• 대한기계학회논문집B
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• 제22권11호
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• pp.1564-1570
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• 1998

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at subatmospheric pressures has been studied. We created uniform upstream conditions of particle concentration and measured the detection efficiency, the lower detection limit, and the size response of the ISPM using uniform sized methylene blue aerosol particles. The effect of particle size, particle velocity, particle concentration, and system pressure on the detection efficiency was examined. Results show that the detection efficiency of the ISPM decreases with decreasing chamber pressure, and with increasing mass flow rate. The lower detection limit of the ISPM, determined at 50 % of the measured maximum detection efficiency, was found to be about $0.15{\sim}0.2{\mu}m$, which is similar to the minimum detectable size of $0.17{\mu}$ given by the manufacturer.

• Nuclear Engineering and Technology
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• 제53권4호
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• pp.1311-1317
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• 2021

In this study, an airborne alpha detection system, which consists of a passivated implanted planar silicon (PIPS) detector and an air filter, was developed. A collimator applied to the alpha detection system showed an enhancement in resolution and a degradation in detection efficiency. The resolution and detection efficiency were compared and analyzed to evaluate the performance of the collimator. Thus, the resolution was found to be more important than the efficiency as a determining factor of the detection system performance, from the viewpoint of radionuclide identification. The performance was evaluated on three properties of the collimator: hole shape, hole length, and the ratio between the hole and frame pitches. From the hole shape performance evaluation, a hexagonal collimator showed the highest resolution. Further, the collimator with a hole pitch of 14 mm was found to have the highest resolution while that with a frame pitch of 4-6 mm (i.e., 1.2-1.4 times longer than the hole pitch) showed the highest resolution.

• Nuclear Engineering and Technology
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• 제52권11호
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• pp.2601-2606
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• 2020

In this study, we expanded the performance of the existing EXVol code and performed empirical experiments and calculations. A high-resolution gamma spectroscopy system was constructed, and a standard point source and a standard volume source were measured with an HPGe detector with 43.1% relative efficiency. EXVol was verified by quantitative comparison of the detection efficiencies determined by measurements and calculations. To introduce the concept of the detector scanning that occurs in the actual measurement into the EXVol code, a collimator was placed between the source and detector. The detection efficiency was determined in the asymmetric arrangement of the source and detector with a collimator. A collimator made of lead with a diameter of 15 mm and a thickness of 50 mm was installed between the source and the detector to determine the detection efficiency at a specific location. The calculation result was contour plotted so that the distribution of detection efficiency could be visually confirmed. The relative deviation between the measurements and calculations for the coaxial and asymmetric structures was 10%, and that for the collimation structure was 20%. The results of this study can be applied to research using γ-ray measurements.

• Journal of Radiation Protection and Research
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• 제38권4호
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• pp.172-178
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• 2013

본 연구에서는 미래 파이로 시설에서의 핵물질 계량 연구를 위하여 개발하고 있는 통합비파괴측정장치(Unified Non-Destructive Assay, UNDA)의 중성자 검출 효율을 MCNPX 코드를 이용하여 평가하였다. 검출 효율 평가는 두 개의 다른 설계안의 UNDA에 대하여 수행되었으며, $^{252}Cf$ 중성자 발생 선원 위치에 따른 검출 효율 평가와 감손우라늄의 용기 두께 및 위치에 따른 검출 효율 평가를 수행하였다. $^{252}Cf$ 중성자 선원의 위치에 따른 UNDA의 검출 효율 결과는 6.83%부터 13.35%까지 분포로 나타났으며, $^{252}Cf$ 선원이 장치 내부의 상단에 위치할수록 검출 효율은 증가 후 감소하는 경향을 나타냈고, 선원이 외각에 위치될수록 효율이 증가하는 경향을 보였다. 감손우라늄 용기의 두께 및 위치에 따른 검출 효율 평가에서는 용기 두께가 증가할수록 검출 효율은 낮아지는 경향을 보이며, 용기 위치가 장치 상부에 위치될수록 효율은 감소하고, 외각에 위치할수록 효율은 증가하였다. 검출 효율은 $^{252}Cf$ 선원의 경우보다 약간 높게 나타났다(10.31~13.61%). 또한, 장치 상단에 고밀도 폴리에틸렌 덮개가 있는 설계안이 덮개가 없는 설계안 보다 평균적으로 약 2% 정도 중성자 검출 효율이 높은 것으로 평가되었다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3162-3167
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• 2007

The OPS (Optical Particle Sensor) using light scattering from the particles (real-time measurement without physical contact to the particles) can be used for cleanroom or atmospheric environment monitoring. For particles smaller than 300 nm, the detection efficiency becomes lower as scattered light decreases with particle size. To obtain higher detection efficiency with small particles, the flow field in particle chamber and the detection volume should be designed optimally to achieve maximum scattered light from the particles. In this study, a commercial computational fluid dynamics software FLUENT was used to simulate the gas flow field and particle trajectories with various optical chamber designs for 300 nm PSL particle. For estimation of laser viewing volume, we used a commercial computational optical design program ZEMAX. The results will be a great help in the development of OPS which can measure small particles with higher detection efficiency.

• 대한화학회지
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• 제63권1호
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• pp.45-50
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• 2019

Because arsenic (As) is a chemical substance toxic to humans, there have been extensive investigations on the development of As detection methods. In this study, the electrochemical determination of As on nanoporous gold (NPG) electrodes was investigated using anodic stripping voltammetry. The electrochemical surface area of the NPG electrodes was controlled by changing the reaction times during the anodization of Au for NPG preparation, and its effect on the electrochemical behavior during As detection was examined. The detection efficiency of the NPG electrodes improved as the roughness factor of the NPG electrodes increased up to around 100. A further increase in the surface area of the NPG electrodes resulted in a decrease of the detection efficiency due to high background current levels. The most efficient As detection efficiency was obtained on the NPG electrodes prepared with an anodization time of 50 s. The effects of the detection parameters and of the Cu interference in As detection were investigated and the NPG electrode was compared to flat Au electrodes.

• Nuclear Engineering and Technology
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• 제53권7호
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• pp.2364-2370
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• 2021

The ⁿMCP (Neutron sensitive microchannel plate) combined with advanced readout electronics is widely used in energy selective neutron imaging because of its good spatial and timing resolution. Neutron detection efficiency is a crucial parameter for the ⁿMCP. In this paper, a mathematical model based on the oblique cylindrical channel and elliptical pore was established to calculate the neutron absorption probability, the escape probability of charged particles and overall detection efficiency of ⁿMCP and analyze the effects of neutron incident position, pore diameter, wall thickness and bias angle. It was shown that when the doping concentration of the ⁿMCP was 10 mol%, the thickness of ⁿMCP was 0.6 mm, the detection efficiency could reach maximum value, about 24% for thermal neutrons if the pore diameter was 6 ㎛, the wall thickness was 2 ㎛ and the bias angle was 3 or 6°. The calculated results are of great significance for evaluating the detection efficiency of the ⁿMCP. In a subsequent companion paper, the mathematical model would be extended to the case of the spatial resolution and detection efficiency optimization of the coating ⁿMCP.

• Journal of Radiation Protection and Research
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• 제21권3호
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• pp.167-173
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• 1996

알파선 검출 효율 측정을 위한 고체비적검출기의 교정 방법을 제시하였으며, 제시된 교정 방법을 이용하여 CN-85와 LEXAN의 검출 효율을 측정하였다. $0{\sim}5.5MeV$ 에너지 영역의 알파선에 대한 검출 효율을 측정한 결과 CN-85와 LEXAN이 각각 97%, 57%였다. CN-85가 LEXAN에 비해 검출 효율이 높게 나타난 이유는 알파선에 대한 CN-85의 sensitivity가 LEXAN에 비해 좋을 뿐만 아니라 에너지 의존성이 CN-85가 LEXAN에 비해 낮기 때문인 것으로 분석되었으며, CN-85는 알파선의 유도 에너지가 약 3 MeV, LEXAN은 약 1.8 MeV에서 검출 효율이 최대로 나타났다.

• Progress in Superconductivity
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• 제14권2호
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• pp.96-98
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• 2012

Bias current dependence of a superconducting strip photon detector is studied in the wavelength range of 405 to 1310 nm. The detector is made of an $MgB_2$ meander pattern with the line width of 135 nm and thickness of 10 nm. At 1310 nm, the detection efficiency exponentially decreases as the bias current decreases. While at 405 nm, the detection efficiency almost saturates in the high bias current region. These features suggest that the intrinsic detection efficiency of the $MgB_2$ detector is high at 405 nm.

• 대한기계학회논문집B
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• 제24권10호
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• pp.1359-1367
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• 2000

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.