• 제목/요약/키워드: Die Strength

검색결과 559건 처리시간 0.023초

레이저를 이용한 웨이퍼 다이싱 특성 분석

  • 이용현;최경진;유승렬;양영진;배성창
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
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    • pp.251-254
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    • 2006
  • In this paper, cutting qualifies and fracture strength of silicon dies by laser dicing are investigated. Laser micromachining is the non-contact process using thermal ablation and evaporation mechanisms. By these mechanisms, debris is generated and stick on the surface of wafer, which is the problem to apply laser dicing to semiconductor manufacture process. Unlike mechanical sawing using diamond blade, chipping on the surface and crack on the back side of wafer isn't made by laser dicing. Die strength by laser dicing is measured via the three-point bending test and is compared with the die strength by mechanical sawing. As a results, die strength by the laser dicing shows a decrease of 50% in compared with die strength by the mechanical sawing.

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용융 붕사욕 침지법에 의해 금형용 강에 형성된 VC coating층의 밀착성과 내마모성에 관한 연구 (A study on Adhesion and Wear Resistance of Vanadium Carbide Coating on Die Steels by Immersing in Molten Borax Bath)

  • 이병권;남태운
    • 열처리공학회지
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    • 제13권2호
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    • pp.71-84
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    • 2000
  • A study on adhesion and wear resistance of VC(vanadium carbide) coating on die steels, STD11 and STD61, has been carried out. The VC coating on the die steels was made by immersing them in molten borax bath, a kind of TRD(thermo-reactive deposition and diffusion). Adhesion strength and wear resistance were investigated using scratch test, indentation test and plate-disc test(Ogoshi type) respectively. The influence of sliding distance on the amount of wear has been determined and dominant wear mechanisms has been characterized using optical microscopy, scanning electron microscopy and EDS spectroscopy. The critical adhesion strength($L_c$) between VC coating layer and substrate(STD11) was increased to 60N($L_c$) in the scratch test. In the case of STD61, the strength increased to 24N. The wear resistance of VC coated die steels was excellent because the diffusion layer formed just below the coating layer. The dominant wear mechanism was identified as adhesive wear for VC coating die steels which were worn by combination of cracking and plucking of VC fragments and disc.

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1.2GPa급 강판 판재 성형에서 스프링백 감소를 위한 금형 보상 설계 (Compensation Design to Reduce Springback in Sheet Metal Forming of 1.2GPa Ultra High Strength Steel)

  • 권순호;이호성;이영섭;김승완;정철영;홍석무
    • 소성∙가공
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    • 제25권5호
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    • pp.301-305
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    • 2016
  • The manual modification of stamping die has widely been used in order to reduce springback after sheet metal forming. When UHSS (Ultra High Strength Steel) is used in sheet metal forming, the die design considering springback compensation is more difficult because higher strength sheet has more springback. In this study, the optimization method was used in order to design die geometry considering springback compensation after forming of 1.2GPa UHSS. Die geometries were defined as design variables and the springback distance from the die surface was conducted as object function in optimization process. The optimized die geometry considering springback compensation was performed using finite element and optimization analysis. The simulation results such as thickness distribution and springback amount were compared with measured data using 3D optical measurement system (GOM ARGUS, ATOS). And the prediction of springback amount showed a good agreement within test results.

4점굽힘시험에 의한 실리콘 다이의 두께에 따른 파단강도 평가 (Evaluation of Flexural Strength of Silicon Die with Thickness by 4 Point Bending Test)

  • 민윤기;변재원
    • 마이크로전자및패키징학회지
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    • 제18권1호
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    • pp.15-21
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    • 2011
  • 전자기기의 고집적화를 위해 실리콘 웨이퍼의 두께가 점점 얇아지고 있으며 이로 인해 제조공정 중 균열이나 파손이 발생할 가능성이 높아지고 있다. 본 연구에서는 300 ${\mu}m$~100 ${\mu}m$ 두께의 반도체용 단결정 실리콘 웨이퍼의 파단 강도 및 파괴특성을 평가하였다. 기계적 연마를 통해 두께 (300, 200, 180, 160, 150, 100 ${\mu}m$)가 다른 실리콘 웨이퍼를 준비하였다. 하나의 웨이퍼에서 40개의 실리콘 다이(크기 : 62.5 mm${\times}$4 mm)를 얻어 4점 굽힘시험을 통해 평균 강도값을 구하였다. 강도분포의 통계적 해석을 위해 와이블 선도를 이용하여 형상인자(와이블 계수)와 크기인자(확률적 파괴강도)를 얻었다. 취성 실리콘 다이의 시편 크기(두께)효과와 파단 확률이 고려된 통계적 파단강도 값을 실리콘 다이 두께의 함수로 얻었다. 관찰된 파괴양상을 측정된 파단강도와 관련하여 고찰하였다.

다이캐스팅용 알루미늄 합금으로 제작된 윈도우 와이퍼의 강도 해석 (Strength Analysis of Aluminum Alloy Window Wiper Manufactured by Die Casting)

  • 조승현;이정호;김한구
    • 한국생산제조학회지
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    • 제25권3호
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    • pp.204-210
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    • 2016
  • This study analyzed the amount of displacement of window wipers according to pressure by using finite element analysis (FEA) with KS standards for aluminum alloy window wipers manufactured by die-casting method. The product design was changed over four steps considering the die-casting process to achieve strength greater than that of the conventional steel window wiper. According to the FEA results, the strength of final aluminum alloy window wiper improved by 55% over that of a steel window wiper, and the weight of the former was less by approximately 45%. Therefore, there is the possibility of module downsizing for driving motor capacity. Further, the cost competitiveness improved, and the manufacturing process of aluminum alloy window wipers was simplified.

형상최적화 기법을 이용한 초고강도강판 성형용 프레스 금형의 구조설계 가이드라인 (Design Guideline for Press Tool Structure of Ultra-high Strength Steel Part with Shape Optimization Technique)

  • 강경훈;곽정환;배상범;김세호
    • 소성∙가공
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    • 제26권6호
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    • pp.372-377
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    • 2017
  • In this paper, an effective design procedure was proposed to design the rib of die structure for auto-body member with ultra-high strength steel (UHSS) having ultimate tensile strength (UTS) of 1.5 GPa. From analysis results of the die structure, structural safety of the die was evaluated with information such as displacement and von-Mises stress. It was concluded that the casting part could be designed in order to reduce tool deformation. A design guideline of the die structure was proposed, especially for the rib structure in the casting part with an optimization scheme and local reinforcement concept. Simulation result following the design guideline fully explained that stability of the tool structure could be obtained simultaneously with weight minimization.

강도보강용 STS304 베젤 프레임 헤밍 공정의 금형 설계 (The Die Design of STS304 Bezel Frame for The Strength Reinforcement in Hemming Process)

  • 김강현;이상호;김병민
    • 소성∙가공
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    • 제17권6호
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    • pp.436-442
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    • 2008
  • As the structure of a mobile phone becomes thin to catch up with a slim product trend, the structural strength and resistance to shock of TFT-LCD module are getting to be reduced. Hence, TFT-LCD module is the strength reinforced by bezel frame. The bezel frame was produced by the multi hemming processes with several folding parts. The determination of the optimal number of hemming part and structure of bezel frame are very important process parameter to obtain the strength of that. The effect of process parameters on strength of bezel frame was investigated by FEA. Based on the result of FEA, the experiment was performed using manufactured hemming die, the result of the experiment was compared with FEA and verified. Also, three point bending tests were performed to check the strength of bezel frame.

용융염 침적법에 의한 VC coating 금형강의 굽힘 피로강도에 관한 연구 (A study on the Bending Fatigue Strength of Die Steels coated with VC(Vanadium Carbide)by Immersing in Molten Borax Bath)

  • 이병권;남태운
    • 열처리공학회지
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    • 제6권3호
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    • pp.166-177
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    • 1993
  • Bending fatigue strength tests were made for VC coated die steels which were coated by immersing in a molten borax bath and for hardened die steels which were quenched and tempered, in order to clarify the effect of VC coating at $1000^{\circ}C$ and $1025^{\circ}C$. The material used in this investigation was a representative cold and hot die steels STD11, STD61. The results obtained are as follows. 1) The endurance limit of VC coated die steels was a little lower than that of hardened die steels. It is considered to be mainly due to the decfl.lase of hardness in the substrates. Accordingly, the endurance limit reo covered almost to the level of hardened die steels by an additional diffusion treatment. 2) The initiation point of fatigue fracture of VC coated die steels in reversed bening was on the substrate just under the VC layer. Hence, the endurance limit is corrected to the hardness of this part. 3) But, there is a considerable scatter in this relationship and the endurance limit of VC coated die steels was a little lower than that of hardened die steels with equal hardness. These results suggest that the fatigue strength of VC coated die steels is determined not only by the hardness but also by other factors. For example. the residual stress in the substrate just under VC coating layer is one of the factors besides hardness which is mainly related to the retained austenite(${\gamma}_R$).

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용융염 침적법에 의한 VC Coating 금형강의 인성에 관한 연구 (A Study on the Toughness of Die Steel Coated with VC (vanadium carbide) by Immersing in Molten Borax Bath)

  • 이병권;남태운
    • 열처리공학회지
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    • 제6권2호
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    • pp.59-69
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    • 1993
  • Bending fracture strength test and impact strength test were made for VC coated die steels treated by immersing in molten borax bath and for hardened steels which were quenched and tempered, in order to clarify the effect of VC coating at $1000^{\circ}C$. The material used in this investigation was representative cold and hot work die steels STD11, STD61. The results obtained are as follows. 1) The bending fracture strength of VC coated die steel (STD11, STD61) was lessened with increasing the thickness of the VC coated layer. 2) With increasing the immersing time (imcreasing the thickness of the VC coated layer) the maximum hardness was obtained at 480 minutes holding, after that holding time hardness was decreased. 3) The impact strength of the VC coated die steel was not decreased. In the casse of STD11, it was higher than that of the quenched condition especially at low tempering temperature, and vice versa at high tempering temperature. However in the case of STD61 shows the result to the contrary.

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