• 한국결정성장학회지
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• 제23권5호
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• pp.235-240
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• 2013

그래핀(Graphene)은 전기 전도성 및 열전도성이 우수하고 1 nm 수준의 초 박막 형 필름 소재를 제조할 수 있다는 장점으로 인하여, 차세대 트랜지스터 소자 및 디스플레이 장치에 적용 가능한 방열 소재로서 많은 연구가 활발히 진행되고 있다. 또한 CVD(chemical vapor deposition)제조법으로 합성된 그래파이트(Graphite)는 구조의 단순성 및 유연성 때문에 안정하고 열에 강한 탄소계 방열소재로 주목 받고 있다. 본 연구는 열전도도가 우수한 폼(foam)형태의 구리를 촉매로 상압과 진공에서의 CVD법을 이용하여 그래핀을 성장시킨 후 구리 폼의 기공 안에 다양한 종류의 그래파이트(Natural graphite, expandable(/expanded) graphite, etc)를 복합 및 안정화시켜 기존보다 높은 열전도도를 가지는 방열소재를 개발하였다. 제조된 금속폼/그래파이트 소재를 OM(optical microscopy)과 SEM(scanning electron microscopy)을 이용하여 표면을 확인하였고 DSC(Differential Scanning Calorimetry), 아르키메데스 법을 활용한 비열, 밀도 결과를 확보하였다. 또한 LFA(Laser Flash Analysis)를 이용하여 열 확산계수 예측을 통한 열전도 특성을 평가하였다.

• 한국광학회지
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• 제8권4호
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• pp.277-282
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• 1997

광학소자나 전자소자의 코팅에 많이 이용되고 있는 Diamond-like Carbon(DLC) 박막의 복소굴절율을 광학적 방법을 사용하여 구하였다. PECVD(Plasma enhanced CVD)법에 의해 Si(100)기판과 비정질실리카 기판위에 각각 성장시킨 DLC 박막을 분광타원해석기와 분광광도계를 이용하여 타원해석 스펙트럼과 광투과율 스펙트럼을 측정하고, Sellmeier 분산관계식과 양자역학적 진동자 모델을 이용하여 분석하였다. 비정질실리카 위에 증착된 DLC 박막의 광투과영역에서 분광타원해석분석으로 굴절률 및 박막의 유효두께를 구하고 광흡수영역에서 투과스펙트럼을 역방계산하여 소광계수를 구한 뒤, 이 소광계수 스펙트럼에 최적 근사하는 양자역학적 분산식의 계수들을 회귀분석법으로 결정하여 복소굴절율을 구하였다. 그리고 모델링방법을 타워해석 스펙트럼에 적용하여 Si기판과 비정질이산화규소 기판위에 증착된 DLC 박막의 조밀도, 표면거칠기 등 박막상수를 박막의 성장조건에 따라 분석하였다.

• Journal of the Optical Society of Korea
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• 제19권6호
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• pp.705-710
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• 2015

The fabrication process of thin boron-doped nanocrystalline diamond (B-NCD) microelectrodes on fused silica single mode optical fiber cladding has been investigated. The B-NCD films were deposited on the fibers using Microwave Plasma Assisted Chemical Vapor Deposition (MW PA CVD) at glass substrate temperature of 475 ℃. We have obtained homogenous, continuous and polycrystalline surface morphology with high sp³ content in B-NCD films and mean grain size in the range of 100-250 nm. The films deposited on the glass reference samples exhibit high refractive index (n=2.05 at λ=550 nm) and low extinction coefficient. Furthermore, cyclic voltammograms (CV) were recorded to determine the electrochemical window and reaction reversibility at the B-NCD fiber-based electrode. CV measurements in aqueous media consisting of 5 mM K₃[Fe(CN)₆] in 0.5 M Na₂SO₄ demonstrated a width of the electrochemical window up to 1.03 V and relatively fast kinetics expressed by a redox peak splitting below 500 mV. Moreover, thanks to high-n B-NCD overlay, the coated fibers can be also used for enhancing the sensitivity of long-period gratings (LPGs) induced in the fiber. The LPG is capable of measuring variations in refractive index of the surrounding liquid by tracing the shift in resonance appearing in the transmitted spectrum. Possible combined CV and LPG-based measurements are discussed in this work.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.190.1-190.1
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• 2015

Graphite has excellent mechanical and physical properties. It is known to advanced materials and is used to materials for molds, thermal treatment of furnace, sinter of diamond and cemented carbide tool etc. SiC materials are coated on the surface and holes of graphite to protect particles emitted from porous graphite with 5%~20% porosity and make graphite hard surface. SiC materials have high durability and thermal stability. Thermal CVD method is widely used to manufacture SiC thin films but high cost of machine investment and production are required. SiC thin films manufactured by Si reaction liquid and vapore with carbon are effective because of low cost of machine and production. SiC thin films made by vapor silicon infiltration into porous graphite can be obtained for shorter time than liquid silicon. Si materials are evaporated to the graphite surface in about $10^{-2}$ torr and high temperature. Si materials are melted in $1410^{\circ}C$. Si vapor is infiltrated into the surface hole of porous graphite and $Si_xC_y$ compound is made. $Si_x$ component is proportional to the Si vapor concentration. Si diffusion coefficient is estimated from quadratic equation obtained by Fick's second law. The steady stae is assumed. Si concentration variation for the depth from graphite surface is fitted to quadratic equation. Diffusion coefficient of Si vapor is estimated at about $10^{-8}cm^2s^{-1}$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1340-1342
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• 1998

The diamond-like carbon(DLC) film, as an antireflection layer, is coated on a commerically used Ge window. DLC films are deposited by using an rf(13.56 MHz) plasma CVD. The optimal value of thickness and refractive index of DLC layer has been determined from the computer simulation. IR-transmittances of DLC-coated Ge windows are estimated by measuring FTIR spectra in the wavelength range of$ 2.5{\sim}25{\mu}m$. By coating the DLC film on one side of the Ge window, the transmittance measured at a wavelength of $10{\mu}m$ is about 60 %, while that of the bare Ge is lower than 50 %. Also, a higher transmittance up to about 90 % is obtained by coating the DLC film on both sides of the window. It may be suggested that the further improvement of the IR-transmittance can be achieved by more precisely controlling the thickness and the refractive index of DLC layer and also by adopting various muliti-layer antireflection structures.

• 한국기계가공학회지
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• 제14권4호
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• pp.160-166
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• 2015

Ultrasonic machining (USM) has been considered a new, cutting-edge technology that presents no heating or electrochemical effects, with low surface damage and small residual stresses on brittle workpieces. However, nowadays, many researchers are paying careful attention to the disadvantages of USM, such as low productivity and tool wear. On the other hand, in this study, a high-performance rotary ultrasonic drilling (RUD) spindle is designed and assembled. In this system, the core technology is the design of an ultrasonic vibration horn for the spindle using finite element analysis (FEA). The maximum spindle speed of RUM is 9,600 rpm, and the highest harmonic displacement is $5.4{\mu}m$ noted at the frequency of 40 kHz. Through various drilling experiments on glass workpieces using a CVD diamond-coated drill, the cutting force and cracking of the hole entrance and exit side in the glass have been greatly reduced by this system.

• KSTLE International Journal
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• 제3권1호
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• pp.38-42
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• 2002

Diamond-like Carbon(DLC) films were deposited on Si wafers by an RF-plasma-assisted CVD using CH$_4$gas. Tribological tests were conducted with the use of a rotating type ball on a disk friction tester with dry air. This study made use of four kinds of mating balls that were made with stainless steel but subjected to different annealing conditions in order to achieve different levels of hardness. In all load conditions, testing results demonstrated that the harder the mating materials, the lower the friction coefficient was. The friction coefficients were fecund to be lower with austenite mating balls than with fully annealed martensite balls. Conversely, the high friction coefficient found in soft martensite balls appeared to be caused by the larger contact area between the DLC film and the ball. The wear tracks on DLC films and mating balls could prove that effect. Measuring the wear track of both DLC films and mating balls revealed a similar tendency compared to the results of friction coefficients. The wear rate of austenite balls was also less than that of fully annealed martensite balls. Friction eoefficients decrease when applied leads exceed critical amount. The wear track on mating balls showed that a certain amount of material transfer occurs from the DLC film to the mating ball during a high friction process. Raman Spectra analysis Showed that the transferred materials were a kind of graphite and that the contact surface of the DLC film seemed to undergo a phase transition from carbon to graphite during the high friction process.

• KSTLE International Journal
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• 제9권1_2호
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• pp.22-25
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• 2008

This paper investigated the wetting and adhesion property of undulated DLC film with surface morphology controlled for a reduced real area of contact. The undulated DLC Films were prepared by 13.56 MHZ radio frequency plasma enhanced chemical vapor deposition (r.f. PECVD) by using nanoscale Cu dots surface on a Si (100) substrate. FE-SEM, AFM analysis showed that the after repeated deposition and plasma induced damage with Ar ions, the surface was nanoscale undulated. This phenomenon changed the surface morphology of DLC surface. Raman spectra of film with changed morphology revealed that the plasma induced damage with Ar ions significantly suppressed the graphitization of DLC structure. Also, it was observed that while the untreated flat DLC surfaces had wetting angle starting ranged from $72^{\circ}$ and adhesion force of 333ni. Had wetting angle the undulated DLC surfaces, which resemble the surface morphology of a cylindrical shape, increased up to $104^{\circ}$ and adhesion force decreased down to 11 nN. The measurements agree with Hertz and JKR models. The surface undulation was affected mainly by several factors: the surface morphology affinity to cylindrical shape, reduction of the real area of contact and air pockets trapped in cylindrical asperities of the surface.

• 열처리공학회지
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• 제33권1호
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• pp.25-32
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• 2020

In this study, the tribology of laser patterned DLC thin film was studied. DLC thin films were coated by RF-PECVD to improve the durability of tungsten carbide (WC) materials. DLC thin films have high hardness and low friction characteristics. Dot and line patterning was processed on the surface of DLC thin film with femtosecond laser, and the coefficient of friction was improved. As a result of ball on disk abrasion test, the hardness and friction coefficient of DLC thin films were much better than that of WC material. The friction coefficient of DLC thin film with dot patterning and line patterning showed better results. The excellent performance of the laser patterned DLC coating is appeared to reduce the coefficient of friction due to the reduction of surface contact area.

• 한국재료학회지
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• 제7권12호
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• pp.1047-1051
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• 1997

CH$_{4}$와 H$_{2}$의 혼합가스에 미량의 질소와 산소를 첨가하여 rf-플라즈마 CVD법으로 DLC막을 합성하였다. 이 때 챔버내 압력은 430mtorr, 기판에 인가된 전력은 80W였으며, H$_{2}$와 CH$_{4}$의 비율은 1:1이었다. 이 시편들에 대해 가시광선 영역과 자외선 영역에서의 투과도를 비교하였으며, 결합구조의 변화를 알아보기 위하여 FTIR 분석을 실시하였다. 질소의 경우 첨가량이 6.3%에서 17.4%으로 증가됨에 따라 전체적인 투과도값이 증가하였으며, FRIR 분석결과 wavenumber 3500 $cm^{-1}$ /의 위치에 N-H stretching band가 나타나고 2300$cm^{-1}$ /에는 nitrile의 피크가 나타났다. 이 피크들의 존재는 질소의 첨가에 의하여 interlink를 감소시킴으로써 막의 잔류응력을 현저히 감소시킬 수 있음을 의미한다. 2% $O_{2}$를 첨가한 경우 막의 투과도는 질소를 첨가한 경우보다 월등히 더 향상되었다. 질소첨가량을 증가시킴에 따라 optical band gap또한 증가되는 경향을 보였으며, 2% $O_{2}$를 첨가하였을 때 막의 optical band gap은 0.5까지 감소하였다.