• Title/Summary/Keyword: Deposition during growth

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Large-Area Synthesis of High-Quality Graphene Films with Controllable Thickness by Rapid Thermal Annealing

  • Chu, Jae Hwan;Kwak, Jinsung;Kwon, Tae-Yang;Park, Soon-Dong;Go, Heungseok;Kim, Sung Youb;Park, Kibog;Kang, Seoktae;Kwon, Soon-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.130.2-130.2
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    • 2013
  • Today, chemical vapor deposition (CVD) of hydrocarbon gases has been demonstrated as an attractive method to synthesize large-area graphene layers. However, special care should be taken to precisely control the resulting graphene layers in CVD due to its sensitivity to various process parameters. Therefore, a facile synthesis to grow graphene layers with high controllability will have great advantages for scalable practical applications. In order to simplify and create efficiency in graphene synthesis, the graphene growth by thermal annealing process has been discussed by several groups. However, the study on growth mechanism and the detailed structural and optoelectronic properties in the resulting graphene films have not been reported yet, which will be of particular interest to explore for the practical application of graphene. In this study, we report the growth of few-layer, large-area graphene films using rapid thermal annealing (RTA) without the use of intentional carbon-containing precursor. The instability of nickel films in air facilitates the spontaneous formation of ultrathin (<2~3 nm) carbon- and oxygen-containing compounds on a nickel surface and high-temperature annealing of the nickel samples results in the formation of few-layer graphene films with high crystallinity. From annealing temperature and ambient studies during RTA, it was found that the evaporation of oxygen atoms from the surface is the dominant factor affecting the formation of graphene films. The thickness of the graphene layers is strongly dependent on the RTA temperature and time and the resulting films have a limited thickness less than 2 nm even for an extended RTA time. The transferred films have a low sheet resistance of ~380 ${\Omega}/sq$, with ~93% optical transparency. This simple and potentially inexpensive method of synthesizing novel 2-dimensional carbon films offers a wide choice of graphene films for various potential applications.

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Process technology and the formation of the TiN barrier metal by physical vapor deposition (PVD 방법에 의한 TiN barrier metal 형성과 공정개발)

  • 최치규;강민성;박형호;염병렬;서경수;이종덕;김건호;이정용
    • Journal of the Korean Vacuum Society
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    • v.6 no.3
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    • pp.255-262
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    • 1997
  • Titanium nitride (TiN) films were prepared by reactive sputter deposition in mixed gas of Ar+$N_2$. The volume percentage of $N_2$ in the working gas was chosen so as to grow stoichiometric TiN films and the substrate temperature during film growth was set from room temperature to $700^{\circ}C$. Stoichiometric $Ti_{0.5}N){0.5}$ films with (111) texture were grown at temperatures over $600^{\circ}C$, while films prepared at temperatures below $600^{\circ}C$ showed N-rich TiN. The composition X and y in the $Ti_xN_y$ films determined by XPS and RBS varied within 5% with the substrate temperature. The sheet resistance of the TiN films decreases as the substrate temperature increased. TiN film prepared at $600^{\circ}C$ showed 14.5$\Omega\Box$, and it decreased to 8.9$\Omega\Box$ after the sample was annealed at $700^{\circ}C$, 30 sec in Ar-gas ambient by RTA. By far, high quality stoichiometric TiN films by reactive sputtering in the mixed gas ambient could be prepared at substrate temperature over $600^{\circ}C$.

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Quantitative analysis of formation of oxide phases between SiO2 and InSb

  • Lee, Jae-Yel;Park, Se-Hun;Kim, Jung-Sub;Yang, Chang-Jae;Kim, Su-Jin;Seok, Chul-Kyun;Park, Jin-Sub;Yoon, Eui-Joon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.162-162
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    • 2010
  • InSb has received great attentions as a promising candidate for the active layer of infrared photodetectors due to the well matched band gap for the detection of $3{\sim}5\;{\mu}m$ infrared (IR) wavelength and high electron mobility (106 cm2/Vs at 77 K). In the fabrication of InSb photodetectors, passivation step to suppress dark currents is the key process and intensive studies were conducted to deposit the high quality passivation layers on InSb. Silicon dioxide (SiO2), silicon nitride (Si3N4) and anodic oxide have been investigated as passivation layers and SiO2 is generally used in recent InSb detector fabrication technology due to its better interface properties than other candidates. However, even in SiO2, indium oxide and antimony oxide formation at SiO2/InSb interface has been a critical problem and these oxides prevent the further improvement of interface properties. Also, the mechanisms for the formation of interface phases are still not fully understood. In this study, we report the quantitative analysis of indium and antimony oxide formation at SiO2/InSb interface during plasma enhanced chemical vapor deposition at various growth temperatures and subsequent heat treatments. 30 nm-thick SiO2 layers were deposited on InSb at 120, 160, 200, 240 and $300^{\circ}C$, and analyzed by X-ray photoelectron spectroscopy (XPS). With increasing deposition temperature, contents of indium and antimony oxides were also increased due to the enhanced diffusion. In addition, the sample deposited at $120^{\circ}C$ was annealed at $300^{\circ}C$ for 10 and 30 min and the contents of interfacial oxides were analyzed. Compared to as-grown samples, annealed sample showed lower contents of antimony oxide. This result implies that reduction process of antimony oxide to elemental antimony occurred at the interface more actively than as-grown samples.

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Synthesis and Characterization of Cu(In,Ga)Se2 Nanostructures by Top-down and Bottom-up Approach

  • Lee, Ji-Yeong;Seong, Won-Kyung;Moon, Myoung-Woon;Lee, Kwang-Ryeol;Yang, Cheol-Woong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.440-440
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    • 2012
  • Nanomaterials have emerged as new building blocks to construct light energy harvesting assemblies. Size dependent properties provide the basis for developing new and effective systems with semiconductor nanoparticles, quantized charging effects in metal nanoparticle or their combinations in 2 and 3 dimensions for expanding the possibility of developing new strategies for photovoltaic system. As top-down approach, we developed a simple and effective method for the large scale formation of self-assembled Cu(In,Ga)$Se_2$ (CIGS) nanostructures by ion beam irradiation. The compositional changes and morphological evolution were observed as a function of the irradiation time. As the ion irradiation time increased, the nano-dots were transformed into a nano-ridge structure due to the difference in the sputtering yields and diffusion rates of each element and the competition between sputtering and diffusion processes during irradiation. As bottom-up approach, we developed the growth of CIGS nanowires using thermal-chemical vapor deposition (CVD) method. Vapor-phase synthesis is probably the most extensively explored approach to the formation of 1D nanostructures such as whiskers, nanorods, and nanowires. However, unlike binary or ternary chalcogenides, the synthesis of quaternary CIGS nanostructures is challenging because of the difficulty in controlling the stoichiometry and phase structure. We introduced a method for synthesis of the single crystalline CIGS nanowires in the form of chalcopyrite using thermal-CVD without catalyst. It was confirmed that the CIGS nanowires are epitaxially grown on a sapphire substrate, having a length ranged from 3 to 100 micrometers and a diameter from 30 to 500 nm.

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Interaction of cracks and precipitate particles on the REBCO superconducting layers of practical CC tapes through fractographic observations

  • de Leon, Michael;Diaz, Mark A.;Shin, Hyung-Seop
    • Progress in Superconductivity and Cryogenics
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    • v.22 no.3
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    • pp.7-12
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    • 2020
  • Electromechanical properties of REBCO CC tapes are known to be limited by defects (cracks) that form in the brittle REBCO layer. These defects could be inherently acquired during the CC tapes' manufacturing process, such as slitting, and which can be initiated at the CC tapes' edges. If propagated and long enough, they are believed to cause critical current degradation and can substantially decrease the delamination strength of CC tapes. Currently, commercially available CC tapes from various manufacturers utilize different growth techniques for depositing the REBCO layers on the substrates in their CC tapes preparation. Their epitaxial techniques, unfortunately, cannot perfectly avoid the formation of particles, in which sometimes acts as current blocking defects, known as outgrowths. Collective research regarding the composition, size, and formation of these particles for various CC tapes with different deposition techniques are particularly uncommon in a single study. Most importantly, these particles might interact in one way or another to the existing cracks. Therefore, systematic investigation on the interactions between the cracks' development mechanism and particles on the REBCO superconducting layers of practical CC tapes are of great importance, especially in the design of superconducting devices. Here, a proper etching process was employed for the CC tapes to expose and observe the REBCO layers, clearly. The scanning electron microscope, field emission scanning microscope, and energy-dispersive x-ray spectroscopy were utilized to observe the interactions between cracks and particles in various practical CC tapes. Particle compositions were identified whether as non-superconducting or superconducting and in what manner it interacts with the cracks were studied.

Grid Discretization Study for the Efficient Aerodynamic Analysis of the Very Light Aircraft (VLA) Configuration

  • Sitio, Moses;Kim, Sangho;Lee, Jaewoo
    • International Journal of Aeronautical and Space Sciences
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    • v.14 no.2
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    • pp.122-132
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    • 2013
  • In this research the development of unstructured grid discretization solution techniques is presented. The purpose is to describe such a conservative discretization scheme applied for experimental validation work. The objective of this paper is to better establish the effects of mesh generation techniques on velocity fields and particle deposition patterns to determine the optimal aerodynamic characteristics. In order to achieve the objective, the mesh surface discretization approaches used the VLA prototype manufacturing tolerance zone of the outer surface. There were 3 schemes for this discretization study implementation. They are solver validation, grid convergence study and surface tolerance study. A solver validation work was implemented for the simple 2D and 3D model to get the optimum solver for the VLA model. A grid convergence study was also conducted with a different growth factor and cell spacing, the amount of mesh can be controlled. With several amount of mesh we can get the converged amount of mesh compared to experimental data. The density around surface model can be calculated by controlling the number of element in every important and sensitive surface area of the model. The solver validation work result provided the optimum solver to employ in the VLA model analysis calculation. The convergence study approach result indicated that the aerodynamic trend characteristic was captured smooth enough compared with the experimental data. During the surface tolerance scheme, it could catch the aerodynamics data of the experiment data. The discretization studies made the validation work more efficient way to achieve the purpose of this paper.

A Quantitative Method for Estimating Damages in Fishery Production due to Artificial Environmental Deterioration in the Tidal Flat Fishing Grounds (천해어장에서 인위적 환경훼손에 의한 어업생산 감소량 추정방법)

  • PARK Joo Seok;KANG Yong Joo;ZHANG Chang Ik
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.36 no.4
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    • pp.402-408
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    • 2003
  • A quantitative method was suggested for estimating damages in fishery production due to the diffusion and deposition of suspended silt and clay by various construction processes in tidal flat fishing grounds. Marine populations are maintained through the process of spawning, growth, recruitment, natural death and death by fishing each year. All of the year classes of the population in a fishery ground could be affected when damages occur by human activities such as land filling or reclamation. The propose of this study is to calculate damages in terms of fishery production using a quantitative population dynamic method. If the maximum age in the population is $X_\lambda,$ the starting year of damage is $t_s,$ and the ending year of damage is $t_e,$ the number of year classes damaged is $t_{s-n\lambda}-t_e,$ Many year classes present in the year $t_s,$ and so if damages occur, they Influence all the year classes which are present in the population. Damaged year classes in year $t_e$ would still be in the population until the year $t_{e+n\lambda}$, where $n_{\lambda}$ is the oldest age class. If the expected yield of a year class is constant, the total yield from year classes in the fishing ground during the construction periods can be calculated as follows: $Y_\Phi=[(t_e-t_s+1)+n_c]{\cdot}Y_E+\sum\limits^{n_\lambda-n_c}_{l=1}\;\sum\limits^{n_\lambda-n_c}_{l=i}\;Y_{n_c+i}$ This method was applied for damage estimation in the production of Ruditapes philippinarum in a tidal flat fishing ground.

Postnatal Expression Pattern of Adipose Type Fatty Acid Binding Protein in Different Adipose Tissues of Porcine

  • Xu, C.L.;Wang, Y.H.;Huang, Y.H.;Liu, J.X.;Feng, J.
    • Asian-Australasian Journal of Animal Sciences
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    • v.20 no.6
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    • pp.811-816
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    • 2007
  • Adipocyte fatty acid-binding protein (A-FABP), which belongs to the FABP family, plays an essential role in long-chain fatty acid uptake and metabolic homeostasis, especially in adipose tissue. The pattern of A-FABP gene mRNA expression in different growth stages and its relation to intramuscular fat (IMF) accretion in pigs was studied. Fifteen female $Duroc{\times}Landrace{\times}Yorkshire$ pigs in five groups of three pigs each, weighing 1, 30, 50, 70 and 90 kg were used to study developmental gene mRNA expression of A-FABP in various adipose tissues by means of semi-quantitative RT-PCR. Results showed that A-FABP mRNA levels in subcutaneous and ventral adipose tissues first increased from 1 to 50 kg, then gradually declined from 50 to 90 kg. Moreover, the rank order of A-FABP mRNA levels determined in three adipose tissues was as follows: subcutaneous adipose>ventral adipose>mesenteric adipose. A-FABP mRNA expression in mesenteric adipose tissue was constant during development. In addition, a positive correlation from 1 to 50 kg BW pigs and a negative correlation from 50 to 90 kg BW between A-FABP mRNA levels in subcutaneous and ventral adipose and IMF content were found.

Micropattern generation by holographic lithography and fabrication of quantum wire array by MOCVD (홀로그래픽 리소그래피에 의한 미세패턴 형성과 MOCVD에 의한 양자세선 어레이의 제작)

  • Kim, Tae-Geun;Cho, Sung-Woo;Im, Hyun-Sik;Kim, Young;Kim, Moo-Sung;Park, Jung-Ho;Min, Suk-Ki
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.6
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    • pp.114-119
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    • 1996
  • The use of holographic interference lithography and removal techniques to corrugate GaAs substrate have been studied. The periodic photoresist structure, which serves as a protective mask during etching, is holographically prepared. Subsequently periodic V-grooved pattern is formed on the GaAs substrate by conventional a H$_{2}$SO$_{4}$-H$_{2}$O$_{2}$-H$_{2}$O wet etching. The linewidth of a GaAs pattern is about 0.4$\mu$m and the depth is 0.5$\mu$m A quantum wires(QWRs) array is well formed on the V-grooved substrate by MOCVD (metalorganic chemical vapor deposition) growth of GaAs/Al$_{0.5}$Ga$_{0.5}$As (50$\AA$/300$\AA$) quantum wells. The formation of QWR array is confirmed by the temperature dependent photoluminescence (PL) measurement. The intensive PL peak with a FWHM of 6meV at 21K shows the high quality of the QWR array.

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Electro-Optical Properties of AZO Thin Films with Deposition & Heat treatment Conditions (AZO 박막의 증착 및 열처리 조건에 따른 전기·광학적 특성)

  • Yeon, Eung-Beom;Lee, Taek-Yong;Kim, Seon-Tai;Lim, Sang-Chul
    • Korean Journal of Materials Research
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    • v.30 no.10
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    • pp.558-565
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    • 2020
  • AZO thin films are grown on a p-Si(111) substrate by RF magnetron sputtering. The characteristics of various thicknesses and heat treatment conditions are investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Hall effect and room-temperature photoluminescence (PL) measurements. The substrate temperature and the RF power during growth are kept constant at 400 ℃ and 200 W, respectively. AZO films are grown with a preferred orientation along the c-axis. As the thickness and the heat treatment temperature increases, the length of the c-axis decreases as Al3+ ions of relatively small ion radius are substituted for Zn2+ ions. At room temperature, the PL spectrum is separated into an NBE emission peak around 3.2 eV and a violet regions peak around 2.95 eV with increasing thickness, and the PL emission peak of 300 nm is red-shifted with increasing annealing temperature. In the XPS measurement, the peak intensity of Al2p and Oll increases with increasing annealing temperature. The AZO thin film of 100 nm thickness shows values of 6.5 × 1019 cm-3 of carrier concentration, 8.4 cm-2/V·s of mobility and 1.2 × 10-2 Ω·cm electrical resistivity. As the thickness of the thin film increases, the carrier concentration and the mobility increase, resulting in the decrease of resistivity. With the carrier concentration, mobility decreases when the heat treatment temperature increases more than 500 ℃.