• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.99-104
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• 2003

A precision displacement measurement system of 3-DOF micro motions is proposed in this paper. The measurement system is composed of two diode lasers, two quadratic PSDs, two beam splitters and a sphere whose surface is highly reflective. In this measurement system, the sphere reflector is mounted on the platform of positioning devices whose 3-DOF translational motions are to be measured, and the sensitive areas of two PSDs are oriented toward the center point of the sphere reflector. Each laser beam emitted from two diode laser sources is reflected at the surface of sphere and arrives at two PSDs. Each PSD serves as a 2-dimensional sensor, providing the information on the 3-dimensional position of the sphere. In this paper, we model the relationship between the outputs of two PSDs and 3-DOF translational motions of the sphere mounted on the object. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, and measurement error. The simulation results show that the proposed measurement system can be valid means of precision displacement measurement of 3-dimensional micro motions.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.324-329
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• 2012

Isolation tables are widely used for precision equipments and their isolation performances have been usually expressed and evaluated by transsmissibility. However, transmissibility is a concept for 1-degree of freedom(DOF) system. In practice, isolation tables are supproted by more than 4 springs. Each spring is subjected to vertical and horizontal ground vibrations, and also the table has more than 1-DOF. Therefore, isolation tables should be treated as multi-input/multi-output(MIMO) system of which isolation performance is expressed by transmissibility matrix. However, the matrix is too complicated to be an index for a system. In this paper, maximum singular value of transmissibility matrx is suggested as a simple performance index of a MIMO isolation system. Physical meaning of singular value is explained using a simple a 2-DOF isolation table. Furthermore, maximum singular values of passive, 3-DOF active and 6-DOF active isolation tables are obtained through experiments, and their meaning are explained and compared with each other.

• Smart Structures and Systems
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• v.13 no.6
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• pp.927-942
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• 2014

Structural displacement is an important indicator for assessing structural safety. For structural displacement monitoring, vision-based displacement measurement systems have been widely developed; however, most systems estimate only 1 or 2-DOF translational displacement. To monitor the 6-DOF structural displacement with high accuracy, a vision-based displacement measurement system with a uniquely designed marker is proposed in this paper. The system is composed of a uniquely designed marker and a camera with a zooming capability, and relative translational and rotational displacement between the marker and the camera is estimated by finding a homography transformation. The novel marker is designed to make the system robust to measurement noise based on a sensitivity analysis of the conventional marker and it has been verified through Monte Carlo simulation results. The performance of the displacement estimation has been verified through two kinds of experimental tests; using a shaking table and a motorized stage. The results show that the system estimates the structural 6-DOF displacement, especially the translational displacement in Z-axis, with high accuracy in real time and is robust to measurement noise.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.871-874
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• 2002

Many malfunctions take place in container crane spreader due to impact. So we designed a 2DOF hydraulic impact absorbing system with multi-step damping coefficient and studied the effect of orifice's interval and damping coefficient. The damping coefficient of upper piston was found to be 180 N.s/m, and the orifice's interval to be 9mm, the max reaction force and the average reaction force might be lowest. Compared with a general 2-DOF impact absorbing system, the max reaction force reduced by 46%., and average reaction force reduced by 5%.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.80-91
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• 2008

Electrostatic forces have an advantage of directly levitating not only non-ferromagnetic metals but also semiconductors, such as silicon wafers, and dielectric materials like glass. This paper describes the characteristics of electrostatic forces and electrostatic suspension system, followed by the basic principle of 1-DOF(degree of freedom) electrostatic suspension system, and the structures of electrodes-for-suspension and voltage supplying methods to the electrodes in 1-DOF model. This paper also discuss about the minimum number of electrodes needed to control n-DOF motion of the suspended object and represents some desirable electrode patterns to stabilize the 6-DOF motion of the object. In the near future, electrostatic suspension system is expected to be applied to industrial manufacturing processes, for example, to the manufacture of semiconductor devices and/or flat panel display devices.

• Journal of Power System Engineering
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• v.11 no.3
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• pp.59-65
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• 2007

In this study, 6-DOF simulator using pneumatic cylinder driving apparatus was manufactured because a pneumatic cylinder driving apparatus is superior to electric driving motor and hydraulic actuator, which used in traditional 6-DOF simulator, in competitive price and acceleration performance, and, 6-DOF motion can be realized at a low price in case that relatively low load is imposed on the simulator. The possible range of pose control of the simulator was investigated by inverse kinematics, and, it was controlled by a linear controller derived from linear model of the simulator. The Experimental results show that the simulator follows given coordinate well.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.7
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• pp.637-643
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• 2010

The paper is about the development of 6-DOF active vibration isolation systems using VCM. Firstly, formulate the vertical 3-DOF mathematical model under eccentric load, and compare the model with the case in which the center of mass is located at the centroid. And then, complete the 6-DOF mathematical model by formulating the horizontal 3-DOF mathematical model. Find main parameters by comparing the result of the frequency response test with simulation result on the model. Finally, achieve the performance of vibration isolation by applying loop shaping approach & feedforward controller.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.4
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• pp.53-62
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• 2010

This study introduces about development of multi-DOF ultrasonic motor that are composed of a bar-shaped stator and a spherical rotor. The ultrasonic motor is a motor which is operated by vibrations over frequency of 20kHz. The multi-DOF ultrasonic motor will be developed by expanding the basic theory of existing 1-DOF ultrasonic motor. It can generate 3-DOF rotation of the rotor around perpendicular axes using 3 vibration modes of stator. By using finite element methods, the optimal dimension of stator is decided and made the components of stator. When we apply the multi-DOF ultrasonic motor composed of rotor and stator to the driving test system, it will be checked whether the motor can be driven at the direction of 3-DOF or not. And it is proposed how the simulation of square bar shaped multi-DOF ultrasonic motor is accomplished.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.8
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• pp.1362-1370
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• 2008

This paper describes the design and characteristic analysis of a novel 3-DOF(Degree of Freedom) spherical motor. For multi DOF actuating, several numbers of motors have been used. By the using of normal motors they connected each other in single joint, is necessary to a several type of complex power transmission devices. The 3-DOF spherical motor can drive roll, pitch, and yaw motion in only one unit and it is not necessary to use additional gears and links parts. Therefore the using of 3-DOF spherical motor can eliminate; combined effects of inertia, backlash, non-linear friction, and elastic deformation of gears. In this paper, we propose the novel structured 3-DOF spherical motor and derive its principles of operation. Firstly, we designed concept model of novel structured 3-DOF spherical motor. Next, we derive the control method by calculating the currents. Also, to have intuitive driving control, we express the rotor position in equivalent angle-axis system and determine the exciting period of currents from the calculation result of the currents. To verify the control method, we calculated the currents by the position of rotor. and then we analyzed the characteristics by 3D Finite Element Method when the calculated currents are excited.

• IEMEK Journal of Embedded Systems and Applications
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• v.15 no.3
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• pp.139-148
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• 2020

This paper is concerned with the H₂ attitude controller design for 3 degree of freedom (DOF) Hover systems with an event-triggered mechanism. The 3 DOF Hover system is an embedded platform for unmanned aerial vehicle (UAV) provided by Quanser. The mathematical model of this system is obtained by a linearization around operating points and it is represented as a linear parameter-varying (LPV) model. To save communication network resources, the event-triggered mechanism (ETM) is considered and the performance of the system is guaranteed by the H₂ controller. The stabilization condition is obtained by using Lyapunov-Krasovskii functionals (LKFs) and some useful lemmas. The effectiveness of the proposed method is shown by simulation and experimental results.