• 제목/요약/키워드: Deposition Path

검색결과 68건 처리시간 0.028초

Ion beam etching of sub-30nm scale Magnetic Tunnel Junction for minimizing sidewall leakage path

  • Kim, Dae-Hong;Kim, Bong-Ho;Chun, Sung-Woo;Kwon, Ji-Hun;Choi, Seon-Jun;Lee, Seung-Beck
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2011년도 자성 및 자성재료 국제학술대회
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    • pp.29-30
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    • 2011
  • We have demonstrated the fabrication of sub 30 nm MTJ pillars with PMA characteristics. The multi-step IBE process performed at $45^{\circ}$ and $30^{\circ}$, using NER resulted in almost vertical side profiles. There deposition on the sidewalls of the NER prevented lateral etching of the resist hard mask allowing vertical MTJ side profile formation without any reduction in the lithographically defined resist lateral dimensions. For the 28nm STT-MTJ pillars, the measured TMR ratio was 13 % with resistance of 1 $k{\Omega}$, which was due to remaining redeposition layers less than 0.1 nm thick. With further optimization in multi-step IBE conditions, it will be possible to fabricate fully operating sub 30 nm perpendicular STT-MTJ structures for application to future non-volatile memories.

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DEPTH AND LAYOUT OPTIMIZATIONS OF A RADIOACTIVE WASTE REPOSITORY IN A DISCONTINUOUS ROCK MASS BASED ON A THERMOMECHANICAL MODEL

  • Kim, Jhin-Wung;Koh, Yong-Kwon;Bae, Dae-Seok;Choi, Jong-Won
    • Nuclear Engineering and Technology
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    • 제40권5호
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    • pp.429-438
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    • 2008
  • The objective of the present study is the depth and layout optimizations of a single layer, high level radioactive waste repository in a discontinuous rock mass with special joint set arrangements. A single layer repository model, considering variations in the repository depths, pitches, and tunnel spacings, is used to analyze the thermomechanical interaction behavior. It is assumed that the repository is constructed in saturated granite with joints; the PWR spent fuel in a disposal canister is installed in a deposition drift which is then sealed with compacted bentonite; and the backfill material is filled in the repository tunnel. The decay heat generated by the high level radioactive wastes governs the thermomechanical behavior of the near field rock mass of the repository. The temperature and displacement behavior of the repository is influenced more by the pitch variations than the tunnel spacing and repository depth. However, the stress behavior is influenced more by the repository depth variations than the pitch and tunnel spacing. For the final selection of the tunnel spacing, pitch, and repository depth, other aspects such as the nuclide migration through a groundwater flow path, construction costs, operation costs, and so on should be considered.

터빈익렬 유로에서 2상 유동에 따른 삭마량 예측 (Prediction of Erosion Rate in Passages of a Turbine Cascade with Two-Phase flow)

  • 유만선;김완식;조형희
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 1999년도 유체기계 연구개발 발표회 논문집
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    • pp.301-308
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    • 1999
  • The present study investigates numerically particle laden flow through compressor cascades and a rocket nozzle. Engines are affected by various particles which are suspending in the atmosphere. Especially in the case of aircraft aviating in volcanic, industrial and desert region including many particles, each components of engine system are damaged severely. That damage modes are erosion of compressor blading and rotor path components, partial or total blockage of cooling passage and engine control system degradation. Numerical prediction and experimental data, erosion rates are predicted for two materials - ceramic, soft metal - on compressor blade surface. Aluminum oxide ($Al_2O_3$) Particles included in solid rocket propelant make ablative the rocket motor nozzle and imped the expansion processes of propulsion. By the definition of particle deposition efficiency, characteristics of particles impaction are considered quantitatively Stoke number is defined over the various particle sizes and particle trajectories are treated by Lagrangian approach. Particle stability is considered by definition of Weber number in rocket nozzle and particle breakup and evaporation is simulated in a rocket nozzle.

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증착변수 및 첨가가스에 따른 다이아몬드 박막의 구조적 물성 및 전계방출 특성의 변화 분석 (Characterization of structural and field-emissive properties of diamond films in terms of growth conditions and additive gases)

  • 박재현;이태훈;박창균;서수형;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1571-1573
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    • 2003
  • Diamond films including nanocystalline and graphite phase are grown by microwave plasma chemical vapor deposition using $N_2$ additives and negative substrate bias at growth step. The microstructure of the films is controlled by changing $N_2$ gas ratio and negative bias. Defects and grain boundaries between diamond and graphite are proposed to be crucial factors for forming the conducting path of electron emissions. The effect of growth parameters on the film microstructure are investigated by Raman spectroscopy and scanning electron microscopy(SEM). Electron emission characteristics are also examined in terms of the film growth conditions.

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그래픽 모사기법을 이용한 하천 변천의 재현과 예측 (Simulating Depositional Changes in River and It's Prediction)

  • 이영훈
    • 자원환경지질
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    • 제27권6호
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    • pp.579-592
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    • 1994
  • A case study is presented where a fluvial system is modeled in three dimensions and compared to data gathered from a study of the Arkansas River. The data is unique in that it documents changes that affected a straight channel that was excavated within the river by the U.S. Army Corps of Engineers. Excavation plan maps and sequential aerial photographs show that the channel underwent massive deposition and channel migration as it returned to a more natural, meandering path. These records illustrate that stability of fluvial system can be disrupted either by catastrophic events such as floods or by subtle events such as the altering of a stream's equilibrium base level or sediment load. SEDSIM, Stanford's Sedimentary Basin Simulation Model, is modified and used to model the Arkansas River and the geologic processes that changed in response to changing hydraulic and geologic parameters resulting from the excavation of the channel. Geologic parameters such as fluid and sediment discharge, velocity, transport capacity, and sediment load are input into the model. These parameters regulate the frequency distribution and sizes of sediment grains that are eroded, transported and deposited. The experiments compare favorably with field data, recreating similar patterns of fluid flow and sedimentation. Therefore, simulations provide insight for understanding and spatial distribution of sediment bodies in fluvial deposits and the internal sedimentary structure of fluvial reservoirs. These techniques of graphic simulation can be contributed to support the development of the new design criteria compatible with natural stream processes, espacially drainage problem to minimize environmental disruption.

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저탄소강의 크롬도금층 형성 및 내식성에 미치는 Na2MoO4 첨가의 영향 (The effect of Na2MoO4 addition on the formation and corrosion resistance of Cr-electroplated layer of low carbon steel)

  • 배기창;김기욱;김주호;이정훈
    • 한국표면공학회지
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    • 제55권1호
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    • pp.18-23
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    • 2022
  • Presence of cracks in electrodeposited hard chromium layer, which provide a path of corrosive media to steel substrate, is a serious issue in metal finishing with chromium electroplating. In this study, we added sodium molybdate in an electrolyte for chromium electroplating bath. 130g/L of sodium molybdate in Sargent bath for chromium electroplating causes a codepostion of molybdenum with chromium in a rage of 0.61 ~ 3.14 wt.%. The co-deposited molybdenum enhances the crystallinity of chromium layer, thus the hardness is slightly decreases by the addition of molybdate in electrolyte. However, due to the co-deposition of molybdenum, a crack-free chromium layer could be electrodeposited. Such crack-free chromium layer shows a significantly improved corrosion resistance.

유기 실란화합물을 이용한 SiO2 박막의 열CVD (Thermal CVD of Silica Thin Film by Organic Silane Compound)

  • 김병훈;안호근;이마이시 노부유키
    • 공업화학
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    • 제10권7호
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    • pp.985-989
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    • 1999
  • 유기 실란화합물을 사용하여 실리카($SiO_2$)박막을 감압 유기금속 화학증착법(LPMOCVD)으로 제조하였다. 원료로는 triethyl orthosilicate(TRIES)를 사용하였다. 실험조건은 반응기의 출구압력을 1~100 torr, 반응온도는 $600{\sim}900^{\circ}C$로 하였다. 높은 반응온도와 원료농도에서는 $SiO_2$가 빠른 성장속도를 나타내었다. 마이크로 스케일 트랜치에서 층덮임이 좋게 나타났는데, 이것은 응축된 다량체들이 트랜치쪽으로 유동하는 현상 때문으로 생각되었다. 원료가스가 중합반응을 하여 다량체(2량체, 3량체, 4량체 등)들이 생성되고, 그 다량체들이 확산하여 고체표면에서 응축되는 반응경로를 따를 것으로 추정된다. 반응관의 출구에서 기상중의 화학종들을 사극질량분석기로 분석한 결과, 반응온도 $650{\sim}700^{\circ}C$에서는 단량체, 원료가스의 2량체, 고분자들의 피크가 관측되었다. 고온($900^{\circ}C$)에서는 거의 모든 원료가스와 중간체(중합된 다량체) 분자들이 산화되었거나 차가운 관벽에 응축되어 고분자들의 피크가 없어졌다.

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Surface state Electrons as a 2-dimensional Electron System

  • Hasegawa, Yukio
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.156-156
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    • 2000
  • Recently, the surface electronic states have attracted much attention since their standing wave patterns created around steps, defects, and adsorbates on noble metal surfaces such as Au(111), Ag(110), and Cu(111) were observed by scanning tunneling microscopy (STM). As a typical example, a striking circular pattern of "Quantum corral" observed by Crommie, Lutz, and Eigler, covers a number of text books of quantum mechanics, demonstrating a wavy nature of electrons. After the discoveries, similar standing waves patterns have been observed on other metal and demiconductor surfaces and even on a side polane of nano-tubes. With an expectation that the surface states could be utilized as one of ideal cases for studying two dimensionakl (sD) electronic system, various properties, such as mean free path / life time of the electronic states, have been characterized based on an analysis of standing wave patterns, . for the 2D electron system, electron density is one of the most importnat parameters which determines the properties on it. One advantage of conventional 2D electron system, such as the ones realized at AlGaAs/GaAs and SiO2/Si interfaces, is their controllability of the electrondensity. It can be changed and controlled by a factor of orders through an application of voltage on the gate electrode. On the other hand, changing the leectron density of the surface-state 2D electron system is not simple. On ewqy to change the electron density of the surface-state 2D electron system is not simple. One way to change the electron density is to deposit other elements on the system. it has been known that Pd(111) surface has unoccupied surface states whose energy level is just above Fermi level. Recently, we found that by depositing Pd on Cu(111) surface, occupied surface states of Cu(111) is lifted up, crossing at Fermi level around 2ML, and approaches to the intrinsic Pd surface states with a increase in thickness. Electron density occupied in the states is thus gradually reduced by Pd deposition. Park et al. also observed a change in Fermi wave number of the surface states of Cu(111) by deposition of Xe layer on it, which suggests another possible way of changing electron density. In this talk, after a brief review of recent progress in a study of standing weaves by STM, I will discuss about how the electron density can be changed and controlled and feasibility of using the surface states for a study of 2D electron system. One of the most important advantage of the surface-state 2D electron system is that one can directly and easily access to the system with a high spatial resolution by STM/AFM.y STM/AFM.

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농업지역에 조성된 자유수면형 인공습지의 유로에 따른 영양염류의 변화 평가 (Evaluation on the nutrient concentration changes along the flow path of a free surface flow constructed wetland in agricultural area)

  • ;;김이형
    • 한국습지학회지
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    • 제15권2호
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    • pp.215-222
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    • 2013
  • 농업지역의 소하천에 흐르는 하천수는 유역의 농업활동으로 유출된 각종 영양염류의 함량이 높아 호소 유입시 부영양화의 원인이 된다. 본 연구에서는 농업지역의 하천수를 처리하기 위해 조성된 자유수면형 인공습지의 수문학적 유로에 따른 영양염류의 농도를 평가하고자 수행되었다. 습지내 유로에 따른 영양염류의 농도를 평가하기 위한 모니터링은 2009년 4월부터 2011년 11월까지 습지내 유로의 5개 지점에서 수행되었다. 채취된 시료는 유로에 따른 수질변화를 분석하기 위하여 질소와 인에 대한 집중적 분석이 수행되었다. 습지내 TP 저류의 원인을 평가한 결과 수온, DO 및 pH가 큰 영향을 끼치는 것으로 나타났다. 또한 습지내 유입수가 침강지를 통과한 직후 영양염류의 농도가 가장 크게 저감된 것으로 나타났는데, 이는 많은 양의 영양소가 입자와 부착된 형태로 이동하기 때문인 것으로 판단되기에 향후 습지 설계시 침강지의 기능 증대 방안 도입이 중요한 인자인 것으로 평가된다. 그러나 습지내에서 가장 큰 영양염류 저감이 발생한 지점은 유로의 85% 지점인 것으로 나타났다. 이는 습지내 미생물 및 식생흡입에 의한 영향으로 평가되기에 이를 활성화 하기 위한 얕은 습지 및 깊은 습지의 적절한 배치도 인공습지 설계에서 중요한 인자임을 보여주고 있다. 마지막 침전지 부분에서는 영양염류의 농도가 증가하는 것으로 나타났는데, 이는 길어진 체류시간에 의한 퇴적층으로부터 용출이 원인인 것으로 평가되기에 습지설계시 침전지의 적정한 체류시간 확보가 중요한 것으로 나타났다.

고순도 저마늄 감마선 검출기의 검출효율에 따른 유효입체각 검증에 관한 연구 (A Study on the Validation of Effective Angle of Particle Deposition according to the Detection Efficiency of High-purity Germanium Gamma-ray Detector)

  • 장보석
    • 한국방사선학회논문지
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    • 제14권4호
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    • pp.487-494
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    • 2020
  • 선원과 검출기 사이의 거리, 검출기 지름, 방사선원의 부피 효과 등에 의해 검출기 입사면에서 입체각(solid angle)의 변화가 생기고 이는 검출기 내부에서의 경로 길이(path length) 차이를 유발하여 검출효율 결정에 영향을 미친다. 유효입체각 계산을 위한 일반적인 분석 방법은 단순한 기하학적 구조를 가진 선원 (60Co)에만 유용하여 본 실험에서는 검출기와 선원 간 거리 window cap 0.5 cm 기준점으로 하여 25 cm 까지 이동 시 켜면서 측정하였다. 또한 표준부피선원 450 ㎖, 1000 ㎖ 마리넬리 비이커는 검출기에 밀착 시켜 측정하였다. 검출기와 동축인 원형 점선원의 경우, 검출기 창으로부터의 거리에 대한 입체 각도의 변화를 측정치와 몬테카를로 시뮬레이션으로 계산 분석 관계의 결과 검출기의 반지름이 선원의 반지름보다 작을 경우, 입체 각도는 선원의 제곱 반지름 대 검출기의 제곱 반지름의 절반과 같다. 입체 각도의 차이는 0.53가 되므로 몬테카를로의 결과는 허용된다. 검출기-선원 간 거리의 역수와의 관계를 나타내었다. 입체각도는 거리에 따라 급격하게 감소함을 확인하였다. 부피선원에 대한 측정치와 시뮬레이션 결과는 거리 0 cm에서 1.01 %이며 거리가 5 cm, 10 cm로 멀어지면 4 % 미만의 차이를 보인다. 거리가 10 cm 일 때 처음으로 계산결과가 측정 결과보다 작아진다. 이는 거리가 멀어질수록 입체각이 작아지고, 에너지가 낮아질수록 감쇠효과가 지수 함수적으로 증가하는 원리가 효율의 계산에 반영되는 것을 확인할 수 있다. 따라서 검출효율은 고체 각도 및 몬테카를로 코드를 사용하기에 충분함을 입증하였다.