• Journal of the Korean Vacuum Society
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• v.8 no.3A
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• pp.245-248
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• 1999

Recently low resistance of gate line or data line is required for large screen size TFT-LCD panels. As a result, lower resistance Al-alloy is currently reviewed extensively and the resistivity is required smaller than 10$\mu\Omega$cm. In this paper, Al-Nd and Al-Zr thin film were deposited on glass substrated by D.C. magnetron sputtering system under various condition. Its properties were characterized by SEM, AFM, XRD and 4-point-probe. The optimal condition was $120^{\circ}C$, 125W, 0.4Pa, 30sccm (Ar) and $350^{\circ}C$, 20min. annealing. At that condition the resistivity of Al-Zr(0.9%wt.) is about 4$\mu\Omega$cm.

• Journal of the Korean institute of surface engineering
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• v.40 no.3
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• pp.117-124
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• 2007

The ITO films were deposited on glass substrates by RF-superimposed dc reactive magnetron sputtering and were annealed in $N_2$ vacuum furnace with temperatures in the range of $403K{\sim}573K$ for 30 minutes. Electrical, optical and structural properties of ITO films were examined with varying annealing temperatures from 403 K to 573 K. The resistivity of as-deposited ITO films was $5.4{\times}10^{-4}{\Omega}cm$ at the sputter conditions of applied RF/DC power of 200/200 W, $O_{2}$ flow of 0.2 seem and Ar flow of 0.2 seem. As a result of annealing in the temperature range of $403K{\sim}573K$, the crystallization occurred at 423 K that is lower than the crystallization temperature caused by a conventional sputtering method. And the resistivity decreased from $5.4{\times}10^{-4}{\Omega}cm\;to\;2.3{\times}10^{-4}{\Omega}cm$, the carrier concentration and mobility of ITO films increased from $4.9{\times}10^{20}/cm^3\;to\;6.4{\times}10^{20}/cm^3$, from $20.4cm^2/Vsec\;to\;41.0cm^2/Vsec$, respectively. The transmittance of ITO films in visible became higher than 90% when annealed in the temperature range of $423K{\sim}573K$. High quality ITO thin films made by RF-superimposed dc reactive magnetron sputtering and annealing in $N_2$ vacuum furnace will be applied to transparent conductive oxides of the advanced flat panel display.

• 한국지구물리탐사학회:학술대회논문집
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• 2007.12a
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• pp.31-42
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• 2007

Dc resistivity monitoring has been increasingly used in order to understand the changes of subsurface conditions in terms of conductivity. The commonly adopted interpretation approach which separately inverts time-lapse data may generate inversion artifacts due to measurement error. Eventually the contaminated error amplifies the artifacts when reconstructing the difference images to quantitatively estimate the change of ground condition. In order to alleviate the problems, we defined the subsurface structure as four dimensional (4-D) space-time model and developed 4-D inversion algorithm which can calculate the reasonable subsurface structure continuously changing in time even when the material properties change during data measurements. In this paper, we discussed two case histories of resistivity monitoring to study the ground condition change when the properties of the subsurface material were artificially altered by injecting conductive materials into the ground: (1) dye tracer experiment to study the applicability of electrical resistivity tomography to monitoring of water movement in soil profile and (2) the evaluation of cement grouting performed to reinforce the ground. Through these two case histories, we demonstrated that the 4-D resistivity imaging technique is very powerful to precisely delineate the change of ground condition. Particularly owing to the 4-D inversion algorithm, we were able to reconstruct the history of the change of subsurface material property.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.6
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• pp.487-490
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• 2001

Residual DC voltage of the in-plane switching (IPS)-liquid crystal display(LCD) by voltage-transmittance (V-T) hysteresis method was studied. Several IPS-LCD which have different concentrations of cynao LCs and different resistivities of fluorine LCs were fabricated. We found that the residual DC voltage of the IPS-LCD was decreasing with increasing concentration of cyano LCs and increasing with decreasing specific resistivity of fluorine LC materials. The residual DC voltage property can be improved by low molecular weight and high polarity of cyano LC.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.656-659
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• 2001

We investigated the residual DC in the in-plane switching (IPS)-liquid crystal display(LCD) by voltage-transmittance (V-T) hysteresis method. Several IPS-LCD which have different concentrations of cynao LCs and different resistivities of fluorine LCs were fabricated. We found that the residual DC voltage of the IPS-LCD was decreasing with increasing concentration of cyano LCs and increasing with decreasing specific resistivity of fluorine LC materials. The residual DC voltage property can be improved by low molecular weight and high polarity of cyano LC.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.2
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• pp.169-172
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• 2002

The voltage holding ratio(VHR) and the residual DC property in the in-plane switching (IPS) cells on a polyimide surface was studied. Several IPS cells which have different concentrations of cyano liquid crystals (LCs) were fabricated. We found that the VHR of the IPS cell was decreased with increasing concentration of cyano LCs. Also, the VHR of the IPS cell was increased with increasing specific resistivity of fluorine LCs. The residual DC voltage of the IPS cell by capacitance-voltage (C-V) hysteresis method was decreased with increasing concentration of cyano LCs. The residual DC property of the IPS cell on the rubbed PI surface can be improved by high polarity of cyano LC.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1751_1752
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• 2009

The accurate measurement of soil resistivity and earthing system resistance is fundamental to electrical safety. However, geological and meterological factors can have a considerable effect on the accuracy of conventional measurements and the validity of the measurement methods. This paper presents optimization method of dc resistivity data acquisition system using ERT.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.4
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• pp.145-150
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• 2004

We have investigated the structural, electrical and optical properties of Al-doped ZnO (AZO) thin films grown on glass substrate by pulsed DC magnetron sputtering as functions of pulse frequency and substrate temperature. A highly c-axis oriented AZO thin film is grown in perpendicular to the substrate when pulse frequency of 30 kHz and substrate temperature of $400^{\circ}C$ was applied. Under this optimized growth condition, the resistivity of AZO thin films exhibited $7.40\times 10^{-4}\Omega \textrm{cm}$. This indicated that the decrease of film resistivity resulted from the improvement of film crystallinity. The optical transmittance spectra of the films showed a very high transmittance of 85∼90 % in the visible wavelength region and exhibited the absorption edge of about 350 nm. The results show the potential application for transparent conductivity oxide (TCO) thin films.

• Transactions on Electrical and Electronic Materials
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• v.17 no.6
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• pp.351-354
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• 2016

The mechanical properties of ITO films such as adhesion and internal stress are very important for the commercial application of solar cell devices. We report high quality pulsed DC magnetron sputtered ITO films deposited on silicon and glass substrates with low resistivity and high transmittance for various working pressures ranging from 0.96 to 3.0 mTorr. ITO films showed the lowest resistivity of $2.68{\times}10^{-4}{\Omega}{\cdot}cm$, high hall mobility of $46.89cm^2/V.s$, and high transmittance (>85%) for the ITO films deposited at a low working pressure of 0.99 mTorr. The ITO films deposited at a low working (0.96 mTorr) pressure had both amorphous and polycrystalline structures and were found to have compressive stress while the ITO films deposited at higher temperature than 0.99 mTorr was mixture of amorphous and polycrystalline and was found to have tensile stress.

• Economic and Environmental Geology
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• v.34 no.5
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• pp.499-506
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• 2001

The geophysical monitoring technique using the high resolution time-domain electromagnetic (TEM) method with a coincident loop away was applied for determination of an underground seawater flow in the coastal areas. In comparison of the TEM monitoring to direct current (DC) resistivity monitoring, the TEM response to the under ground seawater flow is less sensitive than the DC resistivity response. However, the TEM monitoring is more effective in terms of measuring time, survey expense, and real-time data processing than the DC monitoring thor evaluating the spatial distribution of the fresh water-seawater transition zone in a regional area.