• Title/Summary/Keyword: Defect Investigation

Search Result 232, Processing Time 0.021 seconds

A Relationship between UT Reported Sizes and Actual Sizes of Defects in Rotor Forgings

  • Seong, Un-Hak;Kim, Jeong-Tae
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.25 no.6
    • /
    • pp.483-486
    • /
    • 2005
  • The relationship between the EFBH (Equivalent Flat-Bottom Hole) size measured by non-destructive method and the actual size by destructive method in many rotors manufactured at Doosan Heavy Industries & Construction Co. Ltd. was investigated. In this investigation. "the Master Curve" compensating the differences between UT reported sizes and actual sizes of defects in our rotor forgings were obtainable. The applicability of this "Master Curve" as a way of calculating the actual defect size was also investigated. For the evaluation of rotor forgings, it is expected that this "Master Curve" may be used to determine the accurate actual sizes of defects.

A Study on the Ultrasonic Conditioning for Interlayer Dielectic CMP (층간절연막 CMP의 초음파 컨디셔닝 특성에 관한 연구)

  • 서헌덕;정해도;김형재;김호윤;이재석;황징연;안대균
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2000.05a
    • /
    • pp.854-857
    • /
    • 2000
  • Chemical Mechanical Polishing(CMP) has been accepted as one of the essential processes for VLSI fabrication. However, as the polishing process continues, pad pores get to be glazed by polishing residues, which hinder the supply of new slurry. This defect makes removal rate decrease with a number of polished wafer and the desired within-chip planarity, within wafer and wafer-to-wafer nonuniformity are unable to be achieved. So, pad conditioning is essential to overcome this defect. The eletroplated diamond grit disk is used as the conventional conditioner, And alumina long fiber, the .jet power of high pressure deionized water and vacuum compression are under investigation. But, these methods have the defects like scratches on wafer surface by out of diamond grits, subsidences of pad pores by over-conditioning, and the limits of conditioning effect. To improve these conditioning methods. this paper presents the Characteristics of Ultrasonic conditioning aided by cavitation.

  • PDF

TEM Stud of GaN Thick Film Crystals Grown by HVPE

  • 송세안;이성국
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 1999.07a
    • /
    • pp.121-121
    • /
    • 1999
  • Gallium nitride (GaN) semiconductor is intensively under investigation for commercialization of short wavelength light emitting devices and laser diodes. One of serious obstacles to overcome is to reduce the defect density in GaN film grown by various techniques such as MOCVD, HVPE, etc. Many research groups including SAIT are trying to improve the defect density to 106-107/cm2 from the level of 108-1010/cm2. We have investigated epitaxial growth behaviour of GaN thin and thick films under hidride vapour phase epitaxy (HVPE) condition. In this report, we present the microstructural and crystallographical characteristics of the GaN films grown on sapphire (0001) substrate which were studied by both conventional and high-resolution transmission electron microscopy (TEM). Also we present some microscopic analysis results obtained from GaN films grown by ELO(dpitzsial lateral overgrowth)-HVPE and from GaN quantum well structures grown by MOCVD. Another serious problem in growing GaN thick film by HVPE is internal micro-cracks. We also comment the origin of the micro-crack.

  • PDF

Investigation of Laser Scattering Pattern and Defect Detection Based on Rayleigh Criterion for Crystalline Silicon Wafer Used in Solar Cell (태양전지 실리콘 웨이퍼에서의 레일리기준 기반 레이저산란 패턴 분석 및 결함 검출)

  • Yean, Jeong-Seung;Kim, Gyung-Bum
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.28 no.5
    • /
    • pp.606-613
    • /
    • 2011
  • In this paper, patterns of laser scattering and detection of micro defects have been investigated based on Rayleigh criterion for silicon wafer in solar cell. Also, a new laser scattering mechanism is designed using characteristics of light scattering against silicon wafer surfaces. Its parameters are to be optimally selected to obtain effective and featured patterns of laser scattering. The optimal parametric ranges of laser scattering are determined using the mean intensity of laser scattering. Scattering patterns of micro defects are investigated at the extracted parameter region. Among a lot of pattern features, both maximum connected area and number of connected component in patterns of laser scattering are regarded as the important information for detecting micro defects. Their usefulness is verified in the experiment.

Investigation of the Growth Kinetics of Al Oxide Film in Sulfuric Acid Solution (황산 용액에서 Al 산화피막의 생성과정 연구)

  • Chon, Jung-Kyoon;Kim, Youn-Kyoo
    • Journal of the Korean Chemical Society
    • /
    • v.54 no.4
    • /
    • pp.380-386
    • /
    • 2010
  • We have investigated the growth kinetics of Al oxide film by anodization in sulfuric acid solution and the electronic properties of this film using electrochemical impedance spectroscopy. Al oxide film consisted $Al_2O_3$ was grown based on the point defect model and shown the eclctronic properties of n-type semiconductor.

Critical Parameters governing on the Fatigue Properties in the Hyper-eutectoid Steel Wires used for Automotive Tire (고강도 극 세선의 피로 특성 향상을 위한 특정 인자 제시)

  • Yang, Y.S.;Bae, J.G.;Park, C.G.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2007.10a
    • /
    • pp.124-127
    • /
    • 2007
  • In this study, we focused on investigation of governing parameters affected on the fatigue properties in the hyper-eutectoid steel wires used for TBR tires. Steel wires are fabricated under different drawing strain from 3.36 to 3.80. Their diameters are 0.21 mm and 0.185mm, respectively. The fatigue properties was measured by hunter rotating beam tester, specially designed thin-sized steel wires. The results showed that the fatigue properites of steel wire, marked as A-1, were greater than the others, due to the low value of residual stress. In order to elucidate the variations of fatigue properties, the microstructure, surface defect and residual stress were observed and measured by useful analysis technique, such as TEM, 3D profiler and FIB.

  • PDF

Investigation on DHF Application at Metal CMP Cleaning Process (Metal CMP 세정 공정에서 DHF 적용에 관한 연구)

  • 김남훈;김상용;김인표;장의구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.16 no.7
    • /
    • pp.569-572
    • /
    • 2003
  • In this study, we evaluated the dilute HF cleaning to reduce residual defects made by metal CMP process. The purpose of this test is to observe the existence of barrier metal damage during DHF cleaning on condition that it should not affect metal thin film reliability, so we will get rid of slurry residual particles as a main defect of the metal CMP process for the better yield. In-line defect data showed us that slurry residual particles were removed by DHF application. The HF rinse significantly reduced metal contamination levels and surface roughness. The best effect by additional oxide loss was discovered when Dilute HF condition is 10".

A Field Survey to Derive Defect Rate According to the Years of Use of Fire Doors in Apartment House (공동주택 방화문의 사용연수에 따른 불량률 도출을 위한 현장조사)

  • Kim, Yun-Seong;Kwon, Yeong-Jin
    • Proceedings of the Korean Institute of Building Construction Conference
    • /
    • 2022.11a
    • /
    • pp.97-98
    • /
    • 2022
  • The purpose of this study is to find out the failure conditions of fire doors in the process of use and prepare maintenance measures against them and find out the failure conditions and failure rates of fire doors according to the period of use of buildings. According to a survey of the failure rate and failure factor of fire doors, the failure rate of fire doors under 5 years was 3.7%, 13.4% of fire doors under 5 years and 10 years, and 14.8% of fire doors under 15 years and 27.6% of fire doors over 20 years. In particular, 15 years later, the failure rate of fire doors exceeded 20%. The main defects were found to be natural aging, holes, opening and closing failures, gaps, and failure and wear of accessories such as gaskets and door closers.

  • PDF

Investigation of High Temperature Electrical Conductivity of CaO-partially Stabilized $ZrO_2$ (CaO에 의하여 부분 안정화된 $ZrO_2$의 고온 전기 전도도에 대한 연구)

  • 변수일
    • Journal of the Korean Ceramic Society
    • /
    • v.16 no.4
    • /
    • pp.213-224
    • /
    • 1979
  • The present work was undertaken: (1) to determine if CaO-partially stabilized $ZrO_2$ prepared by Hot Petroleum Drying Method would show better ionic conductor as an oxygen sensor in molten metals than that prepared by Oxide Wet Mixing Method and than CaO-fully stabilized $ZrO_2$, and (2) to understand the nature of conduction mechanism of CaO-partially stabilized $ZrO_2$ by a comparison of measured electrical conductivity data with theory on defect structure of pure monoclinic $ZrO_2$ and fully stabilized cubic $ZrO_2$. The DC electrical conductivity was measured by 3-probe technique and the AC electrical conductivity by 2-probe technique as a function of temperature in the range 973-1373 K and oxygen partial pressure in the range 10-1-10-25Mpa. The results of the experiments were as follows: 1. CaO-partially stabilized $ZrO_2$ prepared by Hot petroleum Drying Method showed at T=1094-1285 K and $Po_2$=10-7-10-25 MPa a nearly ionic conduction with 4 times higher conductivity than that prepared by Oxide Wet Mixing Method. 2. High-oxygen pressure conductivity tends toward a Po_2^{+1/5}-Po_2^{+1/6}$dependence. An analysis of possible defect structures suggests that CaO-partially stabilized $ZrO_2$ has an anti-Frenkel defect in which singly or doubly ionized oxygen interstitials and defect electrons predominate at T=1094-1285 K and $Po_2$=10-1-10-7MPa. 3. The activation energy for pure electron hole-conduction and ionic conduction of CaO-partially stabilized $ZrO_2$ was found to be 130 KJ/mol at T=973-1373 K, $Po_2$=2, 127 10-2 MPa(air) and 153KJ/mol at T=1094-1285 K respectively.

  • PDF

Influence of Shearing Amount on Detection of Internal Defect of Pressure Pipeline by Shearography (Shearography 기법에 의한 압력 배관 내부 결함 검출에서 전단량의 영향)

  • Kim, Koung-Suk;Kang, Ki-Soo;Choi, Man-Yong;Kang, Young-June
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.26 no.2
    • /
    • pp.122-129
    • /
    • 2006
  • Shearography is one of optical methods that has been applied to nondestructive testing (NDT) and strain/stress analysis. The technique has the merit of the directly measuring relative displacement, which is insensitive to environmental vibration disturbance. Previous studies about the method have emphasized on extending its application to new fields and lack insufficient research on effective parameters for qualitative and quantitative evaluation of defects. In this paper, the influence of shearing amount on the detection of an internal defect is investigated. In experiment, slender defects along longitudinal direction of pipeline are artificially designed and detection results according to the change of shearing amount are analyzed. Based on the investigation, we propose the technique for the determination of defect size and accurate source location.