• Title/Summary/Keyword: Deposition of Pt

검색결과 433건 처리시간 0.034초

Pt/SCT/Pt 박막 구조의 전기적인 특성 (Electrical Properties of Pt/SCT/Pt Thin Film Structure)

  • 김진사;신철기
    • 전기학회논문지
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    • 제56권10호
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    • pp.1786-1790
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    • 2007
  • The $(SrCa)TiO_3(SCT)$ thin films are deposited on Pt-coated electrode ($Pt/TiN/SiO_2/Si$) using RF sputtering method at various deposition temperature. The dielectric constant of SCT thin films were increased with the increase of deposition temperature, and changed almost linearly in temperature ranges of $-80{\sim}+90[^{\circ}C]$. Also, SCT thin films was observed the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency was observed above 200[kHz]. V-I characteristics of SCT thin films show the increasing leakage current with the increases of deposition temperature. The conduction mechanism of the SCT thin films observed in the temperature range of $25{\sim}100[^{\circ}C]$ can be divided into three characteristic regions with different mechanism by the increasing current. The region 1 below 0.8[MV/cm] shows the ohmic conduction. The region 2 can be explained by the Child's law, and the region 3 is dominated by the tunneling effect.

아크 플라즈마 증착공정을 통한 Pt/C 나노촉매 합성 및 특성평가 (Characteristics of Pt/C Nano-catalyst Synthesized by Arc Plasma Deposition)

  • 주혜숙;최한신;하헌필;김도향
    • 한국분말재료학회지
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    • 제19권1호
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    • pp.6-12
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    • 2012
  • Electricity is generated by the combined reactions of hydrogen oxidation and oxygen reduction which occur on the Pt/C catalyst surface. There have been lots of researches to make high performance catalysts which can reduce Pt utilization. However, most of catalysts are synthesized by wet-processes and a significant amount of chemicals are emitted during Pt/C synthesis. In this study, Pt/C catalyst was produced by arc plasma deposition process in which Pt nano-particles are directly deposited on carbon black surfaces. During the process, islands of Pt nano-particles were produced and they were very fine and well-distributed on carbon black surface. Compared with a commercialized Pt/C catalyst (Johnson & Matthey), finer particle size, narrower size distribution, and uniform distribution of APD Pt/C resulted in higher electrochemical active surface area even at the less Pt content.

Copper oxide/n-Si 전극의 광전기화학 변환 특성과 안정성에 미치는 Pt 층의 영향 (Effect of Pt Layers on the Photoelectrochemical Properties and Stability of a Copper Oxide/n-Si Electrode)

  • 윤기현;홍석건;강동헌
    • 한국세라믹학회지
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    • 제37권3호
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    • pp.263-270
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    • 2000
  • The Pt/copper oxide/n-Si electrodes were fabricated by depositing copper oxide thin film of 500${\AA}$ and very thin Pt layer on the n-type (100) Si substrate. hotoelectrochemical properties and stability profiles of the electrodes were investigated as a function of deposition time of Pt layer. As the deposition time of Pt layer increased up to 10 seconds, the photocurrent and quantum efficiency were increased and then decreased with further depositing time. The better cell stability was observed for the electrode with longer deposition time. The improvements in above photoelectrochemical properties indicate that Pt layer acts as a catalyst layer at electrode/electrolyte interface as well as a protective layer. The decreasing tendency of the photocurrent and efficiency for the electrode with Pt layer deposited above 20 seconds was explained as an increases in probbility of electron-hole pair recombination and also the absorbing photon loss at electrode surface due to the excessive thickness of Pt layer. The results were confirmed by impedance spectroscopy, mutiple cycle voltammograms and microstructural analyses.

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Pt 상부 전극 증착온도가 PZR 박막의 전지적 특성에 미치는 영향 (The Effects of Deposition Temperature of Pt Top Electrodes on the Electrical Properties of PZT Thin Films)

  • 이강운;이원종
    • 한국재료학회지
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    • 제8권11호
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    • pp.1048-1054
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    • 1998
  • Pt 상부 전극 증착온도가 Pb(Zr,Ti)$O_3$(PZT) 박막의 전기적 특성에 미치는 영향에 대하여 연구하였다. Pt 상부 전극을 $200^{\circ}C$이상의 고온에서 증착하는 경우, Pt 전극의 하부에 위치한 PZT 박막은 강유전 특성이 심하게 저하되었으나, Pt 전극이 증착되지 않았던 부분은 강유전 특성이 저하되지 않았다. 이와 같은 현상이 발생된 것은 진공 chamber 내의 수증기가 Pt 상부전극의 촉매 작용에 의해 수소 원자로 분해되고, 이 분해된 수소 원자가 고온에서 Pt 하부의 PZT 박막 내로 확산해 들어가 PZT박막에 산소 공공을 만들어 내기 때문이다. Pt의 촉매 작용이 없이는 수증기의 수소 원자로의 분해가 어려우므로 Pt 전극이 덮여져 있지 않는 PZT 박막은 강유전 특성이 저하되지 않는다. 이러한 강유전 특성의 저하는 산소 분위기의 RTA(rapid thermal annealing)처리에 의해 회복이 되었다. 한편, 누설전류 특성은 Pt 상부 전극의 증착온도가 증가함에 따라 향상되는 특성을 보였다.

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Support Effect of Arc Plasma Deposited Pt Nanoparticles/TiO2 Substrate on Catalytic Activity of CO Oxidation

  • Qadir, Kamran;Kim, Sang Hoon;Kim, Sun Mi;Ha, Heonphil;Park, Jeong Young
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.261-261
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    • 2013
  • The smart design of nanocatalysts can improve the catalytic activity of transition metals on reducible oxide supports, such as titania, via strong metal-support interactions. In this work, we investigatedtwo-dimensional Pt nanoparticle/titania catalytic systems under the CO oxidation reaction. Arc plasma deposition (APD) and metal impregnation techniques were employed to achieve Pt nanoparticle deposition on titania supports, which were prepared by multitarget sputtering and sol-gel techniques. APD Pt nanoparticles with an average size of 2.7 nm were deposited on sputtered and sol-gel-prepared titania films to assess the role of the titania support on the catalytic activity of Pt under CO oxidation. In order to study the nature of the dispersed metallic phase and its effect on the activity of the catalytic CO oxidation reaction, Pt nanoparticles were deposited in varying surface coverages on sputtered titania films using arc plasma deposition. Our results show an enhanced activity of Pt nanoparticles when the nanoparticle/titania interfaces are exposed. APD Pt shows superior catalytic activity under CO oxidation, as compared to impregnated Pt nanoparticles, due to the catalytically active nature of the mild surface oxidation and the active Pt metal, suggesting that APD can be used for large-scale synthesis of active metal nanocatalysts.

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Comparison of structural and electrical properties of PMN-PT/LSCO thin films deposited on different substrates by pulsed laser deposition

  • ;;윤순길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.214-214
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    • 2010
  • The 0.65Pb($Mg_{1/3}Nb_{2/3})O_3-0.35PbTiO_3$ (PMN-PT) thin films with $La_{0.5}Sr_{0.5}CoO_{3-\delta}$ (LSCO) bottom electrodes were grown on $CeO_2$/YSZ/Si(001), Pt/$TiO_2$/Si and $SrTiO_3$ (STO) substrates using conventional pulsed laser deposition (PLD) at a substrate temperature of $550^{\circ}C$. Since generally the crystallographic orientation of the bottom electrode induces the orientation of the films deposited on it, it allows us to observe the influence of the PMN-PT film orientation on the electrical properties. Phi scan done on PMN-PT/LSCO thin films shows epitaxial behavior of the films grown on sto substrates and $CeO_2$/YSZ buffered Si(001) substrates, and (110) texture on Pt/$TiO_2$/Si substrates. Polarization-electricfield (P-E) measurement shows good hysteresis behavior of PMN-PT films with remnant polarization of 18.2, 8.8, and $4.4{\mu}C/cm^2$ on $CeO_2$/YSZ/Si, Pt/TiO2/Si and STO substrates respectively.

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전기영동법에 의해 제조된 Pt/C 촉매 전극의 전기화학적 특성 (Electrochemical characteristic of Pt/C Electrode Catalyst prepared by Electrophoresis Method)

  • 송재창;김정현;김윤수;윤정모;이홍기;유연태
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.146.2-146.2
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    • 2010
  • PEMFC를 구성하는 여러 부품 중 핵심부품은 MEA(Membrane Electrode Assembly)으로서 실제 연료전지 반응이 일어나며 연료전지의 성능을 결정하는 부품이다. 그러나 PEMFC의 특성 상 촉매로 귀금속인 Pt가 사용됨에 따라 경제성이 확보된 MEA의 성능을 얻기 위해선 현재 Pt 담지량을 0.3mg/$cm^2$ 이하로 크게 감소시키면서 Pt촉매의 고분산화와 미반응 사이트의 감소가 필요하다. 본 연구에서는 Pt 촉매의 미반응 사이트를 줄이고자 전기영동법에 의해 카본전극(carbon black + GDL) 상에 Pt 나노입자를 직접 석출시켜 Pt/C 촉매 전극을 제조 하였다. 본 실험에서는 가장 좋은 Pt 나노입자의 석출거동을 나타낸 30mA/$cm^2$, pH 2, duty cycle 25% 조건을 기준으로 하여 electro-deposition time을 통한 석출량 제어와 carbon paper의 wet proofing 정도에 따른 Pt의 석출거동을 조사하였으며, 종래의 방법으로 제조한 Pt/C 촉매전극의 전기화학적 특성과 비교 분석하였다. 전기영동 석출법에 사용된 Pt나노입자는 $H_2PtCl_6{\cdot}6H_2O$로부터 화학적 환원법으로 합성한 2~3nm 입경을 갖는 Pt콜로이드를 사용하였으며, magnetic stirring과 항온 ($20^{\circ}C$)을 유지하여 실험하였다. 전기영동 석출량 제어는 electro-deposition time을 5~25분까지 5분 간격으로 나누어 실험하였고 카본전극을 구성하는 carbon paper의 wet proofing 정도가 Pt 나노입자 석출거동에 미치는 영향을 조사하기 위하여 20, 40, 60%의 서로 다른 wet proofing 값을 갖는 carbon paper를 사용하여 Pt/C 촉매 전극을 제조하였다. 전기영동법으로 석출된 카본블랙 전극 상 Pt나노입자의 분산도와 담지량는 각각 FE-SEM과 TGA 장비를 사용하여 측정하였고, 제조된 Pt/C 촉매 전극의 전기화학적 촉매 특성은 cyclic voltammetry(CV)법으로 측정하였다.

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수소 분위기 중 열처리법을 이용한 고자기이방성 L10 FePt 박막 제작 (Preparation of tetragonal phase L10 FePt thin films with H2 annealing atmosphere)

  • 공석현;김경환
    • 한국진공학회지
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    • 제16권5호
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    • pp.343-347
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    • 2007
  • Glass disk상에 대향 타겟식 스퍼터링(Facing Target Sputtering) 방식을 이용하여 $0.1\;{\AA}/s$의 낮은 증착속도로 증착시킬 경우 b.c.c. (100)면 우선배향성을 확인하였으며, 그 위에 Pt박막을 증착시킨 경우 hetero-epitaxial 성장에 의해 Pt박막이(111)의 조밀면이 아닌 (100)면이 우선배향 되었다. 이렇게 형성된 Fe (100)/Pt (100) 이층막(두께 각 3 nm)을 $600\;^{\circ}C$ 수소분위기에서 열처리함에 의해 막전체에 걸쳐서 f.c.t. (00n)면을 형성시키는 데 성공하고, 또한 Fe (100)면 상에 Pt 박막을 증착시키는 동안 열처리를 하고 증착 이후 수소분위기에서 열처리함에 의해 열처리 시간 및 온도를 크게 낮출 수 있음을 확인하였다.

Pt-Based Core-Shell Nanocrystals with Enhanced Activity and Durability toward Oxygen Reduction Reaction

  • Choi, Sang-Il
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.394-394
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    • 2016
  • The oxygen reduction reaction (ORR) in a polymer electrolyte membrane (PEM) fuel cell requires the use of Pt-based catalysts. Due to the high cost and low abundance of Pt, many researchers have been studied to reduce the use of Pt while to enhance the catalytic performance of Pt. One of the promising strategies is the deposition of Pt as ultrathin skins of only a few atomic layers on nanoscale substrates made of another metal. This presentation will discuss the conformal deposition of Pt as uniform, ultrathin shells on Pd nanocrystals. By optimizing the catalytic behavior of Pt-based nanocrystals, we obtained the greatly enhanced ORR activity and durability.

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