• Title/Summary/Keyword: DOE-2

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Characterization of Cesium Assisted Sputtering Process Using Design of Experiment (실험계획법을 이용한 세슘보조 스퍼터링 공정의 특성분석)

  • Min, Chul-Hong;Park, Sung-Jin;Yoon, Neung-Goo;Kim, Tae-Seon
    • Journal of Surface Science and Engineering
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    • v.40 no.4
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    • pp.165-169
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    • 2007
  • Compared to conventional Indium Tin Oxide (ITO) film deposition methods, cesium (Cs) assisted sputtering offers higher film characteristics in terms of electrical, mechanical and optical properties. However, it showed highly non-linear characteristics between process input factors and equipment responses. Therefore, to maximize film quality, optimization of manufacturing process is essential and process characterization is the first step for process optimization. For this, we designed 2 level design of experiment (DOE) to analyze ITO film characteristics including film thickness, resistivity and transmittance. DC power, pressure, carrier flow, Cs temperature and substrate temperature were selected for process input variables. Through statistical effect analysis methods, relation between three types of ITO film characteristics and five kinds of process inputs are successfully characterized and eventually, it can be used to optimize Cs assisted sputtering processes for various types of film deposition.

Study on Thermal Properties and Plasma Resistance of MgO-Al2O3-SiO2 Glass (MgO-Al2O3-SiO2계 유리의 열물성과 내플라즈마성 연구)

  • Yoon, Ji Sob;Choi, Jae Ho;Jung, YoonSung;Min, Kyung Won;Im, Won Bin;Kim, Hyeong-Jun
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.2
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    • pp.61-66
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    • 2021
  • In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al2O3-SiO2(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF4/O2/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al2O3 and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO2.

Development of Load Prediction Equations of Office Buildings

  • Seok, Ho-Tae;Kim, Kwang-Woo
    • International Journal of Air-Conditioning and Refrigeration
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    • v.10 no.2
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    • pp.65-71
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    • 2002
  • The objective of this study is to evaluate the design parameters and to develop the cooling and heating load prediction equations of office buildings. The building load calculation simulation was carried out using the DOE-2.1E program. The results of the simulation were used as data for multiple regression analysis which could develop the load prediction equations.

Effect of Thermal Aging in PMN-PZT Ceramics (PMN-PZT 세라믹스에 있어서 열에이징 효과)

  • 이개명;박창엽
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.05a
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    • pp.17-21
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    • 1995
  • Tw types of Pb(Mn$\sub$1/3/Nb$\sub$2/3/)O$_3$+PZT Ceramics had been fabricated by hot-pressing method. One had cause grain and the other had fine grain doe to Cr$_2$O$_3$ addition. These specimen were poled by applying the DC electric field in various steps. The effects of thermal aging on their piezoelectric characteristics and temperature stability of the frequency were investigated.

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The Equilibrium Design of Radial Magnetic Force for Reduction of Vibration in IPM type BLDC Motor

  • Lee, Gyeong-Deuk;Kim, Gyu-Tak
    • Journal of Electrical Engineering and Technology
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    • v.11 no.2
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    • pp.377-382
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    • 2016
  • In this paper, influence of vibration on cogging torque and Radial Magnetic Force(RMF) imbalance was investigated in the IPM type BLDC motor. Design of cogging torque reduction and the RMF equilibrium was proceed applied to Design of Experiment(DOE). Vibration test results, the RMF imbalance was confirmed that a significant impact of vibration.

Optimization Condition of Trace Analysis of Fuel Oxygenated Compounds Using The Design of Experiment (DOE) in Solid-Phase Microextraction with GC/FID (고체상미량분석법(SPME-GC/FID)에서 실험계획법을 이용한 연료첨가제 미량분석의 최적조건)

  • An, Sang-Woo;Lee, Si-Jin;Chang, Soon-Woong
    • Journal of Soil and Groundwater Environment
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    • v.15 no.1
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    • pp.9-18
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    • 2010
  • In this study, Solid-phase micro-extraction (SPME) with Gas Chromatograph using Flame Ionization Detector (GC/FID) was studied as a possible alternative to liquid-liquid extraction for the analysis of Methyl tert-butyl ether (MTBE) and Tertiary-butyl ether (TBA) in water and an optimization condition of trace analysis of MTBE and TBA using the design of experiment (DOE) was described. The aim of our research was to apply experimental design methodology in the optimization condition of trace analysis of fuel oxygenated compounds in soil-phase microextraction with GC/FID. The reactions of SPME were mathematically described as a function of parameters of Temp ($X_1$), Volume ($X_2$), Time ($X_3$) and Salt ($X_4$) being modeled by the use of the partial factorial designs, which was used for fitting 2nd order response surface models and was alternative to central composite designs. The model predicted agreed with the experimentally observed result ($Y_1$(MTBE, $R^2$ = 0.96, $Y_2$ (TBA, $R^2$ = 0.98)). The estimated ridge of the expected maximum responses and optimal conditions for MTBE and TBA were 278.13 and (Temp ($X_1$) = $48.40^{\circ}C$, Volume ($X_2$) = 73.04 mL, Time ($X_3$) = 11.51 min and Salt ($X_4$) = 12,50 mg/L), and 127.89 and (Temp ($X_1$) = $52.12^{\circ}C$, Volume ($X_2$) = 88.88mL, Time ($X_3$) = 65.40 min and Salt ($X_4$) = 12,50 mg/L), respectively.

Parametric study of propeller boss cap fins for container ships

  • Lim, Sang-Seop;Kim, Tae-Won;Lee, Dong-Myung;Kang, Chung-Gil;Kim, Soo-Young
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.6 no.2
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    • pp.187-205
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    • 2014
  • The global price of oil, which is both finite and limited in quantity, has been rising steadily because of the increasing requirements for energy in both developing and developed countries. Furthermore, regulations have been strengthened across all industries to address global warming. Many studies of hull resistance, propulsion and operation of ships have been performed to reduce fuel consumption and emissions. This study examined the design parameters of the propeller boss cap fin (PBCF) and hub cap for 6,000TEU container ships to improve the propulsion efficiency. The design parameters of PBCF have been selected based on the geometrical shape. Computational fluid dynamics (CFD) analysis with a propeller open water (POW) test was performed to check the validity of CFD analysis. The design of experiment (DOE) case was selected as a full factorial design, and the experiment was analyzed by POW and CFD analysis. Analysis of variance (ANOVA) was performed to determine the correlation among design parameters. Four design alternatives of PBCF were selected from the DOE. The shape of a propeller hub cap was selected as a divergent shape, and the divergent angle was determined by the DOE. Four design alternatives of PBCF were attached to the divergent hub cap, and the POW was estimated by CFD. As a result, the divergent hub cap with PBCF has a negative effect on the POW, which is induced by an increase in torque coefficient. A POW test and cavitation test were performed with a divergent hub cap with PBCF to verify the CFD result. The POW test result showed that the open water efficiency was increased approximately 2% with a divergent hub cap compared to a normal cap. The POW test result was similar to the CFD result, and the divergent hub cap with the PBCF models showed lower open water efficiency. This was attributed to an increase in the torque coefficient just like the CFD results. A cavitation test was performed using the 2 models selected. The test result showed that the hub vortex is increased downstream of the propeller.

Impact of Boundary Conditions and Cumulus Parameterization Schemes on Regional Climate Simulation over South-Korea in the CORDEX-East Asia Domain Using the RegCM4 Model (CORDEX 동아시아 영역에서 경계조건 및 적운모수화방안이 RegCM4를 이용한 남한 지역 기후모의에 미치는 영향 분석)

  • Oh, Seok-Geun;Suh, Myoung-Seok;Myoung, Ji-Su;Cha, Dong-Hyun
    • Journal of the Korean earth science society
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    • v.32 no.4
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    • pp.373-387
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    • 2011
  • In this study, four types of sensitivity experiments (EG, EE, NG, NE; E: ERA-Interim, N: NCEP/DOE2, G: Grell scheme, E: Emanuel scheme) were performed to evaluate the simulation skills of RegCM4 released in July 2010 over the CORDEX (COordinated Regional Downscaling EXperiment) East Asia domain based on the combinations of boundary conditions (BC: ERA-Interim, NCEP/DOE2) and the cumulus parameterization schemes (CPS: Grell, Emanuel) for the 1989. The surface air temperature and precipitation data observed by the Korea Meteorological Adminstration were used to validate the simulation results over South Korea. The RegCM4 well simulates the seasonal and spatial variations of temperature but it fails to capture the seasonal and spatial variations of precipitation without consideration of the BC and CPS. Especially the simulated summer precipitation amount is significantly less in EG, NG, and NE experiments. But the seasonal variation of precipitation including summer precipitation is relatively well simulated in the EE experiment. The EE experiment shows a better skill in the seasonal march of East Asia summer monsoon, distribution of precipitation intensity and frequency than other experiments. In general, the skills of RegCM4 for temperature and precipitation are better during winter than summer, and in Emanuel than Grell schemes. The simulation results are more impacted by cumulus parameterization schemes than boundary conditions.

Six Sigma Robust Design of Composite Hand for LCD Glass Transfer Robot (LCD 유리 이송용 복합재료 로봇 핸드의 식스 시그마 강건설계)

  • Nam Hyunwook
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.29 no.3 s.234
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    • pp.455-461
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    • 2005
  • This research studied robust design of composite hand for LTR (LCD glass Transfer Robot). $1^{st}$ DOE (Design of Experiment) was conducted to find out vital few Xs. 108 experiments were performed and their results were statistically analyzed. Pareto chart analysis shows that the geometric parameters (height and width of composite beam) are more important than material parameters $(E_{1},\;E_{2})$ or stacking sequence angle. Also, the stacking sequence of mid-layer is more important than that of outer-layer. The main effect plots shows that the maximum deflection of LTR hand is minimized with increasing height, width of beam and layer thickness. $2^{nd}$ DOE was conducted to obtain RSM (Response Surface Method) equation. 25 experiments were conducted. The CCD (Central Composite Design) technique with four factors was used. The coefficient of determination $(R^{2})$ for the calculated RSM equation was 0.989. Optimum design was conducted using the RSM equation. Multi-island genetic algorithm was used to optimum design. Optimum values for beam height, beam width, layer thickness and beam length were 24.9mm, 186.6mnL 0.15mm and 2402.4mm respectively. An approximate value of 0.77mm in deflection was expected to be a maximum under the optimum conditions. Six sigma robust design was conducted to find out guideline for control range of design parameter. To acquire six sigma level reliability, the standard deviation of design parameter should be con trolled within $2{\%}$ of average design value