• Title/Summary/Keyword: Dielectric Fluid

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Numerical Study on Polishing Behavior during Oxide CMP (Oxide CMP 과정에 대한 수치 유동 해석)

  • Kwon, Dal-Jung;Lee, Do-Hyung;Hong, Yi-Koan;Park, Jin-Goo
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.922-927
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    • 2003
  • In this paper, slurry fluid motion, abrasive particle motion, and roles of groove patterns on the pads are numerically investigated in the 2D and 3D geometries. The simulation results are analyzed in terms of experimental removal rate and WIWNU (within wafer non-uniformity) for ILD (inter level dielectric) CMP process. Numerical investigations reveal that the grooves in the pad behave as uniform distributor of abrasive particles and enhance the removal rate by increasing shear stress. Higher removal rate and desirable uniformity are numerically and experimentally observed at the pad with grooves. Numerical analysis is very well matched with experimental results and helpful for understanding polishing mechanism and local physics.

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AC PDP의 셀 크기 및 격벽 높이 변화에 따른 방전 특성 분석

  • Lee, Jong-Bong;Sim, Seung-Bo;Choe, Yong-Seok;Hwang, Seok-Won;Lee, Ho-Jun;Lee, Hae-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.106-106
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    • 2010
  • AC PDP(Plasma Display Panel)는 상압에 가까운 압력에서 DBD(Dielectric Barrier Discharge) 방전을 이용한 디스플레이다. AC PDP는 보통 면 방전을 이용하기 때문에 대향 방전과는 다른 방전 현상을 보인다. 본 연구에서는 4인치 test 패널 제작하여 격벽 높이 변화에 따른 방전 현상을 연구하였다. PDP 셀은 $1mm^3$ 보다 작은 크기를 가지고 있기 때문에 방전 현상을 분석하는 것은 쉽지 않다. 그래서 이 연구에서는 2, 3차원 유체 시뮬레이션을 이용하여 실험 결과에 대한 방전 현상을 연구하였다. 테스트 패널을 통하여 정적 마진, 휘도, 소비전력, 발광효율 등을 구하였고, Fluid 시뮬레이션을 통하여 전기장 분포, 하전입자 및 여기종 입자들의 개수 및 밀도 분포, 벽전하 분포 등을 통하여 방전 특성의 경향성을 분석하였다. 격벽 높이가 높아질수록 방전 공간이 넓어지면서 효율이 증가하였으나 $140\;{\mu}m$ 이상의 높이에서는 광 변환 효율이 감소하면서 효율이 오히려 감소하였다.

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Vertically Aligned Nematics at Polymer interfaces and Its device implications

  • Srinivasarao, Mohan;Park, Jung-Ok;Zhou, Jian
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.558-561
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    • 2005
  • In-situ photopolymerization of alkyl acrylate monomers in the presence of a nematic fluid provides a cellular matrix of liquid crystalline droplets in which the chemical structure of the encapsulating polymer exerts control over the alignment (anchoring) of the liquid crystalline molecules. Control is obtained by variation of the alkyl side chains and through copolymerization of two dissimilar monofunctional acrylates. Two monofunctional acrylates with opposing tendencies on copolymerization provide control over the tunability of anchoring over a wide temperature range. Using various acrylates we show that a uniform vertical alignment can be achieved over a large area. Utilizing this technique and a nematic with negative dielectric anisotropy, we have fabricated highly flexible liquid crytal based devices, with high contrast and fast response time, without using any alignment layer.

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Discharge analysis of SrO- and SrCaO-PDP operated at lower voltage

  • Uchida, G.;Uchida, S.;Yano, T.;Awaji, N.;Kajiyama, H.;Shinoda, T.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.177-180
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    • 2009
  • Here is presented the measurement on SrO- and SrCaO-PDP operated at lower voltage. SrO- and SrCaO-PDP attain high luminous efficacy at low voltage, where the breakdown voltage is 30 % lower than that of the ordinary MgO-PDP. A one-dimensional fluid model is applied for the simulation of PDP discharge. High VUV radiation efficiency is confirmed at high ${\gamma}_i$ and both low and high $V_s$ as in the experiment. Discharge analysis in simulation also shows that the high ${\gamma}_i$ protective layer leads to high plasma density especially near the cathode electrode, being responsible for high efficiency.

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Electronic Ink using the Electrophoretic High Mobility Particles

  • Kim, Chul-Am;Kang, Seung-Youl;Kim, Gi-Heon;Ahn, Seong-Deok;Oh, Ji-Young;Suh, Kyung-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.969-971
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    • 2007
  • The black/white electronic ink containing high mobility white nano particles and the organic black pigment particles dispersed in dielectric fluid were prepared. A charge control agent affects the electrophoretic zeta potentials of white particle, which show the maximum value in zeta potential. The electronic ink panel fabricated with the charged white particles and the black particles exhibits more than 15:1 contrast ratio at 10V.

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Evaluation of Small Current Breaking Performance for 245kV GCB with or without Shield (쉴드 유무에 따른 245kV GCB의 소전류차단성능 평가)

  • Song T. H.;Lee H. G.;Kim Y. P.;Yoon J. H.
    • Proceedings of the KIEE Conference
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    • summer
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    • pp.824-826
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    • 2004
  • 상용 CFD(Computational Fluid Dynamics) 프로그램인 PHOENICS를 이용하여 245kV $SF_6$ 가스 차단기의 진상소전류 차단성능을 평가하였다. 소전류 차단시에는 아크가 발생 즉시 소호되므로 $SF_6$ 가스를 전리가 일어나지 않은 냉가스로 취급할 수 있다. 그러므로 PHOENICS를 이용하여 극간의 $SF_6$ 가스밀도 및 전계의 변화를 계산하였으며 이것으로부터 극간 $SF_6$ 가스의 절연내력(Dielectric Strength)을 계산하였다. 계산된 $SF_6$ 가스의 절연내력과 아크 소호 후 극간에 인가되는 회복전압(Recovery Voltage)을 비교하여 차단기의 진상소전류 차단성능을 평가하였다. 245kV 차단기에는 전계를 완화하기 위한 목적으로 차단부에 쉴드가 설치되어 있으며 이 쉴드에 의한 소전류차단성능의 변화를 해석하였다.

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Analysis of Characteristics on the Static Electricity by Streaming Electrification (유동대전에 의한 정전기 특성 분석)

  • Kim, Gil-Tae;Lee, Jae-Keun
    • Journal of the Korean Society of Safety
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    • v.20 no.3 s.71
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    • pp.42-46
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    • 2005
  • The static electricity by thinner flow and discharge energy is investigated experimentally for the purpose of preventing the electrostatic discharge and damage. Test system for evaluating streaming electrification consists of a teflon pipe, a reservoir tank a pump, flowmeters and an electrometer. When dielectric liquid flows through a pipe from one vessel to another, the potential difference generated in the collecting vessel is due to the accumulation of charges. These charges result from the convection of a part of the electrical double layer existing in the tube at the contact between the liquid and the inner wall. When the fluid velocity increases, the electric current increases proportionally. The charging current and accumulated charges by streaming electrification at the thinner velocity of 40cm/s are measured a range of 5 nA and $0.27{\mu}C$ respectively. This amount of static discharge energy generated by streaming electrification is enough to ignite flammable solvent. Therefore surface electric potential should decrease by using electrostatic shielding and ground.

Numerical Study on Polishing Behavior During Oxide CMP (Oxide CMP과정에 대한 수치 운동 해석)

  • Kwon Daljung;Kim Inhwan;Lee Dohyung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.29 no.4 s.235
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    • pp.435-440
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    • 2005
  • In this paper, slurry fluid motion, abrasive particle motion, and roles of groove patterns on the pads are numerically investigated in the 2D and 3D geometries. The simulation results are analyzed in terms of experimental removal rate and WIWNU (Within Wafer Non-Uniformity) for ILD (Inter Level Dielectric) CMP process. Numerical investigations reveal that the grooves in the pad behave as uniform distributor of abrasive particles and enhance the removal rate by increasing shear stress. Higher removal rate and desirable uniformity are numerically and experimentally observed at the pad with grooves. Numerical analysis is very well matched with experimental results and helpful fur understanding polishing mechanism and local physics.

Flow Control using DBD Plasma on Backward-facing Step (DBD 플라즈마를 이용한 후향계단 아음속 유동 제어)

  • Song, Ji-Woon;Park, Sul-Ki;Kim, Tae-Hwan;Cho, Hyung-Hee
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2011.04a
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    • pp.433-436
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    • 2011
  • The effect of plasma on flow characteristics in subsonic flow in backward-facing step is studied. The velocty of main flows are 0.5 m/s. DBD plasma is using for flow control. Stainless foil and polymide films are used as an electrode and dielectric material. The change of flow characteristics are shown by different of plasma generation region in fluid flow.

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Application of Nano Coating to ACSR conductor for the Protection of Transmission lines against Solar Storms, Surface Flashovers, Corona and Over voltages

  • Selvaraj, D. Edison;Mohanadasse, K.;Sugumaran, C. Pugazhendhi;Vijayaraj, R.
    • Journal of Electrical Engineering and Technology
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    • v.10 no.5
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    • pp.2070-2076
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    • 2015
  • Nano composite materials were multi-constituent combinations of nano dimensional phases with distinct differences in structure, chemistry and properties. Nano particles were less likely to create large stress concentrations and thereby can avoid the compromise of the material ductility while improve other mechanical properties. Corona discharge was an electrical discharge. The ionization of a fluid surrounding a conductor was electrically energized. This discharge would occur when the strength of the electric field around the conductor was high enough to form a conductive region, but not high enough to cause electrical breakdown or arcing to nearby objects. This paper shows all the studies done on the preparation of nano fillers. Special attention has given to the ACSR transmission line conductor, TiO2 nano fillers and also to the evaluation of corona resistance on dielectric materials discussed in detail. The measurement of the dielectric properties of the nano fillers and the parameters influencing them were also discussed in the paper. Corona discharge test reveals that in 0%N ACSR sample corona loss was directly proportional to the applied line voltage. No significant change in corona loss between 0%N and 1%N. When TiO2 nano filler concentration was increased up to 10%N fine decrement in corona loss was found when compared to base ACSR conductor, corona loss was decreased by 40.67% in 10%N ACSR sample. It was also found from the surface conditions test that inorganic TiO2 nano filler increases the key parameters like tensile strength and erosion depth.