• 제목/요약/키워드: Deposition reduction

검색결과 490건 처리시간 0.033초

게이트 절연막에 의한 다이아몬드 MIS (Metal-Insulator-Semiconductor) 계면의 전기적 특성 개선과 전계효과 트랜지스터에의 응용 (Improvement of Electrical Properties of Diamond MIS (Metal-Insulator- Semiconductor) Interface by Gate Insulator and Application to Metal-Insulator- Semiconductor Field Effect Transistors)

  • 윤영
    • 한국전자파학회논문지
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    • 제14권6호
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    • pp.648-654
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    • 2003
  • 본 논문에서는 비 산화물인 불소화합물 게이트절면막을 이용하여 박막반도체 다이아몬드 MS계면(Metal-Insulator-Semiconductor Interface)의 전기적 안정화를 실현하였다. 특히 산소 게터링 효과(Oxygen-Gettering Effect)에 의한 표면준위 억제를 통해, 박막반도체 다이아몬드 MIS계면에 있어서 최적의 전기적 특성을 부여하는 BiF2 게이트절연막을 개발하였다. 본 논문의 결과에 의하면, BaF$_2$ 게이트 절연막을 이용하여 제작한 A1/BaF2/diamond MIS 다이오드와 MISFET(Metal-Insulator-Semiconductor Field Effect Transistor)로부터 저농도의 ~10101/$\textrm{cm}^2$ eV의 표면준위밀도가 관측되었고, 그리고 이제까지 발표된 다이아몬드 박막반도_체 FET중 최고치인 400 $\textrm{cm}^2$/Vs의 유효이동도가 관찰되었다.

라돈 환경계통의 제어 매개변수 모델링 (Modeling a Radon Environment System with Dose Sensitivity to the Controllable Parameters)

  • 주운표;김건중;장시영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1991년도 하계학술대회 논문집
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    • pp.753-756
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    • 1991
  • This paper aimed to analyse dose sensitivity to the controllable parameters of in-door radon $(^{222}Rn)$ and its decay products(Rn-D) by applying the input-output linear system theory. Physical behaviors of $^{222}Rn$ & Rn-D were analyzed in terms of $^{222}Rn$ gas generation, -migation and - infiltration to indoor environments, and the performance output-function(i.e. mean dose equivalent to Tracho-Bronchial(TB) lung region was assessed to the following ranges of the controllable parameters; a) the ventilation rate constant $({\lambda}_v)$ : $0{\sun}500[h^{-1}]$. b) the attachment rate constant$({\lambda}_a)$ : 0-500 $[h^{-1}]$. c) deposition rate constant $({\lambda}{_{d}^{u}})$: 0-50$[h^{-1}]$. A linear input-output model was reconstructed from the original models in literatures, as follows, which was modified into the matrices consisting of 111 nodal equations. a) indoor ${222}Rn$ & Rn-D Behaviour: jacobi- Porstendorfer- Bruno model. b) lung dosimerty : Jacobi-Eisfeld model. Some of the major findings, which identify the effectiveness of this model, were as follows. a) ${\lambda}_v$ is most effective, dominant controllable parameters in dose reduction, if mechanical ventilation is applied. b) ${\lambda}_v$, depending on the air particle-concentration, reduces the dose somewhat within ${\lambda}_v$<1 $h^{-1}R range. However, the dose increases conversely, ${\lambda}_v$>1 $h^{-1}R range range. c) ${\lambda}{_{d}^{4}}$ reduces the dose linearly as ${\lambda}_v$ dose. Such dose(z-axis) sentivities are shown with three-dimensional plots whoes x,y-axes are combined 2out the 3 parameter${\lambda}_v{\lambda}_s,\;{\lambda}_d^s$.

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Changes in Marine Environment by a Large Coastal Development of the Saemangeum Reclamation Project in Korea

  • Lie, Heung-Jae;Cho, Cheol-Ho;Lee, Seok;Kim, Eun-Soo;Koo, Bon-Joo;Noh, Jae-Hoon
    • Ocean and Polar Research
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    • 제30권4호
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    • pp.475-484
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    • 2008
  • The word 'Saemangeum' indicates an estuarine tidal flat in the southwestern part of the Korean peninsula. The Saemangeum Reclamation Project was launched as a national project in 1991 to reclaim a large coastal area of $401\;km^2$ by constructing a 33-km long dyke. The final dyke enclosure in April 2006 has transformed the tidal flat into lake and land. An integrated oceanographic study has been conducted since 2002 as a part of the Government Action Plan to monitor and assess changes in the marine environment. Prior to the dyke enclosure, the coastal environment in the Saemangeum was a complex system governed by tidal motion, estuarine processes, and coastal circulation of the Yellow Sea. The dyke construction has radically changed not only the estuarine tidal system inside the dyke, but also the coastal marine environment outside the dyke. Post to the dyke enclosure, subsequent changes such as red tide, hypoxia, and coastal erosion/deposition occur successively. Red tides appear almost the year round in the inner area. Even under the condition that the sluice gates are fully open, the water quality does not improve as much as the developers would expect, mainly due to the critical reduction of the hydrodynamic stirring power. We will introduce details of our monitoring program and significant changes in the Saemangeum marine environment, based on observations and model results.

새만금 4호 방조제 연결 후 군산갯벌 대형저서동물군집 변화 (Changes in Macrobenthic Community Structure on Gunsan Tidal Flat after the Closing of the Saemangeum 4th Dyke)

  • 구본주;신상호;우한준;김은수;제종길
    • Ocean and Polar Research
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    • 제30권4호
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    • pp.497-507
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    • 2008
  • With the reduction of tidal currents by the closing of the Saemangeun 4th dyke, sedimentary environments on the Gunsan tidal flat, the nearest inner flat from the 4th dyke, has been severely changed, which might affect macrobenthic assemblages on the habitats. In order to investigate changes in macrobenthic community structure on Gunsan tidal flat, field surveys were seasonally conducted at seven stations from April 2002 to November, 2005. Sedimentary facies on the study area were shifted into muddominant facies. The fine sediment has been greatly deposited on the tidal flat with accumulation of organic materials after closing the water passage of 4th dyke section. These drastic variations in environments gave rise to change in macrobenthic community structure. Since the closure of the 4th dyke, the number of species of macrobenthos has gradually decreased. And the filter feeders and sand-favored species such as Urothoe convexa, Macrophthalmus dilatatus, Umbonium thomasi, and Mactra veneriformis have been replaced by the deposit feeders such as Macrophthalmus japonicus and Ilyoplax pingi. MDS ordination based on Bray-Curtis similarity from forth-root transformed species abundance data showed that the macrobenthic communities have passed through three succession stages from 2002 to 2005. During the third stage of 2005 opportunistic species such as Prionospio japonica, Heteromastus filiformis and Sinocorophium sinensis increased in population on the tidal flat.

Effect of Mineral-induced Alkaline Reduced Water on Sprague-Dawley Rats Fed on High-fat Diet

  • Jin Dan;Park Seung-Kyu;Lee Young-Mi;Yoon Yang-Suk;Kim Dong-Heui;Deung Young-Kun;Lee Kyu-Jae
    • 대한의생명과학회지
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    • 제12권1호
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    • pp.1-7
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    • 2006
  • Mineral-induced alkaline-reduced water (MRW) is generated by the chemical reaction of water with alkaline earth metals and characterized by high pH and low oxidation-reduction potential. As ROS are believed to have a role in the pathogenesis of obesity, we attempted to determine the effect of MRW on obesity in Sprague-Dawley (SD) rats fed on a high-fat diet. The body weight of the MRW group was significantly lower than that of the control group in most periods of the examination (P<0.05). Serum level of triglycerides (p<0.05) and fat deposition in the livers of the MRW group were found to have been significantly reduced. This suggests that MRW down-regulates lipid metabolism, thereby suppressing obesity. Possible mechanisms of MRW related to reactive oxygen species were also discussed. Our results suggest that MRW is effective in the alleviation of obesity in SD rats fed on high-fat diet.

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유전상수가 낮아지는 원인과 이온 분극의 효과 (Origin of Decreasing the Dielectric Constant and the Effect of Ionic Polarization)

  • 오데레사
    • 한국진공학회지
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    • 제18권6호
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    • pp.453-458
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    • 2009
  • SiOC 박막을 BTMSM과 산소의 혼합가스를 사용하여 CVD 방법으로 증착하였다. 박막의 특성은 가스 유량비에 따라서 변하였다. 유전상수는 MIS 구조를 이용하여 C-V 측정법에 의하여 얻었다. 결합의 말단을 구성하는 Si-$CH_3$ 결합 사이의 공간효과에 의해서 기공이 만들어지며, 기공의 형성에 의해서 박막의 두께가 증가하였다. 그러나 분극의 감소에 의해서 만들어지는 SiOC 박막은 두께가 감소하면서 유전상수도 감소되었다. 열처리 후 유전상수는 수산기의 기화에 의해서 감소되었다. 박막의 두께는 분극의 감소에 의한 유전상수의 감소와 연관이 있었다. 굴절률은 박막의 두께에 반비례하는 경향성이 있으며, 박막의 두께와 굴절률의 경향성은 열처리 후에도 변하지 않았다.

Swift Synthesis of CVD-graphene Utilizing Conduction Heat Transfer

  • Kim, Sang-Min;Mag-isa, Alexander E.;Oh, Chung-Seog;Kim, Kwang-Seop;Kim, Jae-Hyun;Lee, Hak-Joo;Yoon, Jonghyuk;Lee, Eun-Kyu;Lee, Seung-Mo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.652-652
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    • 2013
  • The conventional thermal chemical vapor deposition (CVD) setup for the graphene synthesis has mainly used convective heat transfer in order to heat a catalyst (e.g. Cu) up to $1,000^{\circ}C$. Although the conventional CVD has been so far widely accepted as the most appropriate candidate enabling mass-production of high-quality graphene, this method has stillremained under the standard for the commercialization largely due to the poor productivity arisen out of the required long processing time. Here, we introduced a fast and efficient synthetic route toward CVD-graphene. Unlike the conventional CVD using convection heat transfer, we adopted a CVD setup utilizing conduction heat transfer between Cu catalyst and rapid heating source. The high thermal conductive nature of Cu and the employed rapid heating source led to the remarkable reduction in processing timeas compared to the conventional convection based CVD (Fig. 1A), moreover, the synthesized graphene was turned out to have comparable quality to that synthesized by the conventional CVD (Fig. 1B). For the optimization of the conduction based CVD process, the parametric studies were thoroughly performed using through Raman spectroscopy and electrical sheet resistance measurement. Our approach is thought to be worth considerable in order to enhance productivity of the CVD graphene in the industry.

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The Effect of Postural Correction and Subsequent Balloon Inflation in Deformity Correction of Acute Osteoporotic Vertebral Fractures

  • Liu, Hai-Xiao;Xu, Cong;Shang, Ping;Shen, Yue;Xu, Hua-Zi
    • Journal of Korean Neurosurgical Society
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    • 제55권6호
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    • pp.337-342
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    • 2014
  • Objective : To determine deformity correction by postural correction and subsequent balloon inflation in acute vertebral compression fractures (OVCFs) and to examine the effect of bone mineral density on deformity correction. Methods : A totol of 50 acute OVCFs received balloon kyphoplasty. Lateral radiographs were taken and analyzed at five different time points : 1) preoperative, 2) after placing the patient in prone hyperextended position, 3) after balloon inflation, 4) after deposition of the cement, and 5) postoperative. All fractures were analyzed for height restoration of anterior (Ha), middle (Hm) and posterior (Hp) vertebra as well as Cobb angle and Kyphotic angle. The bone mineral density (BMD) of lumbar spine was measured by dual-energy X-ray absorptiometry. According to the T-score, the patients were divided into two groups which were osteoporosis group and osteopenia group. Results : Postoperative measurements of Ha, Hm and the Cobb angle demonstrated significant reduction of 4.62 mm, 3.66 mm and $5.34^{\circ}$ compared with the preoperative measurements, respectively (each p<0.05). Postural correction significantly increased Ha by 5.51 mm, Hm by 4.35 mm and improved the Cobb angle by $8.32^{\circ}$ (each p<0.05). Balloon inflation did not demonstrate a significant improvement of Ha, Hm or the Cobb angle compared with baseline prone hyperextended. Postural correction led to greater improvements of Ha, Hm and Cobb angle in osteoporosis group than osteopenia group (each p<0.05). Conclusion : In acute OVCFs, the height restoration was mainly attributed to postural correction rather than deformity correction by balloon inflation. BMD affected deformity correction in the process of postural correction.

메탄에 의한 이산화탄소의 환원반응에 관한 연구 (A Study on the Catalytic Reduction of Carbon Dioxide by Methane)

  • 홍성수;양진섭;김병기;주창식;이근대
    • 공업화학
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    • 제8권4호
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    • pp.685-693
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    • 1997
  • 여러 종류의 담체에 담지된 니켈 촉매상에서 메탄에 의한 이산화탄소 개질반응에 대해 연구하였다. 여러 가지 담체중에 천연 제올라이트가 가장 높은 활성을 보여주었고, 염기성 담체에 비해 산성 담체에 담지된 니켈 촉매의 활성이 좋았으며 촉매의 비활성화도 느리게 진행되었다. 천연제올라이트에 담지된 니켈 촉매의 담지율이 증가할수록 활성이 증가하였고, 10wt% 이상으로 담지된 경우에는 활성의 변화가 그다지 일어나지 않았다. 반응물중 메탄과 이산화탄소의 비에 따라 전환율과 생성물의 수율이 크게 영향을 받았으며, $CH_4/CO_2$의 비가 1일 때 가장 높은 수소 및 일산화탄소 수율을 나타내었다. 촉매의 비활성화는 반응중에 생성되는 코크에 침적에 기인하는 것으로 생각되며, 코크는 주로 메탄의 분해에 의해 생성되었고 코크의 형상은 whisker형으로 촉매의 비활성화 속도를 느리게 하였다.

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태양전지 응용을 위한 고품위 및 저가격 ZnO 박막 제조에 관한 연구 (A Study on the High Quality and Low Cost Fabrication Technology of ZnO Thin Films for Solar Cell Applications)

  • 이재형
    • 한국정보통신학회논문지
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    • 제14권1호
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    • pp.191-196
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    • 2010
  • 본 연구에서는 타겟 제작에 드는 비용을 줄이고, 타겟 이용의 효율성을 높이기 위해 기존의 소결된 세라믹 타겟 대신 분말 타겟으로 사용하여 알루미늄 도핑된 산화아연(Aluminum doped zinc oxde; AZO)박막을 마그네트론 스퍼터법에 의해 제조하고, 스퍼터 압력에 따른 박막 물성을 조사하였다. 유리 기판에 증착된 AZO 박막은 타깃 종류 및 스퍼터 압력에 관계없이 기판에 수직한 c-축 방향으로 우선 성장방위를 갖는 hexagonal 구조로 성장되었다. 스퍼터 압력이 증가함에 따라 이 면 방향으로의 결정성장이 촉진되었다. AZO 박막의 전기적, 광학적 특성은 스퍼터 압력 증가에 따라 향상되었으며, 15 mTorr에서 $6.5{\times}10^{-1}\;{\Omega}-cm$의 최소의 비저항 값을 나타내었다.