• 제목/요약/키워드: Deposition thickness

검색결과 1,562건 처리시간 0.031초

외부증착(OVD)공정에 관한 열전달과 입자부착에 관한 연구 (A Study of Heat Transfer and Particle Deposition During Outside Vapor Deposition Process)

  • 송영휘;최만수;강신형
    • 대한기계학회논문집
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    • 제18권1호
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    • pp.193-202
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    • 1994
  • A study of heat transfer and particle deposition has been made numerically for outside vapor deposition process. Heat conduction through the two layer cylinder which consists of the target and the deposited layer is included together with heat transfer and gas jet flow onto the cylinder from the torch. Temperature and flow fields have been obtained by an iterative method and thermophoretic particle deposition has been studied. Of particlar interests are effects of the thickness of the deposited layer, the torch speed and the rotation speed of the cylinder on particle deposition flux and efficiency. Effects of buoyancy, variable properties and tube rotation are included.

Polyimide 기판과 ZnO 박막의 접합강도에 미치는 증착조건에 관한 연구 (A Study on the Deposition Conditions on Joint Strength of Polyimide Substrate and ZnO Thin Film)

  • 허장욱
    • 한국기계가공학회지
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    • 제12권2호
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    • pp.62-67
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    • 2013
  • The influence of internal stress and joint strength(shear, tensile) according to the deposition conditions was investigated by the Polyimide substrate and ZnO thin film. Deposition thickness and temperature affect the internal stress and the internal stress was minimum at the 60nm and $200^{\circ}C$ of the deposition conditions. Tensile strength is large at the deposition condition that shear strength is large and the shear strength was about 50% of the tensile strength. The shear strength and tensile strength were large at deposition condition that internal stress was small. Crack occurred near the joint interface of Polyimide substrate and progressed along the interface until the final fracture.

DETORQUE FORCE OF TiN-COATED ABUTMENT SCREW WITH VARIOUS COATING THICKNESS AFTER REPEATED CLOSING AND OPENING

  • Kim, Han-Su;Kim, Hee-Jung;Chung, Chae-Heon
    • 대한치과보철학회지
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    • 제45권6호
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    • pp.769-779
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    • 2007
  • Statement of problem. When TiN coating is applied to the abutment screw, occurrence of greater preload and prevention of the screw loosening could be expected due to decrease of frictional resistance. However, the proper thickness of TiN coating on abutment screw has not been yet reported. Purpose. The purpose of this study is to find out the appropriate TiN coating thickness by evaluating the detorque force and the surface change of titanium abutment screw with various TiN coating thickness. Material and methods. 1. Material Thirty five non-coated abutment screws were prepared for TiN coating. TiN coatings were prepared by Arc ion plating method. Depending on the coating deposition time(CDT), experimental groups were divided into 6 groups(CDT 30min, 60min, 90min, 120min, 150min, 180min) and those of 1 group was not coated as a control group. Each group was made up of 5 abutment screws. 2. Methods FE-SEM(Field Emission Scanning Electron Microscoper) and EDX(Energy Dispersive X-ray Spectroscopy) were used to observe the surface of the abutment screw. Electric scales was used to measure the weight of the abutment screw after the repeated closing and opening of 10 trials. Detorque force was measured with digital torque gauge, at each trial. Results. 1. As the coating deposition time increased, the surface became more consistent and smooth. 2. As for the abutment screws that were TiN coated for more than 60 minutes, no surface change was found after the repeated closing and opening. 3. The TiN coated abutment screws showed less weight change than the non-coated abutment screws. 4. The TiN coated abutment screws showed higher mean detorque force than the noncoated abutment screws. 5. The abutment screw coated for 60 minutes showed the highest mean detorque force. Conclusion. The coating layer of proper thickness is demanded to obtain consistent and smooth coating surface, resistance to wear, and increased detorque force of the abutment screw. In conclusion, the coating deposition time of 60 minutes indicated improved mechanical property, when TiN coating was conducted on titanium abutment screw.

BCP 두께 변환에 따른 OLEDs의 효율 향상 (Efficiency Improvement of OLEDs depending on the Thickness Variation of BCP)

  • 김원종;이영환;박영하;김태완;홍진웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.349-350
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    • 2008
  • In the structure of ITO/N,N'-diphenyl-N,N' bis (3-methylphenyl)-1,1'-biphenyl-4,4'-diamine(TPD) /2,9-Dimethy 1-4,7-diphenyl-1,10-phenanthroline (BCP)/tris (8-hydroxyquinoline)aluminum$(Alq_3)$/Al device, we studied the efficiency improvement of organic light-emitting diodes due to thickness variation of BCP materials used for a electron breaking layer. The thickness of TPD and $Alq_3$ was manufactured 40 nm, 60 nm, respectively under a base pressure of $5\times10^{-6}$Torr using a thermal evaporation. The TPD and $Alq_3$ layer were evaporated to be at a deposition rate of 2.0 A/s. The BCP was evaporated to be at a deposition of 1.0 A/s. When the thickness of BCP increased from 5 to 30 nm, we found that the luminous efficiency and the external quantum efficiency is superior to the others when the thickness of BCP is 20 nm. Compared to the ones from the devices made without BCP, the luminous efficiency and the external quantum efficiency was improved by 57 %, 70%, respectively.

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CNx코팅된 강의 회전접촉피로에 미치는 코팅두께의 영향 (Effect of Coating Thickness on Rolling Contact Fatigue of CNx Coated Steel)

  • 최병영;노리츠구 우메하라
    • 열처리공학회지
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    • 제13권5호
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    • pp.355-359
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    • 2000
  • Ion beam assisted deposition system was used to deposit CNx coatings with various thickness on the substrates of high-frequency induction hardened steels. Rolling contact fatigue tests were performed using Polymet RCF-1 machine with a constant supply of lubricant. Rolling contact fatigue life was substantially different in the steels with various thickness of CNx coatings. The optimum thickness of CNx coating was found to be $8.9{\mu}m$, showing the longest fatigue life, mainly caused by higher resistance to initiation of cracks and protective overcoat remaining to the surface failure during rolling contact fatigue. Cracks were initiated in the substrates under the surface of wear track and propagated to the surface, which eventually resulted in the failure. The reduction of fatigue life observed in the specimen with elimination of CNx coating during rolling contact fatigue was explained by the substrates deformation.

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Lifetime Performance of EB-PVD Thermal Barrier Coatings with Coating Thickness in Cyclic Thermal Exposure

  • Lu, Zhe;Lee, Seoung Soo;Lee, Je-Hyun;Jung, Yeon-Gil
    • 한국재료학회지
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    • 제25권10호
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    • pp.571-576
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    • 2015
  • The effects of coating thickness on the delamination and fracture behavior of thermal barrier coating (TBC) systems were investigated with cyclic flame thermal fatigue (FTF) and thermal shock (TS) tests. The top and bond coats of the TBCs were prepared by electron beam-physical vapor deposition and low pressure plasma spray methods, respectively, with a thickness ratio of 2:1 in the top and bond coats. The thicknesses of the top coat were 200 and $500{\mu}m$, and those of the bond coat were 100 and $250{\mu}m$. FTF tests were performed until 1140 cycles at a surface temperature of $1100^{\circ}C$ for a dwell time of 5 min. TS tests were also done until more than 50 % delamination or 1140 cycles with a dwell time of 60 min. After the FTF for 1140 cycles, the interface microstructures of each TBC exhibited a sound condition without cracking or delamination. In the TS, the TBCs of 200 and $500{\mu}m$ were fully delaminated (> 50 %) within 171 and 440 cycles, respectively. These results enabled us to control the thickness of TBC systems and to propose an efficient coating in protecting the substrate in cyclic thermal exposure environments.

Relationship between Secondary Electron Emissions and Film Thickness of Hydrogenated Amorphous Silicon

  • Yang, Sung-Chae;Chu, Byung-Yoon;Ko, Seok-Cheol;Han, Byoung-Sung
    • KIEE International Transactions on Electrophysics and Applications
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    • 제4C권4호
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    • pp.185-189
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    • 2004
  • The temporal variation of a secondary electron emission coefficient (${\gamma}$ coefficient) of hydrogenated amorphous silicon (a-Si:H) was investigated in a dc silane plasma. Estimated ${\gamma}$ coefficients have a value of 2.73 ${\times}$ 10$^{-2}$ on the pure aluminum electrode and 1.5 ${\times}$ 10$^{-3}$ after 2 hours deposition of -Si:H thin films on a cathode. It showed an abrupt decrease for about 30 minutes before saturation. The variation of the ${\gamma}$ coefficient was estimated as a function of the thin film thickness, and the film thickness was about 80 nm after 30 minutes deposition time. These results are compared with the results of a computer simulation for ion penetration into a cathode.

EL시스템의 Rhodamine 유도체화합물의 표면특성 (The Microscopic Surface Properties of Rhodamine Derivatives in EL System)

  • 박수길;조성렬;손원근;조병호;임기조;이주성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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    • pp.265-268
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    • 1997
  • Electroluminescent(EL) devices are constructed using multilayer organic thin film. A cell structure of glass substrate/Indium-Tinoxide/TPD as a hole transporting layer/Alq3+Rhodamine 101 perchrolate(Red3) as an emitting layer/Alq3 as an electrron transporting layer/Al as an electrode was employed. Optimal thickness of emitting layer in EL cell was performed from the viewpoint of the electronics properties of emitting layers. The general vapor-deposition method was used to control the thickness of omitting layer in EL devices and electro-optical characteristics were measured. It is clarified that controlling thickness of emitting layer in vapor-deposition film had an effect on the change of carrier injection and EL spectrum. The intensity of red omission with luminance of 81cd/$m^2$ was achived at 11V driving voltage. The surface morphology of emitting layer in EL devices was investigated.

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제조조건에 따른 TbFeCo 박막의 산화 (The oxidation of TaFeCo thin films according to the depositio conditions)

  • 문정탁;김명한;이동철
    • 한국재료학회지
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    • 제4권7호
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    • pp.767-774
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    • 1994
  • The TbFeCo thin films were prepared by the magnetron sputtering system to investigate the effect of the base pressure, film thickness and pre sputtering on the oxidation of the films by analyzing the change of matneto optical properties and by AES depth profile. The films prepared by the facing targets sputtering system represented almost constant magneto optical properties independent of the base pressure resulting from the short flight distance of the sputtered particles. Also, the thin TbFeCo films represented better perpendicular anisotropy as the films thickness increased with pre sputtering. However, it was still needed a deposition rate higher than a certain critical deposition rate to obtain a perfect perpendicular anisotropy even at a very high film thickness.

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전자빔 증발법 박막 증착을 이용한 양극 산화 알루미늄 템플릿의 나노 포어 가공 연구 (Study on the narrowed nanopores of anodized aluminum oxide template by thin-film deposition using e-beam evaporation)

  • 이승훈;이민영;김천중;김관오;윤재성;유영은;김정환
    • 한국표면공학회지
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    • 제54권1호
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    • pp.25-29
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    • 2021
  • The fabrication of nanopore membrane by deposition of Al2O3 film using electron-beam evaporation, which is fast, cost-effective, and negligible dependency on substance material, is investigated for potential applications in water purification and sensors. The decreased nanopore diameter owing to increased wall thickness is observed when Al2O3 film is deposited on anodic aluminum oxide membrane at higher deposition rate, although the evaporation process is generally known to induce a directional film deposition leading to the negligible change of pore diameter and wall thickness. This behavior can be attributed to the collision of evaporated Al2O3 particles by the decreased mean free path at higher deposition rate condition, resulting in the accumulation of Al2O3 materials on both the surface and the edge of the wall. The reduction of nanopore diameter by Al2O3 film deposition can be applied to the nanopore membrane fabrication with sub-100 nm pore diameter.