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3D Lithography using X-ray Exposure Devices Integrated with Electrostatic and Electrothermal Actuators

  • Lee, Kwang-Cheol;Lee, Seung S.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.2 no.4
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    • pp.259-267
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    • 2002
  • We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

Impact of Various Tumor Markers in Prognosis of Gastric Cancer -A Hospital Based Study from Tertiary Care Hospital of Kathmandu Valley

  • Mittal, Ankush;Gupta, Satrudhan Pd.;Jha, Dipendra Kumar;Sathian, Brijesh;Poudel, Bibek
    • Asian Pacific Journal of Cancer Prevention
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    • v.14 no.3
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    • pp.1965-1967
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    • 2013
  • Background: To obtain the maximum additional information about the prognosis of gastric cancer, we compared CA-50 with other previously defined markers. Materials and Methods: This hospital based study was carried out in the Department of Biochemistry of Nepalese Army Institute of Health Sciences between $1^{st}$ July 2012 and $31^{st}$ December 2012. The variables collected were age, gender, AFP, CEA, CA19-9, and CA50, assayed with ELISA reader for all cases. The cut off values for serum AFP, CEA, CA19-9, and CA-50 were 10 ${\mu}g/l$, 10 ${\mu}g/l$, 37 U/ml, and 20 U/ml, respectively according to the manufacturer's instructions. Approval for the study was obtained from the institutional research ethical committee. Results: Of the 40 examined patients, 13 patients had tumors located in the upper third of the stomach, 6 patients had tumors in the middle third, 16 patients had tumors in the lower third, and 5 patients had tumors occupying two-thirds of the stomach or more. The distribution of lymph node staging of the patients was as follows: 7 patients belonged to N0, 9 patients to N1 stage, 10 patients to N2 stage, and 14 patients to N3 stage. The statistical method of Cox proportional hazards using multivariate analysis also illustrated that tumor markers including CEA (2.802), CA19-9 (2.690), CA50 (2.101), were independent prognostic factors, as tumor size (1.603), and lymph node stage (1.614). Conclusions: The tumour markers now available, like CEA, CA 19-9 and CA 50, chiefly perceive advanced gastric cancer. The preoperative rise in those tumour marker level have a prognostic significance and may be clinically helpful in choosing patients for adjuvant management.

The Study on RFID Traceability System for Rice Chain Management (쌀 생산이력정보 추적을 위한 RFID시스템 구현에 관한 연구)

  • Paek, Min-Ho;Ko, Sung-Seok
    • The Journal of Society for e-Business Studies
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    • v.13 no.4
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    • pp.33-47
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    • 2008
  • In this paper, the traceability system for rice which is based on RFID technology is introduced. The traceability system plays an important role in the quality management for rice and rice-related food since this system can provide the information of all food chain (production, treatment, distribution and sales etc.) and more quickly identify the cause of the rice and rice-related accident. The main result of the this paper is the basic structure for the traceability system based on RFID technology. To show the implementation case based on this basic structure, the effectiveness of the traceability system is verified. In addition, the prerequisites condition for effective implementation is proposed.

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The characteristics of types and annual trends of pop-up fashion stores - Focused on domestic cases - (패션 팝업 스토어의 연도별 변화 추이 및 유형 특성 - 국내 사례를 중심으로 -)

  • Yu, Jihun;Choi, Doree
    • The Research Journal of the Costume Culture
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    • v.23 no.5
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    • pp.822-834
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    • 2015
  • Contemporary fashion companies have been planning marketing strategies that can promote brands and products more effectively for satisfying consumers' increasingly diversified needs. For this reason, retail spaces have continued to evolve and the modern concept of pop-up stores appeared through this process. Therefore, the object of this study was to research domestic pop-up fashion store cases by collecting article data. These data are from Internet fashion-specialty sites and analyze the types and characteristics of pop-up fashion stores by providing basic information that will be useful in the pop-up fashion stores of companies when they establish their marketing strategies. This study utilized the content analysis method and derived the results by using SPSS Statistics. As a result of this study, the type of "pop-up fashion stores opening in distribution enterprises" comprised the highest percentage of the whole store types and the pop-up fashion stores' management purposes were focused on product introduction, promotion, and market testing. As time passed, not only did pop-up fashion stores' growth rate increased, but also the types of pop-up fashion stores have become more diverse. In other words, contemporary fashion companies are utilizing more pop-up fashion stores as a marketing strategy than before. However, due to the short history of domestic pop-up fashion stores, the variety of research is still insufficient, so more extensive research on pop-up fashion stores is required.

Smart Cold-Chain Monitoring Automation System Architecture based on Internet of Things (사물 인터넷 기반 스마트 콜드 체인 모니터링 자동화 시스템 구조)

  • Kim, Seok-Hoon;Han, Jung-Soo
    • Journal of Digital Convergence
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    • v.12 no.12
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    • pp.351-356
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    • 2014
  • Generally, although securing the condition and location of container freights or normal freights, which load a fresh goods, has been a very important issue in the cold-chain system implementations, it has not gotten out of the traditional methods in the related business world yet. To solve this problem, we propose the designing method and architecture which can be used to implement a smart cold-chain monitoring automation systems. The proposed system architecture is based on the oneM2M standards, and it has 3 layers and entities, which can be implemented to S/W and H/W, network services layer and entity, common services layer and entity, application layer and entity. Based on this architecture, we will not only expect an innovative retrenchment of distribution cost, but also automatically secure the freight condition and location.

Occurrence of Plant-parasitic Nematodes in Major Potato Production Areas and PCR Identification of Root-knot Nematodes (감자 주산지 식물기생선충 분포와 뿌리혹선층의 PCR 동정)

  • Cho Myoung-Rae;Lee Young-Gyu;Kim Jum-Soon;Yoo Dong-Lim
    • Korean journal of applied entomology
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    • v.45 no.1 s.142
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    • pp.79-85
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    • 2006
  • This study was conducted to get basic information on the occurrence of plant-parasitic nematodes for the establishment of nematode management strategy in major potato production areas in Korea. Nationwide soil collection was done in 11 areas of Cheju, Yesan, Gimchun, Goryoung, Hong chun, Pyungchang, Gimjae, Milyang, Namwon, Gangnung, and Inje in 2004-2005. Root-hot nematode juveniles(J2) were detected in 30 samples among the 50 samples. The average density was 12-69 J2/100cc soil. Pratylenchus sp., Helicotylenchus sp., Ditylenchus sp., Tylenchus sp., and Tylenchorhynchus sp. were also detected in various locations, however, their densities were very low. Root-knot nematode females were collected from tomato roots inoculated with the potato field soils for PCR-RFLP identification. The females from Cheju, Milyang, and Goryung showed PCR products of 500 bp. And the Dra I restriction enzyme digestions showing 290 bp and 230 bp fragments confirmed their identity as Meloidogyne hapla.

Microscopy Study for the Batch Fabrication of Silicon Diaphragms (실리콘 Diaphragm의 일괄 제조공정을 위한 Microscopy Study)

  • 하병주;주병권;차균현;오명환;김철주
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.29A no.1
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    • pp.33-40
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    • 1992
  • Several etching phenomena were observed and analyzed in diaphragm process performed on 4-inch (100) Si wafers for sensor application. In case of deep etching to above 300$\mu$m depth, the etch-defects appeared at etched surface could be classified into three categories such as hillocks, reaction products, and white residues. It was known that the hillock had a pyramidal shape or trapizoidal hexahedron structure depending on the density and size of the reaction products. The IR spectra showed that the white residue, which was due to the local over-saturation of Si dissolved in solution, was mostly Si-N-O compounds mixed with a small amount of H and C etc. Also, the difference in both the existence of etch-defects and etch rate distribution over a whole wafer was investigated when the etched surfaces were downward, upward horizontally and erective in etching solutions. The obtained data were analyzed through flow pattern in the etching bath. As the results, the downward and erective postures were favorable in the etch rate uniformity and the etch-defect removal, respectively.

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Design of an integrated Chassis Controller for the Improvement of Vehicle Dynamic Characteristics (차량의 동특성 향상을 위한 통합 샤시 제어기의 설계)

  • Lee, Sin-Won;An, Tae-Hwan;An, Hyeon-Sik;Lee, Un-Seong;Kim, Do-Hyeon;Kim, Sang-Seop
    • Journal of the Korean Institute of Telematics and Electronics S
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    • v.35S no.9
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    • pp.43-52
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    • 1998
  • In this paper, a novel type of an integrated controller is designed for vehicles equipped with active classis systems to improve vehicle stability, handling, and ride comfort. The hybrid fuzzy logic controller consists of a fuzzy logic controller, a skyhook controller, an attitude controller, and a roll moment distribution controller, and these controllers are used with a proper combination which is determined by the integrated control logic based on driving conditions of a vehicle. It is shown by simulations using MATRIXx/SYSTEMBBUILD software that ride comfort, handling, and active safety are improved for a 16 degree-of-freedom vehicle dynamic model.

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Dynamical Electrical Impedance Tomography Based on the Regularized Extended Kalman Filter (조정 확장 칼만 필터를 이용한 동적 전기 임피던스 단층촬영법)

  • Kim, Kyung-Youn;Kim, Bong-Seok;Kang, Suk-In;Kim, Min-Chan;Lee, Jung-Hoon;Lee, Yoon-Joon
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.38 no.5
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    • pp.23-32
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    • 2001
  • Electrical impedance tomography (EIT) is a relatively new imaging modality in which the resistivity (conductivity) distribution of the unknown object is estimated based on the known sets of injected currents and measured voltages on the surface of the object. In this paper, we propose a dynamical EIT reconstruction algorithm based on the regularized extended Kalman filter(EKF). The EIT inverse problem is formulated as dynamic equation which consists of the slate equation and the observation equation, and the unknown state(resistivity) is estimated recursively with the aid of the EKF. In doing so, the generalized Tikhonov regularization technique is employed in the cost functional to mitigate the ill-posedness characteristics of the inverse problem. Computer simulations for the 16-channel synthetic data are provided to illustrate the reconstruction performance of the proposed algorithm.

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Joint Channel estimation in Asynchronous Amplify-And-Forward Relay Networks based on OFDM signaling (OFDM 신호를 이용한 비동기식 증폭 후 전달 중계망에서의 결합 채널 추정)

  • Yan, Yier;Jo, Gye-Mun;Balakannan, S.P.;Lee, Moon-Ho
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.46 no.1
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    • pp.55-62
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    • 2009
  • In this paper, we propose a method on the training sequence based on channel estimation issues for relay networks that employ amplify-and-forward(AF) transmission scheme. In $^{[1]}$ and $^{[2]}$, we have to point out that jointly estimating the channel from source to relay and from relay to destination suffers from many drawbacks in fast fading case because the estimation of previous pilots is not suitable for current channel. In this paper, we consider a new joint estimation of overall channel impulse response(CIR) using one OFDM signal without pilots. Using the maximum likelihood(ML) function, we derive a channel estimator by taking the frequency domain of transmitted signal as Gaussian and averaging the ML function over the resulting Gaussian distribution. Simulation results show that our proposed channel estimator performs a fraction of 1dB compared with $^{[1]}$ in high SNR region.