• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.399-400
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• 2009

• 한국자동차공학회논문집
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• 제23권6호
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• pp.656-662
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• 2015

In the present study, multi-layered Si DLC (Silicon Diamond-Like Carbon) coatings with HMDSO (Hexamethyldisiloxane) buffer layers are applied on SKD 11 substrates by PECVD (Plasma Enhanced Chemical Vapor Deposition) with different HMDSO gas flow rates, while the gas flow rate of $C_2H_2$ is fixed to enhance the electric resistivity of forming dies for electrically assisted forming. The HMDSO buffer layer is introduced to increase adhesion between the base metal and Si-DLC layers. The result of evaluation of electric resistivity and adhesion strength shows that the properties are affected by the flow rate of HMDSO, while the flow rate of 80 sccm results in the coating with the highest electric resistivity and adhesion strength among the selected flow rates.

• 한국진공학회지
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• 제15권3호
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• pp.287-293
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• 2006

R.F. PACVD법을 이용하여, 벤젠을 반응기체로 사용하여 순수한 DLC필름을 증착하였다. DLC필름의 마찰마모특성은 시험 환경을 제어하기 위하여 챔버로 고립된 ball-on-disk형식의 마모시험기를 이용하여 측정하였다. 상대습도에 따른 필름의 마찰특성을 관찰하기 위하여, 상압에서 챔버 내의 습도를 0-90%로 조절하면서 관찰하였다. 그리고 상대면 물질의 영향을 알아보기 위하여 스틸볼과 함께 DLC필름이 코팅된 스틸볼을 사용하였다. 스틸볼을 사용시 습도가 0%에서 90%로 증가함에 따라 마찰계수가 0.025에서 0.2로 크게 증가하였다. Ferich debris가 생성되지 않는 DLC가 코팅된 볼을 사용하여 실험한 경우에, 마찰계수는 상대 습도가 90%인 경우에도 0.08정도로, 스틸볼을 사용하였을 경우보다 훨씬 더 낮은 습도의존성을 보여주었다. 스틸볼 사용시 나타나는 DLC필름의 마찰계수의 큰 습도의존성은 습도가 증가함에 따라 debris의 크기 증가와 함께 스틸볼의 마모로 인한 Fe-rich debris의 생성과 밀접한 관계가 있음을 확인 할 수 있었다. 그리고 스틸볼을 사용하여 90%의 습도에서 마모시험을 하는 중간에 습도를 0%로 변화시키며 관찰한 결과, 마찰계수 값이 급격히 감소하였다. 이와 같은 결과를 통하여, Fe-rich debris가 마찰계수에 미치는 영향은 debris내의 Fe원소가 습도에 매우 민감한 흑연상의 전이층을 형성시킨다는 것을 확인 할 수 있었다.

• 한국표면공학회지
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• 제50권3호
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• pp.183-191
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• 2017

In this study, surface morphology and mechanical property of TiN and DLC coated pedicle screw have been investigated by field-emission scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray diffraction, vickers hardness test, axial gripping, and axial torsional gripping capacity test. From the EDS and XRD results, the composition and crystal structure of TiN and DLC coated surface were verified. The hardness value was increased by TIN and DLC coating, and the DLC coating surface has the highest value. The gripping capacity also showed higher value for TiN and DLC coated specimen than that of non-coated (Ti alloy) surface. The surface morphology of gripping tested specimen showed rougher scratched surface from Ti alloy than TiN and DLC coated layer.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1340-1342
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• 1998

The diamond-like carbon(DLC) film, as an antireflection layer, is coated on a commerically used Ge window. DLC films are deposited by using an rf(13.56 MHz) plasma CVD. The optimal value of thickness and refractive index of DLC layer has been determined from the computer simulation. IR-transmittances of DLC-coated Ge windows are estimated by measuring FTIR spectra in the wavelength range of$ 2.5{\sim}25{\mu}m$. By coating the DLC film on one side of the Ge window, the transmittance measured at a wavelength of $10{\mu}m$ is about 60 %, while that of the bare Ge is lower than 50 %. Also, a higher transmittance up to about 90 % is obtained by coating the DLC film on both sides of the window. It may be suggested that the further improvement of the IR-transmittance can be achieved by more precisely controlling the thickness and the refractive index of DLC layer and also by adopting various muliti-layer antireflection structures.

• 한국표면공학회지
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• 제49권6호
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• pp.587-594
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• 2016

Various surface treatments and thin film coating processes on the surface of injection die steel have been developed to extend the life. Most of previous studies were mainly focused on investigating the wear and static bonding behavior of thin films. In this study complex surface treatments of DLC coating combined with ion nitriding were applied to increase fatigue life and wear resistance. Ion nitriding, DLC coating, and DLC coating following nitriding on the surface of Fe-3.0Ni-0.7Cr-1.4Mn-X steel were investigated to uncover the beneficial effect which is applicable to injection die. The effect of various surface treatments and coating conditions on high cycle fatigue resistance was studied. Surface morphology change during fatigue tests were observed with AFM. Fatigue life of the die steel increased by 10 to 1,000 times at the various level of stress amplitudes in the condition of DLC coating following the ion nitriding for 3 hrs comparing with the only DLC coated condition.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.247-247
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• 2010

DLC(diamond-like carbon)는 비정질 고상 탄소의 하나로 다이아몬드의 유사한 높은 경도, 내마모성, 윤활성, 전기절연성, 화학적 안정성을 가지고 있는 재료이다. 이러한 우수한 특성 때문에 DLC는 박막의 형태로 여러 종류의 보호코팅에 많이 응용되고 있다. DLC의 광범위한 응용에 있어 가장 큰 문제점은 박막이 갖는 높은 잔류응력과 이에 따른 기판과의 낮은 접착성으로 알려져 있다. 최근 연구에 의하면, plasma pre-treatment를 통해 PTFE기판에 DLC박막의 adhesion strength를 증진 시킬 수 있다고 보고하였다. 또한 ion beam technique를 이용하여 잔류응력을 줄이고 기판과의 접착력을 높일 수 있다는 것도 보고 되었다. 이에 기인하여 pre-treatment가 DLC합성에 잔류응력을 낮추고 기판과의 접착성을 높이는 효과를 보일 것이라고 가정하고 연구하였다. 본 연구에서 pre-treatment가 Diamond-like Carbon의 stainless steel 합성시 stress와 adhesion에 어떤 효과가 있는지 알아보기 위해, pre-treatment시와 synthesis of DLC film시에 13.56MHz 150W RF플라즈마 화학기상 증착 (RF-PECVD) 법을 통해 합성되었다. pre-treatment시에 H2(80 sccm), O2(10 sccm), N2(20 sccm)의 가스 종류를 다르게 하였고, synthesis of DLC film시에는 CH4 (20 sccm), H2 (80 sccm)가스의 유량을 고정하였다. 합성된 DLC 박막은 Contact Angle Analyze, Raman spectroscopy, Scratch tester를 이용하여 접촉각, D peak Position, G peak Position, ID/IG ratio, 접착력을 측정하였다.

• Corrosion Science and Technology
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• 제23권3호
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• pp.235-245
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• 2024

DLC coatings have been widely applied in industrial fields that require high corrosion resistance due to their excellent mechanical characteristics and chemical stability. In this research, effects of DLC coating thickness and defects on corrosion resistance were investigated for application of metallic bipolar plates in polymer membrane electrolyte fuel cells (PEMFCs). Results revealed that a DLC coating thickness of 0.7 ㎛ could lead to a defect size reduction of about 75.9% compared to that of 0.3 ㎛.As a result of potentiodynamic polarization experiments, the current density under a potential of 0.6 V was measured to be less than 1 ㎂/cm²,which was an excellent value. Inparticular, the delamination ratio and the decrease rate of maximum pitting depth were up to 84.8% and 63.3%, respectively, with an increase in the DLC coating thickness. These results demonstrate that DLC coating thickness and defects are factors that can affect corrosion resistance of DLC coating and its substrate.

• Tribology and Lubricants
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• 제32권4호
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• pp.125-131
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• 2016

In recent years, thick ta-C coating has attracted considerable interest owing to its existing and potential commercial importance in applications such as automobile accessories, drills, and gears. The thickness of the ta-C coating is an important parameter in these applications. However, the biggest problems are achieving efficient coating and uniformity over a large area with high-speed deposition. Feasibility is confirmed for the ta-C coating thickness of up to 9.0 µm (coating speed: 3.0 µm/h, fixed substrate) using a single FCVA cathode. The thickness was determined using multiple coating cycles that were controlled using substrate temperature and residual stresses. In the present research, we have designed a coating system using FCVA plasma and produced enhanced thick ta-C coating. The system uses a specialized magnetic field configuration with stabilized DC arc plasma discharge during deposition. To achieve quality that is acceptable for use in automobile accessories, the magnetic field, T-type filters, and 10 pieces of a multi-cathode are used to demonstrate the deposition of the thick ta-C coating. The results of coating performance indicate that uniformity is ±7.6 , deposited area is 400 mm, and the thickness of the ta-C coating is up to 5.0 µm (coating speed: 0.3 µm/h, revolution and rotation). The hardness of the coating ranges from 30 to 59 GPa, and the adhesion strength level (HF1) ranges from 20 to 60 N, depending on the ta-C coating.

• 한국정밀공학회지
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• 제26권1호
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• pp.51-56
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• 2009

Recently, with the increasing lightness and miniaturization of high resolution camera phones, the demand for aspheric glass lens has increased because plastic and spherical lens are unable to satisfy the required performance. An aspheric glass lens is fabricated by the high temperature and pressure molding using a tungsten carbide molding core, so precision grinding and coating technology for the molding core surface are required. This study investigates the effect of diamond-like carbon (DLC) and rhenium-iridium (Re-Ir) coating For aspheric molding core surface. The grinding conditions of the tungsten carbide molding core were obtained by design of experiments (DOE) for application in the ultra precision grinding process of the tungsten carbide molding core of the aspheric glass lens used in 5 megapixel, $4{\times}$ zoom camera phone modules. A tungsten carbide molding core was fabricated under this grinding condition and coated with the DLC and Re-Ir coating. By measurements, the effect of DLC and Re-Ir coating on the form accuracy and surface roughness of molding coer was evaluated.