• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 춘계학술대회 및 기술 세미나 논문집 디스플레이 광소자
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• pp.44-44
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• 2008

To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, non contact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide under various ion beam angles. In this experiment, Polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposure polyimide surface was observed. The tilt angle of NLC on the PI surface with ion beam exposure can be measured under $1^{\circ}$ for all of irradiation angles. In addition, it can be achieved the good EO properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

• 전력전자학회논문지
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• 제6권6호
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• pp.538-545
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• 2001

본 논문에서는 영구 자석형 동기 전동기를 이용한 고속 엘리베이터 시스템 용 무기어식 구동 시스템의 개발 사례를 소개한다. 엘리베이터 구동원으로서 영구 자석형 동기 전동기의 채택은 에너지 절약, 승차감 향상, 기계실의 하중 부담 감소 및 효율적인 공간 활용 등의여러 장점을 지닌다. 전력 변환 장치로는 기존의 다이오드 정류기와 제동 저항 대신 직류단 전압 제어 회생 운전 그리고 낮은 고조파 함유율이 역률 1 제어가 가능한 승압형 PWM 컴버터를 채택하였다. 제어 시스템은 고속 대용량의 단일 DSP를 사용하여 통합형 제어 시스템을 구축함으로써 전체 제어 시스템의 신뢰성 및 성능을 크게 향상시켰다. 시험 장치로는 고속 엘리베이터용 부사 시뮬레이터 시스템을 개발하여 운전 거리에 대한 제약 없이 구동 시스템의 다양한 시험이 가능해졌다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.353-356
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• 2009

A pivotal mechanical balance of plant for 75kW class molten carbonate fuel cells comprise of a catalytic burner and an ejector which has been designed and tested in KEPRI(Korea Electric Power Research Institute). The catalytic burner, which oxidizes residual fuel in the anode tail gas, was operated at several conditions. Some problems arose due to local overheating or auto-ignition, which could limit the catalyst life. The catalytic burner was designed by considering both gas mixing and gas velocity. Test results showed that the temperature distribution is very uniform. In addition, an ejector is a fluid machinery to be utilized for mixing fluids, maintaining vacuum, and transporting them. The ejector is placed at mixing point between the anode off gas and the cathode off gas or the fresh air Several ejectors were designed and tested to form a suction on the fuel tail gas and balance the differential pressures between anode and cathode over a range of operating conditions. The tests showed that the design of the nozzle and throat played an important role in balancing the anode tail and cathode inlet gas pressures. The 75kW MCFC system built in our ejector and catalytic burner was successfully operated from Novembe, 2008 to April, 2009. It recorded the voltage of 104V at the current of 754A and reached the maximum generating power of 78.5kW DC. The results for both stand-alone and integration into another balance of plant are discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.572-572
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• 2013

본 연구에서는 Plasma damage-free 선형 대향 타겟 스퍼터(Linear Facing Target sputtering: LFTS) 시스템을 이용하여 성막시킨 GaN-LED의 투명전극용 Ga-doped ZnO (GZO) 박막의 특성을 연구하였다. LFTS 시스템을 이용한 GZO 성막 공정 중 LED소자의 플라즈마 노출에 의한 데미지를 최소화 하기 위해 일정한 타겟간 거리(Target-to-Target distance: 65 mm)에서 타겟과 기판간 거리(Target-to-Substrate distance)를 50 mm에서 120 mm로 변화시키며 GZO 투명 전극을 성막해 박막의 특성과 소자의 특성을 동시에 분석하였다. LFTS에서 플라즈마는 GZO 타겟 사이에 형성된 일방향의 자장에 의해 효과적으로 구속되기 때문에 기판과 타겟 거리를 최적화 할 경우 플라즈마 데미지를 최소화하며 GaN-LED의 제작이 가능하다. 기판과 타겟 사이의 거리가 120 mm에서 최적화된 200 nm 두께의 GZO 투명 전극은 DC 파워 250 W, 공정 압력 0.3 mTorr, Ar 20 sccm 실험 조건하에서 LED 소자 위해 성막되었으며, 이후 $600^{\circ}C$ 수소 분위기에서 1분간 급속 열처리하였고 면저항(37 Ohm/sq.)과 450 nm 파장에서의 투과도(83%)를 나타냄을 확인할 수 있었다. LED 소자와 타겟 사이의 거리가 50 mm에서 120 mm로 증가할수록 성막공정 중 LED 소자에 미치는 플라즈마 데미지의 감소로 인해 GaN-LED 소자의 turn on voltage가 8.2 V에서 3.4 V로 감소한 것을 확인하였으며, 또한 radiant intensity는 20 mA의 전류를 인가하였을 시 0.02 mW/sr에서 8 mW/sr로 400배 향상되었다. 이러한 소자 특성은 대향 타겟 스퍼터 시스템으로 성장시킨 GZO 투명전극이 LED 소자의 투명 전극 층(Transparent Conductive Layer: TCL)에 적용될 수 있음을 말해준다.

• Smart Structures and Systems
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• 제8권1호
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• pp.139-155
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• 2011

Polymeric thin-film assemblies whose bulk electrical conductivity and mechanical performance have been enhanced by single-walled carbon nanotubes are proposed for measuring strain and corrosion activity in metallic structural systems. Similar to the dermatological system found in animals, the proposed self-sensing thin-film assembly supports spatial strain and pH sensing via localized changes in electrical conductivity. Specifically, electrical impedance tomography (EIT) is used to create detailed mappings of film conductivity over its complete surface area using electrical measurements taken at the film boundary. While EIT is a powerful means of mapping the sensing skin's spatial response, it requires a data acquisition system capable of taking electrical impedance measurements on a large number of electrodes. A low-cost wireless impedance analyzer is proposed to fully automate EIT data acquisition. The key attribute of the device is a flexible sinusoidal waveform generator capable of generating regulated current signals with frequencies from near-DC to 20 MHz. Furthermore, a multiplexed sensing interface offers 32 addressable channels from which voltage measurements can be made. A wireless interface is included to eliminate the cumbersome wiring often required for data acquisition in a structure. The functionality of the wireless impedance analyzer is illustrated on an experimental setup with the system used for automated acquisition of electrical impedance measurements taken on the boundary of a bio-inspired sensing skin recently proposed for structural health monitoring.

• 한국전기전자재료학회논문지
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• 제14권10호
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• pp.785-791
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• 2001

High dielectric (Ba, Sr) TiO$_3$ thin films were etched in an inductively coupled plasma (ICP) as a function of Cl$_2$/Ar mixing ration. Under Cl$_2$(20)/Ar(80), the maximum etch rate of the BST films was 400 $\AA$/mim and selectivities of BST to Pt and PR were obtained 0.4 and 0.2, respectively. Etching products were redeposited on the surface of BST and resulted in varying the nature of crystallinity. Therefore, we investigated the etched surface of BST by x-ray photoelectron spectroscopy (XPS) atomic force microscopy (AFM) and x-ray diffraction (XRD). From the result of XPS analysis, we found that residues of Ba-Cl and Ti-Cl bonds remained on the surface of the etched BST for high boiling point. The morphology of the etched surfact was analyzed by AFM. A smoothsurface(roughness ~2.8nm) ws observed under Cl$_2$(20)/Ar(80), rf power of 600 W, dc bias voltage of -250 V and pressure of 10 mTorr. This changed the nature of the crystallinity of BST. From the result of XRD analysis, the crystallinities of the etched BST film under Ar only and Cl$_2$(20)/Ar(80) were maintained as similar to as-deposited BST. However, intensity of BST(100) orientation under Cl$_2$ only plasma was abruptly decreased. This indicated that CI compounds were redeposited on the etched BST surface and resulted in changed of the crystallinity of BST during the etch process.

• Transactions on Electrical and Electronic Materials
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• 제17권2호
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• pp.92-97
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• 2016

This paper presents design and simulation of wide band RF microswitch that uses electrostatic actuation for its operation. RF MEMS devices exhibit superior high frequency performance in comparison to conventional devices. Similar techniques that are used in Very Large Scale Integration (VLSI) can be employed to design and fabricate MEMS devices and traditional batch-processing methods can be used for its manufacturing. The proposed switch presents a novel design approach to handle reliability concerns in MEMS switches like dielectric charging effect, micro welding and stiction. The shape has been optimized at actuation voltage of 14-16 V. The switch has an improved restoring force of 20.8 μN. The design of the proposed switch is very elemental and primarily composed of electrostatic actuator, a bridge membrane and coplanar waveguide which are suspended over the substrate. The simple design of the switch makes it easy for fabrication. Typical insertion and isolation of the switch at 1 GHz is -0.03 dB and -71 dB and at 85 GHz it is -0.24 dB and -29.8 dB respectively. The isolation remains more than - 20 db even after 120 GHz. To our knowledge this is the first demonstration of a metal contact switch that shows such a high and sustained isolation and performance at W-band frequencies with an excellent figure-of merit (fc=1/2.pi.Ron.Cu =1,900 GHz). This figure of merit is significantly greater than electronic switching devices. The switch would find extensive application in wideband operations and areas where reliability is a major concern.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2001년도 춘계학술발표회 초록집
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• pp.14-14
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• 2001

Nitride films such as TiN, CrN etc. deposited on glass by PVD processes have been developed for many industrial applications. These nitride films deposited on glass were widely used for not only decorative and optical coatings but also wear and corrosion resistance coatings employed as dies and molds made of glass for the example of lens forming molds. However, the major problem of nitride coatings on glass by PVD process is non-uniform film owing to pin-hole and micro crack. It is estimated that nonuniform coating is influenced by a different surface energy between metal nitrides and glass due to binding states. In this work, therefore, for the evaluation of nucleation and growth mechanism of nitride films on glass TiN and CrN film were synthesized on glass with various nitrogen partial pressure by unbalanced magnetron sputtering. Prior to deposition, for the examination of relationship between surface energy and film microstructure plasma pre-treatment process was carried out with various argon to hydrogen flow rate and substrate bias voltage, duty cycle and frequency by using pulsed DC power supply. Surface energy owing to the different plasma pre-treatment was calculated by the measurement of wetting angle and surface conditions of glass were investigated by X-ray Photoelectron Spectroscopy(XPS) and Atomic Force Microscope(AFM). The microstructure change of nitride films on glass with increase of film thickness were analyzed by X-Ray Diffraction(XRD) and Scanning Electron Microscopy(SEM).

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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• pp.185-188
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• 1999

Biepitaxial Y$_1Ba_2Cu_3O_{7-x}$ (YBCO) and La$_{0.2}Sr_{0.8}MnO_3$ (LSMO) thin films have been prepared on SrTiO$_3$ buffer layer and MgO seed layer grown on Al$_2O_3$(11${\bar{2}}$0)substrates by dc-sputtering with hollow cylindrical targets, respectively. We charaterized Josephson properties and significantly large magnetoresistance in YBCO and LSMO films with 45$^{\circ}$ grain boundary junction, respectively. The observed working voltage (I$_cR_n$) at 77 K in grain boundary junction was below 10${\mu}$V, which is typical I$_cR_n$ value of single biepitaxial Josephson junction. The field magnetoresistance ratio (MR) of LSMO grain boundary juncoon at 77K was enhanced to 13%, which it was significant MR value with high magnetic field sensitivity at a low field of 250 Oe. These results indicate that inserting the insulating layer instead of the grain boundary layer with metallic phase can be possible to apply a new SIS Josephson junction and a novel magnetic device using spin-polarized tunneling junction.

• 대한전자공학회논문지SD
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• 제38권3호
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• pp.211-219
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• 2001

본 논문에서는 RFID를 위한 읽기 전용 CMOS 트랜스폰더를 one-chip으로 설계하였다. 리더에서 공급되는 자기장으로부터 트랜스폰더 칩의 전원을 공급하기 위한 전파정류기를 NMOS 트랜지스터를 사용하여 설계하였으며, 데이터 저장 소자로는 64비트의 ROM을 사용하였다. 메모리에 저장되어 있는 ID 코드는 Manchester 코딩되어 front-end 임피던스 변조 방식으로 리더에 전송된다. 임피던스 변조를 위한 감폭회로로는 리더와 트랜스폰더 사이의 거리가 변해도 일정한 감폭율을 갖는 새로운 감폭회로를 사용하였다. 설계된 회로는 0.65㎛ 2-poly, 2-metal CMOS 공정을 사용하여 IC로 제작되었다. 칩 면적은 0.9㎜×0.4㎜이다. 측정 결과 설계된 트랜스폰더 IC는 인식거리 내에서 약 20∼25%의 일정한 감폭율을 보이며, 125㎑의 RF에 대해 3.9kbps의 데이터 전송속도를 보인다. 트랜스폰더 칩의 전력소모는 읽기 모드시 약 100㎼이다. 인식거리는 약 7㎝이다.