• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 A
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• pp.141-143
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• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권5호
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• pp.315-320
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• 2000

This paper presents the fabrication and test of a micropump with an electromagnetic actuator and a pair of aluminum flap valves. The actuator consists of a solenoid coil, a permanent magnet and an actuator diaphragm. The actuator diaphragm is fabricated by the spin coating of silicone rubber. The valve are passive ones and are fabricated by micromachining. The deflection of the fabricated actuator diaphragm is measured with a laser vibrometer. The deflection of the actuator diaphragm is proportional to the input current. The measured deflection of the fabricated diaphragm is $400 \mum$,/TEX> when the input is 118 mApp, and the cut-off frequency is 50 Hz. The maximum flow rate of the fabricated micropump with the electromagnetic actuator is about 5$0 \muell/min$ at 5 Hz when the input current and the duty ratio of the square was are 118 mApp and 50%, respectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.1154-1156
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• 1999

This paper presents the novel fabrication of an electromagnetic micro actuator with a corrugated diaphragm and a flat one. The actuator consists of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The cower coil is fabricated by electroplating and patterning. As the further works, the frequency response of the actuator are obtained by using a laser vibrometer and the static deflection of the actuator diaphragm are measure by using laser displacement meter. The corrugated diaphragm is expected to be better than the flat one with respect to the actuator performance.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 춘계학술대회논문집
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• pp.298-302
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• 2002

Equivalent volume estimation of the coupler and two coupled microphones has a key role in standard microphone pressure calibration. The equivalent volume of the microphone is determined by the dynamic characteristics of the diaphragm system and front cavity. Therefore the modal parameters of diaphragm system - natural frequency and damping fatter - should be measured explicitly for the estimation of the equivalent volume. The diaphragm system is composed of the vibrating diaphragm, back slit behind diaphragm, pressure equalization vent, and front cavity which are acoustically coupled. In the measurement, the electrostatic actuator was used to excite the system with the swept sine, and the frequency response was obtained. The close actuator in front of the diaphragm must influence the radiation impedance of the system, and then the modal parameters. From the measured frequency response, the natural frequency and the damping factor could be estimated with the Complex exponential method based on the Prony model and the zero crossing real and imaginary plot.

• 항공우주기술
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• 제13권2호
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• pp.160-166
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• 2014

액체로켓 엔진용 개폐밸브는 파일럿 공압으로 포핏을 열고 스프링 힘에 의해 닫음으로써 로켓엔진의 추진제 유량을 제어한다. 현재 개발 중인 엔진용 개폐밸브는 다이어프램 액추에이터에서 압력을 제거하면 닫히도록 설계되어 있다. 다이어프램을 설계하고 개발하기 위해 밸브가 열리고 닫히는 특성에 따라 수명을 분석할 필요가 있다. 밸브가 닫히기 시작하는 시점의 작동 유체의 압력을 결정하고, 포핏이 열리는 시점의 압력을 결정되어 힘평형이 설계되어 있다. 수명시험은 상온 유동에서 다이어프램부의 크랙에 의한 누설은 용접 부위에서 발생했다. 다이어프램 액추에이터의 작동 수명은 헬륨 파일럿 압력의 22 MPa 시험에서 61회이다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3328-3330
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• 1999

In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

• 대한기계학회논문집B
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• 제34권6호
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• pp.599-606
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• 2010

본 연구에서는 다양한 작동조건(인가전압, 주파수)에 대하여 박막의 두께와 챔버의 직경이 열공압형 마이크로펌프의 액추에이터 박막의 거동 특성에 미치는 영향을 실험적으로 파악하기 위해 다양한 박막 두께와 챔버직경의 액추에이터를 제작하였다. 액추에이터는 파이렉스 표면에 위치한 마이크로히터, 챔버, 그리고 박막으로 구성된다. 모든 인가전압에 대하여 주파수가 10 Hz 이하로 감소함에 따라 박막 중앙의 최대 변위는 박막의 두께와 챔버의 직경에 관계없이 크게 증가한다. 낮은 주파수 영역에서 챔버로 공급되는 열량이 증가함에 따라 박막 중앙의 변위는 박막의 두께가 얇을수록, 챔버의 직경이 작을수록 증가한다. 10 Hz 이상의 주파수 영역에서 박막 두께, 챔버 직경, 공급 열량과 같은 모든 설계 변수가 박막 중앙의 변위에 미치는 영향은 미미하다.

• 동력기계공학회지
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• 제14권6호
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• pp.35-40
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• 2010

This article deals with the numerical analysis results of stiffness of diaphragm spring used in the clutch of a manual transmission. In order to investigate the relationship of the force and displacement in a diaphragm spring, we have established a numerical model of diaphragm spring using a well-known analytic model of Belleville spring and a cantilever beam model for the finger part of diaphragm spring. Using the stress and strain relations of Belleville spring and cantilever beam, we propose the analytic equation of motion of diaphragm spring for the use of a clutch automated actuator in an automated manual transmission. The proposed analytic model represents the typical dynamic characteristics of diaphragm spring along with the release bearing travel. And it is characterized in a closed-form equation, therefore it can be used for the further study of development of actuator and control law of clutch automating mechanism.

• KIEE International Transactions on Electrophysics and Applications
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• 제4C권4호
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• pp.137-141
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• 2004

In this paper, a thermopneumatic PMDS (polydimethlysiloxane) micropump with nozzle/diffuser elements is presented. The micropump is composed of nozzle/diffuser elements as dynamic valves, an actuator consisting of a circular PDMS diaphragm and a Cr/Au heater on a glass substrate. Four PDMS layers are used for fabrication of an actuator chamber, actuator diaphragm by a spin coating process, spacer layer, and nozzle/diffuser by the SU-8 molding process. The radius and thickness of the actuator diaphragm is 2 mm and 30 ${\mu}{\textrm}{m}$, respectively. The length and the conical angle of the nozzle/diffuser elements are 3.5 mm and 20$^{\circ}$, respectively. The actuator diaphragm is driven by the air cavity pressure variation caused by ohmic heating and natural cooling. The flow rate of the micropump in the frequency domain is measured for various duty cycles of the square wave input voltage. When the square wave input voltage of 5 V DC is applied to the heater, the maximum flow rate of the micropump is 44.6 ${mu}ell$/min at 100 Hz with a duty ratio of 80% under the zero pressure difference.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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• pp.207-209
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• 1993

In this paper, an electrostatic silicon micro actuator has been designed and fabricated using the micro machining technology. The actuator consists of two counter electrodes. One is an Al film deposited on a pyrex glass, and the other is a circular corrugated diaphragm with boron doped. The diaphragm is fabricated by boron etch stop technique using an anisotropic etchant, EPW.