• 한국정밀공학회지
• /
• 제22권1호
• /
• pp.199-206
• /
• 2005

Mask manufacturing is a high COC and COO process in developing of semiconductor devices because of mask production tool with high resolution. Direct writing has been thought to be the one of the patterning method to cope with development or small-lot production of the device. This study consists two categories. One is the additional process of the direct and maskless patterning generation using SLA for easy and convenient application and the other is a removal process using wet-etching process. In this study, cured status of epoxy pattern is most important parameter because of the beer-lambert law according to the diffusion of UV light. In order to improve the contact force between patterns and substrate, prime process was performed and to remove the semi-cured resin which makes a bad effects to the pattern, spin cleaning process using TPM was also performed. At a removal process, contact force between photo-curable resin as an etching mask and Si wafer is important parameter.

• 한국자동차공학회논문집
• /
• 제16권2호
• /
• pp.158-165
• /
• 2008

The combustion and exhaust emissions characteristics of a liquefied petroleum gas-di-methyl ether compression ignition engine with a variable valve timing device were investigated under various liquefied petroleum gas injection timing conditions. Liquefied petroleum gas was used as the main fuel and was injected directly into the combustion chamber. Di-methyl ether was used as an ignition promoter and was injected into the intake port. Different liquefied petroleum gas injection timings were tested to verify the effects of the mixture homogeneity on the combustion and exhaust emission characteristics of the liquefied petroleum gas-di-methyl ether compression ignition engine. The average charge temperature was calculated to analyze the emission formation. The ringing intensity was used for analysis of knock characteristics. The combustion and exhaust emission characteristics differed significantly depending on the liquefied petroleum gas injection and intake valve open timings. The CO emission increased as the intake valve open and liquefied petroleum gas injection timings were retarded. However, the particulate matter emission decreased and the nitrogen oxide emission increased as the intake valve open timing was retarded in the diffusion combustion regime. Finally, the combustion efficiency decreased as the intake valve open and liquefied petroleum gas injection timings were retarded.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 하계학술대회 논문집
• /
• pp.263-266
• /
• 2001

In this paper, we investigated dielectric properies for BST thin films that was deposited on MgO/Si substrates using RF magnetron sputtering. In here, MgO film was used to perform that a diffusion b arrier between the BST film and Si substrate and a buffer layer to assist the BST film growth. A d eposition condition for MgO films was RF Power of 50W, substrate temperature of room temperature and the working gas ratio of Ar:O$_2$ were varied from 90:10 to 60:47. Finally we manufactured the cap acitor of Al/BST/MgO/Si/Al structure to know electrical properties of this capacitor through I-V, C-V measurement. In the results, C-V aha racteristic curves was shown a ferroelectric property so we measured P-E. A remanent poliazation and coerceive electric field was present 2$\mu$C/cm$^2$ and -27kV/cm respectively at Ar:O$_2$=90:10. And a va clue of dielectric constant was 86 at Ar:02=90:10.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 하계학술대회 논문집
• /
• pp.288-291
• /
• 2002

Application of metal silicides such as TiSi$_2$ and CoSi$_2$ as contacts and gate electrodes are being studied. However, TiSi$_2$ due to the linewidth-dependance, and CoSi$_2$ due to the excessive Si consumption during silicidation cannot be applied to the deep-submicron MOSFET device. NiSi shows no such problems and can be formed at the low temperature. But, NiSi shows thermal instability. In this investigation, NiSi was formed with a Ti-capping layer to improve the thermal stability. Ni and Ti films were deposited by the thermal evaporator. The samples were then annealed in the N$_2$ ambient at 300-800$^{\circ}C$ in a RTA (rapid thermal annealing) system. Four point probe, FESEM, and AES were used to study the thermal properties of Ti-capped NiSi layers. The Ti-capped NiSi was stable up to 700$^{\circ}C$ for 100 sec. RTA, while the uncapped NiSi layers showed high sheet resistance after 600$^{\circ}C$. The AES results revealed that the Ni diffusion further into the Si substrate was retarded by the capping layer, resulting in the suppression of agglomeration of NiSi films.

• Journal of Electrochemical Science and Technology
• /
• 제5권2호
• /
• pp.37-44
• /
• 2014

The $Li-O_2$ battery has been attracting much attention recently, due to its very high theoretical capacity compared with Li-ion chemistries. Nevertheless, several studies within the last few years revealed that Li-ion derived electrolytes based on alkyl carbonate solvents, which have been commonly used in the last 27 years, are irreversibly consumed at the $O_2$ electrode. Accordingly, more stable electrolytes are required capable to operate with both the Li metal anode and the $O_2$ cathode. Thus, due to their favorable properties such as non volatility, chemical inertia, and favorable behavior toward the Li metal electrode, ionic liquid-based electrolytes have gathered increasing attention from the scientific community for its application in $Li-O_2$ batteries. However, the scale-up of Li-$O_2$ technology to real application requires solving the mass transport limitation, especially for supplying oxygen to the cathode. Hence, the 'LABOHR' project proposes the introduction of a flooded cathode configuration and the circulation of the electrolyte, which is then used as an oxygen carrier from an external $O_2$ harvesting device to the cathode for freeing the system from diffusion limitation.

• 한국동물위생학회지
• /
• 제42권4호
• /
• pp.251-255
• /
• 2019

Wildlife is a bio-indicator of environmental pollution by antimicrobial resistant bacteria or genes, however, there is no information on antimicrobial resistance in wildlife-origin bacteria. This study aimed to investigate the normal microbiota of staphylococci and their antimicrobial resistance in wildlife that did not take any antimicrobials. After sampling and bacterial isolation/identification, antimicrobial resistance profiles were examined by broth microdilution test, Kirby-Bauer disc diffusion test and mecA genetargeted PCR. Of 90 isolates from wildlife, 83 were coagulase-negative staphylococci while only 7 were coagulase-positive staphylococci. Methicillin-resistance was found in 63 (70%) isolates and 35 of 90 (38.9%) isolates were multidrug-resistant staphylococci. When considering that all of the animals did not take any medication or contacted any medical device before the sampling, the results indicate significantly high prevalence of antimicrobial resistance in wild environments. Further study would be necessary to investigate the transmission route of antimicrobial resistance.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제6권2호
• /
• pp.106-113
• /
• 2006

Electrical properties of $Si_{0.88}Ge_{0.12}(C)$ p-MOSFETs have been exploited in an effort to investigate $Si_{0.88}Ge_{0.12}(C)$ channel structures designed especially to suppress diffusion of dopants during epitaxial growth and subsequent fabrication processes. The incorporation of 0.1 percent of carbon in $Si_{0.88}Ge_{0.12}$ channel layer could accomodate stress due to lattice mismatch and adjust bandgap energy slightly, but resulted in deteriorated current-voltage properties in a broad range of operation conditions with depressed gain, high subthreshold current level and many weak breakdown electric field in gateoxide. $Si_{0.88}Ge_{0.12}(C)$ channel structures with boron delta-doping represented increased conductance and feasible use of modulation doped device of $Si_{0.88}Ge_{0.12}(C)$ heterostructures.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
• /
• pp.319.2-319.2
• /
• 2014

휴대기기 발전과 사용 증가로 인해 배터리의 고용량화와 소형화가 요구되고 있으며, 특히 의료용 센서 기기 같은 health care device에서 소형화에 대한 관심이 증가하였다. 박막 이차 전지는 박막형태로 배터리의 구성요소를 한층씩 쌓아 올린 형태이므로 소형화가 가능하며, 내부에 액체전해질이 없어 누액으로 인한 폭발등의 염려가 없다. 또한 Si 반도체 소자에 integration 할 수 있어 다양한 분야에 적용할 수 있다. 하지만 Si 소자에 integration시 리튬이 기판으로 확산되어 배터리 용량이 감소하거나 Si 소자에 악영향을 미칠 수 있다. 따라서 본 연구에서는 리튬의 확산 여부를 민감하게 평가할 수 있는 방법 및 리튬 확산을 억제할 수 있는 확산방지막에 대한 연구를 진행하였다. 리튬의 확산을 평가하는 방법으로는 물리적 분석 방법 및 전기적 분석 방법을 평가하여 가장 민감한 방법을 선정하였다. 또한 확산방지막으로는 반도체 배선공정에서 Cu 확산 방지막으로 사용되고 있는 Ta, TaN 등과 함께 Na 확산 방지막으로 알려진 $Al_2O_3$ [1]등을 평가하였다.

• Macromolecular Research
• /
• 제10권5호
• /
• pp.246-252
• /
• 2002

In order to the development of the delivery device of long-acting local anesthetics for postoperative analgesia and control of chronic pain of cancer patient, fentnyl-loaded poly (L-lactide-co-glycolido) (PLGA, molecular weight, 5,000 g/mole; 50 : 50 mole ratio by lactide to glycolide) microspheres (FMS) were studied. FMS were prepared by an emulsion solvent-evaporation method. The influence of several preparation parameters such as initial drug loading, PLGA concentration, emulsifier concentration, oil phase volume, and fabrication temperature has been investigated on the fentanyl release profiles. Generally, the drug showed the biphasic release patterns, with an initial diffusion followed by a lag period before the onset of the degradation phase, but there was no lag time in our system. Fentanyl was slowly released from FMS over 10 days in vitro with a quasi-zero order property. The release rate increased with increasing drug loading as well as decreasing polymer concentration with relatively small initial burst effect. From the results, FMS may be a good formulation to deliver the anesthetic for the treatment of chronic pain.

• 한국자동차공학회논문집
• /
• 제17권3호
• /
• pp.142-148
• /
• 2009

The direct injection(DI) diesel engine has become a prime candidate for future transportation needs because of its high thermal efficiency. However, nitrogen oxides(NOx) increase in the local high temperature regions and particulate matter (PM) increases in the diffusion flame region within diesel combustion. Therefore, the demand for developing a suitable after treatment device has been increased. NOx absorbing catalysts are based on the concept of NOx storage and release making it possible to reduce NOx emission in net oxidizing gas conditions. This De-NOx system, called the LNT(Lean NOx Trap) catalyst, absorbs NOx in lean exhaust gas conditions and release it in rich conditions. This technology can give high NOx conversion efficiency, but the right amount of reducing agent should be supplied into the catalytic converter at the right time. In this research, a performance characteristics of LNT with a hydrogen enriched gas as a reductant was examined and strategies of controlling the injection and rich exhaust gas condition were studied. The NOx reduction efficiency is closely connected to the injection timing and duration of reductant. LNT can reduce NOx efficiently with only 1 % fuel penalty.