• 대한기계학회논문집B
• /
• 제36권10호
• /
• pp.1025-1032
• /
• 2012

플래시 램프 열처리(Flash lamp annealing, FLA) 공정은 저온폴리실리콘의 생산을 위한 기술로써 대면적 기판용 실리콘 결정화 기술로 기대 받고 있는 기술이다. 본 연구에서는 FLA 공정 중 기판에 발생하는 변형의 원인에 대하여 이론적인 해석과 이를 토대로 시뮬레이션을 수행하였다. 상용 FEM 해석프로그램에 고온에서의 유리의 점성에 대한 모델을 적용하여, 고온에서 유리의 구조적인 수축과 응력이완으로 인한 영구변형을 수치적으로 재현하였다. 0 세대 실험시편($2cm{\times}2cm$)의 경우 중력의 영향이 미미하여서, 실험 결과와 일치하는 'U'모양의 변형이 남는 것을 확인하였고, 4 세대 기판($74cm{\times}94cm$)의 경우 중력으로 인하여 'M'모양의 변형이 발생하는 것을 시뮬레이션하였다.

• 한국산업보건학회지
• /
• 제32권1호
• /
• pp.10-20
• /
• 2022

Objectives: The aim of this study is to evaluate exposure levels of the extremely low frequency magnetic fields(ELF-MF) radiated from various electric facilities in Liquid Crystal Display(LCD) manufacturing processes. Methods: This study measured the exposure levels of personal and local ELF-MF for the electronic facilities installed in two LCD manufacturing companies. Samplers were installed around workers' waist during working hours to identify personal exposure levels, and direct reading equipment were located at 3 cm, 10 cm, and 30 cm away from the surface of the electronic facilities to measure local exposure levels. Average and maximum(ceiling) values were calculated for personal and local exposure levels. Results: Average and maximum of personal exposure levels for each worker were 0.56(mean) ± 0.02(SE) µT and 6.31 ± 0.75 µT, respectively. Statistical analyses of the study found that maximum of the personal exposure levels for engineers was significantly higher than that for operators since engineers spend more time near the electronic facilities for repairing. The range of maximum personal exposure levels was 0.50 ~ 43.50 µT and its highest level was equivalent to 4.35 % of ACGIH(American Conference of Governmental Industrial Hygienists) exposure limit value(1 mT). Maximum of local exposure levels was 8.18 ± 0.52 µT and the electronic facilities with higher exposure levels were roof rail and electric panel, which were not related to direct manufacturing. The range of maximum local exposure levels was 0.60 ~ 287.20 µT and its highest level was equivalent to 28.7 % of the ACGIH exposure limit value. Lastly, the local exposure levels significantly decreased as the measurement distance from the electronic facilities increased. Conclusions: Maximum of personal and local exposure levels did not exceed the exposure limit value of ACGIH. However, it is recommended to keep the workers as far as possible from the sources of ELF-MF.

• Safety and Health at Work
• /
• 제3권2호
• /
• pp.146-153
• /
• 2012

Objectives: The introduction of computerized numeric control (CNC) technology in manufacturing industries has revolutionized the production process, but there are some health and safety problems associated with these machines. The present study aimed to investigate the extent of postural discomfort in CNC machine operators, and the relationship of this discomfort to the display and control panel height, with a view to validate the anthropometric recommendation for the location of the display and control panel in CNC machines. Methods: The postural discomforts associated with CNC machines were studied in 122 male operators using Corlett and Bishop's body part discomfort mapping, subject information, and discomfort level at various time intervals from starting to end of a shift. This information was collected using a questionnaire. Statistical analysis was carried out using ANOVA. Results: Neck discomfort due to the positioning of the machine displays, and shoulder and arm discomfort due to the positioning of controls were identified as common health issues in the operators of these machines. The study revealed that 45.9% of machine operators reported discomfort in the lower back, 41.8% in the neck, 22.1% in the upper-back, 53.3% in the shoulder and arm, and 21.3% of the operators reported discomfort in the leg. Conclusion: Discomfort increased with the progress of the day and was highest at the end of a shift; subject age had no effect on patient tendency to experience discomfort levels.

• 대한기계학회논문집A
• /
• 제35권1호
• /
• pp.33-37
• /
• 2011

디스플레이, 광학, 에너지 분야 부품의 미세형상화, 대면적화, 저가격화 요구에 대응하기 위하여 대면적 롤금형의 미세형상 가공기술개발에 대한 필요성이 대두되고 있다. 롤금형은 기존의 평판금형에 비해서 금형의 납기가 빠르고, 대면적화에 용이하며, 연속성형이 가능하다는 장점을 갖고 있다. 본 연구는 롤금형에 미세형상을 가공할 때 발생하는 형상오차의 원인을 규명하는 것을 목적으로 하고 있으며, 가공 현장에서 개선 가능한 요소로서 롤금형의 동적밸런싱 보정방안을 제시하고 있다. 기존보다 정밀한 동적밸런싱 보정을 통하여 롤금형의 질량불평형이 최대 90%까지 감소되었고, 롤금형의 진동량이 0.044 mm/sec (RMS)에서 0.004mm/sec (RMS)로 감소하였으며, 결과적으로 미세패턴의 형상정밀도가 개선되는 것을 확인할 수 있었다.

• 한국정밀공학회지
• /
• 제18권11호
• /
• pp.138-147
• /
• 2001

Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.

• 전력전자학회논문지
• /
• 제20권5호
• /
• pp.456-463
• /
• 2015

Nowadays, small quantity batch production, which is so-called a flexible manufacturing system, is a major trend in the modern factory automation industry. The demands for new transportation system are increased gradually, with which multiple passive carriers carrying materials and semi-products are precisely and individually controlled along a single closed rail. Thus, a new type of permanent magnet linear synchronous motor (PMLSM), which consists of state coils on a single rail and PM movers as many as carriers, is proposed in this paper. The rail can be segmented as modules with pairs of coils and a current amplifier, which makes the transportation system simple; therefore, the rail can be easily extended and repaired. A design method of the new PMLSM with a single carrier is proposed, which can be thought as a new version of PMLSM, a coil-segmented coreless PMLSM (CS-CLPMLSM). Experimental setup for it is made, and propulsion results show that with the help of a new effective coil selection and switching algorithms, the conventional current-based vector control is sufficient to fulfill the position and velocity control of the new PMLSM. The proposed PMLSM is expected to fulfill seamless servo-control of multiple carriers also in process line, such as a new generation of flat panel display manufacturing line.

• 센서학회지
• /
• 제27권3호
• /
• pp.182-185
• /
• 2018

Zinc oxide (ZnO) thin films have the advantages of growing at a low temperature and obtaining high charge mobility (carrier mobility) [1]. Furthermore, the zinc oxide thin film can be used to control application resistance depending on its oxygen content. ZnO has the desired physical properties, a transparent nature, with a flexible display that makes it ideal for use as a thin-film transistor. Though these transparent flexible thin-film transistors can be manufactured in various manners, manufacturing large-area transistors using a solution process is easier owing to the low cost and flexible substrate. The advantage of being able to process at low temperatures has been attracting attention as a preferred method. However, in the case of a thin-film transistor fabricated through a solution process, it is reported that charge mobility is lower. To improve upon this, a method of improving the crystallinity through heat treatment and increasing electron mobility has been reported. However, as the heat treatment temperature is relatively high at $500^{\circ}C$, an application where a flexible substrate is absent would be more suitable.

• Design & Manufacturing
• /
• 제11권1호
• /
• pp.1-6
• /
• 2017

In these days, due to generalization of using smart mobile phone and wearable device such as smart watch, demand of Cover-glass and touch screen panel for protecting display increases. With increasing the demand of Cover-glass, slimming technique is promising for weight lightening, zero bezel. Cover-glass produced by this technique is required to decreasing thickness with increase strength. In the Cover-glass manufacturing process, mechanical processing and chemical processing has improve in the strength. Generally, Diamond electrodeposition wheel is used in mechanical process. Reinforced glass with the characteristics of the brittle and high hardness was manufactured by using a diamond electrodeposition wheel. At this time, Because of surface of the tool present non-uniform distribution of diamond particle, it has generate Loading of wheel and it has been decrease life of grinding tool, efficiency of grinding, quality and shape accuracy of workpiece. Thus Research is needed to controling particle distribution of diamond electrodeposition wheel uniformly. And it is necessary to study micro hole machining such as proximity senser hole, speaker hole positioned Cover-glass. Reinforced glass with the characteristics of the brittle and high hardness is difficult to machining. Processing of reinforced glass have generated wear of tool, micro cracks. Also, it is decreasing shape accuracy. In this paper, We conducted a study on how to control particle distribution uniformly about the diamond tool manufactured using elecetodeposition processing. It analyzed the factors that affect the arrangement of the particles in the electrodeposition process by design of experiment. And There is produced the grinding tool, which derives an optimum deposition conditions, for processing Cover-glass edge and the machinability was evaluated.

• 한국컴퓨터정보학회논문지
• /
• 제16권12호
• /
• pp.197-204
• /
• 2011

본 논문에서는 스마트폰 기반의 산업현장 공정관리에 대한 학습 App을 연구한 논문으로 공정의 측정치 데이터를 입력하여 관리한계선을 구하고 해당 범위를 벗어나는 이상 원인을 관리하였다. 본 공정관리를 위한 데이터입력 메뉴를 통해 이상 원인의 측정치를 검출하고 지난기록을 조회하도록 하였으며, 학습도구로 사용하기 위해 교육기관의 공지사항을 게시판 형태로 제공하여 정보교류에 도움을 주었다. 또한 본 이론과 사용방법에 대한 메뉴를 추가하였다. 본 공정관리의 결과는 차트로 제공되며, 알람메시지는 색상 심볼로 경고의 레벨에 따라 명확하게 결과를 표시해 주는 UI로 설계하였다. 본 App에 대해 관련학과와 App개발학과에 설문조사를 한 결과 사용의 편의성에 활용도가 있다는 응답이 약 82%, 학습효과 대해 약 90%가 만족한다는 결과를 보였다.

• 한국소음진동공학회논문집
• /
• 제21권12호
• /
• pp.1112-1119
• /
• 2011

The goal of this study is the stability evaluation of a vacuum pump through modal test and rotor dynamics. Roots type vacuum pump, which is a dry vacuum pump, is necessary for the manufacturing process of the semiconductor and the display. Eigenvalue was solved by the finite-element method(FEM) using 2D and 3D models, then the modal test result was compared with the FEM result. According to the comparison, the analysis result using the 2D was more accurate than the 3D model. Therefore, rotor dynamics was performed by the 2D model. Campbell diagram and root-locus maps, which were calculated by complex-eigenvalue analysis, were used to evaluate the stability of the rotors of the vacuum pump. And displacement solved by unbalance response analysis was compared with the minimum clearance between two rotors of the vacuum pump. Thus, the vacuum pump is assumed operated under steady state through the evaluation of the rotor dynamics.