• Title/Summary/Keyword: Deposition time

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The Chemical Vapor Deposition of TiN on Cemented Tungsten Carbide Cutting Tools (초연합금절단공구상에 TiN의 화학증착피막에 관한 연구)

  • 이상래
    • Journal of the Korean institute of surface engineering
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    • v.15 no.3
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    • pp.138-145
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    • 1982
  • The effects of the simultaneous variations of the ratio of feed gases(H2/N2 Flow ratio), feed gas flow rate (H2/N2, total-flow rate) and partial pressures of TiCl4 (PTiCl41) as well as deposition time and cobalt content of the substrate on the deposition rate of the TiN Coated Cemented Tungsten Carbide Tools were investigated. Deposition was carried out in the temperature range of 930$^{\circ}C$-1080$^{\circ}C$ and an activation energy of 46.5 Kcal/mole can be calculated. Transverse rupture strength was noticeably reduced by the TiN coating on the virgin surfa-ce of Cemented Tungsten Carbide, the extent of which was decreased according to the coa-ting thickness. Microhardness value observed on the work was in the range of 1700∼2000kg/mm, which were in well agreement with the value of bult TiN. The wear resistance of TiN layers was performed by turning test and it was observed that crater and flank resistance remarkably enhanced by TiN coating.

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Influence of tangent line angle on surface roughness at fused deposition (FDM에서 곡면부의 접선기울기가 쾌속조형물의 표면에 미치는 영향)

  • 전재억;권광진;정진서;김준안;김수광
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.1067-1070
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    • 2002
  • Fused deposition modelling(FDM) is a rapid prototyping(RP) process that fabricates part layer by layer by deposition of molten thermoplastic material extrude from a nozzle. RP system has many benefit. One of the benefit would be the ability to experiment with physical objects of any complexity in a relatively short period of time. But it has a matter of surface roughness and geometric accuracy. We study on Influence of tangent line angle on surface roughness at fused deposition

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The Deposition of Aluminum Thin Films for Mirror Reflection Films and fits Properties (미러용 반사막을 위한 알루미늄 박막의 증착과 그 특성)

  • 김춘곤;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.11a
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    • pp.244-247
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    • 1995
  • Physical, electrical and optical properties of Aluminum(Al) thin films were investigated in order to establish the optimum sputtering parameters in mirror reflection films. Al. thin films deposited on corning glass substrate by DC magnetron sputtering were grown as a variation of the input power, operation pressure and deposition time. The properties of the Al thin films have been discussed by deposition rate, SEM, XRD, sheet resistivity, resistivity and reflectance. Al thin films were obtained at the deposition conditions as follows: operating pressure, 3 mtorr; DC input power desnsitiy, 3W/$\textrm{cm}^2$.

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Analysis of Aerosol Dynamics, Heat and Mass Transfer in the Modified Chemical Vapor Deposition (수정된 화학증착공정에서 에어로졸 역학, 열전달 및 물질전달 해석)

  • Park, Kyong Soon;Lee, Bang Weon;Choi, Mansoo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.2
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    • pp.262-271
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    • 1999
  • A study of aerosol dynamics has been done to obtain axially and radially varying size distributions of particles generated in the Modified Chemical Vapor Deposition process. Heat and mass transfer have also been studied since particle generation and deposition strongly depend on the temperature field in a tube. Bimodal size distributions of particles have been obtained both in the particulate flow and in the deposited particle layer for the first time using the sectional method to solve aerosol dynamics. Variations of geometric mean diameter, geometric standard deviation have been studied for various parameters; flow rates and maximum wall temperature. The comparison between one-dimensional and two-dimensional approaches has also been made.

The Deposition and Properties of Surface Textured ZnO:Al Films (표면 텍스쳐된 ZnO:Al 투명전도막 증착 및 특성)

  • 유진수;이정철;김석기;윤경훈;박이준;이준신
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.9
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    • pp.378-382
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    • 2003
  • Transparent conductive oxides (TCO) are necessary as front electrode for most thin film solar cell. In our paper, transparent conducting aluminum-doped Zinc oxide films (ZnO:Al) were prepared by rf magnetron sputtering on glass (Corning 1737) substrate as a variation of the deposition condition. After deposition, the smooth ZnO:Al films were etched in diluted HCI (0.5%) to examine the electrical and surface morphology properties as a variation of the time. The most important deposition condition of surface-textured ZnO films by chemical etching is the processing pressure md the substrate temperature. In low pressures (0.9mTorr) and high substrate temperatures ($\leq$$300^{\circ}C$), the surface morphology of films exhibits a more dense and compact film structure with effective light-trapping to apply the silicon thin film solar cells.

Effect of Deposition Rate on the Property of ZnO Thin Films Deposited by Pulsed Laser Deposition

  • Kim Jae-Won;Kang Hong-Seong;Lee Sang-Yeol
    • Journal of Electrical Engineering and Technology
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    • v.1 no.1
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    • pp.98-100
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    • 2006
  • ZnO thin films were deposited at different repetition rates of 5 Hz and 10 Hz by pulsed laser deposition. X-ray diffraction (XRD) full widths at half maximum (FWHMs) of (002) ZnO peak in ZnO thin film deposited at 5 Hz and 10 Hz was 0.22 and $0.26^{\circ}$, respectively. The grain size of ZnO thin film deposited at 5 Hz was larger than that of 10 Hz. The variation of repetition rates did not have an effect on the optical property of ZnO thin films. The degradation of the crystalline quality and surface morphology in ZnO thin film deposited at 10 Hz resulted from supersaturation effect by decrease of time interval between a ZnO particle arriving on a substrate by laser shot and a ZnO particle arriving on a substrate by next laser shot.

Annealing Effect on Structural, Electrical and Optical Properties of CdS Films Prepared by CBD Method

  • Haider, Adawiya J.;Mousa, Ali M.;Al-Jawad, Selma M.H.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.8 no.4
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    • pp.326-332
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    • 2008
  • In this work CdS films were prepared by using chemical bath deposition, which is simple and inexpensive technique suitable for large deposition area. Annealing in air at different temperatures (300, 350, 400, 450 and $500^{\circ}C$) at constant time of 30 min, also for different times (15, 30, 45, 60 and 90 min) at constant temperature ($300^{\circ}C$) is achieved. X-Ray analysis has confirmed the formation of cadmium oxide (CdO) with slight increase in grain size, shift towards lower scattering angle due to relaxation in the tensile strain for deposition films, and structure change from cubic and hexagonal to the hexagonal. From electrical properties, significant increase in electrical conductivity appeared in samples annealed at $300^{\circ}C$ for 60 min, and at $350^{\circ}C$ for 30 min.

Uniform Coating of $TiO_2$ Thin Films on Polypropylene Particles by Plasma Chemical Vapor Deposition Process

  • Pham, Hung Cuong;Kim, Dong-Joo;Kim, Kyo-Seon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.05a
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    • pp.151-152
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    • 2009
  • We coated $TiO_2$ thin films on particles by a rotating cylindrical plasma chemical vapor deposition (PCVD) process and investigated the effects of various process variables on the morphology and growth of thin films. The polypropylene (PP) particles were rotated with the cylindrical PCVD reactor and they were coated with $TiO_2$ thin films uniformly by the deposition of thin mm precursors in the gas phase. The $TiO_2$ thin films were coated on the PP particles uniformly and the thickness of thin films almost proportional to the deposition time. The $TiO_2$ thin films grew more quickly on the PP particles with increasing rotation speed of the reactor. This study shows that a rotating cylindrical PCVD reactor can be a good method to coat high-quality $TiO_2$ thin films uniformly on particles.

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Prediction of sphere surface by the theoretical area error at FDM (FDM에서 이론적 면적오차법에 의한 구형제품의 표면예측)

  • 전재억;권혁준;김수광;김준안;정진서;하만경
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.262-265
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    • 2002
  • Fused deposition modelling(FDM) is a rapid prototyping(RP) process that fabricates part layer by layer by deposition of molten thermoplastic material extrude from a nozzle. RP system has many benefit. One of the benefit would be the ability to experiment wiか physical objects of my complexity in a relatively short period of time. But it has a matter of surface roughness and geometric accuracy. We study on Influence of angle of tangent line and area error on sphere surface roughness at fused deposition.

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Large-Scale Vacuum Technologies for $730{\times}920$ AMOLED Production; The world's largest OLED deposition system

  • Hwang, Changhun;Han, Seung-Jin;Kim, Do-Gon;Yook, Sim-Man;Kim, Seung-Han;Kim, Jin-Hyung;Kim, Beom-jai;Won, You-Tae;Park, Ki-Joo;Kim, Kwang-Ho;Kim, Byung-Seok;Kang, Teak-Sang;Kim, Jung-Hwan;Seo, Sang-Won;Song, Ha-Jin;Sim, Hyung-Bo;Noh, Young-Bo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.668-672
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    • 2005
  • Doosan DND, OLED manufacturing equipment maker, has developed the largest deposition system to produce $730{\times}920mm$ size AMOLED devices for the first time in the world. It is necessary for producing 40" AMOLED panels to develop the large-scaled vacuum technologies including ICP plasma, stretching glass chuck, organic deposition, metal deposition and hybrid encapsulation processes.

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