• Title/Summary/Keyword: Direct process

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A Study on the Polymer Lithography using Stereolithography (광조형법을 이용한 고분자 리소그래피에 관한 연구)

  • Jung Young Dae;Lee Hyun Seop;Son Jae Hyuk;Cho In Ho;Jeong Hae Do
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.1
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    • pp.199-206
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    • 2005
  • Mask manufacturing is a high COC and COO process in developing of semiconductor devices because of mask production tool with high resolution. Direct writing has been thought to be the one of the patterning method to cope with development or small-lot production of the device. This study consists two categories. One is the additional process of the direct and maskless patterning generation using SLA for easy and convenient application and the other is a removal process using wet-etching process. In this study, cured status of epoxy pattern is most important parameter because of the beer-lambert law according to the diffusion of UV light. In order to improve the contact force between patterns and substrate, prime process was performed and to remove the semi-cured resin which makes a bad effects to the pattern, spin cleaning process using TPM was also performed. At a removal process, contact force between photo-curable resin as an etching mask and Si wafer is important parameter.

Understanding Internet Banking in China : Focused on Process Quality, Outcome Quality, Customer Satisfaction, Reuse and Word of Mouth

  • Kim, Kyoung-Hwan;Jin, Shi;Chang, Young-Il
    • Journal of Information Technology Applications and Management
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    • v.16 no.3
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    • pp.45-58
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    • 2009
  • This paper is an empirical study especially to understand recent Chinese internet banking users' behavior and intentions through the process quality, outcome quality, customer satisfaction, reuse and word of mouth on internet banking service. The results of this study are as follows. First, percieved process quality of internet banking service affects the outcome quality, and both quality have a direct relation to customer satisfaction. It is found that Chinese internet users perceive a difference between process quality and outcome quality of internet banking service. And the reuse of the internet banking is decided by customer satisfaction as well as the word of mouth of the internet banking. For successful internet banking business in China, internet marketers should recognize that the service quality consists of the process quality and the outcome quality, and they should organize a new campaign that takes this information into consideration. And considering the process quality effect, they should pay attention to service process as well as the direct merit of services.. And if an internet banking service properly meets customer demands, internet users would constantly use internet services and would share good experiences with their neighbors. Therefore the result of our study will be of working-level help for financial company in China.

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Development of Direct Surface Forming Process

  • Cho, Kwang-Hwan;Yoon, Kyung-Hwan
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.04a
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    • pp.73-77
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    • 2003
  • The backlight unit(BLU) is used as a light source of TFT liquid-crystalline-display (TFT-LCD) module. In this backlight unit, one of important components is the light guide, which is usually made of transparent polymers. Currently the screen-printing method is mainly used for the light guide as a manufacturing process. However, it has limitation to the flexibility of three-dimensional optical design. In the present paper a new alternative manufacturing method for the light guide with low-cost is proposed. This manufacturing method is named as direct surface forming (DSF), which is very similar to the well-known hot embossing except for partial contact between mold and substrate. The results of this new manufacturing method are presented in terms of processing condition, dimensional accuracy, productivity, etc.

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A Study of Mastless Pattern Fabrication using Stereolithography (광조형을 이용한 마스크리스 패턴형성에 관한 연구)

  • 정영대;조인호;손재혁;임용관;정해도
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.503-507
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    • 2002
  • Mask manufacturing is a high COC and COO process in developing of semiconductor devices, because of the mass production tool with high resolution. Direct writing has been thought to be one of the patterning method to cope with development or small-lot production of the device. This study focused on the development of the direct, mastless patterning process using stereolithography tool for the easy and convenient application to micro and miso scale products. Experiments are utilized by three dimensional CAD/CAM as a mask and photo-curable resin as a photo-resist in a conventional stereo-lithography apparatus. Results show that the resolution of the pattern was achieved about 300 micron because of complexity of SLA apparatus settings, inspite of 100 micro of inherent resolution. This paper concludes that photo resist and laser spot diameter should be adjusted to get finer patterns and the proposed method is significantly feasible to mastless and low cost patterning with micro and miso scale.

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Characteristics of Laser Aided Direct Metal Deposition Process for Tool Steel (공구강을 이용한 레이저 직접 금속조형 공정의 적층 특성)

  • 장윤상
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.327-330
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    • 2004
  • Laser aided direct metal deposition (LADMD) process offers the ability to make a metal component directly from 3-D CAD dimensions. A 3-D object can be formed by repeating laser cladding layer by layer. The key of the build-up mechanism is the effective control of powder delivery and laser power to be irradiated into the melt-pool. A feedback control system using optical sensors is introduced to control laser power and powder mass flow rate. Using H13 tool steel and $CO_2$ laser system, comprehensive analysis are executed to test the efficiency of the system. In addition, the dimensional characteristics of directed deposited material are investigated with the parameters of deposition thickness, laser power, traverse speed and powder mass flow rate.

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Direct Numerical Simulation and Second-Order Conditional Moment Closure Modelling of a Turbulent Hydrocarbon Flame (난류 탄화수소화염의 직접수치해석 및 이차 조건모멘트닫힘 모델링)

  • Kim, Seung-Hyun;Huh, Kang Y.;Bilger, Robert W.
    • 한국연소학회:학술대회논문집
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    • 2001.11a
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    • pp.35-41
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    • 2001
  • A second-order conditional moment closure(CMC) model is applied to the prediction of local extinction in a turbulent hydrocarbon diffusion flame and compared with direct numerical simulation(DNS) results for the flame. Combustion of a hydrocarbon fuel is described by a simple two-step mechanism. A second-order correction for conditional mean reaction rate terms is made by the assumed pdf method. The results show that the second-order closure is necessary for accurate prediction of intermediate species, while first-order CMC gives good predictions for fuel, oxidant, product and temperature. Conditional variances and covariances are well predicted during an extinction process while they are overpredicted during a reignition process.

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Mathematical Programming Approaches to GT Cell Formation: A Comparative Study

  • 원유경
    • Journal of the Korean Operations Research and Management Science Society
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    • v.16 no.2
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    • pp.137-137
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    • 1991
  • This paper compares and evaluates the performances of the two types of mathematical programming models for solving the machine-part cell formation problem in group technology manufacturing : indirect formulation relying on surrogate measure such as similarity coefficient and direct formulation seeking to minimize the number of exceptional elements. New indirect formulation, called the generalized p-median model. is proposed. Unlike existing p-median formulations, proposed formulation includes the classical cell formation problem in which only one process plan exsits for each part as a special case. The proposed new formulation can also deal with the cell formation problem in which alternative process plans exist for a part. The indirect formulation is compared with a new direct formulation which needs much fewer extra variables and constraints than existing direct formulations. Some significant findings from comparative experiment are discussed.

A Finite Element Heat Transfer Analysis with Coupling of Roll and Molten Metal in Direct Rolling Process (직접압연공정에 있어서 롤과 용탕을 연계한 유한요소 열전도해석)

  • 김영도;강충길
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.4
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    • pp.946-957
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    • 1994
  • In the steel industries, direct rolling process for production of strip from molten metal has been investigated to simplify processes, to minimize energy consumption, and to improve quality of the strip. In this study, two kinds of practicable scale cooling rollers are proposed. And heat transfer analysis of pool region and cooling roller considering flow of molten metal and roll rotation respectively using the finite element method are performed to obtain the proper initial condition and to observe cooling characteristics of cooling roller. From the results, variations of solidification final points and temperature distribution in roller are observed quantitatively according to roll rotation.

Three Dimensional Direct Monte Carlo Simulation on OLED Evaporation Process (유기EL 증착 공정에 대한 3차원 Monte Carlo 해석)

  • Lee, Eung-Ki
    • Journal of the Semiconductor & Display Technology
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    • v.8 no.4
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    • pp.37-42
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    • 2009
  • The performance of an OLED(organic luminescent emitting device) fabrication system strongly depends on the design of the evaporation cell-source. Trends in display sizes have hauled the enlargement of mother glass substrates. The enlargement of substrates requires the improvement and the enlargement of the effusion cell-source for OLED evaporation process. The deposited layers should be as uniform as possible, and therefore it is important to know the effusion profile of the molecules emitted from the cell-source. Conventional 2D DSMC algorithm cannot be used for simulating the new concept cell-source design, such as a linear source. This work concerns the development of 3D DSMC (direct simulation Monte Carlo) analysis for simulating the behavior of the evaporation cell-sources. In this paper, the 3D DSMC algorithm was developed and the film thickness profiles were obtained by the numerical analysis.

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Direct Bonding of Heterogeneous Insulator Silicon Pairs using Various Annealing Method (열처리 방법에 따른 이종절연층 실리콘 기판쌍의 직접접합)

  • 송오성;이기영
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.10
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    • pp.859-864
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    • 2003
  • We prepared SOI(silicon-on-insulator) wafer pairs of Si II SiO$_2$/Si$_3$N$_4$ II Si using wafer direct bonding with an electric furnace annealing(EFA), a fast linear annealing(FLA), and a rapid thermal annealing(RTA), respectively, by varying the annealing temperatures at a given annealing process. We measured the bonding area and the bonding strength with processes. EFA and FLA showed almost identical bonding area and theoretical bonding strength at the elevated temperature. RTA was not bonded at all due to warpage, We report that FLA process was superior to other annealing processes in aspects of surface temperature, annealing time, and bonding strength.