• 한국광학회:학술대회논문집
• /
• 한국광학회 2001년도 제12회 정기총회 및 01년도 동계학술발표회
• /
• pp.78-79
• /
• 2001

노광 후 지연(Post Exposure Delay： PED) 효과는 그림 1과 같이 노광 후 지연 시간에 따른 감광제의 Profile에 thinning, T-top, foot, undercut 를 보여주는 현상으로 화학 증폭형 감광제(Chemically Amplified Resist, CAR) 개발에 있어 PED의 안정성은 중요한 요소이다(1). 따라서 노광후 지연 효과에 대한 모델링은 연구와 개발을 위한 시뮬레이션 tool에 있어 매우 의미 있는 일이다. T-top 이나 undercut 를 형성하는 Surface inhibition layer(SIL) 은 노광 후 지연시 발생되는 environmental base contamination, acid evaporation 이 주요 원인이며 다른 원인으로는 감광제 속에서 acid migration, spin coating 동안에 photoacid generator (PAG)의 고갈, internal basic impurities 이며 그 외에 nonbsic atmospheric contamination, high power laser source의 영향 등이 있다. (중략)

• 전기전자학회논문지
• /
• 제5권1호
• /
• pp.85-90
• /
• 2001

본 논문에서는 지수함수적인 전력지연 특성을 갖는 나카가미-라이스 페이팅 채널에서 두 개의 반송파로 변조된 광대역 신호의 진폭특성을 분석한다. 그 결과, 분해 가능한 경로 신호들 간의 진폭상관은 신호의 대역폭과 다중경로 신호의 rms지연확산 뿐만 아니라 직접파의 전력과 다중경로 신호의 평균전력의 비에 영향을 받는다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
• /
• pp.158-159
• /
• 2006

The resistance-capacitance (RC) delay of signals through interconnection materials becomes a big hurdle for high speed operation of semiconductors which contain multilayer interconnection layers. In order to reduce the RC delay, low-k materials will be used for inter-metal dielectric (IMD) materials. We have developed self-consistent simulation tool that includes neutral-species transport model, based on the relaxation continuum (RCT) model. We present the parametric study of the modeling results of a two-frequency capacitively coupled plasma (2f-CCP) with $N_2/H_2$ gas mixture that is known as promising one for organic low-k materials etching. We include the neutral transport model as well as plasma one in the calculation. The plasma and neutrals are calculated self-consistently by iterating the simulation of both species till a spatiotemporal steady state profile could be obtained.

• Bulletin of the Korean Chemical Society
• /
• 제21권5호
• /
• pp.487-492
• /
• 2000

The combustion characteristics of a mixture of acetaldehyde, oxygen and argon behind a reflected shock wave at temperatures ranging from 1320 to 1897 K at 100 torr were studied. The emission from the OH radical at 306.4 nm and the pressure profile behind the reflected shock were measured to monitor ignition delay time. The ignition delay times were computed from a proposed mechanism of 110 elementary reactions involving 34 species. The simulation and sensitivity analysis confirm that the main channel for oxidation of acetaldehyde at high temperature consists of the Rice-herzfeld mechanism, the decomposition and oxidation of HCO, and the reaction of H with $O_2$.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2004년도 ICCAS
• /
• pp.1275-1280
• /
• 2004

This paper presents the construction of an active suspension system of a one-wheel car model by using fuzzy reasoning. The car model is approximately described by a nonlinear two degrees freedom system subject to excitation from a road profile, and the active control force is constructed by actuating a pneumatic actuator, and the degradation of the performance due to the delay of the pneumatic actuator is improved by inserting a compensator. The fuzzy control is obtained by single input rule modules fuzzy reasoning, and the excitation from the road profile is estimated by using a disturbance observer. The experimental result shows that the proposed active suspension system much improves the performance in the vibration suppression of the car model.

• Journal of electromagnetic engineering and science
• /
• 제5권1호
• /
• pp.31-35
• /
• 2005

This paper presents low form factor dual polarized antenna incorporating low profile annular ring patch antenna having 90$^{\circ}$ phase delay element for circular polarization(CP) and a reactive-loaded monopole linear polarized(LP) antenna. Both types of receiving antennas operate in the same frequency region from 2.320 GHz to 2.345 GHz, while different polarizations are used to take advantage of polarization diversity. The proposed CP antenna has good broadside radiation patterns, while the LP antenna reveals monopole-like radiation patterns. The gains of the antennas are measured to be 1.93 dBi and 2.24 dBi for CP and LP, respectively.

• 한국지하수토양환경학회:학술대회논문집
• /
• 한국지하수토양환경학회 1996년도 사용종료 매립지의 안정화 에 관한 국제 세미나
• /
• pp.97-101
• /
• 1996

Municipal and sanitary landfills can pose environmental problems due to leachate, landfill gas md unstable geotechnical properties. Most governmental bodies delay the correction of landfill problems or landfill replacement until a crises stage is reached. The replacement of a landfill is often made difficult due to costly regulatory controls, public opposition to siting and the high cost of closure for the previous landfill unit. Solutions to extending landfill life and capacity Involve waste minimization by recycling, refuse compaction and waste-to-energy incineration. Incineration can reduce the volume of refuse by 50-95%. The largest installed bases of municipal waste Incinerators are located in Japan and the U.S. The volume of waste contained in a landfill can be estimated by load count tabulations, weight-and-volume measurements or a material balance analysis based on the trash profile of user categories. for an existing landfill, core samples may be collected and analyzed for use in a material balance analysis. Newly generated refuse contains approximately 50% of the heating value of coal. However, landfill properties vary significantly due to the waste profile of the contributors and biodegradation due to time and weathering. The volume of the Nanji-do landfill

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2004년도 ICCAS
• /
• pp.219-222
• /
• 2004

There are several factors that disturb an Ultra-Wideband (UWB) radio propagation in an indoor environment such as path loss, shadowing and multipath fading. These factors directly affect the quality of the received signal. In this paper, we investigated the influence of the human body shadowing on UWB propagation based on measured wireless channel in an anechoic chamber. The characteristics of the UWB channel including the transmitter and the receiver antenna effects are acquired over the frequency bandwidth of 3${\sim}$11 GHz. The major factors such as the power delay profile (PDP), the angular power distribution (APD), the pulse distortion and the RMS delay spread caused by the human body shadowing are presented.

• 대한화학회지
• /
• 제48권1호
• /
• pp.12-16
• /
• 2004

에탄올-산소-아르곤 혼합기체의 점화 과정을 반사 충격파를 이용 1281-1625 K의 온도 범위 및 0.69-1.06 bar 압력 범위에서 고찰하였다. 점화지연시간은 급격한 압력변화와 광 방출 스펙트럼으로부터 측정하였으며, 에탄올 및 산소 기체의 농도 그리고 반응온도에 따른 점화지연시간의 의존관계를 나타내는 실험식을 구할 수 있었다. 실험결과 에탄올 점화 과정에서 연료인 에탄올의 농도가 커지면 점화지연시간이 길어지는 경향을 보였으며, 이는 메탄올 점화 과정에서 메탄올의 농도가 증가하면 점화 과정이 짧아지는 것과는 다른 경향이었다. 그리고 에탄올 점화 과정에 관하여 보다 자세히 고찰하기 위해 다양한 에탄올 연소반응 메카니즘을 이용하여 모델 연구를 수행하였다.

• 한국군사과학기술학회지
• /
• 제14권1호
• /
• pp.154-159
• /
• 2011

The effect of the ignition delay time gap is newly studied. The operational characteristics of the linked two pyrotechnic thrusters are affected by the time gap. Although two thrusters are simultaneously ignited, the time at which the pressure starts to rise in each thruster may not be synchronized. The characteristic of the system with the time gap is compared with that of the fully synchronized system without any time gap. Depending upon the magnitude of the time gap, the pressure-time profile and the ballistic performance are different. When two pyrotechnic thrusters have a time gap, the peak pressure of one thruster(in which the pressure is built up earlier) is increased and the other is decreased. As the time gap is increased, the peak pressure is converged into the maximum pressure. This maximum pressure can be obtained when only one thruster is activated. Because the maximum pressure is bounded, it is predicted that there isn't any catastrophic failures in the considered system. When the time gap is relatively small, the impulse of the combined force acting on the moving body is almost maintained. But the ballistic performance of the system with a large time gap should be carefully estimated because the reduction of the ballistic performance should not be easily neglected.