌을 이용한 나노미터 크기 입자상 오염물질의 세정에 대한 CFD 시뮬레이션)

  • Jinhyo, Park;Jeonggeon, Kim;Seungwook, Lee;Donggeun, Lee
    • Particle and aerosol research
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    • v.18 no.4
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    • pp.129-136
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    • 2022
  • The line width of circuits in semiconductor devices continues to decrease down to a few nanometers. Since nanoparticles attached to the patterned wafer surface may cause malfunction of the devices, it is crucial to remove the contaminant nanoparticles. Physical cleaning that utilizes momentum of liquid for detaching solid nanoparticles has recently been tested in place of the conventional chemical method. Dropwise impaction has been employed to increase the removal efficiency with expectation of more efficient momentum exchange. To date, most of relevant studies have been focused on drop spreading behavior on a horizontal surface in terms of maximum spreading diameters and average spreading velocity of drop. More important is the local liquid velocity at the position of nanoparticle, very near the surface, rather than the vertical average value. In addition, there are very scarce existing studies dealing with microdroplet impaction that may be desirable for minimizing pattern demage of the wafer. In this study, we investigated the local velocity distribution in spreading liquid film under various impaction conditions through the CFD simulation. Combining the numerical results with the particle removal model, we estimated an effective cleaning diameter (ECD), which is a measure of the particle removal capacity of a single drop, and presented the predicted ECD data as a function of droplet's velocity and diameter particularly when the droplets are microns in diameter.

The Numerical Study on Effect of the Droplet Sizes on Internal Mass Transfer in the Spray Type Scrubber (분무형 스크러버에 내에서 액적크기에 따른 물질전달에 관한 전산해석적 연구)

  • Lee, Chanhyun;Chang, Hyuksang
    • Clean Technology
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    • v.25 no.1
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    • pp.19-32
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    • 2019
  • As regional air pollution gets worse by the sulfur oxides emitted from various types of vessels passing through the many countries, the International Maritime Organization establishes the emission control areas and regulates sulfur dioxide in those areas. In order to satisfy these regional regulations, the fuel selection method and the exhaust gas post-treatment device are applied to the ships. Due to the economic reasons, the post-treatment method of exhaust gas for reducing the amount of sulfur oxides discharged is mainly preferred. The scrubber which is dominantly used in the ships are the spray type system where the sprayed liquid drops used for capturing the soluble sulfur dioxides in the exhaust gas. The performance of the spray type system depends on the size distribution of the sprayed droplets. In order to evaluate this performance, we designed counterflow type scrubber and cyclone scrubber and evaluated the desulfurization efficiency and the amount of droplet evaporation according to the size of each droplet by using computational fluid dynamics. The Eulerian-Eulerian analysis method was used because the scrubber had a gas-liquid two-phase flow inside the scrubber. When the diameter of the droplet was $100{\mu}m$, $300{\mu}m$, $500{\mu}m$ and $700{\mu}m$. As a result, both of scrubbers showed high desulfurization efficiency and low evaporation amount at $500{\mu}m$ and $700{\mu}m$.

Spray Characteristics of Biodiesel Fuel by Blending Bioethanol and Diesel Fuel in a Common Rail Injection System (커먼레일 분사시스템에서 바이오에탄올 및 디젤연료 혼합 바이오디젤의 분무 특성)

  • Park, Su-Han;Suh, Hyun-Kyu;Kim, Hyung-Jun;Lee, Chang-Sik
    • Transactions of the Korean Society of Automotive Engineers
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    • v.17 no.2
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    • pp.82-89
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    • 2009
  • In order to investigate the spray characteristics according to diesel and bioethanol blending with biodiesel fuel, macroscopic spray characteristics were analyzed from the comparison of the effect of the injection pressure, ambient pressure and density on the spray tip penetration and spray cone angle. In addition, spray atomization characteristics were studied with local and overall Sauter mean diameter (SMD) and the contour map of SMD distribution at various injection conditions. It was revealed that the spray tip penetration of biodiesel fuels blended with diesel and ethanol was shorter than that of an undiluted biodiesel fuel at low injection pressure. However, the difference of spray tip penetration among three test fuels reduces at a high injection pressure. Increase of the ambient gas density leads to the decrease of the spray tip penetration of three test fuels. When diesel and ethanol fuels add to an undiluted biodiesel fuel, spray cone angle increases due to the decrease of the fuel density at the same ambient pressure condition. On the other hand, the droplet mean diameter decreases due to the reduction of the kinematic viscosity and surface tension.

Numerical Analysis of the Effects of Droplets Characteristics of Water Spray on Fire Suppression (물 분무 액적 특성이 화재진압에 미치는 영향에 대한 수치해석)

  • Lee, Jaiho
    • Fire Science and Engineering
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    • v.33 no.6
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    • pp.1-8
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    • 2019
  • In this study, the effects of the characteristics of droplets of water spray on suppression of fire were analyzed numerically using fire dynamics simulator (FDS) 6.5.2. Additionally, the fire suppression characteristics by the water spray nozzle, including the extinguishing coefficient (EC), droplet size distribution function (SDF), median volumetric diameter (MVD), and droplets per second (DPS), were evaluated in terms of the decreasing normalized heat release rate (HRR) curve and cooling time. It was observed that with increase in the EC, the normalized HRR curve decreased rapidly, and the changing MVD affected the suppression of fire. In case of mono-disperse, the normalized HRR curve decreased slowly with the increase in DPS. On the contrary, in case of multi-disperse, the normalized HRR curve decreased rapidly even with a small increase in DPS.

The Characteristics of Swirl Spray Combustion in Gas Turbine Combustor (가스터빈 연소기내의 선회분무연소 특성)

  • Hong, Jeong-Gu;Kim, Hyeok-Ju
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.20 no.8
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    • pp.2721-2730
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    • 1996
  • The present study conducted experimental study of spray combustion to investigate the effect of the inlet conditions of fuel and air on the flame structure, the flame stability and the characteristics of emission in the can-type model of a gas turbine combustor. In the experiment, the diameter of fuel droplet was measured using Malvern particle size analyser and temperatures in the combustion chamber were measured with R-type shielded thermocouple. In addition, flame structure was taken picture with camera and analysed. Gas analyser was also used to analyse the concentration of each components of exhausting gas. The experimental results showed that the flame condition was optimal with swirl number, 0.63 and equivalence ratio, 0.5 for controlling the flame stability, the combustion temperature and the NOx concentration. The present study concluded that both the flame structure and the emission formation were strongly affected by the swirl intensity, which selection was found as an important parameter for either stabilizing flame or lowering the quantity of NOx.

A Study on the Spray Atomization Characteristics of a Multi-Hole Diesel Nozzle using PDPA System (PDPA계측에 의한 다공 디젤 노즐의 분무 미립화 특성에 관한 연구)

  • Lee, J.K.;Oh, J.H.;Kang, S.J.;Rho, B.J.
    • Journal of ILASS-Korea
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    • v.4 no.1
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    • pp.45-54
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    • 1999
  • The spray characteristics of a direct injection multi-hole diesel nozzle having the 2-spring nozzle holder were investigated by using the image processing system and a PDPA(phase Bowler particle analyzer) system. The spray tip penetration, the spray angle, and the droplet diameter and velocity with the variation of the pump speed, injection quantity were measured. From, the experiments, we know that there are small droplets which are not to be detected with spray image around the leading edge of the spray. In order to represent the mean characteristics of the intermittent spray very well, it is very important to set the time windows accurately. From the measurements along the axis of the spray, close to the nozzle, the initially injected droplets are overtaken by droplets that follow them. And also there are the maximum axial mean velocity and SMD at the following part of the leading edge of the spray.

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Stochastic Model Comparison for the Breakup and Atomization of a Liquid Jet using LES (LES 해석에서 액체제트의 분열에 대한 확률론적 분열 모델링 비교)

  • Yoo, YoungLin;Sung, Hong-Gye
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.45 no.6
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    • pp.447-454
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    • 2017
  • A three-dimensional two-phase large eddy simulation(LES) has been conducted to investigate the breakup and atomization of liquid jets such as a diesel jet in parallel flow and water jet in cross flow. Gas-liquid two-phase flow was solved by a combined model of Eulerian for gas flow and Lagrangian for a liquid jet. Two stochastic breakup models were implemented to simulate the liquid column and droplet breakup process. The penetration depth and SMD(Sauter Mean Diameter) were analyzed, which was comparable with the experimental data.

A Study of Spray Characteristics for the Shape of Nozzle by Phase Doppler Analyzer (PDPA를 이용한 노즐의 형상에 따른 분무 특성의 연구)

  • Hwang, S. S.;Lee, H. S.;Kim, J.;Lee, B. G.;Kim, J. C.;Chun, U. H.
    • Transactions of the Korean Society of Automotive Engineers
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    • v.6 no.5
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    • pp.199-210
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    • 1998
  • The skill that utilizes atomization of the liquid has been widely used in the field of industry and engineering. Though there are dozens of methods to make atomization, the pressure type injection nozzle is frequently used in washing of parts, pastourization and painting because it has relatively simple system. This study is to reveal the characteristics of atomizing formed by three different types of the pressure type injection nozzle. We measured velocity and diameter of droplet to compare and analyze characteristic of each nozzle. In case of velocity, atomization of hollow-cone nozzle is irregular than others and change of radial direction is especially large. Atomization of flat nozzle is nearly uniform. In case of diameter, atomization of hollow-cone nozzle is increased rapidly, as measurement point become more distant from the center of nozzle. Atomization of flat nozzle has the most fixed magnitude. Accordingly, full-cone nozzle can be used irrespective of the form of subject and hollow-cone nozzle is proper to the occasion to spray large and smooth subject. Also, flat nozzle is proper to the occasion to spray a part of subject and long groove.

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A Study on the Distribution of Cylindrical Disk Spray by a Impinging Disk (충돌판에 의한 원판형 분무의 공간분포에 관한 실험적 연구)

  • 차건종;김덕줄
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.1
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    • pp.251-262
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    • 1995
  • The goal of this study is to provide fundamental information on the design of a new diesel injector system. The cylindrical disk spray was made by an impinging disk insited below the exit of air-assist atomizor. The disintegration processes on a twin-fluid atomization by air-assist atomizor were investigated. Liquid jet was disintegrated at the condition that wavelength was equal and longer than the circumference of the liquid jet, .lambda. .geq. .pi.do. However, the wavelength and the diameter of the liquid jet were decreased according to the increasing of air velocity. The relative density distribution of droplets and pattern of spray by impinging disk were investigated with a C-CCD. Optimum design conditions for cylindrical disk spray were also achieved. The pattern of cylindrical spray can classified according to the size of the disk and the distance from the nozzle tip to the disk. When the space of the disk and the nozzle tip was narrow and the diameter of the disk was larger than that of the air orifice of the nozzle exit, the good distribution of spray could be achieved. When the air flowrate was constant, the spray width was decreased according to the increasing of the liquid flowrate. When the liquid flowrate was constant, the spray width was decreased according to the increasing of the air flowrate.

Calculation of Two-Phase Turbulent Jet with a Two-Equation Model (2-方程式 모델 에 의한 二相亂流 제트流動 의 數値解析)

  • 양선규;최영돈
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.9 no.6
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    • pp.714-724
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    • 1985
  • Two-phase(air-solid, air-liquid droplet) turbulent round jet has been analyzed numerically using two equation turbulence model. The mean motion of suspending particles in air has been treated as the secondary fluid with virtual density and eddy viscosity. In this paper, the local mean velocity of secondary fluid is not assumed to be the same as that of the primary one. Dissipation rate of turbulent kinetic energy which arises because the particles can not catch up with the turbulent fluctuations of the primary fluid has been modelled by using the concept of Kolmogorov's spectral energy transfer. Numerical computations were performed for flows with different volume fraction of the dispersed phase and the diameter of particle. Results show that the total rate of turbulent energy dissipation, turbulent intensities and spreading rate of jets are reduced by the increase of volume fraction of dispersed phase. However it does not show consistent tendency with increasing the particle diameter. This investigation also shows that presence of particles in the fluid modifies the structure of the primary fluid flow significantly. Predicted velocity profiles and turbulence properties qualitatively agree with available data.