• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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• pp.141-141
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• 2011

DLC(Diamond Like Carbon) 박막은 높은 경도, 낮은 마찰계수, 내화학성 등의 우수한 트라이볼로지적 특성을 가지고 있기 때문에 다양한 산업분야에서 적용되고 있다. 이러한 DLC 박막은 합성기구나 구조의 관점에서 몇 가지 다른 이름으로 불려지기도 한다. 밀도와 경도가 높기 때문에 경질탄소(Hard Carbon)라고도 불려지며, 수소를 함유한 경우에는 수소함유 비정질 탄소(Hydrogenated Amorphous Carbon)이라는 이름이 사용되며, 고밀도 탄소(Dense Carbon) 또는 고밀도 탄화수소(Dense Hydrocarbon)라고 불리기도 한다. 이렇듯 DLC 박막은 합성방법에 따라 함유된 수소와 탄소의 결합구조의 차이가 있다. 수소 함유한 DLC 박막은 20~50%까지 수소를 함유하며, DLC막의 기계적, 광학적, 전기적 특성들이 수소함량과 밀접한 관계를 가지고 있는 것으로 알려져 있다. 그러나 함유된 수소가 $300^{\circ}C$ 이상의 온도에서는 쉽게 결합에서 이탈되면서 흑연화와 더불어 마찰마모시 코팅층의 파손이 발생한다고 보고되고 있고, 또한 수소량이 증가함에 따라 DLC 박막의 경도는 감소하게 되는데, 이는 수소에 의해 dangling bond가 Passivation되면 탄화수소의 3차원적인 Crosslinking은 그만큼 감소하게 되기 때문이라고 알려져 있다. 본 연구에서는 PECVD를 이용하여 여러 가지 공정에 따른 DLC 박막을 증착시켰으며, 수소함유량에 따른 DLC막의 구조와 그에 따른 경도 변화를 살펴보았다. FTIR(Furier Transform Infrared Spectroscopy)과 Raman Spectroscopy을 이용하여 DLC막의 수소의 결합상태를 관찰하였으며, Nano Indentation을 사용하여 미소경도를 측정하였고, FE-SEM을 이용하여 표면과 단면을 관찰하였다. 막의 두께 측정에는 ${\alpha}$-Step을 사용하였으며, Ball-on-Disk 타입의 Tribo-meter을 이용하여, 모재의 경도에 따른 마찰계수 변화를 관찰하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.169.2-169.2
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• 2013

본 연구에서는 gas를 이용한 PECVD 공법중 이온화 에너지가 높고 대면적 코팅이 용이한 Hybrid 코팅 장비에서 Linear Ion-Gun 이용하여 탄화수소 계열의 gas인 $C_2H_2$ 와 Si을 함유한 TMS (tetramethylsilane, $Si(CH_3)_4)$ gas를 이용하여 저마찰, 고경도 특성을 갖는 Si-DLC 코팅에 대한 연구를 수행하였다. Si-DLC 코팅에 앞서 전처리 공정으로 Linear Ion-Gun에 Ar gas를 주입하고 고전압의 DC 전원을 인가하여 제품 표면의 건식세정 및 표면 활성화를 진행 후, $C_2H_2$ 와 TMS gas를 Linear Ion-Gun에 주입하여 Si-DLC 코팅 공정을 진행하였다. Si-DLC 코팅시 $C_2H_2$ gas 주입량을 고정하고 TMS 가스 유량을 5~20sccm으로 조절하여 Si 함유량에 따른 Si-DLC 코팅막의 특성을 분석하였다. 이렇게 코팅된 Si-DLC의 박막 특성 분석으로 마찰계수 측정을 위해 ball-on-disk 타입의 tribometer를 사용하였으며, 박막 경도 측정은 Nano-indenter를 이용하여 분석을 진행하였다. 그 결과 Si을 포함하지 않는 DLC의 경우 마찰계수가 ~0.2를 가지는 반면, Si-DLC의 경우 Si 함유량이 약 1.5at%일 때, 마찰계수 ~0.04 저마찰의 우수한 특성을 지니며, 박막의 경도는 22[Gpa]로 고경도의 Si-DLC 코팅을 확인할 수 있었다.

• 열처리공학회지
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• 제33권1호
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• pp.25-32
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• 2020

In this study, the tribology of laser patterned DLC thin film was studied. DLC thin films were coated by RF-PECVD to improve the durability of tungsten carbide (WC) materials. DLC thin films have high hardness and low friction characteristics. Dot and line patterning was processed on the surface of DLC thin film with femtosecond laser, and the coefficient of friction was improved. As a result of ball on disk abrasion test, the hardness and friction coefficient of DLC thin films were much better than that of WC material. The friction coefficient of DLC thin film with dot patterning and line patterning showed better results. The excellent performance of the laser patterned DLC coating is appeared to reduce the coefficient of friction due to the reduction of surface contact area.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.956-960
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• 2004

Effects of ion implantation and deposition on the tribological properties of DLC film as a function of implanted energies and process times were investigated. TiC ions were implanted and deposited on the Si-wafer substrates followed by DLC coating using ion beam deposition method. In order to study tribological properties such as friction coefficient and behavior of DLC film on the modified surface as a function of implanted energies and process times, we used a ball-on-disc type apparatus in the atmospheric environment. From results of wear test, as the implanted energy was increased, the friction coefficient was more stable below 0.1.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.145-146
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• 2015

초미세 가공 및 치수안정성 향상을 위한 다이아몬드 마이크로 블레이드의 DLC 코팅이 연삭 과정에서 결합구조가 안정적으로 유지되는지 알아보기 위해 Cu/Sn 금속 결합재에 $MoS_2$ 고체 윤활제를 첨가한 후 PAPVD법으로 DLC 박막을 블레이드의 측면에 증착하였다. 실착 절삭 시험을 위해 마이크로 블레이드 시편을 제조하여 충분한 드레싱 과정 후 절삭 시험을 행하였으며 라만 분광법을 통해 절삭 전후 DLC 코팅에 존재하는 $sp^2$, $sp^3$ 결합의 분율을 조사하고 그 결과를 토대로 DLC 코팅의 특성의 변화를 분석하였다. DLC 코팅에 존재하는 D밴드와 G밴드의 비인 ID/IG는 절삭 후 증가하는 경향을 보였으며 결과적으로 절삭 과정 중 흑연화가 진행되었음을 확인하였다.

• 한국기계가공학회지
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• 제19권4호
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• pp.9-15
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• 2020

Carbon fiber reinforced plastic (CFRP) is a composite material useful in the aerospace and automotive industries because of its light weight and high strength. In this study, side milling tests were carried out using AlCrN, diamond-like carbon (DLC), and diamond-coated end mills. Additionally, a comparison study according to the cobalt content was conducted. Thus, tool wear and surface quality were examined and the influences of using coating and a certain material type were analyzed. The surface roughness of the machined surface was measured. Microscope observations revealed that the CFRP fiber at the machined surface was not damaged even at a cutting distance of 3,000 mm. Therefore, this study showed that the diamond-coated end mill containing 6% cobalt is appropriate for milling CFRP.

• 한국자동차공학회논문집
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• 제23권6호
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• pp.656-662
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• 2015

In the present study, multi-layered Si DLC (Silicon Diamond-Like Carbon) coatings with HMDSO (Hexamethyldisiloxane) buffer layers are applied on SKD 11 substrates by PECVD (Plasma Enhanced Chemical Vapor Deposition) with different HMDSO gas flow rates, while the gas flow rate of $C_2H_2$ is fixed to enhance the electric resistivity of forming dies for electrically assisted forming. The HMDSO buffer layer is introduced to increase adhesion between the base metal and Si-DLC layers. The result of evaluation of electric resistivity and adhesion strength shows that the properties are affected by the flow rate of HMDSO, while the flow rate of 80 sccm results in the coating with the highest electric resistivity and adhesion strength among the selected flow rates.

• 한국전기전자재료학회논문지
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• 제11권7호
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• pp.508-516
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• 1998

Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.

• Tribology and Lubricants
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• 제37권5호
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• pp.179-188
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• 2021

Reputed for their low friction coefficient and wear protection effect, diamond-like carbon (DLC) materials are considered amongst the most important lubricant coatings for tribological applications. In this framework, this investigation aims to elucidate the effect of a few operating parameters, such as applied stress and sliding amplitude on the friction lifetime of DLC coatings. Fretting wear tests are conducted using a 12.7 mm radius counterpart of 52100 steel balls slid against a substrate of the same material coated with a 2 ㎛ thickness DLC. Approximately, 5 to 57 N force is applied, generating a maximum Hertzian contact pressure of 430 to 662 MPa, corresponding to the applied force. The coefficient of friction (CoF) generates three regimes, first a running-in period regime, followed by a steady-state evolution regime, and finally a progressive increase of the CoF reaching the steel CoF value, as an indicator of reaching the substrate. To track the wear scenario, interrupted tests are performed with analysis combining scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX), 3D profilometer and micro-Raman spectroscopy. The results show two endurance values: one characterizing the coating failure (Nc₁), and the other (Nc₂) indicating the friction failure which is situated where the CoF reaches a threshold value of μ_th = 0.3 in the third regime. The Archard energy density factor is used to determine the two endurance values (Nc₁, Nc₂). Based on this approach, a master curve is established delimitating both the coating and the friction endurances.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.167-170
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• 2005

The two-dimensional (2D) and three-dimensional (3D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography (UV-NIL) were fabricated using two kinds of methods, which were a DLC coating process followed by the focused ion beam (FIB) lithography and the two-photon polymerization (TPP) patterning followed by nano-scale thick DLC coating. We fabricated 70 nm deep lines with a width of 100 nm and 70 nm deep lines with a width of 150 nm on 100 nm thick DLC layers coated on quartz substrates using the FIB lithography. 200 nm wide lines, 3D rings with a diameter of $1.35\;{\mu}m$ and a height of $1.97\;{\mu}m$, and a 3D cone with a bottom diameter of $2.88\;{\mu}m$ and a height of $1.97\;{\mu}m$ were successfully fabricated using the TPP patterning and DLC coating process. The wafers were successfully printed on an UV-NIL using the DLC stamp. We could see the excellent correlation between the dimensions of features of stamp and the corresponding imprinted features.