• 제목/요약/키워드: Design of ICP light source

검색결과 2건 처리시간 0.009초

ICP 광원의 정격용량 설계 요소와 전기적 의존성 (The Power Rating Design of Inductively Coupled Plasma Light Source and The Electrical Dependency Between Parameters)

  • 김현일;박대희;장홍순;백수현;임연찬
    • 전기학회논문지
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    • 제57권3호
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    • pp.453-457
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    • 2008
  • We studied on the dependency of parameters which those were used to design a ballast of ICP light source. These parameters were derived from Barkhausen criterion equation about the oscillating condition of ballast. Comparing with a change of turns, we can suggest that a change of l is suitable to control a $I_p$ of an ICP light source. According to the Z-l equation, we can find an optimum rating power of ICP light sources corresponding to l.

발진 이론에 근거한 유도결합형 방전광원의 안정기 설계에 관한 연구 (A Study on the Ballast Design of a Inductively Coupled Plasma Light Source based on Oscillation Theory)

  • 김철진;임연찬
    • 전기학회논문지
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    • 제58권6호
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    • pp.1110-1115
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    • 2009
  • We studied on the design of electrical parameters for ICP(Inductively Coupled Plasma) light sources which can be effective to improve the electrical power efficiency of it. These parameters were derivated from Barkhausen theory about the oscillating condition of a ballaster. The relationships of $f-I_p$ and f-n were calculated theoretically and then these relationships were compared with the measured results about $I_p$ and power depending to a discharge length(l) of ICP light source. Finally, we can see that a specific range of induced current depending to a discharge length would be necessary to minimize the change of magnetization inductance and driving frequency at driving.