• Proceedings of the KIEE Conference
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• 1994.07a
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• pp.141-143
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• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.5
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• pp.315-320
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• 2000

This paper presents the fabrication and test of a micropump with an electromagnetic actuator and a pair of aluminum flap valves. The actuator consists of a solenoid coil, a permanent magnet and an actuator diaphragm. The actuator diaphragm is fabricated by the spin coating of silicone rubber. The valve are passive ones and are fabricated by micromachining. The deflection of the fabricated actuator diaphragm is measured with a laser vibrometer. The deflection of the actuator diaphragm is proportional to the input current. The measured deflection of the fabricated diaphragm is $400 \mum$,/TEX> when the input is 118 mApp, and the cut-off frequency is 50 Hz. The maximum flow rate of the fabricated micropump with the electromagnetic actuator is about 5$0 \muell/min$ at 5 Hz when the input current and the duty ratio of the square was are 118 mApp and 50%, respectively.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1154-1156
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• 1999

This paper presents the novel fabrication of an electromagnetic micro actuator with a corrugated diaphragm and a flat one. The actuator consists of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The cower coil is fabricated by electroplating and patterning. As the further works, the frequency response of the actuator are obtained by using a laser vibrometer and the static deflection of the actuator diaphragm are measure by using laser displacement meter. The corrugated diaphragm is expected to be better than the flat one with respect to the actuator performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.298-302
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• 2002

Equivalent volume estimation of the coupler and two coupled microphones has a key role in standard microphone pressure calibration. The equivalent volume of the microphone is determined by the dynamic characteristics of the diaphragm system and front cavity. Therefore the modal parameters of diaphragm system - natural frequency and damping fatter - should be measured explicitly for the estimation of the equivalent volume. The diaphragm system is composed of the vibrating diaphragm, back slit behind diaphragm, pressure equalization vent, and front cavity which are acoustically coupled. In the measurement, the electrostatic actuator was used to excite the system with the swept sine, and the frequency response was obtained. The close actuator in front of the diaphragm must influence the radiation impedance of the system, and then the modal parameters. From the measured frequency response, the natural frequency and the damping factor could be estimated with the Complex exponential method based on the Prony model and the zero crossing real and imaginary plot.

• Aerospace Engineering and Technology
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• v.13 no.2
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• pp.160-166
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• 2014

The shutoff valve of a Liquid Rocket Engines (LRE) controls the flow of propellant between turbo-pump and combustion devices of LRE using pilot pressure and spring force. The shutoff valve is closed when the pilot pressure is removed from the diaphragm type actuator. During designing process of life cycle is when should be analyzed according to the characteristics of forces with respect to the opening and closing of diaphragm actuator. A valve has been designed to adjust the control pressure which is required to open a poppet and to determine the working fluid pressure at which a valve starts to close. During flow capacity test under room temperature as a part of life cycle tests, the leakage in diaphragm was occurred due to the leakage of sheet welding sections. The operating cycle of the diaphragm type actuator is about 61 times with 22 MPa of pilot pressure.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3328-3330
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• 1999

In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.6
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• pp.599-606
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• 2010

In the present study, actuators with diaphragms of different thickness and chambers of different diameter are fabricated to examine experimentally how the behavior characteristics of the actuator diaphragm in a thermopneumatic micropump are affected by diaphragm thickness and chamber diameter under various operating conditions with different values of input voltage and frequency. The actuator comprises a microheater set on Pyrex glass, a chamber, and a diaphragm. For all values of the input energy, as the frequency decreases below 10 Hz, the maximum center deflection of the diaphragm greatly increases irrespective of diaphragm thickness and chamber diameter. At low frequencies, as the heat energy supplied to the chamber increases, the center of deflection of the diaphragm increases; the magnitude of deflection is high for thin diaphragms and for diaphragms whose chambers have small diameters. At frequencies higher than 10 Hz, all the design variables such as diaphragm thickness, chamber diameter, and the input energy have negligible effect on the center deflection of the diaphragm.

• Journal of Power System Engineering
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• v.14 no.6
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• pp.35-40
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• 2010

This article deals with the numerical analysis results of stiffness of diaphragm spring used in the clutch of a manual transmission. In order to investigate the relationship of the force and displacement in a diaphragm spring, we have established a numerical model of diaphragm spring using a well-known analytic model of Belleville spring and a cantilever beam model for the finger part of diaphragm spring. Using the stress and strain relations of Belleville spring and cantilever beam, we propose the analytic equation of motion of diaphragm spring for the use of a clutch automated actuator in an automated manual transmission. The proposed analytic model represents the typical dynamic characteristics of diaphragm spring along with the release bearing travel. And it is characterized in a closed-form equation, therefore it can be used for the further study of development of actuator and control law of clutch automating mechanism.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.137-141
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• 2004

In this paper, a thermopneumatic PMDS (polydimethlysiloxane) micropump with nozzle/diffuser elements is presented. The micropump is composed of nozzle/diffuser elements as dynamic valves, an actuator consisting of a circular PDMS diaphragm and a Cr/Au heater on a glass substrate. Four PDMS layers are used for fabrication of an actuator chamber, actuator diaphragm by a spin coating process, spacer layer, and nozzle/diffuser by the SU-8 molding process. The radius and thickness of the actuator diaphragm is 2 mm and 30 ${\mu}{\textrm}{m}$, respectively. The length and the conical angle of the nozzle/diffuser elements are 3.5 mm and 20$^{\circ}$, respectively. The actuator diaphragm is driven by the air cavity pressure variation caused by ohmic heating and natural cooling. The flow rate of the micropump in the frequency domain is measured for various duty cycles of the square wave input voltage. When the square wave input voltage of 5 V DC is applied to the heater, the maximum flow rate of the micropump is 44.6 ${mu}ell$/min at 100 Hz with a duty ratio of 80% under the zero pressure difference.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.207-209
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• 1993

In this paper, an electrostatic silicon micro actuator has been designed and fabricated using the micro machining technology. The actuator consists of two counter electrodes. One is an Al film deposited on a pyrex glass, and the other is a circular corrugated diaphragm with boron doped. The diaphragm is fabricated by boron etch stop technique using an anisotropic etchant, EPW.