• 제목/요약/키워드: Deposition index

검색결과 289건 처리시간 0.022초

포락선 방법을 이용한 흡수가 작은 박막의 광학 상수 및 두께 결정 (Determination Of Optical Constants and Thickness of Weakly Absorbing Thin Films Using An Envelope Method)

  • 황보창권;진권휘;박대윤;이민희
    • 한국광학회지
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    • 제3권1호
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    • pp.1-10
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    • 1992
  • 분광 광도계에서 측정한 1/4 파장과 1/2 파장 광학 두께에서의 투과율을 곡선 맞춤한 두 포락선으로부터 흡수가 작은 박막의 광학 상수(굴절률과 소명 계수)와 두께를 결정하는 포락선 방법의 간단한 식을 유도하였다. 기판의 뒷면 효과를 고려한 포락선 방법을 진공 증착한 ZnS와 SiOx박막에 적용하여 증착조건에 대한 광학 상수의 변화를 결정하였으며, SiOx박막의 경우 주입 산소 압력의 증가에 따른 굴절률의 감소와 원소 조성비의 증가가 일치하는 것을 확인하였다.

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재성형점토의 압축특성을 이용한 자연점토의 압축지수 추정 (Evaluation of Compression Index for Natural Clay Using the Compression Characteristic of Reconstituted Clay)

  • 홍성진;김동휘;이문주;지홍근;이우진
    • 한국지반공학회논문집
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    • 제29권3호
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    • pp.5-13
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    • 2013
  • 압축지수는 점토의 압축특성을 나타내는 대표적인 물성치로 압밀시험으로 직접 결정하거나, 점토의 기본 물성으로부터 경험적 방법으로 추정한다. 그러나 자연점토의 압축지수는 지반 물성치뿐 아니라 퇴적상태에 영향을 받으므로 경험적 추정방법은 지역적 한계를 지닌다. 본 연구에서는 재성형점토의 압축특성을 이용하여 지반 물성치로부터 자연 점토의 압축지수를 추정하는 새로운 방법을 제안하였다. 부산점토의 압밀시험 결과를 통해 제안방법의 적합성을 검증하였으며, 오차원인을 분석하였다. 분석결과 제안된 방법은 경험적 추정방법보다 압축지수를 정확하게 추정하였다. 제안방법의 오차는 가정사항에 의해 발생하며, 추정오차는 $e_{cross}/e_0$와 명확한 반비례 관계를 나타냈다.

실리카 콜로이드 나노입자를 이용한 반사 방지막의 제조 (II) (High-Transmittance Films Coated from Silica Colloidal Nano-Particles (II))

  • 황연
    • 한국세라믹학회지
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    • 제42권6호
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    • pp.399-404
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    • 2005
  • Anti-reflection film was coated by using spherical silica nano colloidal particles and fumed silica particles. Silica colloid sol was reserved between two inclined slide glasses by capillary force, and particles were stacked to form a film onto the substrate as the upper glass was sliding. The deposition processes were studied to enhance the wavelength dependency of the light transmittance and to control the effective refractive index of the film. Both of the spherical and fumed silica particles showed an enhancement of $4.0-4.4\%$ in light transmittance by one step coating. The dependence of the transmittance on wavelength was largely improved at the longer wavelength by partial coating of fumed particles on the film of spherical particles. The effective refractive index of the film was controlled by removing latex particles that were co-deposited with silica particles. Using this process the light reflectance from one side of the glass substrate could be reduced from $4.2\%$ to $0.6\%$ although zero reflectance was not achieved due to the agglomeration of the latex particles.

EVALUATION OF WATER REPELLENCY FOR SILICON OXIDE FILMS PREPARED BY RF PLASMA-ENTRANCED CVD

  • Sekoguchi, Hiroki;Hozumi, Atsuhi;Kakionoki, Nobuyuki;Takai, Osamu
    • 한국표면공학회지
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    • 제29권6호
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    • pp.781-787
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    • 1996
  • Silicom oxide films with good water repellency were prepared by rf plasma-enhanced CVD (rf-PECVD) using four kinds of organosilicon compound, which had different number of methyl ($CH_3$) groups, and oxygen as gas sources. The differences in the deposition rates, film composition and film properties were studied in detail. Water repellency depended on the number of $CH_3$ groups in the organosilicon compounds and the partial pressure of oxygen in the plasma. The highest contact angle for water drops, about 95 degrees, was obtained when trimethy lmethoxy silane (TMMOS) was used. The contact angle decreased with the amount of oxygen gas introduced into the plasma. The dissociation of $CH_3$ groups by adding oxygen was comfirmed by Fourier transform infrared spectroscopy(FTIR) and X-ray photoelectron spectroscopy (XPS). The optical properties were estimated by double-beam spectroscopy and ellipsometry. The transmittance of the glass plate coated by the film prepared with tetramethoxy silane (TMOS) was about 90% and the refractive index of film was 1.44. This value was smaller than the refractive index of a glass plate(soda lime glass, refractive index is 1.515) and this film played a role of anti-refractive coating.

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단결정 실리콘 태양전지의 MgF$_2$/CeO$_2$ 반사 방지막에 환한 연구 (A Study on MgF$_2$/CeO$_2$ AR Coating of Mono-Crystalline Silicon Solar Cell)

  • 유진수;이재형;이준신
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권10호
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    • pp.447-450
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    • 2003
  • This paper presents a process optimization of antireflection (AR) coating on crystalline Si solar cells. Theoretical and experimental investigations were performed on a double-layer AR (DLAR) coating of MgF$_2$/CeO$_2$. We investigated CeO$_2$ films as an AR layer because they have a proper refractive index of 2.46 and demonstrate the same lattice constant as Si substrate. RF sputter grown CeO$_2$ film showed strong dependence on a deposition temperature. The CeO$_2$ deposited at 40$0^{\circ}C$ exhibited a strong (111) preferred orientation and the lowest surface roughness of 6.87 $\AA$. Refractive index of MgF$_2$ film was measured as 1.386 for the most of growth temperature. An optimized DLAR coating showed a reflectance as low as 2.04% in the wavelengths ranged from 0.4${\mu}{\textrm}{m}$ to 1.1${\mu}{\textrm}{m}$. We achieved the efficiencies of solar cells greater than 15% with 3.12% improvement with DLAR coatings. Further details on MgF$_2$, CeO$_2$ films, and cell fabrication parameters are presented in this paper.

p-type (100) Cz 단결정 실리콘 태양전지의 $MgF_2/CeO_2$ 반사 방지막에 관한 연구 ($MgF_2/CeO_2$ AR Coating on p-type (100) Cz Silicon Solar Cells)

  • 이수은;최석원;박성현;강성호;이준신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.593-596
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    • 1999
  • This paper presents a process optimization of antireflectiun (AR) coating on crystalline Si solar cells. Theoretical and experimental investigations were performed on a doble-layer AR(DLAR) coating of MgF$_2$/CeO$_2$, We investigated CeO$_2$ films as an All layer because they hale a proper refractive index of 2.46 and demonstrate the same lattice constant as Si substrate. RF sputter grown CeO$_2$ film showed strong dependence on a deposition temperature. The CeO$_2$ film deposited at 400 $^{\circ}C$ exhibited a strong (111) preferred orientation and the lowest surface roughness of 6.87 $\AA$. Refractive index of MgF$_2$ film was measured as 1.386 for the most of growth temperature. An optimized DLAR coating showed a reflectance as low as 2.04 % in the wavelengths ranged from 0.4 7m to 1.1 7m. We achieved the efficiencies of solar cells greater than 15% with 3.12 % improvement with DLAR coatings . Further details on MgF$_2$, CeO$_2$ films, and cell fabrication Parameters are presented in this paper.

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Image Evaluation and Association Analysis of the Cardiovascular Disease of the Degree of Pancreatic Steatosis in Ultrasonography

  • Cho, Jin-Young;Ye, Soo-Young;Ko, Seong-Jin
    • Transactions on Electrical and Electronic Materials
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    • 제17권6호
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    • pp.375-379
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    • 2016
  • Increasing fat tissue of obese people, increases the rate of cardiovascular disease, diabetes, metabolic syndromes and dyslipidemia. An increase in the focal tissue of pancreas is a known risk factor of these diseases. Although there exists sufficient research on the diagnosis and treatment of pancreatic cancer, studies have been done on fatty pancreas. In this study, based on ultrasound imaging and using a texture characteristic of GLCM, fatty pancreas was divided into three categories: mild, moderate and severe. We compared and analyzed the three groups was by Pancreatic ultrasonography and body characteristics, serological tests, pressure and the degree of arteriosclerosis, against normal control group. The following parameters of control and test groups were measured: WC (waist circumference),BMI (body mass index), TC (total cholesterol), TG (triglyceride), HDL-C (High-density lipoprotein cholesterol) and LDL-C (Low-density lipoprotein cholesterol), SBP (systolic blood pressure), BST (Blood Sugar Test) and aortic PWV (pulse wave velocity). We observed the values correspondingly increasing fat deposition. However, ABI (Ankle Brachial pressure index) stenosis and HDL-C levels decreased with increasing fat deposit (p <0.05); a drop in these parameters are known to be harmful to the human body. The difference in texture characteristics between normal control group and pancreatic fatty group (mild, moderate, and severe) was statistically confirmed. Ultrasound imaging of pancreatic steatosis categorized the disease as mild, moderate and severe based on the characteristic texture. In conclusion, we observed on increase in metabolic syndrome, dyslipidemia, and arteriosclerosis, proportional to the degree of pancreatic fat deposition. The escalation of these diseases was confirmed and was directly related with predictors of cardiovascular diseases.

디스플레이용 ITO 전극의 동작 압력에 따른 특성 연구 (A Study of Characteristic based on Working Pressure of ITO Electrode for Display)

  • 김해문;박형준
    • 전기전자학회논문지
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    • 제20권4호
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    • pp.392-397
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    • 2016
  • 본 논문에서는 투명 전극용 ITO(Indium Tin Oxide) 박막의 성막 조건을 알아내기 위하여 DC(Direct Current) 마그네트론 스퍼터를 사용해 증착된 ITO 박막의 특성을 분석하였다. 실험 조건은 1~3[mTorr] 분위기압으로 조절하고 인가전압은 260~330[V]로 10[V]씩 스텝을 주어 실험을 진행하였다. 증착된 박막의 투과율, 굴절률 및 표면과 단면 형상을 자외선-가시광선 분광광도계, 타원편광분석기와 주사전자현미경으로 측정하였다. ITO 성막 조건 1~2[mTorr] 분위기압에서 300[V] 정도의 전압이 투과율이 90[%] 이상으로 우수하고 굴절률이 2이상 이였다. 따라서 높은 투명 전도성 전극을 만들기에 적절한 조건임을 확인하였다.

이중 이온빔 스퍼터링 방식을 사용한 보조 이온빔의 Ar/O2가스 유량에 따른 Ta2O5 박막의 제조 및 특성분석 (Characteristics Analysis and Manufacture of Ta2O5 Thin Films Prepared by Dual Ion-beam Sputtering Deposition with Change of Ar/O2Gas Flow Rate of Assist Ion Beam)

  • 윤석규;김회경;김근영;김명진;이형만;이상현;황보창권;윤대호
    • 한국세라믹학회지
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    • 제40권12호
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    • pp.1165-1169
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    • 2003
  • 이중 이온빔 스퍼터링(Dual ion-beam sputtering)을 사용하여 보조이온건의 Ar/O$_2$가스유량 변화에 따라 Si-(III) 기판과 glass에 Ta$_2$O$_{5}$ 박막을 증착시켰다. 보조 이온총의 산소 가스량의 비가 감소함에 따라서 증착되는 Ta$_2$O$_{5}$ 박막의 성장속도는 감소하였으며, 굴절률은 $O_2$ 가스의 양이 0∼12sccm인 범위에서 2.09(at 1550nm)로 일정한 값을 나타내었다. Ar:O$_2$가 3: 12인 조건에서 화학양론 조성인 Ta$_2$O$_{5}$를 형성하였으며, 표면 거칠기도 가장 작은 값을 나타내었다.나타내었다.

이온 보조 증착한 ${Ta_2}{O_5}$ 광학 박막의 광학적 및 기계적 특성 분석 (Optical and mechnical properties of ${Ta_2}{O_5}$ optical thin films by ion assisted deposition)

  • 류태욱;김동진
    • 한국광학회지
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    • 제11권3호
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    • pp.147-151
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    • 2000
  • 전자총을 사용하여 이온 보조한 Ta2O5 박막과 이온 보조하지 않은 ${Ta_2}{O_5}$ 박막을 진공 증착하고, 증착 조건에 따른 광학적 특성과 기계적 특성을 측정하였다. 양극전압 120V, 이온빔 전류밀도 $50~500\muA/cm^2$로 산소 이온보조 증착한 박막의 경우 굴절률은 상온에서 제작한 보통 ${Ta_2}{O_5}$ 박막의 1.94보다 높은 2.15이었으며, 변형력은 $7.0\times10^8 dyne/cm^2$보다 낮은 $5.0\times10^8 dyne/cm^2$2이었다. 이는 기판온도 $230^{\circ}C$에서 증착한 박막과 광학적.기계적 특성이 유사함을 알수 있었다. 아르곤 이온 보조한 박막의 경우 인장 변형력은 감소하였으나 가시광 영역의 단파장쪽에서 흡수가 발생하였다. 그리고 X-선 회절분석 결과 모든 박막의 비정질로 나타났다.

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