• Title/Summary/Keyword: Deflectometry

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Measurement of Wafer Deformation using Deflectometry (편향법을 이용한 웨이퍼 변형 측정)

  • Lee, Hodong;Shin, Sanghoon;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.24 no.6
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    • pp.324-330
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    • 2013
  • Phase-measuring deflectometry is a full-field gradient measuring technique that lends itself very well to testing specular optical surfaces. We have measured deformation of a large specular surface by deflectometry. In this work, we have used a Fourier-transform method to get the phase from a measured deformed fringe pattern, and we have used least squares method to obtain the height information of the specular surface from the calculated slope. Experimentally, we have confirmed that deflectometry can be used for deformation measurement of a specular surface like that of a wafer.

Simultaneous Determination of Both Surface Profiles of a Bifocal Lens Using Dual-Wavelength Transmission Deflectometry With Liquid (액체와 2 파장 투과형 편향법을 이용한 다초점 렌즈 양면 프로파일 동시측정)

  • Shin, Sanghoon;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.26 no.3
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    • pp.147-154
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    • 2015
  • We propose a method for simultaneously measuring the front and back surface profiles of transparent optical components. The proposed method combines dual-wavelength transmission deflectometry with liquids to record distorted phases at different wavelengths, and then numerically reconstructs the three-dimensional phase information to image the front and back surfaces of the lens. We propose a theoretical model to determine the surface information, and a bifocal lens is experimentally investigated. Unlike conventional transmission deflectometry, our proposed method supports direct observation of the front and back surface profiles of the optical elements.

Three-Dimensional Measurements of the Specular Components by Using Direct Phase-Measuring Transmission Deflectometry

  • Na, Silin;Shin, Sanghoon;Kim, Doocheol;Yu, Younghun
    • New Physics: Sae Mulli
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    • v.68 no.11
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    • pp.1275-1280
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    • 2018
  • We demonstrated transmission direct phase-measuring deflectometry (DPMD) with a specular phase object having discontinuous surfaces by using two displays and a two-dimensional array detector for display and by recording the distorted fringe patterns. Three-dimensional (3D) information was obtained by calculating the height map directly from the phase information. We developed a mathematical model of the phase-height relationship in transmission DPMD. Unlike normal transmission deflectometry, this method supports height measurement directly from the phase. Compared with other 3D measurement techniques such as interferometry, this method has the advantages of being inexpensive and easy to implement.

Determining the Refractive Index Distribution of an Optical Component Using Transmission Deflectometry with Liquids (액체와 투과형 편향법을 이용한 광학부품의 굴절률 분포 측정)

  • Shin, Sanghoon;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.25 no.6
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    • pp.326-333
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    • 2014
  • Phase-measuring deflectometry is a full-field gradient measuring technique that lends itself very well to testing specular optical surfaces. We have measured the deformation of the surface of a lens by transmission deflectometry with liquids. In this study, a method is proposed for measuring the refractive index distribution of a transparent object component. The proposed method combines transmission deflectometry with liquids. The deformed fringe patterns of a sample immersed in different fluids are recorded, and then the three-dimensional phase information of the sample is reconstructed numerically. We have used phase-shifting and temporal phase-unwrapping methods to retrieve the phase from the measured deformed fringe pattern, and we have used a least-squares method to find the height information of the specular surface from the calculated slope. In particular, we have proposed a theoretical model for determining the refractive index of sample and planar convex lens are demonstrated experimentally.

A Study of Three-Dimensional Measurement By Transmission Deflectometry and Hilbert Transform (Hilbert 변환과 투과형 편향법을 이용한 3차원 측정연구)

  • Na, Silin;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.27 no.2
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    • pp.61-66
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    • 2016
  • We used transmission deflectometry to measure the three-dimensional shapes of optical components, and we used the Hilbert transform to retrieve the phases from measured deformed fringe images. Deflectometry is useful for measuring large-scale samples, and specular samples. We have retrieved the phases from deformed fringe images and Hilbert-transformed images, and have used the least-squares method to find the height information. We have verified that phase retrieval using Hilbert transform is useful by computer simulation and experiment.

The setup of the moiré deflectometry using the virtual grating and the measurement of the effective focal length (가상격자를 사용한 무아레 무늬 발생기의 구성과 유효초점거리 측정)

  • Kim, Sang Gee
    • Journal of Korean Ophthalmic Optics Society
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    • v.5 no.2
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    • pp.181-186
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    • 2000
  • The setup of the moir$\acute{e}$ deflectometry using the virtual grating was done, so the convergence and divergence of a pencil of ray was determined. The light source was He-Ne laser(3mW). The focal length of the first lens, the second lens being 18 mm, 250 mm respectively was used for the setup of the beam expander. The optics of the moir$\acute{e}$ deflectometry determining the vergence was used a diffraction grating(pitch = $1.6{\mu}m/line$) and a front flat reflection mirror. The effective focal length of the trial lens set was measured and compared with the theoretical value.

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Improved Iterative Method for Wavefront Reconstruction from Derivatives in Grid Geometry

  • Nguyen, Vu-Hai-Linh;Rhee, Hyug-Gyo;Ghim, Young-Sik
    • Current Optics and Photonics
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    • v.6 no.1
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    • pp.1-9
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    • 2022
  • This paper proposes a robust, simple zonal wavefront-estimation method in a grid sampling model. More slopes are added to the integral equation of the algorithm to improve the accuracy and convergence rate of this approach, especially for higher-order optical aberrations. The Taylor theorem is applied to clarify the mathematical description of the remaining error in the proposed method. Several numerical simulations are conducted to ensure the performance and improvement in comparison to the Southwell and previous algorithm. An experiment is also conducted according to deflectometry output and the results are verified using a reference measured with a stylus system.

Measurement of POF Refractive Index Profile by using Phase-Shifting Moire Deflectometry (위상천이 모아레 간섭방법을 이용한 POF의 굴절률 분포 측정)

  • 우세윤;이현호;박승한
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.07a
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    • pp.274-275
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    • 2003
  • 광통신 분야의 연구 중 근거리 광통신 분야에 적용하기 위한 Plastic Optical Fiber(POF)에 관한 연구와 개발이 활발히 이루어지고 있다. POF의 광전송 특성을 결정짓는 요소 중 가장 중요한 특성이 바로 굴절률 분포이다. 이에 따라 그동안 다양한 형태의 POF 굴절률 측정 방법이 연구되어 왔다. 기존 Glass Optical Fiber의 굴절률 분포 측정 방법 중 가장 일반적이고 효과적인 방법 중 하나는 coherent 빛의 간섭을 이용한 transverse interferograms을 분석하는 방법으로 Fizeau 간섭계와 같은 간섭계를 이용하여 위상변화를 측정하고 측정한 위상을 tomography적인 해석방법을 통해 굴절률 분포를 계산하는 방법이다. (중략)

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