Five Mirror System Derived From the Numerical Solutions of all Zero 3rd Order Aberrations and Zero 5th Order Spherical Aberration for DUV Optical Lithography (모든 3차 수차와 5차 구면수차를 제거하여 얻은 극자외선 리소그라피용 5-반사광학계)
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- Korean Journal of Optics and Photonics
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- v.4 no.4
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- pp.373-380
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- 1993