• Title/Summary/Keyword: Direct Heating Method

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A Heating Apparatus for Semiconductor Manufacturing using Direct Heating Method (직접 가열 방식을 이용한 반도체 제조용 히팅 장치)

  • Jung, Soon-Won;Koo, Kyung-Wan
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.57 no.4
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    • pp.408-411
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    • 2008
  • As to this research is new structure of the semiconductor substrate heating apparatus. The fast thermoresponsive according to the direct heating structure of the heating plate layer adhering closely to the floor side of a substrate and the fast heat loss minimization can be accomplished. Moreover, the contact area of the sheath heater, which is the heating plate layer built-in heating apparatus, is increased, so that it has more heating valid area. For this, it adheres closely to the substrate, in which the photosensitive film is coated and the heating plate layer, adhering closely to the floor side of a substrate the mica layer which adheres closely to the floor side of the upper heating plate layer in order to minimize an insulation and heat loss, and the lower part of the mica layer and it is comprised of the floor plate layer. The heating plate layer forms the continued groove portion over the floor side whole. The sheath heater for heating a substrate is inserted with the groove portion and the heating plate layer is comprised. It is confirmed that by using the new substrate heating structure, the temperature change of the heating plate against the time is observed. Then, there is the electric power saving effect of about 40% in comparison with the existing method.

Characteristics of plasma sprayed composite YSZ/Ni-Cr resistant heating coatings (YSZ/Ni-Cr 저항 발열 복합용사피막의 특성)

  • 김병수;박경채;김태형;양병모
    • Proceedings of the KWS Conference
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    • 2003.05a
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    • pp.111-113
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    • 2003
  • The existing heating unit is indirect-heating method that make use or the nichrome wire or halogen lamp. The indirect-heating method has the demerits of long warming time, high power consumption and many organization parts. In this study, the heating unit of direct-heating method manufactured as being the thermal spray coating of conductive heating material on the surface of heating unit in order to improve the demerits of indirect-heating method. And YSZ added Ni-20Cr that had moderate electrical resistivity was chosen of the conductive heating material.

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Straightening Process of Micro Wires (마이크로 와이어의 직선화 처리에 관한 연구)

  • Kim, Woong-Kyum;Hong, Nam-Pyo;Kim, Byeong-Hee;Kim, Heon-Young
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.9 s.252
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    • pp.1148-1153
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    • 2006
  • This paper deals with the effect of the direct heating method(DHM) for straightening the micro wire. Straightened micro wires have been widely used in the fields of the medicine and the semi-conductor. We have developed a micro wire straightening system by using the direct wire heating method. To controling the tension of the micro wire during the heating and straightening process, a precision tension sensor was set up. In order to avoid the surface oxidation during the heating process, the argon inert gas was supplied to the vicinity of the wire. And, this paper shows the correlation between the tension and the current when arson gas supplied to the tungsten wire. Through several experiments, the optimal tension and current were found. Also, higher straightness $({\approx}1{\mu}m/1000{\mu}m)$ and roundness$(<{\Phi}{\pm}2{\mu}m/100{\mu}m)$ founded when $500{\mu}600gf$ tension and 1.5 ampere.

Performance Analysis of Water Direct Contact Air Conditioning System (물 직접접촉식 공기조화장치의 성능해석)

  • Yoo, S.Y.;Kwon, H.K.;Song, J.;Kim, K.Y.;Park, J.T.
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.158-163
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    • 2001
  • Performance of the water direct contact air conditioning system, in which heat and mass are transferred directly between air and water droplet, is simulated by semi-empirical method. This system improves transport efficiency compared to conventional indirect contact system and cooling, heating, dehumidification and humidification are attained with one unit. In this study, temperature and flowrate for air and water are measured in the various cooling and heating conditions, and correlations for $h_{c}A/c_{pm}$ are derived from these data. Cooling and heating characteristics of the water direct contact air conditioning system are investigated using correlations.

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Simultaneous Consolidation of Titanium Diboride with Self-Propagating High-Temperature Synthesis, Direct Contact-Heating, and Pressure: Modeling of Temperature Distribution and the Relationship between Applied Energy and Densification ($TiB_2$ SHS 및 직접 접촉가열에 의한 동시 가압법 : 온도분포 모델링 및 공급에너지와 치밀화 관계)

  • Chung, G.K.;Cho, K.;Lee, H.B.
    • Journal of the Korean Ceramic Society
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    • v.32 no.7
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    • pp.817-824
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    • 1995
  • TiB2 was simultaneously synthesized and densified with concurrent self-propagating high-temperature synthesis and direct contact-heating by electrcial power input and pressure. Density of TiB2 synthesized by self-propagating high-temperature synthesis and consolidated simultaneously by direct contact-heating and pressure was maximum 80% of the theoretical density (4.52g/㎤). Temperature profile was analyzed by solving heat balance equation with numerical method (FTCS method). The temperature of the sample was sufficiently raised to that temperature sufficient to be densified. It was ascertained that the density of the SHS synthesized TiB2 is exponentially proportinal to the input thermal energy per mass.

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Performance Analysis of Water/Air Direct Contact Air Conditioning System (물-공기 직접접촉식 공기조화장치의 성능해석)

  • 유성연;권화길;김광영
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.16 no.2
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    • pp.175-183
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    • 2004
  • Performance of the water/air direct contact air conditioning system, in which heat and mass are directly transferred between air and water droplet, is simulated using semi-empirical method. Direct contact system improves transport efficiency compared to conventional indirect contact system. In this study, correlations for h$_{c}$A / c$_{pm}$ which represent the capacity of direct contact system are derived as a function of air and water flowrate from the experimental data. Cooling and heating performance of the water/air direct contact air conditioning system are evaluated using these correlations.ons.

Performance of Underground Air-to-Water Heat Pump with Direct Contact Heat Exchanger (지하공기-물 직접접촉식 열교환기를 구비한 히트펌프의 성능)

  • Kim, Y.H.;Kang, Y.K.;Sung, M.S.;Ryou, Y.S.;Kim, J.G.;Jang, J.K.
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.172.1-172.1
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    • 2010
  • In Jeju, underground air is used for heating greenhouse and fertilizing natural $CO_2$ gas by suppling directly into greenhouse. But greenhouse heating method by direct supply of underground air has several problems as like low temperature below $20^{\circ}C$ or high relative humidity over 90%. The underground air is inadequate in heating of crops such as mangos, oranges with the growing temperature over $20^{\circ}C$. Also if the relative humidity of greenhouse is kept with over 90%, diseases can strike almost of the crops. And also the ventilation loss becomes larger because the air pressure of inside greenhouse by direct supply of underground air is higher. In this study the heat pump system using underground air as heat source was developed and heating performance of the system was analyzed. Heating COP of the system was 2.5~5.0 and rejecting heat into greenhouse and extracting heat from underground air in this heat pump system were 46.5~31.4 kW, 34.9~20.9 kW respectively.

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Straightening of the micro wires (극세선의 직선화 처리에 관한 연구)

  • Kim W. K.;Kim B. H.;Kim H. Y.;Kim N. S.;Shin H. K.;Hong N. P.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2004.10a
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    • pp.83-88
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    • 2004
  • Micro wires manufactured by the straightening progress are widely used in bio-medical and semi-conductor fields. In this study, we have developed a novel straightener which uses the direct heating method for straightening. In order to avoid the surface oxidization, during the heating process, we supplied the inert gas(Ar) and examined the effect of the gas flow rate. The effect of the tension and the current applied to the tungsten micro wires were thoroughly studied. From various experiments, it was found that when the tension is $500{\sim}600gf$ and the current is about 1.5A, we obtained higher straightness(${\approx}1{\mu}m/1000{\mu}m$) and roundness ($<{\pm}2{\mu}m/100{\mu}m$).

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Study on the Generalization of the Equivalent Point Method for Thermal Evaluation (Equivalent Point Method의 일반적 이용을 위한 연구)

  • Rhim, Jong-Whan
    • Korean Journal of Food Science and Technology
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    • v.22 no.5
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    • pp.575-581
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    • 1990
  • The existence of the equivalent point for a thermal processing system was demonstrated using arbitrarily chosen ideal direct heating curves. i.e. isothermal heating curves at $120^{\circ}C$ for 10min and at $135^{\circ}C$ for 10sec. Under these conditions, G-values and F-values were calculated at various values of Ea- and z-values by applying the Arrhenius and the Bigelow models respectively. The equivalent time and equivalent temperature were determined by both line intersection and linear regression methods. The equivalent points estimated by both the line intersection and the linear regression methods were consistent and their values were the same as the heating time and temperature of the ideal direct heating curves.

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FRACTIONAL ORDER THERMOELASTIC PROBLEM FOR FINITE PIEZOELECTRIC ROD SUBJECTED TO DIFFERENT TYPES OF THERMAL LOADING - DIRECT APPROACH

  • GAIKWAD, KISHOR R.;BHANDWALKAR, VIDHYA G.
    • Journal of the Korean Society for Industrial and Applied Mathematics
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    • v.25 no.3
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    • pp.117-131
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    • 2021
  • The problem of generalized thermoelasticity of two-temperature for finite piezoelectric rod will be modified by applying three different types of heating applications namely, thermal shock, ramp-type heating and harmonically vary heating. The solutions will be derived with direct approach by the application of Laplace transform and the Caputo-Fabrizio fractional order derivative. The inverse Laplace transforms are numerically evaluated with the help of a method formulated on Fourier series expansion. The results obtained for the conductive temperature, the dynamical temperature, the displacement, the stress and the strain distributions have represented graphically using MATLAB.