• 제목/요약/키워드: Deposition flux

검색결과 248건 처리시간 0.023초

화학증착 및 증발-산화법에 의한 알루미나 복합분리막의 제조 및 투과특성 (Preparation and Permeation Characteristics of Alumina Composite Membranes by CVD and Evaporation-Oxidation Process)

  • 안상옥;최두진;현상훈;정형진;유광수
    • 한국세라믹학회지
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    • 제30권8호
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    • pp.678-684
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    • 1993
  • Alumina composite membranes were prepared by chemical vapor deposition and evaporation-oxidation process. For CVD process, deposition was carried out using aluminum-tri-isopropoxide at 35$0^{\circ}C$, 2 torr by heterogeneous reaction, and for evaporation-oxidation process, alumina composite membranes were prepared by evaporation of aluminum and dry oxidation at 80$0^{\circ}C$. As deposition time increases, water flux and N2 gas permeability of the composite membranes prepared by both processes were reduced. Applying gas permeation model, permeability and cracking possibility of top layer were evaluated.

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Influence of Mg Vapor Pressure on the $MgB_2$/Carbon Fiber Fabricated by Physical Vapor Deposition method

  • Li, Xiang;Ha, Hong-Soo;Kim, Cheol-Jin
    • 한국초전도ㆍ저온공학회논문지
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    • 제13권4호
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    • pp.5-9
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    • 2011
  • We have fabricated the superconducting $MgB_2$/carbon fiber by physical vapor deposition method. Mg (Magnesium) and B (Boron) were simultaneously deposited on the carbon fiber using the RF-sputtering and thermal evaporation, respectively. To ensure the relatively high vapor pressure of Mg at the growth region and the subsequent phase stability of $MgB_2$ at the deposition temperature, inverted funnel-like guide made of Mg-foil was employed while one side of the guide were open for the sputtered B flux. Mg vapor pressure should be controlled precisely to secure the complete reaction. The $MgB_2$/carbon fiber showed a uniformly deposited thin layer with dense and well-formed grains. The $MgB_2$/carbon fibers in this study showed $T_c$~37.5K, $J_c$ ~ $2{\times}10^4\;A/cm^2$ in the 20K, 0T.

Charged Cluster Model as a New Paradigm of Crystal Growth

  • Nong-M. Hwang;In-D. Jeon;Kim, Doh-Y.
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 2000년도 Proceedings of 2000 International Nano Crystals/Ceramics Forum and International Symposium on Intermaterials
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    • pp.87-125
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    • 2000
  • A new paradigm of crystal growth was suggested in a charged cluster model, where charged clusters of nanometer size are suspended in the gas phase in most thin film processes and are a major flux for thin film growth. The existence of these hypothetical clusters was experimentally confirmed in the diamond and silicon CVD processes as well as in gold and tungsten evaporation. These results imply new insights as to the low pressure diamond synthesis without hydrogen, epitaxial growth, selective deposition and fabrication of quantum dots, nanometer-sized powders and nanowires or nanotubes. Based on this concept, we produced such quantum dot structures of carbon, silicon, gold and tungsten. Charged clusters land preferably on conducting substrates over on insulating substrates, resulting in selective deposition. if the behavior of selective deposition is properly controlled, charged clusters can make highly anisotropic growth, leading to nanowires or nanotubes.

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Temperature Analysis for Optimizing the Configuration of the Linear Cell

  • Choi Jong-Wook;Kim Sung-Cho;Kim Jeong-Soo
    • Journal of Mechanical Science and Technology
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    • 제20권7호
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    • pp.1089-1097
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    • 2006
  • The market demand of display devices is drastically increasing in the information technology age. The research on OLED (Organic Light Emitting Diodes) display with the luminescence in itself is being more paid attention than LCD (Liquid Crystal display) with the light source from the back. The vapor deposition process is most essential in manufacturing OLED display. The temperature distribution of the linear cell in this process is closely related to securing the uniformity of organic materials on the substrate. This work analyzed the temperature distribution depending on the intervals between the crucible and the heating band as well as on the amount of the heat flux from the heating band. Moreover, the roles of the water jacket and the configuration of the cover within the linear cell were examined through the temperature analysis for six configurations of the linear cell. Under the above temperature analysis, the variations in the intervals and the amount of the heat flux were considered to have an effect on building the uniform temperature distribution within the crucible. It is predicted that the water jacket and the adequate configuration of the cover will prevent the blowout and clogging phenomena, respectively. The results can be used as the fundamental data for designing the optimal linear cell.

The flux pinning properties of BaSnO3-added GdBa2Cu3O7-δ films with varying growth conditions

  • Lee, J.K.;Oh, J.Y.;Lee, J.M.;Kang, W.N.;Kang, B.
    • 한국초전도ㆍ저온공학회논문지
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    • 제19권3호
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    • pp.18-22
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    • 2017
  • Addition of $BaSnO_3$ (BSO) to $GdBa_2Cu_3O_{7-{\delta}}$ (GdBCO) is reported to enhance the flux pinning property of GdBCO thick films. To investigate the effect of growth condition on the pinning properties, 700 nm-thick BSO-added GdBCO films deposited with varying temperatures and growth rates were prepared by using a pulsed laser deposition method. As the deposition temperature increases, the critical current density and the pinning force density show an improved field dependence up to $750^{\circ}C$ due to the increase in the formation of the a-axis growth and the BSO nanostructures. The films deposited at higher temperatures show degraded surfaces and as a result, degraded pinning behaviors. For the change in growth rate, the critical current density and the pinning force increase as the repetition rate increase at low magnetic fields, but this behavior is reversed in high magnetic fields. These results indicate that the film growth conditions significantly affect the formation of BSO nanostructures and the pinning properties of BSO-added GdBCO films.

플라즈마 CVD 법을 이용한 대면적 균일한 비정질 탄소 막 증착 (Large-area Uniform Deposition of Amorphous Hydrogenated Carbon Films using a Plasma CVD Method)

  • 윤상민;양성채
    • 한국전기전자재료학회논문지
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    • 제22권5호
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    • pp.411-414
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    • 2009
  • It has been investigated for the film uniformity and deposition rate of a-C:H films on glass substrate and polymeric materials in the presence of the modulated crossed magnetic field. We used Plasma CVD, i.e, using a crossed electromagnetic field, for uniform depositing thin film. The optimum discharge condition has been discussed for the gas pressure, the magnetic flux density and the distance between substrate and electrodes, As a result, it is found that the optimum discharge conditions are $CH_4$ concentration $CH_4$=10 %, modulated magnetic flux density B=48 Gauss, pressure P=100 mTorr, discharge power supply voltage V=l kV under these experimental conditions. By using these experimental condition, it is possible to prepare the most uniform film extends over about 160 mm of the film width. In this study, we deposited a-C:H thin film on glass substrate, and have a plan that using this condition, study depositing a-C:H thin film on polymeric substrate in next studies.

Thermal study of a scanning beam in granular flow target

  • Ping Lin;Yuanshuai Qin;Changwei Hao;Yuan Tian ;Jiangfeng Wan ;Huan Jia ;Lei Yang ;Wenshan Duan ;Han-Jie Cai ;Sheng Zhang
    • Nuclear Engineering and Technology
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    • 제54권11호
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    • pp.4310-4321
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    • 2022
  • The concept of dense granular-flow target (DGT) for the China Initiative Accelerator Driven Subcritical system (CiADS) is an attractive choice for high heat removal ability, low chemical toxicity, and radiotoxicity. A wobbling hollow beam is proposed to enhance the homogeneity of temperature rise of flowing particles in beam-target coupling zone. In this paper, the design procedure of target and beam parameters was discussed firstly. Then we simulated the heat deposition and transfer of the scanning beam in DGT to study the effect of beam parameters. The results show the flux density of proton beam plays a crucial role in the distribution of temperature rise while the contributions from scanning frequency heat transfer are also obvious. Moreover, heat transfer in transversal directions is insignificant, resulting in a low heat flux towards the sidewalls of DGT. This work not only contributes to the design of DGT, but also beneficial for understanding the beam-target coupling in porous materials.

대기오염 총침착물의 채취방법 표준화 개발에 관한 연구 -여과식 채취방법을 통한 총침착물의 공간분포 특성- (A Study on the Development of Standard Method of Total Deposition Sampling in Air Pollutants - Spatial Distribution of Total Deposition by the Filtration-Sampling Method -)

  • 박정호;조인철;김찬훈;서정민
    • 한국환경과학회지
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    • 제11권6호
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    • pp.489-496
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    • 2002
  • The purpose of this study was to investigate spatial distributions of total deposition. A total number 79 samples were collected at 17 sampling sites from September 1999 to January 2000. Total (=wet+dry) atmospheric depositions were collected by filtered deposition sampler at sampling site (the Western Part of Kyongsangnam Province). In addition, the deposition of soluble and insoluble fraction was also investigated to find a suitable simplified collection method for a long-term monitoring of total deposition. The total depositions were measured soluble amount(mm/month), insoluble amount(kg/km$^2$/month), pH, conductivity(E.C.) and eight ionic components. The spatial distribution of deposition flux was to estimated by using a kringing analysis. The 17 sites mean fluxes of water soluble ionic components; SO$_4$$\^$2-/, Cl$\^$-/, NO$_3$$\^$-/, Na$\^$+/, NH$_4$$\^$+/, K$\^$+/, Mg$\^$2+/, Ca$\^$2+/ were 100.7∼315.6kg/km$^2$/month, 30.1∼234.3kg/km$^2$/month, 64.4∼ 139.4kg/km$^2$/month, 7.5∼68.3kg/km$^2$/month, 10.7∼48.7kg/km$^2$/month, 5.6∼27.9kg/km$^2$/month, 4.5∼17.5kg/km$^2$/month, 27.6∼81.7kg/km$^2$/month, respectively.

빗각 증착으로 제조된 TiN 박막의 특성 (Properties of TiN Films Fabricated by Oblique Angle Deposition)

  • 정재훈;양지훈;박혜선;송민아;정재인
    • 한국표면공학회지
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    • 제45권3호
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    • pp.106-110
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    • 2012
  • Oblique angle deposition (OAD) is a physical vapor deposition where incident vapor flux arrives at non-normal angles. It has been known that tilting the substrate changes the properties of the film, which is thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer TiN films by cathodic arc deposition. TiN films have been deposited on cold-rolled steel sheets and stainless steel sheet. The deposition angle as well as substrate temperature and substrate bias was changed to investigate their effects on the properties of TiN films. TiN films were analyzed by color difference meter, scanning electron microscopy, nanoindenter and x-ray diffraction. The color of TiN films was not much changed according to the deposition conditions. The slanted and zigzag structures were observed from the single and multilayer films. The relation between substrate tilting angle (${\alpha}$) and the growth column angle (${\beta}$) followed the equation of $tan{\alpha}=2tan{\beta}$. The indentation hardness of TiN films deposited by OAD was low compared with the ones prepared at normal angle. However, it has been found that $H^3/E^2$ ratio of 3-layer TiN films prepared at OAD condition was a little higher than the ones prepared at normal angle, which can confirm the robustness of prepared films.

Enhanced flux pinning property of GdBa2Cu3O7-x films by ferromagnetic surface decoration

  • Song, C.Y.;Oh, J.Y.;Ko, Y.J.;Lee, J.M.;Kang, W.N.;Kang, B.
    • 한국초전도ㆍ저온공학회논문지
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    • 제22권2호
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    • pp.21-25
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    • 2020
  • We investigated the flux pinning property of GdBa2Cu3O7-x (GdBCO) films on top of La0.7Sr0.3MnO3 (LSMO) nanoparticles deposited by a surface decoration. Both GdBCO films and LSMO nano particles were deposited by pulsed laser deposition and the number of laser pulses were varied from 80 to 320 in order to control the density of the LSMO nanoparticles. The magnetization data at 77 K showed that the critical current density (Jc) was enhanced in all of the GdBCO films with LSMO nanoparticles and that the Jc enhancement was found to be inversely proportional to the LSMO nanoparticle density. Structural analyses revealed that LSMO nanoparticles induce a compressive strain in the GdBCO films resulting in a disordering in the CuO2 plane. Therefore, the enhanced flux pinning property in the GdBCO with LSMO nanoparticles was attributed to the competing effect between the increase of pinning centers and the increase of compressive strain in the superconducting phase.