• Title/Summary/Keyword: Dimple plate

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The Comparison of Stiction Results of Anti-Stiction Methods for Polysilicon Surface Micromachining (다결정실리콘 표면 미세가공 기술을 위한 점착 방지법들의 성능 비교)

  • Lee, Youn-Jae;Han, Seung-Oh;Park, Jung-Ho
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.233-241
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    • 2000
  • This paper presents comparative results of various commonly used anti-stiction methods for polysilicon surface micromachining using identical test structures. Four different types of cantilevers - single cantilevers, cantilevers with dimples, cantilevers with anti-stiction tip, cantilevers with plate - with different widths and lengths were employed as test structures. The detachment length of cantilevers was examined depending on the anti-stiction methods and test structure types. After sacrificial layer was removed, evaporation and sublimation drying methods were used in the drying step when takes place the stiction between structure and substrate. Various final rinsing liquids such as methanol, IPA, and DI water were employed to compare anti-stiction results depending on surface tension and rinsing temperature. For sublimation drying method, methanol was used as an intermediate rinsing liquid. Also, the influence of a stress gradient of the polysilicon was investigated by performing the identical anti-stiction experiments on identical test structures with a stress gradient. In conclusion, sublimation drying method showed superior results to various evaporation drying methods and hence it is considered the best method for releasing polysilicon microstructure in polysilicon surface micromachining.

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The Weldability of $6mm^t$ Primer-coated Steel for Shipbuilding Using $CO_2$ Laser (II) - Dynamic Behavior of Laser Welding Phenomenon and Composition of Porosity and Vaporized-particle - ($6mm^t$조선용 프라이머 코팅강판의 $CO_2$레이저 용접성 (II) - 레이저 용접현상의 동적거동과 기공 및 증발입자의 조성 -)

  • Kim, Jong-Do;Park, Hyun-Joon
    • Journal of Welding and Joining
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    • v.24 no.2
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    • pp.71-78
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    • 2006
  • It has been reported that good quality weld beads are not easily obtained during the $CO_2$ CW laser welding of primer coated plate. However, by introducing a small gap clearance in the lap position, the zinc vapor can escape through it and sound weld beads can be acquired. Therefore, this study examines for keyhole behavior by observing the laser-induced plasma and investigates the relation between keyhole behavior and formation of weld defect. Laser-induced plasma has accompanied with the vaporizing pressure of zinc ejecting from keyhole to surface of primer coated plate. This dynamic behavior of plasma was very unstable and this instability was closely related to the unstable motion of keyhole during laser welding. As a result of observing the composition of porosity, much of Zn element was found from inner surface of porosity. But Zn was not found from the dimple structure fractured at the weld metal. By analyzing of vaporizing element in laser welding, a component ratio of Zn was decreased by introducing a small gap clearance. Therefore we can prove that the major cause of porosity is the vaporization of primer in lap position. Mechanism of porosity-formation is that the primer vaporized from the lap position accelerates dynamic behavior of the key hole and the bubble separated from the key hole is trapped in the solidification boundary and romaines as porosity.

A Study on Electron Beam Weldmetal Cross Section Shapes and Strength of Al 5052 Thick Plate (Al 5052 함금 후판재의 전자빔 용접부 단면 형상과 강도에 관한 연구)

  • Kim, In-Ho;Lee, Gil-Young;Ju, Jeong-Min;Park, Kyoung-Tae;Chun, Byong-Sun
    • Journal of Welding and Joining
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    • v.27 no.3
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    • pp.73-79
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    • 2009
  • This present paper investigated the mechanical properties and the microstructures of each penetration shapes classifying the conduction shape area and the keyhole shape area about electron beam welded 120(T)mm thick plated aluminum 5052 112H. As a result the penetration depth is increased linearly according to the output power, but the aspect ratio is decreased after the regular output power. In the conduction shape area, the Heat affected zone is observed relatively wider than the keyhole shape area. In the material front surface of the welded specimen, the width is decreased but the width in the material rear surface is increased. After the measuring the Micro Vikers Hardness, it showed almost similar hardness range in all parts, and after testing the tensile strength, the ultimate tensile strength is similar to the ultimate tensile strength of the base material in all the specimens, also the fracture point was generated in the base materials of all the samples. In the result of the impact test, impact absorbed energy of the Keyhole shape area is turned up very high, and also shown up the effect about four times of fracture toughness comparing the base material. In the last result of observing the fractographs, typical ductile fraction is shown in each weld metal, and in the basic material, the dimple fraction is shown. The weld metals are shown that there are no other developments of any new chemical compound during the fastness melting and solidification.

Correction of Lowerlid Entropion by Using Skin-tarsal Fixation Method (피부검판 고정술을 이용한 하안검 내반증의 교정)

  • Hong, Jung Soo;Kim, Han Koo;Kim, Woo Seob;Kim, Seung Hong
    • Archives of Plastic Surgery
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    • v.32 no.3
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    • pp.397-402
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    • 2005
  • For its lowerlid entropion correction, nonsurgical eyelid suture or surgical eyelid suture can be employed. Different types of surgical eyelid suture such as the Hotz method and the Callahan method, are generally performed, but were not sufficient for correcting of entropion. In our hospital we performed modified skin-tarsal fixation on 15 patients, 5 male and 10 female from January 20, 1999 to December 16, 2002. We corrected lower eyelid entropion with the excision of the skin and orbicularis oculi muscle and buried suture of tarsal plate and dermis which is a variant of the Callahan method. All the patients were satisfied with the operation results, and there was no case of recurrence of the lower eyelid pricking the cornea. During the 6 months period after the operation, the lower eyelids slightly turned inward but there was no further progression. The correction was performed excessively, therefore there was no case of recurrence after the operation and the results were satisfactory. There developed a dimple at the suture margin caused by skin contraction but it usually disappeared within 2 months after the operation. To avoid recurrence and to achieve satisfactory results, the orbicularis oculi muscle must be totally resected at the ciliary margin. We resected ciliary as well as pretarsal portion of orbicularis oculi muscle. Also, since most of the recurrences are originated from the medial side, the medial portion of skin flap must be tightly fixed to avoid recurrence and the upper part of the dermis should be fixed tightly to the lower border of the tarsal plate.

Investigation on Resistance to Hydrogen Embrittlement of High Nitrogen Austenitic Steels for Hydrogen Pipe by the Disc Pressure Test and the Tensile Test on Hydrogen Pre-charged Specimens (디스크 시험 및 수소처리 인장시험에 의한 수소배관용 고질소 스테인리스강의 내수소취성 평가 연구)

  • Dong-won, Shin;Min-kyung, Lee;Jeong Hwan, Kim;Ho-seong, Seo;Jae-hun, Lee
    • Journal of the Korean Institute of Gas
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    • v.26 no.6
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    • pp.16-23
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    • 2022
  • In this study, characteristics of effect on hydrogen gas was investigated to hydrogen embrittlement by disk and tensile tests. The developed and commercial alloy was fabricated to a plate material made from an alloy ingot. The prepared materials were processed in the form of a disk to measure rupture pressure by hydrogen and helium gas at a rate of 0.1 to 1,000 bar/min. In the hydrogen pre-charged tensile test, a specimen was hydrogenated using an anode charging method, and the yield strength, ultimate tensile strength, elongation, and reduction in area rate were carried by a strain rate test. Also, the microstructure was observed to the fracture surface of the tensile test specimen. As a result, the developed materials satisfied endurable hydrogen embrittlement, and the fractured surface showed a brittleness fracture surface with a depth of several ㎛, but dimple due to ductile fracture could be observed.