• Title/Summary/Keyword: Double chamber

Search Result 134, Processing Time 0.029 seconds

Effects of Substrate Cleaning on the Properties of GaAs Epilayers Grown on Si(100) Substrate by Molecular Beam Epitaxy (분자선에피택시에 의해 Si (100) 기판 위에 성장한 GaAs 에피층의 특성에 대한 기판 세척효과)

  • Cho, Min-Young;Kim, Min-Su;Leem, Jae-Young
    • Journal of the Korean Vacuum Society
    • /
    • v.19 no.5
    • /
    • pp.371-376
    • /
    • 2010
  • The GaAs epitaxial layers were grown on Si(100) substrates by molecular beam epitaxy (MBE) using the two-step method. The Si(100) substrates were cleaned with three different surface cleaning methods of vacuum heating, As-beam exposure, and Ga-beam deposition at the substrate temperature of $800^{\circ}C$ in the MBE growth chamber. Growth temperature and thickness of the GaAs epitaxial layer were $800^{\circ}C$ and $1{\mu}m$, respectively. The surface structure and properties were investigated by reflection high-energy electron diffraction (RHEED), AFM (Atomic force microscope), DXRD (Double crystal x-ray diffraction), PL (Photoluminescence), and PR (Photoreflectance). From RHEED, the surface structure of GaAs epitaxial layer grown on Si(100) substrate with Ga-beam deposition is ($2{\times}4$). The GaAs epitaxial layer grown on Si(100) substrate with Ga-beam deposition has a high quality.

Study on the Scan Field of Modified Octupole and Quadrupole Deflector in a Microcolumn (마이크로칼럼에서 변형된 4중극 디플렉터와 8중극 디플렉터의 스캔 영역 비교)

  • Kim, Young Chul;Kim, Ho-Seob;Ahn, Seong Joon;Oh, Tae-Sik;Kim, Dae-Wook
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.19 no.11
    • /
    • pp.1-7
    • /
    • 2018
  • In a microcolumn, a miniaturized electrostatic deflector is often adopted to scan an electron beam. Usually, a double octupole deflector is used because it can avoid excessive spherical aberrations by controlling the electron beam path close to the optical axis of the objective lens and has a wide scan field. Studies on microcolumns have been performed to improve the low throughput of an electron column through multiple column applications. On the other hand, as the number of microcolumns increases, the number of wires connected to the components of the microcolumn increases. This will result in practical problems during the process of connecting the wires to electronic controllers outside of the vacuum chamber. To reduce this problem, modified quadrupole and octupole deflectors were examined through simulation analysis by selecting an ultraminiaturized microcolumn with the Einzel lens eliminated. The modified deflectors were designed changing the size of each electrode of the conventional Si octupole deflector. The variations of the scan field and electric field strength were studied by changing the size of active electrodes to which the deflection voltage was to be applied. The scan field increased linearly with increasing deflection voltage. The scan field of the quadrupole deflector and the electric field strength at the center were calculated to be approximately 1.3 ~ 2.0 times larger than those of the octupole deflector depending on the electrode size.

Contact block copolymer technique을 이용한 실리콘 나노-필라 구조체 제작방법

  • Kim, Du-San;Kim, Hwa-Seong;Park, Jin-U;Yun, Deok-Hyeon;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.189-189
    • /
    • 2015
  • Plasmonics, sensor, field effect transistors, solar cells 등 다양한 적용분야를 가지는 실리콘 구조체는 제작공정에 의해 전기적 및 광학적 특성이 달라지기 때문에 적합한 나노구조 제작방법이 요구되고 있다. 나노구조체 제작방법으로는 Photo lithography, Extreme ultraviolet lithography (EUV), Nano imprinting lithography (NIL), Block copolymer (BCP) 방식의 방법들이 연구되고 있으며, 특히 BCP는 direct self-assembly 특성을 가지고 있으며 가격적인 면에서도 큰 장점을 가진다. 하지만 BCP를 mask로 사용하여 식각공정을 진행할 경우 BCP가 버티지 못하고 변형되어 mask로서의 역할을 하지 못한다. 이러한 문제를 해결하기 위하여 본 논문에서는 BCP와 질화막을 이용한 double mask 방법을 사용하였다. 기판 위에 BCP를 self-assembly 시키고 mask로 사용하여 hole 부분으로 노출된 기판을 Ion gun을 통해 질화 시킨 후에 BCP를 제거한다. 기판 위에 hole 모양의 질화막 표면은 BCP와 다르게 etching 공정 중 변형되지 않는다. 이러한 질화막 표면을 mask로 사용하여 pillar pattern의 실리콘 나노구조체를 제작하였다. 질화막 mask로 사용되는 template은 PS와 PMMA로 구성된 BCP를 사용하였다. 140kg/mol의 polystyrene과 65kg/mol의 PMMA를 톨루엔으로 용해시키고 실리콘 표면 위에 spin coating으로 도포하였다. Spin coat 후 230도에서 40시간 동안 열처리를 진행하여 40nm의 직경을 가진 PS-b-PMMA self-assembled hole morphology를 형성하였다. 질화막 형성 및 etching을 위한 장비로 low-energy Ion beam system을 사용하였다. Reactive Ion beam은 ICP와 3-grid system으로 구성된 Ion gun으로부터 형성된다. Ion gun에 13.56 MHz의 frequency를 갖는 200W 전력을 인가하였다. Plasma로부터 나오는 Ion은 $2{\Phi}$의 직경의 hole을 가지는 3-grid hole로 추출된다. 10~70 voltage 범위의 전위를 plasma source 바로 아래의 1st gird에 인가하고, 플럭스 조절을 위해 -150V의 전위를 2nd grid에 인가한다. 그리고 3rd grid는 접지를 시켰다. chamber내의 질화 및 식각가스 공급은 2mTorr로 유지시켰다. 그리고 기판의 온도는 냉각칠러를 이용하여 -20도로 냉각을 진행하였다. 이와 같은 공정 결과로 100 nm 이상의 높이를 갖는 40 nm직경의 균일한 Silicon pillar pattern을 형성 할 수 있었다.

  • PDF

Rice Seedling Establishment for Machine Transplanting II. Effects of Sprouting and Seed Bed Temperature on the Seedling Characteristics (수도 기계이앙 육묘에 관한 연구 II보. 간역출아방법 및 육묘상내 온도가 묘소질에 미치는 영향)

  • Yong-Dea Yun;Hyun-Ok Choi;Jong-Hoon Lee
    • KOREAN JOURNAL OF CROP SCIENCE
    • /
    • v.22 no.2
    • /
    • pp.32-36
    • /
    • 1977
  • Experiments were conducted to know the effects of seed bed temperatures on the sprouting of seeds and seedling growth in the phytotron and field. Sprouting of seeds were most uniform when seed bed was stored under the straw and vinyl mulching for 48 hours after seed bed temperature increased up to 3$0^{\circ}C$ by the sun. In the phytotron, optimum temperature was 32$^{\circ}C$ for sprouting and day/night temperature of 25/30 and 20/15$^{\circ}C$ for greening and hardening of seedlings, respectively. In the field, the best results were obtained under the conditions of sprouting in the seedling chamber heated by electricity and greening the hardening under the double vinyl tunnel in the upland nusery bed.

  • PDF

Effect of Injector Number on Combustion Characteristics of Full-scale Gas Generators (분사기 수에 따른 실물형 가스발생기 연소특성)

  • Ahn, Kyu-Bok;Seo, Seong-Hyeon;Lim, Byoung-Jik;Kim, Jong-Gyu;Lee, Kwang-Jin;Han, Yeoung-Min;Choi, Hwan-Seok
    • Aerospace Engineering and Technology
    • /
    • v.6 no.1
    • /
    • pp.128-135
    • /
    • 2007
  • Combustion characteristics of full-scale gas generators were studied experimentally by changing the injector number installed at the injector head. Three full-scale gas generators were utilized; they have same total mass flow rate but mass flow rates per injector are different. Thirteen, nineteen and thirty seven injectors, which have internal-mixing and double-swirl characteristics, are distributed in injector heads, respectively. The results showed that pressure fluctuations in the gas generators with 13 and 19 injectors didn't occur around longitudinal resonant frequency, however longitudinal-mode pressure fluctuation appeared slightly in the gas generator with 37 injectors. As the number of injectors increased, deviations of temperature distribution in the combustion chamber decreased gradually, but the damage of injector LOx posts became a little severe.

  • PDF

Optimization and Molecular Characterization of Exoelectrogenic Isolates for Enhanced Microbial Fuel Cell Performance

  • Nwagu, Kingsley Ekene;Ekpo, Imo A.;Ekaluo, Benjamin Utip;Ubi, Godwin Michael;Elemba, Munachimso Odinakachi;Victor, Uzoh Chukwuma
    • Microbiology and Biotechnology Letters
    • /
    • v.47 no.4
    • /
    • pp.621-629
    • /
    • 2019
  • In this study we attempted to screen bacteria and fungi that generate electricity while treating wastewater using optimized double-chamber microbial fuel cell (MFC) system parameters. Optimization was carried out for five best exoelectrogenic isolates (two bacteria and three fungi) at pH values of 6.0, 7.5, 8.5, and 9.5, and temperatures of 30, 35, 40, and 45℃; the generated power densities were measured using a digital multimeter (DT9205A). The isolates were identified using molecular characterization, followed by the phylogenetic analysis of isolates with known exoelectrogenic microorganisms. The bacterium, Proteus species, N6 (KX548358.1) and fungus, Candida parapsilosis, S10 (KX548360) produced the highest power densities of 1.59 and 1.55 W/m2 (at a pH of 8.5 and temperatures of 35 and 40℃) within 24 h, respectively. Other fungi-Clavispora lusitaniae, S9 (KX548359.1) at 40℃, Clavispora lusitaniae, S14 (KX548361.1) at 35℃-and bacterium-Providencia species, N4 (KX548357.1) at 40℃-produced power densities of 1.51, 1.46, and 1.44 W/m2, respectively within 24 h. The MFCs achieved higher power densities at a pH of 8.5, temperature of 40℃ within 24 h. The bacterial isolates have a close evolutionary relationship with other known exoelectrogenic microorganisms. These findings helped us determine the optimal pH, temperature, evolutionary relationship, and exoelectrogenic fungal species other than bacteria that enhance MFC performance.

Effects of Pine Silage Feeding on Ruminal Fermentation Characteristics, and Blood Concentrations of Stress-Related Hormones in HANWOO Steers (잣나무 생지엽(生枝葉) 사일리지 급여가 거세한우의 반추위 발효성상 및 스트레스 관련 Hormone의 혈 중 농도에 미치는 영향)

  • Lee, S.C.;Jung, C.S.;Oh, Y.K.;Kim, K.H.;Cho, S.B.;Kim, T.G.;Lee, S.S.;Moon, Yea-Hwang
    • Journal of Animal Science and Technology
    • /
    • v.47 no.2
    • /
    • pp.253-260
    • /
    • 2005
  • This study was conducted to utilize the wastes produced from thinning the forest as a roughage source for ruminants. Four ruminally cannulated Korean steers were used to investigate the ruminal fermentation characteristics and blood concentrations of stress-related hormones. Treatments were composed of the rice straw only (Control) and the 30% pine silage plus 70% rice straw(Pine silage) as roughages. The experiment was conducted with four replicates by a double tum over design. For sampling of blood under high temperature steers were accommodated in respiratory chamber. Concentrations of ruminal pH, volatile fatty acids and ammonia were not affected by substitution of pine silage. Mean concentration of blood thyroxine was significantly(P < 0.01) lower in the pine silage than the control. However, blood cortisol concentration was not affected by substitution of pine silage, even though it was significantly(P < 0.05) decreased after exposure for 6 hrs in high temperature. It was concluded that the pine silage using the wastes produced from thinning the forest could be use as a substitute roughage for reduction of heat stress in ruminant.

Fabrication and Application of Micro Polymer Chip Platform for Rare Cell Sample Preparation (희귀 세포 샘플 준비를 위한 마이크로 폴리머 칩 플랫폼 제작 및 활용)

  • Park, Taehyun
    • Journal of the Korea Convergence Society
    • /
    • v.9 no.3
    • /
    • pp.217-222
    • /
    • 2018
  • In this paper, a new micro polymer chip platform and protocol were developed for rare cell sample preparation. The proposed platform and protocol overcome the current limitation of the dilution method which is based on statistics and the FACS method which expensive and requires fluorescence staining. It allows collecting exact number of target cells simply and selectively because the cells are visually confirmed during the collecting process. The collected cells can be transported or spiked into a desired locations, such as a microchamber, without cell loss. This research may applicable not only to a rare cell sample preparation for Lab on a Chip cancer diagnosis, but also to a single/double/multiple cell sample preparation for a cell analysis field. To verify this platform and protocol, five human breast cancer cells (MCF-7) were collected and transported into a hemocytometer chamber.

Effect of pre-operative medication with paracetamol and ketorolac on the success of inferior alveolar nerve block in patients with symptomatic irreversible pulpitis: a double-blind randomized clinical trial

  • Kumar, Umesh;Rajput, Akhil;Rani, Nidhi;Parmar, Pragnesh;Kaur, Amandeep;Aggarwal, Vivek
    • Journal of Dental Anesthesia and Pain Medicine
    • /
    • v.21 no.5
    • /
    • pp.441-449
    • /
    • 2021
  • Background: The efficacy of local anesthesia decreases in patients with symptomatic irreversible pulpitis. Therefore, it was proposed that the use of premedication with an anti-inflammatory drug might increase the success rate of pulpal anesthesia in mandibular posterior teeth with vital inflamed pulp. Methods: One hundred thirty-four patients who were actively experiencing pain willingly participated in this study. The Heft Parker (HP) visual analog scale (VAS) was used to record the initial pain intensity. Patients were randomly allocated to receive a placebo, 10 mg of ketorolac, and 650 mg of paracetamol. The standard inferior alveolar nerve block (IANB) was administered to all patients using 2% lidocaine with 1:200,000 adrenaline after one hour of medication. After 15 min, the patient was instructed to rate the discomfort during each step of the treatment procedure, such as access to remaining dentin, access to the pulp chamber, and during canal instrumentation on the HP VAS. IANB was considered successful if the patient reported no or mild pain during access preparation and instrumentation. Moderate or severe pain was classified as a failure of IANB and another method of anesthesia was used before continuing the treatment. Results: The rate of successful anesthesia in the placebo, paracetamol, and ketorolac groups was 29%, 33%, and 43%, respectively, and no statistically significant difference was found between the groups. Conclusion: Preoperative administration of paracetamol or ketorolac did not significantly affect the success rate of IANB in patients with irreversible pulpitis. No significant difference was observed between the paracetamol and ketorolac groups.

Characterization on the Ozone Oxidation of Raw Natural Rubber Thin Film using Image and FT-IR Analysis

  • Kim, Ik-Sik;Lee, DooYoul;Sohn, Kyung-Suk;Lee, Jung-Hun;Bae, JoongWoo
    • Elastomers and Composites
    • /
    • v.54 no.2
    • /
    • pp.110-117
    • /
    • 2019
  • The characterization of the ozone oxidation for raw natural rubber (NR) was investigated under controlled conditions through image and fourier transform infrared (FT-IR) analysis. The ozone oxidation was performed on a transparent thin film of raw NR coated on a KBr window in a dark chamber at $40^{\circ}C$ under low humidity conditions to completely exclude thermal, moisture, or light oxidation. The ozone concentration was set at 40 parts per hundred million (pphm). Before or after exposure to ozone, the image of the thin film for raw NR was observed at a right or tilted angle. FT-IR absorption spectra were measured in the transmission mode according to ozone exposure time. The ozone oxidation of NR was determined by the changes in the absorption peaks at 1736, 1715, 1697, and $833cm^{-1}$, which were assigned to an aldehyde group (-CHO), a ketone group (-COR), an inter-hydrogen bond between carbonyl group (-C=O) from an aldehyde or a ketone and an amide group (-CONH-) of protein, and a cis-methine group ($is-CCH_3=CH-$, respectively. During ozone exposure period, the results indicated that the formation of the carbonyl group of aldehyde or ketone was directly related to the decrement of the double bond of cis-1,4-polyisoprene. Only carbonyl compounds such as aldehydes or ketones seemed to be formed through chain scission by ozone. Long thin cracks with one orientation at regular intervals, which resulted in consecutive chain scission, were observed by image analysis. Therefore, one possible two-step mechanism for the formation of aldehyde and ketone was suggested.