• Title/Summary/Keyword: Deformation Potential

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Molecular Dynamics Simulation of Deformation of Polymer Resist in Nanoimpirnt Lithography (나노임프린트 리소그래피에서의 폴리머 레지스트의 변형에 관한 분자 동역학 시뮬레이션)

  • Kang, Ji-Hoon;Kim, Kwang-Seop;Kim, Kyung-Woong
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.410-415
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    • 2004
  • Molecular dynamics simulations of nanoimprint lithography in which a stamp with patterns is pressed onto amorphous poly-(methylmethacrylate) (PMMA) surface are performed to study the deformation of polymer. Force fields including bond, angle, torsion, inversion, van der Waals and electrostatic potential are used to describe the intermolecular and intramolecular force of PMMA molecules and stamp. Periodic boundary condition is used in horizontal direction and $Nos\acute{e}$-Hoover thermostat is used to control the system temperature. As the simulation results, the adhesion forces between stamp and polymer are calculated and the mechanism of deformation are investigated. The effects of the adhesion force and friction force on the polymer deformation are also studied to analyze the pattern transfer in nanoimprint lithography. The mechanism of polymer deformation is investigated by means of inspecting the indentation process, molecular configurational properties, and molecular configurational energies.

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Molecular Dynamics Simulation of Deformation of Polymer Resist in Nanoimpirnt Lithography (나노임프린트 리소그래피에서의 폴리머 레지스트의 변형에 관한 분자 동역학 시뮬레이션)

  • Kim Kwang-Seop;Kim Kyung-Woong;Kang Ji-Hoon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.29 no.6 s.237
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    • pp.852-859
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    • 2005
  • Molecular dynamics simulations of nanoimprint lithography in which a stamp with patterns is pressed onto amorphous poly-(methylmethacrylate) (PMMA) surface are performed to study the deformation of polymer. Force fields including bond, angle, torsion, inversion, van der Waals and electrostatic potential are used to describe the intermolecular and intramolecular force of PMMA molecules and stamp. Periodic boundary condition is used in horizontal direction and Nose-Hoover thermostat is used to control the system temperature. As the simulation results, the adhesion forces between stamp and polymer are calculated and the mechanism of deformation are investigated. The effects of the adhesion and friction forces on the polymer deformation are also studied to analyze the pattern transfer in nanoimprint lithography. The mechanism of polymer deformation is investigated by means of inspecting the indentation process, molecular configurational properties, and molecular configurational energies.

Weight Function Theory for Piezoelectric Materials with Crack in Anti-Plane Deformation (균열을 가진 압전재료에 대한 면외 변형에서의 가중함수이론)

  • Son, In-Ho;An, Deuk-Man
    • Journal of Ocean Engineering and Technology
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    • v.24 no.3
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    • pp.59-63
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    • 2010
  • In this paper, an electroelastic analysis is performed on a piezoelectric material with an open crack in anti-plane deformation. Bueckner’s weight function theory is extended to piezoelectric materials in anti-plane deformation. The stress intensity factors and electric displacement intensity factor are calculated by the weight function theory.

Application of shear deformation theory for two dimensional electro-elastic analysis of a FGP cylinder

  • Arefi, M.;Rahimi, G.H.
    • Smart Structures and Systems
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    • v.13 no.1
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    • pp.1-24
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    • 2014
  • The present study deals with two dimensional electro-elastic analysis of a functionally graded piezoelectric (FGP) cylinder under internal pressure. Energy method and first order shear deformation theory (FSDT) are employed for this purpose. All mechanical and electrical properties except Poisson ratio are considered as a power function along the radial direction. The cylinder is subjected to uniform internal pressure. By supposing two dimensional displacement and electric potential fields along the radial and axial direction, the governing differential equations can be derived in terms of unknown electrical and mechanical functions. Homogeneous solution can be obtained by imposing the appropriate mechanical and electrical boundary conditions. This proposed solution has capability to solve the cylinder structure with arbitrary boundary conditions. The previous solutions have been proposed for the problem with simple boundary conditions (simply supported cylinder) by using the routine functions such as trigonometric functions. The axial distribution of the axial displacement, radial displacement and electric potential of the cylinder can be presented as the important results of this paper for various non homogeneous indexes. This paper evaluates the effect of a local support on the distribution of mechanical and electrical components. This investigation indicates that a support has important influence on the distribution of mechanical and electrical components rather than a cylinder with ignoring the effect of the supports. Obtained results using present method at regions that are adequate far from two ends of the cylinder can be compared with previous results (plane elasticity and one dimensional first order shear deformation theories).

Three Dimensional Molecular Dynamics Simulation of Nano-Lithography Process for Fabrication of Nanocomponents in Micro Electro Mechanical Systems (MEMS) Applications (MEMS 부품 제조를 위한 나노 리소그래피 공정의 3차원 분자동력학 해석)

  • Kim, Young-Suk;Lee, Seung-Sub;Na, Kyoung-Hoan;Son, Hyun-Sung;Kim, Jin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.10
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    • pp.1754-1761
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    • 2003
  • The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

Effect of slip system transition on the deformation behavior of Mg-Al alloy: internal variable based approach (비탄성 변형 이론을 바탕으로 한 Mg-Al 합금의 슬립기구 천이 현상 해석)

  • Lee H. S.;Bang W.;Chang Y. W.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2004.05a
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    • pp.186-189
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    • 2004
  • Although magnesium has high potential for structural material due to the lightweight and high specific strength, the structural application has been limited by the low ductility at room temperature. The reason of the poor ductility is few activated slip systems of magnesium (HCP structure) during deformation. As temperature increases, however, additional non-basal slip systems are incorporated to exhibit higher ductility comparable to aluminum. In the present study, a series of tensile tests of Mg-Al alloy has been carried out to study deformation behavior with temperature variation. Analysis of load relaxation test results based on internal variable approach gave information about relationship between the micromechanical character and corresponding deformation behavior of magnesium. Especially, the material parameter, p representing dislocation permeability through barriers was altered from 0.1 to 0.15 as the non-basal slip systems were activated at high temperature.

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An Inextensible Wire-shaped Deformation Model for Catheter Simulation (카테터의 거동을 시뮬레이션 하기 위한 고정된 길이를 유지하는 실 형상의 변형체 모델)

  • Han, Hyehyun;Lee, Doo Yong
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.8
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    • pp.610-614
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    • 2016
  • This paper proposes an inextensible wire-shaped deformation model to simulate catheter behavior. The wire-shaped model consists of serially-connected mass points and massless rigid links. Torsional springs and dampers are employed to accommodate bending. Deformation is computed by updating the rotation angles from the global coordinates while maintaining the fixed length condition. Equations of motion is derived from double pendulum motion. Spring constant is computed using strain energy and potential energy stored in a torsional spring to reflect material property. Simulation is conducted to show deformation of wire model while maintaining inextensibility condition and including material properties. The proposed method guarantees inextensible constraint in the catheter simulation.

Effect of Slip System Transition on the Deformation Behavior of Mg-Al Alloy: Internal Variable Based Approach (비탄성 변형 이론을 바탕으로 한 Mg-Al 합금의 슬립기구 천이 현상 해석)

  • Lee H.S.;Chang Y. W.;Bang W.
    • Transactions of Materials Processing
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    • v.13 no.6 s.70
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    • pp.535-539
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    • 2004
  • Although magnesium has high potential for structural material due to the lightweight and high specific strength, the structural application has been limited by the low ductility at room temperature. The reason of the poor ductility is few activated slip systems of magnesium (HCP structure) during deformation. As temperature increases, however, additional non-basal slip systems are incorporated to exhibit higher ductility comparable to aluminum. In the present study, a series of tensile tests of Mg-Al alloy has been carried out to study deformation behavior with temperature variation. Analysis of load relaxation test results based on internal variable approach gave information about relationship between the micromechanical character and corresponding deformation behavior of magnesium. Especially, the material parameter, p representing dislocation permeability through barriers was altered from 0.1 to 0.15 as the non-basal slip systems were activated at high temperature.

Bending response of functionally graded piezoelectric plates using a two-variable shear deformation theory

  • Zenkour, Ashraf M.;Hafed, Zahra S.
    • Advances in aircraft and spacecraft science
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    • v.7 no.2
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    • pp.115-134
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    • 2020
  • This paper proposes a bending analysis for a functionally graded piezoelectric (FGP) plate through utilizing a two-variable shear deformation plate theory under simply-supported edge conditions. The number of unknown functions used in this theory is only four. The electric potential distribution is assumed to be a combination of a cosine function along the cartesian coordinate. Applying the analytical solutions of FGP plate by using Navier's approach and the principle of virtual work, the equilibrium equations are derived. The paper also discusses thoroughly the impact of applied electric voltage, plate's aspect ratio, thickness ratio and inhomogeneity parameter. Results are compared with the analytical solution obtained by classical plate theory, first-order-shear deformation theory, higher-order shear deformation plate theories and quasi-three-dimensional sinusoidal shear deformation plate theory.

Estimation of Final Deformation of Hard Rock Tunnel Using Early Measured Deformation (초기계측치를 이용한 경암 지반내 터널의 최총변위량 예측)

  • 송승곤;양형식;임성식;정소걸
    • Tunnel and Underground Space
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    • v.12 no.2
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    • pp.99-106
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    • 2002
  • To use the early measured data of tunnel deformation in but analysis, the relationship between these values find final deformation data were studied. Panet\`s exponential and fraction equations successfully approximate the convergence of the hard rock tunnels. Measured deformation data of ID location, $U_{1D}$ show that they can be lilted to linear equations but should not be used to estimate potential deformation before measurement, $C_{0}$. Early measured data $U_{1D}$ $U_{2D}$ , and final deformation $ U_{L}$ showed linear correlations. It proved that estimated data of final deformation from early measured ones can be used as input parameters for back analysis.