Experimental A Study on the Removal for Hazardous White Smoke and Aerosols using Dielectric Coagulation System to Treat off-gases from Semiconductor Manufacturing (정전유전체를 이용한 반도체공정에서의 배출가스 처리성능 특성 연구)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2012.05a
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- pp.1221-1222
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- 2012