• 한국전기전자재료학회논문지
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• 제32권5호
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• pp.366-370
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• 2019

In this paper, a single N+ emitter trench gate-type insulated gate bipolar transistor (IGBT) device was studied using T-CAD, in order to achieve a low on-state voltage drop (Vce-sat) and high breakdown voltage, which would reduce power loss and device reliability. Using the simulation, the threshold voltage, breakdown voltage, and on-state voltage drop were studied as a function of the temperature, the length of time in the diffusion process (drive-in) after implant, and the trench gate depth. During the drive-in process, a $20^{\circ}C$ change in temperature from 1,000 to $1,160^{\circ}C$ over a 150 minute time frame resulted in a 1 to 4 V change in the threshold voltage and a 24 to 2.6 V change in the on-state voltage drop. As a result, a 0.5 um change in the trench depth of 3.5 to 7.5 um resulted in the breakdown voltage decreasing from 802 to 692 V.

• Nuclear Engineering and Technology
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• 제51권2호
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• pp.369-376
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• 2019

A complete solution for a soluble-boron-free (SBF) small modular reactor (SMR) is pursued with a new burnable absorber concept, namely centrally-shielded burnable absorber (CSBA). Neutronic flexibility of the CSBA design has been discussed with fuel assembly (FA) analyses. Major design parameters and goals of the SBF SMR are discussed in view of the reactor core design and three CSBA designs are introduced to achieve both a very low burnup reactivity swing (BRS) and minimal residual reactivity of the CSBA. It is demonstrated that the core achieves a long cycle length (~37 months) and high burnup (~30 GWd/tU), while the BRS is only about 1100 pcm and the radial power distribution is rather flat. This research also introduces a supplementary reactivity control mechanism using stainless steel as mechanical shim (MS) rod to obtain the criticality during normal operation. A further analysis is performed to investigate the local power peaking of the CSBA-loaded FA at MS-rodded condition. Moreover, a simple $B_4C$-based control rod arrangement is proposed to assure a sufficient shutdown margin even at the cold-zero-power condition. All calculations in this neutronic-thermal hydraulic coupled investigation of the 3D SBF SMR core are completed by a two-step Monte Carlo-diffusion hybrid methodology.

• 한국초전도ㆍ저온공학회논문지
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• 제22권4호
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• pp.20-23
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• 2020

Among many variables in processing the high performance MgB2 bulk superconductors, simple and important approach is to optimize the size dependence of the Mg & B raw powders. The present study is dedicated towards the variation in superconducting properties of MgB2 depending upon the various combination of Mg & B powders with the two different particle sizes respectively. From morphological investigation of the MgB2 samples, narrow and long pores are observed when the larger Mg powders are used, whereas it is rather like the oval shapes with the smaller Mg powders. Also, it can be seen that the connectivity of the MgB2 samples is much enhanced with the smaller size of the B powders. Jc-H properties of the MgB2 samples also indicate that the highest Jc can be obtained when using the smaller size of the B powder with the combination of the smaller Mg powders than that of the larger Mg powders. If the cases with the larger B powers, it is more favorable to select the larger Mg powders with the better Jc-H properties considering shorter diffusion length of Mg and more homogeneous mixture between the Mg & B powders.

• 한국재료학회지
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• 제32권6호
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• pp.307-312
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• 2022

Metal halide perovskite (MHP) nanocrystals (NCs) have emerged as promising materials for various optoelectronic applications including photovoltaics, light-emitting devices, and photodetectors because of their high absorption coefficient, high diffusion length, and photoluminescence quantum yield. However, understanding the morphological evolution of the MHP NCs as well as their controlled assembly into optoelectronic devices is still challenging and will require further investigation of the colloidal chemistry. In this study, we found that the amount of n-octylamine (the capping agent) plays a crucial role in inducing further growth of the MHP NCs into one-dimensional nanowires during the aging process. In addition, we demonstrate that the dielectrophoresis process can permit self-alignment of the MHP nanowires with uniform distribution and orientation on interdigitated electrodes. A strong light-matter interaction in the MHP NWs array was observed under UV illumination, indicating the photo-induced activation of their luminescence and electrical current in the self-aligned MHP nanowire arrays.

• 한국표면공학회지
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• 제56권4호
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• pp.265-272
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• 2023

Photoelectrochemical (PEC) water splitting is one of the promising methods for hydrogen production by solar energy. Iron oxide has been effectively investigated as a photoelectrode material for PEC water splitting due to its intrinsic property such as short minority carrier diffusion length. However, iron oxide has a low PEC efficiency owing to a high recombination rate between photoexcited electrons and holes. In this study, we synthesized nanoporous structured iron oxide by anodization to overcome the drawbacks and to increase surface area. The anodized iron oxide was annealed in Ar atmosphere with different purging times. In conclusion, the highest current density of 0.032 mA/cm² at 1.23 V vs. RHE was obtained with 60 s of pursing for iron oxide(Fe-60), which was 3 times higher in photocurrent density compared to iron oxide annealed with 600 s of pursing(Fe-600). The resistances and donor densities were also evaluated for all the anodized iron oxide by electrochemical impedance spectra and Mott-Schottky plot analysis.

• International journal of advanced smart convergence
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• 제11권4호
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• pp.88-95
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• 2022

Vacuum simulation is associated with the prediction and calculation of how materials, pumps and systems will perform using mathematical equations. In this investigation, three different high vacuum systems were simulated and estimated with each vacuum characteristics by VacTran simulator. In each of modelled vacuum systems, selection of gas loads into vessel, combination of rough and high vacuum pumps and dimension of conductance elements were proposed as system variables. In pump station model, the pumping speed to pressures by the combination of root pump was analyzed under the variations of vessel volume. In this study, the effects of outgassing dependent on vessel materials was also simulated and aluminum vessel was estimated to optimum materials. It was obtained from the modelling with diffusion pump that the diameter, length of 50×250[mm]roughing line was characterized as optimum variables to reach the ultimate pressure of 10E-7[torr]. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacTran simulator. Feasibility of VacTran as vacuum simulator was verified and applications of VacTran in high tech process expected to be increased.

• 한국재료학회지
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• 제1권3호
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• pp.132-138
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• 1991

2충의 BPSG를 사용하는 서브마이크론 CMOS DRAM에 있어 전기적 특성에 관한 BPSG flow온도의 영향을 비교하였다. BPSG flow온도를 $850^{\circ}C/850^{\circ}C,\;850^{\circ}C/900^{\circ}C,\;900^{\circ}C/900^{\circ}C$의 3가지 다른 조합을 적용하여 문턱전압, 파괴전압, Isolation전압과 더불어 면저항과 접촉 저항을 조사하였다. $900^{\circ}C/900^{\circ}C$ flow의 경우 NMOS에서 문턱전압은 $0.8\mu\textrm{m}$ 미만의 채널길이에서 급격히 감소하나 PMOS 경우는 차이가 없었다. NMOS와 PMOS의 파괴전압은 각각 $0.7\mu\textrm{m}$와 $0.8\mu\textrm{m}$ 이하에서 급격히 감소하였다. 그러나 $850^{\circ}C/850^{\circ}C$ flow의 경우에는 NMOS와 PMOS모두 문턱전압과 파괴전압은 채널길이 $0.7\mu\textrm{m}$까지 감소하지 않았다. Isolation전압은 BPSG flow온도 감소에 따라 증가하였다. 면저항과 접촉 저항은 BPSG flow온도가 $900^{\circ}C$에서 $850^{\circ}C$로 감소됨에 따라 급격히 증가되었다. 이와 같은 결과는 열처리 온도에 따라 dopant의 확산과 활성화에 관련 있는 것으로 생각된다. 접촉 저항 증가에 대한 개선 방법에 대하여 고찰하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Korean Chemical Engineering Research
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• 제47권1호
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• pp.46-53
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• 2009

본 연구에서는 비이온 계면활성제 $C_{12}E_5$ 수용액과 비극성 탄화수소 오일 시스템에 대한 상평형 및 동적 거동 실험을 수행하였다. 온도를 증가시킴에 따라 oil-in-water(O/W) microemulsion(${\mu}E$)이 excess 오일상과 평형을 이루는 2상 영역으로부터 middle-phase ${\mu}E$이 excess water, excess 오일상과 각각 평형을 이루는 3상 영역을 거쳐서 water-in-oil(W/O) ${\mu}E$이 excess 물상과 평형을 이루는 2상으로 전이되었다. 또한 탄화수소 오일의 사슬 길이가 증가할수록 상전이 온도가 증가하였다. O/W ${\mu}E$이 존재하는 낮은 온도 조건에서는 비극성 오일의 종류와 상관없이 오일이 계면활성제 마이셀에 의하여 가용화되어 시간에 따라 크기가 선형적으로 감소하였다. 한편 middle-phase ${\mu}E$을 포함한 3상이 형성되는 조건에서는 매우 낮은 계면장력으로 인하여 오일이 수용액 상에 빠른 속도로 가용화되었고 작은 drop 형태로 유화되었다. 반면에 W/O ${\mu}E$의 2상을 형성하는 온도에서는 과포화로 인하여 일어나는 자발적 유화 현상과 물과 계면활성제의 오일상으로의 확산으로 인한 오일의 크기가 증가하였다. 비극성 탄화수소 오일과 계면활성제 수용액 사이의 시간에 따른 계면장력을 $25^{\circ}C$에서 측정한 결과, 탄화수소 오일의 사슬 길이가 증가함에 따라 평형에서의 계면장력 값과 평형에 도달하는데 소요되는 시간이 모두 증가하였다.

• 공업화학
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• 제20권5호
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• pp.473-478
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• 2009

본 연구에서는 $C_{10}E_5$ 비이온 계면활성제 수용액과 비극성 탄화수소 오일 시스템에 대한 상평형 및 동적 거동 실험을 수행하였다. 온도를 증가시킴에 따라 oil in water (O/W) microemulsion (${\mu}E$)이 excess 오일상과 평형을 이루는 2상 영역으로부터 middle-phase ${\mu}E$이 excess water, excess 오일상과 각각 평형을 이루는 3상 영역을 거쳐서 water in oil (W/O)${\mu}E$이 excess 물상과 평형을 이루는 2상으로 전이되었다. 또한 탄화수소 오일의 사슬 길이가 증가할수록 상전이 온도가 증가하였다. O/W ${\mu}E$이 존재하는 낮은 온도 조건에서는 비극성 오일의 종류와 상관없이 오일이 계면활성제 마이셀에 의하여 가용화되어 시간에 따라 크기가 선형적으로 감소하였고, 가용화 속도는 탄화수소 오일의 사슬 길이를 증가시킴에 따라서 감소하였다. 한편 middle-phase ${\mu}E$을 포함한 3상이 형성되는 조건에서는 매우 낮은 계면장력으로 인하여 오일이 수용액 상에 빠른 속도로 가용화되었고 작은 drop 형태로 유화되었다. 반면에 W/O ${\mu}E$의 2상을 형성하는 온도에서는 과포화로 인하여 일어나는 자발적 유화 현상과 물과 계면활성제의 오일상으로의 확산으로 인한 오일의 크기 증가가 관찰되었다. 비극성 탄화수소 오일과 계면활성제 수용액 사이의 시간에 따른 계면장력을 $25^{\circ}C$에서 측정한 결과, 탄화수소 오일의 사슬 길이 증가에 따라 평형에서의 계면장력 값과 평형에 도달하는 데 소요되는 시간이 모두 증가하였다.