Electrical Characteristic of Al/AIN/GaAs MIS Capacitor fabricated by Reactive Sputtering Method for the DC power (반응성 스퍼터링법으로 Al/AIN/GaAs MIS 커패시터 제조시 DC 전력에 따른 전기적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2001.07a
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- pp.566-569
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- 2001